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41.发明授权Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion 有权用于电容式微机械超声换能器的声学串扰降低公开(公告)号：US07745973B2
公开(公告)日：2010-06-29
申请号：US11789210
申请日：2007-04-23
IPC分类号： H01L41/08
CPC分类号： B06B1/0292
摘要： A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.
摘要翻译： 提供了减少的串扰电容微机械超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在衬底上的至少两个CMUT阵列元件，阵列元件中的至少一个CMUT单元，相邻CMUT阵列元件之间的分离区域和形成在分离区域中的膜。 膜减少相邻阵列元件之间的串扰，其中串扰是来自在CMUT阵列的流体 - 固体界面中传播的CMUT的超声信号的色散引导模式。 每个单元具有沉积到基板上的绝缘层。 细胞膜层沉积到绝缘层，其中细胞膜层在其中具有真空间隙。 电池还具有沉积到膜层的一部分的电极层和沉积到电极层，细胞膜层和绝缘层的钝化层。
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公开(公告)号：US20090292208A1
公开(公告)日：2009-11-26
申请号：US12380889
申请日：2009-03-03
IPC分类号： A61B8/06
CPC分类号： A61B8/06 , A61B5/02007 , G01S15/8927 , G01S15/8979 , G01S15/8984
摘要： Peak blood velocity measurement for automated stenosis detection is provided. Ultrasound measurements of the peak blood velocity are corrected by a calculation of the Doppler angle, which exists from misalignment of the ultrasound transducer axis and the true blood velocity. The direction of the blood velocity and the Doppler angle are found by imaging a set of planar cross-sections of a blood vessel, such as the carotid artery, to obtain velocity maps of the blood flowing in the blood vessel. Peak blood velocity can be correlated with an amount of stenosis therefore accurate peak blood velocity measurements are necessary for medical diagnosis. Automated stenosis detection allows for implementation in many medical settings. A capacitive micromachined ultrasound transducer array is also provided to measure the planar cross-sectional images.
摘要翻译： 提供自动狭窄检测的峰值血液速度测量。 通过计算由超声换能器轴的未对准和真实血液速度存在的多普勒角来校正峰值血液速度的超声测量。 通过对血管如颈动脉的一组平面横截面进行成像来获得血液速度和多普勒角的方向，以获得在血管中流动的血液的速度图。 峰值血流速度可以与狭窄量相关，因此精确的峰值血液速度测量对于医学诊断是必需的。 自动狭窄检测允许在许多医疗设置中实现。 还提供电容微加工超声换能器阵列以测量平面横截面图像。
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公开(公告)号：US20090140357A1
公开(公告)日：2009-06-04
申请号：US12288344
申请日：2008-10-17
CPC分类号： H02N1/008 , B06B1/0292 , Y10T29/49005
摘要： A high temperature micromachined ultrasonic transducer (HTCMUT) is provided. The HTCMUT includes a silicon on insulator (SOI) substrate having a doped first silicon layer, a doped second silicon layer, and a first insulating layer disposed between the first and second silicon layers. A cavity is disposed in the first silicon layer, where a cross section of the cavity includes a horizontal cavity portion on top of vertical cavity portions disposed at each end of the horizontal cavity portion, and the vertical cavity portion spans from the first insulating layer through the first silicon layer, such that a portion of the first silicon layer is isolated by the first insulating layer and the cavity. A membrane layer is disposed on the first silicon layer top surface, and spans across the cavity. A bottom electrode is disposed on the bottom of the second silicon layer.
摘要翻译： 提供了一种高温微加工超声波换能器（HTCMUT）。 HTCMUT包括具有掺杂的第一硅层，掺杂的第二硅层和设置在第一和第二硅层之间的第一绝缘层的绝缘体上硅（SOI）衬底。 空腔设置在第一硅层中，其中空腔的横截面包括在设置在水平空腔部分的每个端部处的垂直空腔部分的顶部上的水平空腔部分，并且垂直空腔部分从第一绝缘层穿过 第一硅层，使得第一硅层的一部分被第一绝缘层和空腔隔离。 膜层设置在第一硅层顶表面上，跨越空腔。 底部电极设置在第二硅层的底部。
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44.发明申请Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion 有权用于电容式微机械超声换能器的声学串扰降低公开(公告)号：US20080259725A1
公开(公告)日：2008-10-23
申请号：US11789210
申请日：2007-04-23
CPC分类号： B06B1/0292
摘要： A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.
