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公开(公告)号：US5777774A
公开(公告)日：1998-07-07
申请号：US744425
申请日：1996-11-07
申请人： Takashi Iizuka
发明人： Takashi Iizuka
CPC分类号： G02B26/126
摘要： A reflection type scanning optical device comprises a rotatable polygonal mirror arranged so that a light beam deflected from the polygonal mirror is separated from the light beam incident thereto, a first curved mirror having a negative power in the main scanning direction to reflect the deflected light beam from the polygonal mirror toward the polygonal mirror, a second curved mirror having a positive power in the main scanning direction to reflect the light beam reflected from the first curved mirror toward the first curved mirror, and a toric lens having a positive power at least in the auxiliary scanning direction to converge the light beam reflected from said second curved mirror and to form a spot on a surface to be scanned.
摘要翻译： 反射型扫描光学装置包括可旋转多面镜，其被布置成使得从多面镜偏转的光束与入射到其上的光束分离;第一弯曲镜，在主扫描方向上具有负功率以反射偏转光束 从多面镜朝向多面镜，具有在主扫描方向上具有正功率以将从第一弯曲镜反射的光束朝向第一曲面镜反射的第二曲面镜，以及具有正功率的复曲面透镜至少在 所述辅助扫描方向会聚从所述第二曲面镜反射的光束，并在待扫描的表面上形成点。
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公开(公告)号：US5745296A
公开(公告)日：1998-04-28
申请号：US648767
申请日：1996-05-16
CPC分类号： G02B26/123
摘要： Lens arrangements for a multibeam recording device include a first lens group that forms collimated beams paired with a second lens group, allowing the second lens group to be moved for focusing. A first lens group forms non-collimated beams is paired with a second lens group, allowing one lens group to be moved for magnification change. A first lens group forms non-collimated beams between internal portions and collimated beams leading to a second lens group, allowing magnification change by moving the two portions and focus change by moving the second lens group. A first lens group having two movable portions is paired with a second lens group, both movable portions being shiftable and tiltable to correct for decentering errors. Three concrete reduction lens system examples applicable in each of the embodiments use positive anomalous dispersion glass, allowing low dispersion and the use of blue LEDs to increase the imaging resolution.
摘要翻译： 用于多光束记录装置的透镜装置包括形成与第二透镜组成对的准直光束的第一透镜组，允许第二透镜组移动以进行聚焦。 形成非准直光束的第一透镜组与第二透镜组配对，允许一个透镜组移动以进行放大改变。 第一透镜组在内部部分和通过第二透镜组的准直光束之间形成非准直光束，通过移动两个部分并通过移动第二透镜组来聚焦变化来允许倍率变化。 具有两个可移动部分的第一透镜组与第二透镜组成对，两个可移动部分都是可移动和可倾斜的，以校正偏心误差。 适用于每个实施例的三个具体的减速透镜系统示例使用正异常色散玻璃，允许低色散和使用蓝色LED来增加成像分辨率。
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43.发明授权Laser drawing apparatus having drawing beams in a common place aligned with a lens meridian 失效具有在与透镜子午线对准的共同平面中的拉伸光束的激光绘制装置
公开(公告)号：US5745150A
公开(公告)日：1998-04-28
申请号：US279747
申请日：1994-07-22
申请人： Takashi Iizuka
发明人： Takashi Iizuka
CPC分类号： G03F7/704 , B41J2/471 , G02B26/123 , G02B27/106 , G02B27/144 , G02B27/145 , H05K3/0082
摘要： A laser drawing apparatus including a splitting means for splitting laser light emitted from a laser source into groups of drawing beams, the drawing beams being aligned in a common plane; a lens to which said drawing beams are made incident upon; and a scanning means for scanning a drawing surface with the said drawing beams passed through the lens in a main scanning direction; wherein the laser source and the splitting means are arranged in a manner such that the drawing beams in the common plane are alinged on a meridian of the lens, and the drawing beams are made incident upon the lens as linearly polarized light having a direction of oscillation which is parallel with or normal to the meridian of the lens.
