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1.发明授权Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same 有权具有贯通衬底电气连接的电容式微加工超声波换能器阵列及其制造方法公开(公告)号：US07545075B2
公开(公告)日：2009-06-09
申请号：US11144184
申请日：2005-06-04
CPC分类号： B06B1/0292
摘要： The embodiments of the present invention provide a CMUT array and method of fabricating the same. The CMUT array has CMUT elements individually or respectively addressable from a backside of a substrate on which the CMUT array is fabricated. In one embodiment, a CMUT array is formed on a front side of a very high conductivity silicon substrate. Through wafer trenches are etched into the substrate from the backside of the substrate to electrically isolate individual CMUT elements formed on the front side of the substrate. Electrodes are formed on the backside of the substrate to individually address the CMUT elements through the substrate.
摘要翻译： 本发明的实施例提供了一种CMUT阵列及其制造方法。 CMUT阵列具有单独地或分别可从其上制造CMUT阵列的衬底的背面寻址的CMUT元件。 在一个实施例中，CMUT阵列形成在非常高导电性的硅衬底的正面上。 通过晶片沟槽从衬底的背面蚀刻到衬底中以电隔离形成在衬底前侧上的各个CMUT元件。 电极形成在衬底的背面，以通过衬底单独地寻址CMUT元件。
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公开(公告)号：US06958255B2
公开(公告)日：2005-10-25
申请号：US10638057
申请日：2003-08-07
CPC分类号： B81C1/00158 , B06B1/0292 , B06B1/0688 , B81B2201/0257 , B81C2203/036 , G01H11/08
摘要： There is described a micromachined ultrasonic transducers (MUTS) and a method of fabrication. The membranes of the transducers are fusion bonded to cavities to form cells. The membranes are formed on a wafer of sacrificial material. This permits handling for fusions bonding. The sacrificial material is then removed to leave the membrane. Membranes of silicon, silicon nitride, etc. can be formed on the sacrificial material. Also described are cMUTs, pMUTs and mMUTs.
摘要翻译： 描述了微机械超声换能器（MUTS）和制造方法。 换能器的膜融合到空腔中以形成细胞。 膜形成在牺牲材料的晶片上。 这样可以处理熔接。 然后去除牺牲材料以离开膜。 可以在牺牲材料上形成硅，氮化硅等膜。 还描述了cMUT，pMUT和mMUT。
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3.发明授权Microfluidic channels with integrated ultrasonic transducers for temperature measurement and method 失效具有集成超声换能器的微流体通道用于温度测量和方法公开(公告)号：US06789426B2
公开(公告)日：2004-09-14
申请号：US10198290
申请日：2002-07-17
IPC分类号： G01H500
CPC分类号： G01N29/223 , G01H5/00 , G01K11/24 , G01N29/024 , G01N29/326 , G01N2291/02881
摘要： There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.
摘要翻译： 描述了一种用于测量具有间隔壁的类型的微通道中的流体的温度的方法和装置。 超声波换能器将从一个壁传输的超声波传送到相对的壁。 处理器确定来自一个壁的超声波的飞行时间，并反射到与该墙壁相对的壁。 处理器通过将墙壁之间的距离除以飞行时间将飞行时间转换为速度。 处理器将速度从流体中的速度关系转换为温度。
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4.发明授权Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method 有权电容膜超声换能器减少了体波产生和方法公开(公告)号：US07321181B2
公开(公告)日：2008-01-22
申请号：US11098863
申请日：2005-04-04
IPC分类号： H01L41/08
CPC分类号： H02N1/002 , B06B1/0292 , Y10T29/43
摘要： A capacitive membrane ultrasonic transducer which includes a membrane supported by a substrate in which ultrasonic bulk waves at the frequency of operation of the transducers are suppressed by configuring the substrate and a method of suppressing the ultrasonic bulk waves.
摘要翻译： 一种电容式膜超声换能器，其包括由基板支撑的膜，其中通过配置基板来抑制在换能器的操作频率处的超声波体波和抑制超声波体波的方法。
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公开(公告)号：US06836020B2
公开(公告)日：2004-12-28
申请号：US10349597
申请日：2003-01-22
IPC分类号： H01L2940
CPC分类号： H01L21/76898 , B06B1/0292 , B06B1/06 , H01L2224/48227 , H01L2924/10253 , H01L2924/12032 , H01L2924/12041 , H01L2924/00
摘要： A wafer with through wafer interconnects. The wafer includes spaced through wafer vias which extend between the back side and front side of the wafer. A conductor within each of said vias connects to front and back side pads. Functions associated with said conductor and said pads provide a depletion region in the wafer between the pads and wafer or pads and conductor and the wafer.
