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    Piezoelectric thin film resonator, filter, and communication apparatus
    41.
    发明授权
    Piezoelectric thin film resonator, filter, and communication apparatus 有权
    压电薄膜谐振器，滤波器和通信装置

    公开(公告)号：US08085115B2

    公开(公告)日：2011-12-27

    申请号：US12397932

    申请日：2009-03-04

    申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Masanori Ueda

    发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Masanori Ueda

    IPC分类号： H03H9/54 ,  H03H9/13 ,  H03H9/15

    CPC分类号： H03H9/132 ,  H03H9/02133 ,  H03H9/173

    摘要： A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

    摘要翻译： 压电薄膜谐振器包括基板，形成在基板上的下电极，形成在基板和下电极上的压电膜，以及形成在压电膜上并与下电极相对的上电极，形成在基板上的上电极 压电薄膜。 上部电极具有与主体部分连接的主要部分和延伸部分，与下部电极相对的主要部分和设置在基板和下部电极之间的开口，延伸部分具有与开口和基板相对的部分。

    ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
    43.
    发明申请
    ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
    弹性波装置及其制造方法

    公开(公告)号：US20110241800A1

    公开(公告)日：2011-10-06

    申请号：US13127215

    申请日：2008-11-28

    申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

    发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

    IPC分类号： H03H9/205 ,  H03H3/04

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/564 ,  H03H9/568 ,  H03H2003/0414 ,  H03H2003/0428 ,  Y10T29/42 ,  Y10T29/49005

    摘要： A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

    摘要翻译： 一种制造弹性波装置的方法具有层压步骤，在基板（1）上形成多个弹性波装置，每个弹性波装置包括下电极（2），压电薄膜（3）和 上电极（4）; 用于测量衬底（1）上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤，其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同，与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此，弹性波器件的频率特性可以通过少量的步骤容易地调节。

    Filter having multiple piezoelectric thin-film resonators
    46.
    发明申请
    Filter having multiple piezoelectric thin-film resonators 有权
    具有多个压电薄膜谐振器的滤波器

    公开(公告)号：US20070279154A1

    公开(公告)日：2007-12-06

    申请号：US11806129

    申请日：2007-05-30

    申请人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda ,  Hisanori Ehara

    发明人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda ,  Hisanori Ehara

    IPC分类号： H03H9/58 ,  H03H9/54

    CPC分类号： H03H9/605 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/02141 ,  H03H9/132 ,  H03H9/173 ,  H03H9/174 ,  H03H2003/021

    摘要： A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.

    摘要翻译： 滤波器包括多个压电薄膜谐振器，每个压电薄膜谐振器均具有基板，形成在基板上的下电极，形成在下电极上的压电薄膜和设置在压电薄膜上的上电极，使得上电极和下电极面 彼此横跨压电薄膜。 多个压电薄膜谐振器包括：第一谐振器，其中第一谐振器的压电膜的外弯曲部分的至少一部分位于比上电极和下电极的区域的外弯曲部分更远的位置 电极彼此面对压电薄膜。 多个压电薄膜谐振器包括第二谐振器，其中第二谐振器的压电膜的外部弯曲部分的至少一部分基本上与上电极和下电极面的区域的外弯曲部分重合 彼此隔着压电膜，或者比该区域的外部弯曲部分进一步。

    Film bulk acoustic resonator, filter, communication module and communication apparatus
    47.
    发明授权
    Film bulk acoustic resonator, filter, communication module and communication apparatus 有权
    薄膜体声共振器，滤波器，通信模块和通信装置

    公开(公告)号：US08653908B2

    公开(公告)日：2014-02-18

    申请号：US12921150

    申请日：2008-03-04

    申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    IPC分类号： H03H9/54

    CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

    摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

    摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

    Method of manufacturing thin film resonator
    48.
    发明授权
    Method of manufacturing thin film resonator 有权
    制造薄膜谐振器的方法

    公开(公告)号：US08240015B2

    公开(公告)日：2012-08-14

    申请号：US12627412

    申请日：2009-11-30

    申请人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    发明人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

    IPC分类号： H04R17/10 ,  H01L41/22 ,  B05D5/12

    CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173 ,  H03H9/605 ,  H03H9/706 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49156

    摘要： A method of producing a piezoelectric thin film resonator is provided. A sacrificial layer is formed on a part of the piezoelectric film. The sacrificial layer is patterned, and thereafter an upper electrode is formed on the piezoelectric layer. The method further includes removing the sacrificial layer formed on the piezoelectric layer; and patterning the piezoelectric film. In the step of removing the sacrificial layer, the sacrificial layer is removed such that at least a portion of the periphery of the upper electrode has a reversely tapered shape that reflects the tapered portion of the sacrificial layer, and in the step of patterning the piezoelectric film, the piezoelectric film is removed such that a lower end of the reversely tapered periphery of the upper electrode is placed so as to coincide with or to be in the vicinity of an end portion of the patterned piezoelectric film.

    摘要翻译： 提供了一种制造压电薄膜谐振器的方法。 在压电膜的一部分上形成牺牲层。 将牺牲层图案化，然后在压电层上形成上电极。 该方法还包括去除形成在压电层上的牺牲层; 并构图压电膜。 在去除牺牲层的步骤中，去除牺牲层，使得上电极的周边的至少一部分具有反映牺牲层的锥形部分的倒锥形形状，并且在图案化压电 膜，去除压电膜，使得上电极的倒锥形周边的下端被放置成与图案化压电膜的端部一致或靠近。

    Filter, duplexer, and communication apparatus
    49.
    发明授权
    Filter, duplexer, and communication apparatus 有权
    滤波器，双工器和通信设备

    公开(公告)号：US08125297B2

    公开(公告)日：2012-02-28

    申请号：US12512794

    申请日：2009-07-30

    申请人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

    发明人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

    IPC分类号： H03H9/70 ,  H03H9/54 ,  H03H9/64 ,  H03H9/72

    CPC分类号： H03H9/725 ,  H03H7/18 ,  H03H9/706

    摘要： A filter includes: a first filter unit includes: a series resonators connected in series to each other between a first input terminal and a first output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to a ground terminal, and a second filter unit includes: a series resonators connected in series to each other between a second input terminal and a second output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to the ground terminal.

    摘要翻译： 滤波器包括：第一滤波器单元，包括：在第一输入端和第一输出端之间彼此串联连接的串联谐振器; 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端并且另一端连接到接地端子，并且第二滤波器单元包括：在第二输入端子和第二输入端子之间彼此串联连接的串联谐振器 输出端子 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端，另一端连接到接地端子。