摘要:
A paintball marker includes a main body and a dual feed adapter coupled to the main body. The dual feed adapter has a hollow interior, a top feed port and a bottom feed port. A top feed storage hopper is detachably connected to the dual feed adapter at the top feed port, and a bottom feed storage magazine is detachably connected to the dual feed adapter at the bottom feed port. A sleeve with an opening is rotatable within the dual feed adapter between a first position where the sleeve opening aligns with the top feed port for feeding therethrough a first group of paintballs from the hopper, and a second position where the sleeve opening aligns with the bottom feed port for feeding therethrough a second group of paintballs from the magazine.
摘要:
The present invention is directed to novel 4-methylpyridopyrimidinone compounds of Formula (I), and to salts thereof, their synthesis, and their use as inhibitors of phosphoinositide 3-kinase alpha (PI3-Kα).
摘要:
Apparatus, systems, and methods described herein may couple a base component associated with a portable electronic device (PED) to a display component associated with the PED such that the display component is capable of sliding and rotating relative to the base component. Other embodiments may be described and claimed.
摘要:
HSQ is employed for gap filling patterned metal layers. The surface of the deposited HSQ gap fill layer is modified to decrease its plasma etching rate. Embodiments include modifying the HSQ surface by exposure to a plasma, such as a nitrogen-containing plasma, e.g., a plasma containing ammonia or hydrogen/nitrogen, to form a nitrided surface region. Reduction of the plasma etching rate of HSQ enables formation of reliable low resistance borderless vias.
摘要:
Borderless vias are formed in electrical connection with a lower metal feature of a metal patterned later gap filled with HSQ. Vacuum baking is conducted before filling the through-hole to outgas water absorbed during solvent cleaning, thereby reducing void formation and improving via integrity. Embodiments include vacuum baking at a temperature of about 300.degree. C. to about 400.degree. C., for about 45 seconds to about 2 minutes, at a pressure of no greater than about 10.sup.-6 Torr, preferably in the same tool employed for depositing the barrier layer in filling the through-hole.
摘要:
Planarization of a dielectric interlayer containing a dielectric gap filled layer is improved and facilitated by selective etching to reduce or eliminate steps in the gap filled dielectric layer before oxide deposition and polishing. Embodiments include gap filling a patterned metal layer with SOG or HSQ, forming a photoresist mask with an opening over steps having a height greater than about 3,000 .ANG., etching to reduce the height of the step by at least 70% depositing silicon oxide derived from TEOS or silane by PECVD and CMP.
摘要:
Leading and trailing metal features in a dense array of conductive lines bordering an open field are formed with side surfaces that gradually taper in the direction of the open field toward an underlying substrate. Each side surface bordering the open field is formed with a sufficient slope to reduce cracking of the subsequently deposited dielectric gap fill layer at high stress areas bordering the open field.
摘要:
Borderless vias are formed by depositing a hard dielectric mask layer on the upper surface of a lower metal feature and forming sidewall spacers on the side surfaces of the metal feature and mask layer. A dielectric interlayer is deposited and a misaligned through-hole formed therein by etching. The dielectric material of the sidewall spacer and dielectric material of the dielectric interlayer are different. The etchant employed to form the through-hole exhibits a high selectivity with respect to the sidewall spacer material. The dielectric mask layer enables the formation of a sidewall spacer extending above the metal feature such that, after etching to form the misaligned through-hole, the sidewall spacer covers the side surface of the metal feature.