摘要翻译： 提供了减少的串扰电容微机械超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在衬底上的至少两个CMUT阵列元件，阵列元件中的至少一个CMUT单元，相邻CMUT阵列元件之间的分离区域和形成在分离区域中的膜。 膜减少相邻阵列元件之间的串扰，其中串扰是来自在CMUT阵列的流体 - 固体界面中传播的CMUT的超声信号的色散引导模式。 每个单元具有沉积到基板上的绝缘层。 细胞膜层沉积到绝缘层，其中细胞膜层在其中具有真空间隙。 电池还具有沉积到膜层的一部分的电极层和沉积到电极层，细胞膜层和绝缘层的钝化层。
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45.发明授权Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method 有权电容膜超声换能器减少了体波产生和方法公开(公告)号：US07321181B2
公开(公告)日：2008-01-22
申请号：US11098863
申请日：2005-04-04
IPC分类号： H01L41/08
CPC分类号： H02N1/002 , B06B1/0292 , Y10T29/43
摘要： A capacitive membrane ultrasonic transducer which includes a membrane supported by a substrate in which ultrasonic bulk waves at the frequency of operation of the transducers are suppressed by configuring the substrate and a method of suppressing the ultrasonic bulk waves.
摘要翻译： 一种电容式膜超声换能器，其包括由基板支撑的膜，其中通过配置基板来抑制在换能器的操作频率处的超声波体波和抑制超声波体波的方法。
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公开(公告)号：US06958255B2
公开(公告)日：2005-10-25
申请号：US10638057
申请日：2003-08-07
CPC分类号： B81C1/00158 , B06B1/0292 , B06B1/0688 , B81B2201/0257 , B81C2203/036 , G01H11/08
摘要： There is described a micromachined ultrasonic transducers (MUTS) and a method of fabrication. The membranes of the transducers are fusion bonded to cavities to form cells. The membranes are formed on a wafer of sacrificial material. This permits handling for fusions bonding. The sacrificial material is then removed to leave the membrane. Membranes of silicon, silicon nitride, etc. can be formed on the sacrificial material. Also described are cMUTs, pMUTs and mMUTs.
摘要翻译： 描述了微机械超声换能器（MUTS）和制造方法。 换能器的膜融合到空腔中以形成细胞。 膜形成在牺牲材料的晶片上。 这样可以处理熔接。 然后去除牺牲材料以离开膜。 可以在牺牲材料上形成硅，氮化硅等膜。 还描述了cMUT，pMUT和mMUT。
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公开(公告)号：US06836020B2
公开(公告)日：2004-12-28
申请号：US10349597
申请日：2003-01-22
IPC分类号： H01L2940
CPC分类号： H01L21/76898 , B06B1/0292 , B06B1/06 , H01L2224/48227 , H01L2924/10253 , H01L2924/12032 , H01L2924/12041 , H01L2924/00
摘要： A wafer with through wafer interconnects. The wafer includes spaced through wafer vias which extend between the back side and front side of the wafer. A conductor within each of said vias connects to front and back side pads. Functions associated with said conductor and said pads provide a depletion region in the wafer between the pads and wafer or pads and conductor and the wafer.
摘要翻译： 具有贯通晶片互连的晶片。 晶片包括在晶片的背侧和前侧之间延伸的间隔开的晶片通孔。 每个所述通孔内的导体连接到前侧和后侧衬垫。 与所述导体和所述焊盘相关联的功能在焊盘和晶片或焊盘与导体和晶片之间的晶片中提供耗尽区。
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48.发明授权Apparatus and method for characterizing semiconductor wafers during processing 有权用于在加工期间表征半导体晶片的装置和方法
公开(公告)号：US6112595A
公开(公告)日：2000-09-05
申请号：US420217
申请日：1999-10-18
申请人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
发明人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
CPC分类号： G01N29/46 , G01N29/041 , G01N29/07 , G01N29/449 , G01N2291/02854 , G01N2291/02881 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/102 , G01N2291/2698
摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.