摘要翻译： 一种激光绘制装置，包括：分离装置，用于将从激光源发射的激光分成多组绘制光束，所述绘制光束在公共平面中对准; 所述牵引梁入射的透镜; 以及扫描装置，用于利用在主扫描方向上穿过透镜的所述拉伸光束扫描绘图面; 其中激光源和分离装置以这样的方式布置，使得公共平面中的拉伸光束被固定在透镜的子午线上，并且拉伸光束作为具有振荡方向的线偏振光入射到透镜上 其与透镜的子午线平行或垂直于透镜的子午线。
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公开(公告)号：US5691835A
公开(公告)日：1997-11-25
申请号：US572798
申请日：1995-12-13
申请人： Takashi Iizuka
发明人： Takashi Iizuka
CPC分类号： G02B13/0005
摘要： An f.theta. scanning lens arrangement, arranged from a polygonal mirror side to an imaging surface side, including a first, second, third, and fourth lens with having negative, positive, positive, and negative power, respectively, in the main scanning and subscanning directions is provided. The ratio of the focal length in the main scanning direction of the fourth lens versus the focal length in the main scanning direction of the entire f.theta. lens is selected to simultaneously minimize astigmatism, field curvature, and linearity error. Further, the ratio of the focal length in a subscanning direction of the first lens versus the focal length in the subscanning direction of the second lens is selected to minimize curving of scanning lines displaced from the optical axis.
摘要翻译： 一种从多面镜侧到成像面侧布置的fθ扫描透镜装置，包括在主扫描和副扫描中分别具有负，正，正和负功率的第一透镜，第二透镜，第三透镜和第四透镜 提供方向。 选择第四透镜的主扫描方向上的焦距与整个fθ透镜的主扫描方向上的焦距的比率，以同时使散光，场曲率和线性误差最小化。 此外，选择第一透镜的副扫描方向上的焦距与第二透镜的副扫描方向上的焦距的比例，以使从光轴移位的扫描线的弯曲最小化。
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公开(公告)号：US5543955A
公开(公告)日：1996-08-06
申请号：US360947
申请日：1994-12-21
申请人： Yoshihiro Yamazaki , Takashi Iizuka , Toshio Kasai
发明人： Yoshihiro Yamazaki , Takashi Iizuka , Toshio Kasai
CPC分类号： G02B26/12 , H04N1/0461 , H04N1/1135 , H04N2201/04729
摘要： An optical scanning system has an image reading scanning system for emitting a first scanning beam of light to read an image of an object, an image forming scanning system for emitting a second scanning beam of light to form an image on a light receiving surface, and a light receiving element. Each of the first and second scanning beams is incident on the light receiving element when each of the first and second scanning beams is located at an end portion of a scanning area, and the first scanning beam and the second scanning beam have different optical characteristics. The optical scanning system also has a circuit for generating a horizontal synchronous signal for the image reading optical system and the image forming optical system, respectively, in accordance with light received by the light receiving element.
摘要翻译： 光学扫描系统具有用于发射第一扫描光束以读取物体的图像的图像读取扫描系统，用于发射第二扫描光束以在光接收表面上形成图像的图像形成扫描系统，以及 光接收元件。 当第一和第二扫描光束中的每一个位于扫描区域的端部时，第一和第二扫描光束中的每一个入射在光接收元件上，并且第一扫描光束和第二扫描光束具有不同的光学特性。 光学扫描系统还具有根据光接收元件接收的光分别产生用于图像读取光学系统和图像形成光学系统的水平同步信号的电路。
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公开(公告)号：US5464516A
公开(公告)日：1995-11-07
申请号：US235934
申请日：1994-05-02
申请人： Hisao Takeda , Youichi Koshiji , Hidehiro Kubota , Takashi Iizuka
发明人： Hisao Takeda , Youichi Koshiji , Hidehiro Kubota , Takashi Iizuka
CPC分类号： G01N27/44747 , B01D57/02 , Y10T428/254 , Y10T428/31725
摘要： An electrophoresis separation layer is produced which comprises a polyacrylamide gel which remains stable even when stored for a long time and is available for analyzing substances of an extremely wide molecular weight range in electrophoresis for determining molecular weight. The electrophoresis separation layer of the present invention includes a polyacrylamide gel with an aqueous solution containing an amine of a specific pH value, an ampholyte and an acid at a specific ratio as an electrolytic solution in the gel. This separation layer can be produced by lowering the pH value of the electrolytic solution in the polyacrylamide gel to such an extent as not to cause any hydrolysis of amide while achieving a suitable potential gradient distribution in the gel during the electrophoresis.
