公开(公告)号：US20150013601A1

公开(公告)日：2015-01-15

申请号：US14502482

申请日：2014-09-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sang-Shin Lee

IPC: B05C21/00

CPC classification number: B05C21/005 ,  C23C14/042 ,  H01L27/3211 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask frame assembly for thin film deposition is disclosed. In one embodiment, the assembly includes: a frame, and a plurality of unit mask strips attached to the frame, wherein each of the unit mask strips includes a plurality of unit masking patterns which are spaced apart from each other. In one embodiment, each of the unit masking patterns includes: i) a plurality of stripe pattern slits and ii) a plurality of sets of dot pattern slits each set formed to be substantially parallel with the stripe pattern slits. Further, the stripe pattern slits and the sets of dot pattern slits are alternately formed with respect to each other, wherein each set of the dot pattern slits includes a plurality of dot pattern slits, and wherein the length of each stripe pattern slit is substantially the same as the length of each set of the dot pattern slits.

Abstract translation: 公开了一种用于薄膜沉积的掩模框架组件。 在一个实施例中，组件包括：框架和附接到框架的多个单元掩模条，其中每个单元掩模条包括彼此间隔开的多个单元掩蔽图案。 在一个实施例中，每个单元掩模图案包括：i）多个条纹图案狭缝，以及ii）多个组的点阵图形狭缝，每组设置成基本上平行于条纹图案狭缝。 此外，条形图案狭缝和点图案狭缝组彼此交替地形成，其中每组点阵图案狭缝包括多个点图案狭缝，并且其中每个条纹图案狭缝的长度基本上是 与每组点阵图案狭缝的长度相同。

公开(公告)号：US20150007768A1

公开(公告)日：2015-01-08

申请号：US14217875

申请日：2014-03-18

Applicant: Samsung Display Co., Ltd.

Inventor： Sang Yun LEE

IPC: B05C21/00

CPC classification number: H01L51/56 ,  B05B12/20 ,  B05C21/005 ,  C23C14/042 ,  H01L51/0011

Abstract: A mask for deposition includes a plurality of deposition pattern parts arranged spaced apart from each other in a first direction, and a plurality of pattern openings defined in each deposition pattern part; a plurality of dummy pattern parts disposed at opposing sides of the plurality of deposition pattern parts in the first direction, respectively, and a plurality of recesses defined in each dummy pattern part; and a plurality of fixing parts respectively disposed at external sides of outermost dummy pattern parts among the plurality of dummy pattern parts, in the first direction. A maximum thickness of the each dummy pattern part is equal to or larger than a maximum thickness of the each deposition pattern part, and is smaller than a maximum thickness of each fixing part.

Abstract translation: 用于沉积的掩模包括沿第一方向彼此间隔布置的多个沉积图案部分和在每个沉积图案部分中限定的多个图案开口; 分别设置在所述多个沉积图案部分的所述第一方向的相对侧的多个虚拟图案部分和限定在每个虚拟图案部分中的多个凹部; 以及多个固定部分，其分别设置在所述多个虚拟图案部分中的最外面的虚拟图案部分的外侧，沿着所述第一方向。 每个假图形部分的最大厚度等于或大于每个沉积图案部分的最大厚度，并且小于每个固定部分的最大厚度。

公开(公告)号：US08887662B2

公开(公告)日：2014-11-18

申请号：US13339449

申请日：2011-12-29

Applicant: Mark Carmine Bellino ,  Matthew Paul Berkebile ,  Eunice Delia Reyes

Inventor： Mark Carmine Bellino ,  Matthew Paul Berkebile ,  Eunice Delia Reyes

IPC: B05C21/00 ,  B05D1/32 ,  B05D3/10 ,  C23C14/04 ,  B05B15/04 ,  B05D3/04

CPC classification number: B05C21/005 ,  B05B12/18 ,  B05B12/20 ,  B05D1/32 ,  B05D3/042 ,  B23P2700/06 ,  C23C14/046

Abstract: Methods of pressure coating a target surface of an article comprising one or more passageways include fluidly connecting a pressure masker comprising pressurized masking fluid to a first side of at least one passageway, passing the pressurized masking fluid through the at least one passageway from the first side to a second side comprising the target surface, and, coating the target surface using a coating material, wherein the pressurized masking fluid passing through the at least one passageway prevents the coating material from permanently altering a cross sectional area of the at least one passageway.

Abstract translation: 包括一个或多个通道的物品的目标表面的压力涂覆方法包括将包括加压掩模流体的压力掩模流体连接到至少一个通道的第一侧，使加压的掩蔽流体从第一侧通过至少一个通道 到包括目标表面的第二侧，并且使用涂覆材料涂覆目标表面，其中通过所述至少一个通道的所述加压掩模流体防止所述涂层材料永久地改变所述至少一个通道的横截面积。

公开(公告)号：US20140331926A1

公开(公告)日：2014-11-13

申请号：US14058404

申请日：2013-10-21

Applicant: Samsung Display Co., Ltd.