摘要翻译： 公开了用于表征可支持声波的半导体晶片或其它测试对象的装置和方法。 源和接收换能器被配置成各种布置以分别激发和检测要表征的晶片中的声波（例如，兰姆波）。 表示检测到的波的信号被数字处理并用于计算与晶片中的波速相关的测量集。 提供了表征灵敏度，其描述不同的感兴趣的晶片特性随着声波传播的变化而变化。 使用在所有晶片特性已知的建立时间计算的表征灵敏度和测量集，以及当至少一个特性未知时的一个或多个处理时间，可以确定设置和处理时间之间的晶片特性的扰动。 通过晶片校准程序改进表征精度，其中针对每个被表征的晶片确定对已知条件的测量偏移。 公开了一种用于校正由于相对于晶片的优选结晶轴的波传播方向引起的声波速度的各向异性的装置和技术。 还描述了一种用于使用单个换能器来测量晶片温度的装置和技术，其温度与晶片的温度和可选的谐振器结构相关。 对于在夹持晶片时发生的表征步骤，描述了一种卡盘结构，其减小卡盘干扰晶片中的波的可能性。
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公开(公告)号：US5277754A
公开(公告)日：1994-01-11
申请号：US978848
申请日：1992-11-19
CPC分类号： B41J2/1631 , B41J2/14008 , B41J2/1607 , B41J2/1626 , B41J2/1632 , B41J2002/14387
摘要： A liquid level control structure and a method for its production. The controller is comprised of a plate having substantially flat top and bottom surfaces and an hourglass-shaped aperture containing a marking fluid. Protruding a known amount and at a known angle from opposite sides of the aperture waist are knife-edged lips that interact with the fluid's surface tension to control the location of an unbounded surface of the fluid.The method for producing the liquid level control structure uses semiconductor fabrication techniques. The aperture is formed in a semiconductor wafer using several etching steps, some of which act along the crystalline planes of the wafer. The lips are formed from etch stop layers deposited between etching steps, while the knife-edges are formed on the ends of the lips during an etching step. Beneficially, the location of the knife-edges relative to one surface of the wafer is independent of small variations in the thickness of the water.
摘要翻译： 液位控制结构及其生产方法。 控制器由具有基本上平坦的顶部和底部表面的板和包含标记流体的沙漏形孔组成。 从孔径腰部的相对侧突出已知的量并以已知的角度突出的是刀刃边缘，其与流体的表面张力相互作用以控制流体的无界表面的位置。 液位控制结构的制造方法采用半导体制造技术。 利用若干蚀刻步骤在半导体晶片中形成孔，其中一些蚀刻步骤沿着晶片的晶面起作用。 唇缘由在蚀刻步骤之间沉积的蚀刻停止层形成，而在蚀刻步骤期间刀刃形成在唇缘的端部上。 有利的是，刀刃相对于晶片的一个表面的位置是独立于水的厚度的小的变化。
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50.发明授权Surface ripple wave diffusion in apertured free ink surface level controllers for acoustic ink printers 失效表面波纹扩散在无孔墨水表面液位控制器的声学墨水打印机
公开(公告)号：US5216451A
公开(公告)日：1993-06-01
申请号：US815002
申请日：1992-12-27
申请人： Eric G. Rawson , Scott A. Elrod , Babur B. Hadimioglu , Calvin F. Quate , Butrus T. Khuri-Yakub
发明人： Eric G. Rawson , Scott A. Elrod , Babur B. Hadimioglu , Calvin F. Quate , Butrus T. Khuri-Yakub
IPC分类号： B41J2/14
CPC分类号： B41J2/14008
摘要： The free ink surface levels of acoustic ink printers are controlled by cap structures that have substantially non-retroreflective aperture configurations. The non-retroreflective configurations of the apertures of these cap structures cause diffusive scattering or directional deflection of the reflected surface ripple waves, thereby significantly reducing the time that is required for the oscillatory perturbations, which are caused by reflection of the surface ripple waves that are generated during the droplet ejection process, to dissipate to a negligibly low amplitude in the critical local areas of the ejection sites. This, in turn, increases the droplet ejection rates at which printers having such cap structures can be operated asynchronously.
摘要翻译： 声学墨水打印机的自由墨水表面水平由具有基本上非回射孔径配置的盖结构控制。 这些盖结构的孔的非回射结构引起反射表面纹波的漫射散射或方向偏转，从而显着减少振荡扰动所需的时间，这是由表面波纹波的反射引起的 在液滴喷射过程中产生，以在喷射位置的关键局部区域中消散到可忽略的低振幅。 这又增加了具有这种帽结构的打印机可以异步操作的液滴喷射速率。
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