摘要翻译： 生成电泳分离层，其包含聚丙烯酰胺凝胶，即使长时间保存也保持稳定，并且可用于分析用于确定分子量的电泳中极宽分子量范围的物质。 本发明的电泳分离层包括具有特定pH值的胺的水溶液的聚丙烯酰胺凝胶，作为凝胶中的电解液的特定比例的两性电解质和酸。 该分离层可以通过将聚丙烯酰胺凝胶中的电解液的pH值降低到不会引起酰胺的水解，同时在电泳期间在凝胶中达到合适的电位梯度分布的程度来制备。
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47.发明授权System for measuring tilt of image plane of optical system using diffracted light 失效使用衍射光测量光学系统的图像平面倾斜的系统
公开(公告)号：US5448355A
公开(公告)日：1995-09-05
申请号：US220682
申请日：1994-03-31
申请人： Masato Noguchi , Takashi Iizuka
发明人： Masato Noguchi , Takashi Iizuka
CPC分类号： G01M11/02
摘要： A system used for measuring the tilt of an image formed by a lens. The measuring system has a light source, a diffraction grating, a reflection surface and a detector for detecting an interference pattern that is formed by the light after passing through the diffraction grating reflection surface and the lens.
摘要翻译： 用于测量由透镜形成的图像的倾斜的系统。 测量系统具有光源，衍射光栅，反射表面和检测器，用于检测通过衍射光栅反射表面和透镜之后由光形成的干涉图案。
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公开(公告)号：US5412510A
公开(公告)日：1995-05-02
申请号：US975128
申请日：1992-11-12
CPC分类号： H04N1/03 , G02B7/008 , H04N2201/02425
摘要： An imaging optical system for compensating for changes of temperature according to the present invention corrects a focal point for an entire optical system due to temperature change by changing a relative distance between a lens and a light receiving element. To this end, a correcting member, which expands and contracts due to temperature change, is disposed between the lens and the light receiving element. Moreover, the coefficient of thermal expansion is set to such a value so as to be able to substantially correct for the focal point change. According to another aspect of the present invention, the optical system includes a lens system which has at least a positive lens and a negative lens in order to offset the effect of the temperature change.
摘要翻译： 根据本发明的用于补偿温度变化的成像光学系统通过改变透镜和光接收元件之间的相对距离来校正由于温度变化而导致的整个光学系统的焦点。 为此，在透镜和光接收元件之间设置由于温度变化而膨胀和收缩的校正构件。 此外，将热膨胀系数设定为这样的值，以便能够基本上校正焦点变化。 根据本发明的另一方面，光学系统包括透镜系统，其至少具有正透镜和负透镜，以抵消温度变化的影响。
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49.发明授权Semiconductor substrate including a single or multi-layer film having different densities in the thickness direction 失效半导体衬底包括在厚度方向上具有不同密度的单层或多层膜
公开(公告)号：US5335256A
公开(公告)日：1994-08-02
申请号：US851792
申请日：1992-03-16
申请人： Tomoko Maruyama , Takashi Iizuka
发明人： Tomoko Maruyama , Takashi Iizuka
CPC分类号： G03F1/22 , G21K1/06 , Y10S430/167 , Y10S430/168
摘要： An X-ray mask support has an X-ray permeable film and a support frame supporting the film and the X-ray permeable film mainly includes a single-layer film having different densities in its thickness direction or a multi-layer laminate film of layers having different densities, but being constituted of compounds having the same main component. The X-ray mask support can be used as an X-ray mask structure for X-ray lithography by providing an X-ray absorber on the X-ray permeable film. The X-ray permeable film exhibits a high permeability for X-rays and visible/near infrared rays and does not bend even by X-ray irradiation, thereby achieving X-ray exposure of high precision and high resolution.
摘要翻译： X射线掩模支架具有X射线透过膜和支撑该膜的支撑框架，X射线透过膜主要包括在其厚度方向上具有不同密度的单层膜或多层层压膜 具有不同的密度，但由具有相同主要成分的化合物构成。 通过在X射线透过膜上设置X射线吸收体，可以将X射线掩模支撑体用作X射线光刻用的X射线掩模结构体。 X射线透过膜对于X射线和可见/近红外线具有高磁导率，即使通过X射线照射也不会弯曲，从而实现高精度和高分辨率的X射线曝光。
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50.发明授权
公开(公告)号：US5145649A
公开(公告)日：1992-09-08
申请号：US592302
申请日：1990-10-02
CPC分类号： G03F7/70058 , B08B7/0035 , G02B27/0006 , G03F7/702 , G03F7/70841 , G03F7/70925
摘要： A method and apparatus for removing unclear matter on an optical element used with a radiation beam is disclosed. A filter is used to introduce light of a desired wavelength into a chamber in which the optical element is accommodated; a gas supplying device is used to supply a reactive gas which is reactable with the unclear matter on the surface of the optical element; and a vacuum-evacuating device is used to vacuum-evacuate the inside of the chamber.
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