Inventor： YONG HWAN KIM

IPC: B05C21/00 ,  B23K37/04 ,  B23K31/02

CPC classification number: B23K37/0408 ,  B05C21/005 ,  C23C14/042

Abstract: A mask assembly includes a mask frame having frame openings formed thereon, and a plurality of unit masks fixed to the mask frame. The respective unit masks extend in a first direction, and at least one of the plurality of unit masks includes at least one of a one sided projection projecting to one side thereof and another sided projection projecting to another side thereof, at both end portions of the unit mask, in a second direction that crosses the first direction.

Abstract translation: 掩模组件包括其上形成有框架开口的掩模框架和固定到掩模框架的多个单元掩模。 相应的单元掩模在第一方向上延伸，并且多个单元掩模中的至少一个包括突出到其一侧的单侧突起和突出到另一侧的另一侧突起中的至少一个， 单位掩模，沿与第一方向相交的第二方向。

公开(公告)号：US08881416B2

公开(公告)日：2014-11-11

申请号：US12990522

申请日：2009-05-04

Applicant: John Menendez

Inventor： John Menendez

IPC: B43L13/02 ,  B44D3/00 ,  B05B15/04

CPC classification number: B44D3/225 ,  B05B12/24 ,  B05C17/00 ,  B05C21/00 ,  B05C21/005 ,  B43L7/10 ,  B43L7/125 ,  B43L7/14 ,  B44D3/00 ,  B44D3/22 ,  B65H37/005

Abstract: Assemblies and methods for applying painter's tape to a wall for painting stripes and patterns on the wall wherein the assembly has a first elongated body defining a first straight outer edge and a first inner edge and having a first body length and a second elongated body defining a second straight outer edge and a second inner edge and having a second body length. The assembly also includes at least one arm having a first end rotatably coupled to the first elongated body and a second end rotatably coupled to the second elongated body, each of the arms having an arm length and configured to space the first elongated body apart from the second elongated body such that the first straight outer edge is a taping distance from the second straight outer edge.

Abstract translation: 将画家的胶带涂在墙壁上用于在墙壁上涂上条纹和图案的组件和方法，其中所述组件具有限定第一直边外边缘和第一内边缘的第一细长主体，并且具有第一主体长度和限定 第二直边外缘和第二内边缘，并具有第二本体长度。 组件还包括至少一个臂，其具有可旋转地联接到第一细长主体的第一端和可旋转地联接到第二细长主体的第二端，每个臂具有臂长度并且构造成将第一细长体与 第二细长体，使得第一直的外边缘是距离第二直边外边缘的胶带距离。

公开(公告)号：US20140315336A1

公开(公告)日：2014-10-23

申请号：US13962872

申请日：2013-08-08

Applicant: Samsung Display Co., Ltd.

Inventor： Hee-Soo Yoo ,  Mu Gyeom Kim

IPC: H01L51/56

CPC classification number: H01L51/56 ,  B05C21/005 ,  C23C14/042 ,  C23C16/042 ,  H01L27/3211 ,  H01L27/3246 ,  H01L51/0005

Abstract: An organic light-emitting layer forming apparatus includes a stage supporting an intermediate product of an organic light emitting device, which includes a substrate, and a pixel defining layer including first openings. The apparatus includes a first mask disposed over the stage and including second openings, and a second mask disposed over the first mask and including third openings. The second mask is movable relative to the first mask between first and second positions. The third openings do not overlap the second openings in the first position while overlapping the second openings in the second position. T he apparatus includes an inkjet head unit disposed over the second mask and supplying an organic material to the third openings of the second mask in the first position. The second mask moves to the second position to transfer the organic material through the second openings.

Abstract translation: 有机发光层形成装置包括支撑包括基板的有机发光器件和包括第一开口的像素限定层的中间产物的载物台。 该装置包括设置在舞台上并包括第二开口的第一掩模和设置在第一掩模上并包括第三开口的第二掩模。 第二掩模相对于第一和第二位置之间的第一掩模是可移动的。 第三开口在第二位置上与第二开口重叠而不与第一开口处的第二开口重叠。 设备包括设置在第二掩模上的喷墨头单元，并且在第一位置向第二掩模的第三开口提供有机材料。 第二掩模移动到第二位置以通过第二开口传送有机材料。

公开(公告)号：US20140262026A1

公开(公告)日：2014-09-18

申请号：US13831285

申请日：2013-03-14

Applicant: APPLIED MATERIALS, INC.