摘要翻译： 具有贯通晶片互连的晶片。 晶片包括在晶片的背侧和前侧之间延伸的间隔开的晶片通孔。 每个所述通孔内的导体连接到前侧和后侧衬垫。 与所述导体和所述焊盘相关联的功能在焊盘和晶片或焊盘与导体和晶片之间的晶片中提供耗尽区。
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6.发明授权公开(公告)号：US06493288B2
公开(公告)日：2002-12-10
申请号：US09728713
申请日：2000-11-30
IPC分类号： H04R1900
摘要： A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
摘要翻译： 一种宽频带微机械麦克风，包括多个微加工单元，其类型包括由支撑在公共电极上的膜承载的电极，导电线与互连电极。 还描述了操作麦克风阵列的方法。
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公开(公告)号：US07530952B2
公开(公告)日：2009-05-12
申请号：US10817381
申请日：2004-04-01
CPC分类号： B06B1/0292
摘要： A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with a patterned isolation layer having isolation posts or areas located in said cavity to prevent the electrodes for coming into contact during operation of the transducer, and to minimize the accumulation of charge as compared to a non-patterned isolation layer for preventing contact of the electrodes during operation of the transducer.
摘要翻译： 描述了一种电容式超声波换能器，其包括一个或多个电池，其包括由支撑电极间隔开的隔离电极限定的空腔，绝缘壁与图案化隔离层具有位于所述空腔中的隔离柱或区域，以防止电极进入 在传感器的操作期间接触，并且与非图案化隔离层相比最小化电荷的累积，以防止在换能器的操作期间电极的接触。
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公开(公告)号：US08451693B2
公开(公告)日：2013-05-28
申请号：US12806763
申请日：2010-08-20
CPC分类号： B06B1/0292
摘要： A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.
摘要翻译： 提供压缩后电容式微机械超声波换能器（CMUT）。 压缩柱CMUT包括第一电极，具有柱孔图案的顶部导电层，包括第一电极的可移动质量块。 压缩柱CMUT还包括设置在顶部导电层的顶表面和可移动块的底表面之间的操作间隙，压缩柱的图案，其中压缩柱的近端垂直于底部表面连接 可移动质量块，其中压缩柱的图案跨过柱孔的图案。 顶部导电层包括与第一电极电子绝缘的第二电极，其中压缩柱的图案被压缩以在与可移动质量块的底表面垂直的方向上提供恢复力。
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公开(公告)号：US20130023752A1
公开(公告)日：2013-01-24
申请号：US13554985
申请日：2012-07-20
IPC分类号： A61B6/00
CPC分类号： A61B5/0095 , A61B5/0507
摘要： Surface selective photoacoustic (PA) medical imaging is introduced. Surface selective PA imaging is responsive to surface features and does not image sub-surface features, in contrast to conventional PA imaging. The surface PA signal can be considerably larger than the bulk PA signal, for an air-coupled (or gas-coupled) acoustic transducer. Distinguishing these two signals based on time of arrival at the transducer can further distinguish the two signals. This approach provides numerous advantages.Non-contact imaging simplifies and expedites imaging, and can serve as a replacement for visual inspection by physicians. Applications include skin screening and endoscopy.
摘要翻译： 介绍了表面选择性光声（PA）医学成像。 与传统的PA成像相比，表面选择性PA成像对表面特征有反应，并且不影像亚表面特征。 对于空气耦合（或气体耦合）的声换能器，表面PA信号可以大大地大于体积PA信号。 基于到达换能器的时间区分这两个信号可以进一步区分两个信号。 这种方法提供了许多优点。 非接触式成像简化并加速成像，可作为医生进行视觉检查的替代品。 应用包括皮肤筛查和内窥镜检查。
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公开(公告)号：US07972271B2
公开(公告)日：2011-07-05
申请号：US11709347
申请日：2007-02-21
IPC分类号： A61B8/14
CPC分类号： A61B8/14 , G01S7/52046 , G01S15/8915 , G01S15/8927 , G01S15/8993
摘要： An invention for coherent array image formation and restoration is taught. The invention is applicable for both 2D and 3D imaging using either 1D or 2D arrays, respectively. A transducer array is subdivided into subarrays, each subarray having a number of adjacent array elements. All elements of each subarray transmit and receive in parallel. The signals received from each subarray are delayed and summed to form scan lines, or beams. The low-beam-rate beams formed from each subarray are upsampled and interpolated prior to forming high-beam-rate images. Depending on the subarray geometry, a subarray-dependent restoration filter is also applied to the subarray beams. The restored beams from each subarray are combined to form the final high-beam-rate image. The invention significantly reduces the front-end hardware complexity compared to conventional methods such as full phased array imaging with comparable image quality.
摘要翻译： 教导了相干阵列图像形成和恢复的发明。 本发明分别适用于使用1D或2D阵列的2D和3D成像。 换能器阵列被细分为子阵列，每个子阵列具有多个相邻的阵列元件。 每个子阵列的所有元素并行传输和接收。 从每个子阵列接收的信号被延迟并相加以形成扫描线或光束。 在形成高光束速率图像之前，从每个子阵列形成的低光束速率光束被上采样和内插。 根据子阵列几何，子阵列依赖的恢复滤波器也被应用于子阵列波束。 来自每个子阵列的恢复的波束被组合以形成最终的高光束速率图像。 与常规方法相比，本发明显着降低了前端硬件复杂性，例如具有可比较图像质量的全相控阵列成像。
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