摘要:
A second vertical heat treating apparatus is temperature-calibrated based on a heat treatment result obtained by a first vertical heat treating apparatus for reference. First, temperature measurement wafers is heated in the first apparatus to obtain set values of temperature controllers for a target value of temperature. Then, wafers are subjected to an oxidizing process in the first apparatus by using these set values to form an oxide film. The thickness of the oxide film is measured and recorded as a reference film thickness. Then, wafers are subjected to an oxidizing process in a second apparatus at temperatures near the target value to form an oxide film. The thickness of the oxide film is measured, and difference in thickness between the oxide film formed in the second apparatus and the reference film thickness is obtained. The oxidizing process in the second apparatus is repeated to obtain set values of temperature controllers for the second apparatus at the time when the difference in film thickness becomes zero. The second apparatus is temperature-calibrated on the basis of the set value thus obtained.
摘要:
In a dielectric transmission line device and a radio device using a dielectric transmission line device, an output matching circuit is constructed in a simplified fashion and an output signal of a frequency multiplier is output via a dielectric transmission line. The frequency multiplier is constructed in a small form in the dielectric transmission line device so as to obtain a dielectric transmission line device with a small total size and also obtain a small-sized high-efficiency radio device using such a dielectric transmission line device as a transmission line for transmitting a transmission signal. An input matching circuit is disposed between an input terminal and an FET for generating a harmonic. An open-ended transmission line is also provided which is coupled with an electromagnetic field of a dielectric transmission line in the form of a dielectric strip.
摘要:
A dielectric lens antenna having a lens comprising a dielectric material and a heating body disposed on a surface of the lens. The dielectric lens antenna has a snow-melting function, which prevents degradation in lens-efficiency.
摘要:
An electronic module, comprising: a dielectric base plate having first and second opposing surfaces on which respective electrodes are disposed such that respective areas at the first and second surfaces are free of electrode material and aligned relative to one another to form a dielectric resonator; a first electronic component coupled to the base plate; and a first circuit sheet having first and second opposing surfaces, at least one aperture between the surfaces, and a conductor pattern disposed on the first surface, the first circuit sheet being disposed on the base plate such that: (i) the first electronic component is at least partially received within the aperture; and (ii) at least part of the conductor pattern is coupled to the dielectric resonator.
摘要:
An electronic device includes one or more GaAs integrated circuits having a plurality of mutually independent field-effect transistors formed on a GaAs base-member; and one or more high-dielectric-constant base-members including a passive element on a surface thereof or therein.
摘要:
To permit a user to produce application programs easily, a plurality of object names and objects linkage information is specified as external specification data, the plurality of objects are related to each other based on linkage information stored in an objects linkage information storage, transmission and reception of data between the plurality of objects are controlled, and processes in which the plurality of objects constituting the application program are linked are executed.
摘要:
In a Schottky barrier diode, concentration of an electrical field at an edge of an insulation layer is suppressed to improve the reverse breakdown voltage. An n- layer of a compound semiconductor substrate having an n+ layer and the n- layer is configured in the form of a mesa. An insulation layer is formed on at least a skirt portion and a slant portion of the mesa. An anode is formed on the insulation layer and n- layer, and a cathode is formed on the n+ layer. Thus, concentration of an electrical field at an edge of the insulation layer is canceled at least in part by an electrical field generated at the anode on the slant portion to improve the reverse breakdown voltage.
摘要:
A tine device for a soil conditioning aeration machine capable of replacing a tine with another in a simple motion. The tine is mounted onto a driving portion through a coupler having an internal member. The internal member has a body portion capable of being inserted into the tine and the coupler retains the inserted tine through movable steel balls. The steel balls are freed by pushing an outer cylinder of the coupler against the force of a coiled spring so that the tine may be removed/mounted in a simple motion.
摘要:
An image processing device includes: a first arithmetic operation unit that individually calculates an evaluation value based upon first factors, in correspondence to each of a plurality of images included in an image batch input thereto; an exclusion unit that executes exclusion processing based upon calculation results provided by the first arithmetic operation unit so as to exclude an image, the calculation results for which satisfy a predetermined condition, from the image batch; a second arithmetic operation unit that individually calculates an evaluation value based upon second factors, which include a factor different from the first factors, in correspondence to each image in the image batch having undergone the exclusion processing; and an evaluation processing unit that ranks individual images in the image batch having undergone the exclusion processing based upon calculation results provided by the second arithmetic operation unit.
摘要:
A semiconductor process system (10) includes a measuring section (40), an information processing section (51), and a control section (52). The measuring section (40) measures a characteristic of a test target film formed on a target substrate (W) by a semiconductor process. The information processing section (51) calculates a positional correction amount of the target substrate (W) necessary for improving planar uniformity of the characteristic, based on values of the characteristic measured by the measuring section (40) at a plurality of positions on the test target film. The control section (52) controls a drive section (30A, 32A) of a transfer device (30), based on the positional correction amount, when the transfer device (30) transfers a next target substrate (W) to the support member (17) to perform the semiconductor process.