Inventor： JOHN FORSTER ,  ZHENBIN GE ,  ALAN RITCHIE

IPC: C23F1/02 ,  B05C21/00

CPC classification number: B05C21/005 ,  C23C14/35 ,  H01J37/32623 ,  H01J37/32642 ,  H01J37/32651 ,  H01J37/3408

Abstract: Variable geometry process kits for use in semiconductor process chambers have been provided herein. In some embodiments, a process kit for use in a semiconductor process chamber includes: an annular body configured to rest about a periphery of a substrate support; a first ring positioned coaxially with the annular body and supported by the annular body; a second ring positioned coaxially with the first ring and supported by the first ring; and an annular shield comprising a horizontal leg positioned coaxially with the second ring such that a portion of the horizontal leg is aligned with and below portions of the first ring and second ring.

Abstract translation: 本文提供了用于半导体处理室的可变几何工艺套件。 在一些实施例中，用于半导体处理室的处理套件包括：环形体，被配置为围绕衬底支撑件的周边放置; 第一环与环形体同轴地定位并由环形体支撑; 与所述第一环同轴并由所述第一环支撑的第二环; 以及环形护罩，其包括与所述第二环同轴地定位的水平腿，使得所述水平腿的一部分与所述第一环和所述第二环的部分对准。

公开(公告)号：US20140137798A1

公开(公告)日：2014-05-22

申请号：US14166275

申请日：2014-01-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hong-Kyun AHN ,  Se-Young OH

IPC: B05C21/00

CPC classification number: B05C21/005 ,  B05D1/32 ,  C23C14/042 ,  C23C16/042 ,  G03F1/20 ,  H01L51/0011

Abstract: A mask assembly includes a frame with an opening, at least one support stick in the frame and extending in a first direction to traverse the opening of the frame, the support stick including a communication pattern above the opening of the frame, and a mask positioned on the frame and the at least one support stick, the mask extending in a second direction perpendicular to the first direction to traverse the opening of the frame, and the mask being exposed to the opening of the frame through the communication pattern.

Abstract translation: 掩模组件包括具有开口的框架，框架中的至少一个支撑杆，并且在第一方向上延伸以横过框架的开口，支撑杆包括在框架的开口上方的连通图案，以及定位的掩模 在所述框架和所述至少一个支撑杆上，所述掩模在垂直于所述第一方向的第二方向上延伸以穿过所述框架的开口，并且所述掩模通过所述连通图案暴露于所述框架的开口。

公开(公告)号：US20140069332A1

公开(公告)日：2014-03-13

申请号：US14025156

申请日：2013-09-12

Applicant: Alfred S. DeMott, III

Inventor： Alfred S. DeMott, III

IPC: B05B15/04

CPC classification number: B05B12/16 ,  B05B9/0403 ,  B05B14/00 ,  B05C21/005

Abstract: A paint shield for releasable attachment to the head of a paint gun sprayer is disclosed for preventing overspray from contacting other exposed surfaces or components outside of the intended surface. The paint shield is comprised of a single planar sheet of flexible, sturdy, impermeable material, such as aluminum. The shield includes a base panel through which the nozzle of the spray gun is secured. A pair of contoured members extend away from the base member to make contact with the adjoining pavement, ground, or wall to establish the distance and the angle in which the nozzle is maintained from the surface. This construction assures that the width and angular velocity of the spray evenly covers the surface without undue waste. The paint shield may be preformed for specific cross sections of objects such as curbing or gutters.

Abstract translation: 公开了一种用于可拆卸地附接到喷枪喷头的头部的油漆屏蔽件，用于防止过度喷射使预期表面外的其它暴露表面或部件接触。 油漆屏蔽由柔性，坚固，不渗透的材料（例如铝）组成的单个平板。 护罩包括一个底板，喷枪的喷嘴固定在底板上。 一对轮廓构件从基座构件延伸出来以与相邻的路面，地面或墙壁接触，以建立喷嘴与表面保持的距离和角度。 这种结构确保了喷雾的宽度和角速度均匀地覆盖在表面上而不会造成浪费。 可以对诸如遏制或沟槽的物体的特定横截面预成型防护罩。

公开(公告)号：US20140000792A1

公开(公告)日：2014-01-02

申请号：US14019979

申请日：2013-09-06

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Woo KO ,  Ikunori KOBAYASHI ,  Sang-Shin LEE

IPC: B05C21/00

CPC classification number: C23C14/042 ,  B05C21/005 ,  Y10T156/10

Abstract: A mask assembly, a deposition apparatus for flat panel displays including the same, and associated methods, the mask assembly including an open mask having a plurality of first openings, and a pattern mask coupled to the open mask, the pattern mask having a plurality of second openings disposed within an area bounded by the first openings, wherein the open mask is formed of a material having a thermal expansion coefficient that is lower than a thermal expansion coefficient of the pattern mask.

Abstract translation: 掩模组件，包括其的平板显示器的沉积装置和相关方法，所述掩模组件包括具有多个第一开口的开口掩模和耦合到所述开口掩模的图案掩模，所述图案掩模具有多个 第二开口设置在由第一开口限定的区域内，其中，开口掩模由热膨胀系数低于图案掩模的热膨胀系数的材料形成。