Manipulator
    41.
    发明授权
    Manipulator 失效
    机械手

    公开(公告)号:US06577093B1

    公开(公告)日:2003-06-10

    申请号:US09831741

    申请日:2001-06-25

    IPC分类号: B25J918

    摘要: A manipulator for an environment with hygienic requirements, comprising a stationary element (1) with a plurality of drive means (2), and arms (3) attached to the drive means, which arms, via a respective linkage (4), support a movable element (5). The drive means (2) are enclosed in an enclosure (6) which encloses a gaseous coolant which, by a forced flow, takes up heat from the motors of the drive means.

    摘要翻译: 一种用于具有卫生要求的环境的操纵器,包括具有多个驱动装置(2)的固定元件(1)和附接到所述驱动装置的臂(3),所述臂(3)经由相应的联动装置(4)支撑 可移动元件(5)。 驱动装置(2)被封闭在包围气态冷却剂的外壳(6)中,该冷却剂通过强制流动从驱动装置的马达吸收热量。

    Substrate transfer robot
    42.
    发明授权
    Substrate transfer robot 失效
    基板传送机器人

    公开(公告)号:US06298684B1

    公开(公告)日:2001-10-09

    申请号:US09440276

    申请日:1999-11-15

    IPC分类号: F25D2312

    摘要: A substrate transfer robot has arms 10, 20, 28 to be arranged in high-temperature vacuum atmosphere. To effectively cool the arms, a cooling block 30 having a cooling line P formed therein for circulating coolant is fixed to a first arm 10, as one of the arms 10, 20, 28 which are accommodated in a transfer chamber 2 of which inside is in a vacuum atmosphere. A driving shaft 11 for driving the first arm 10 is provided with a feed passage 13A and a return passage 13B formed along the axial direction thereof for supplying and collecting the coolant to and from the cooling line P of the cooling block 30. A swivel joint 40 is provided on the lower end of the driving shaft to allow the connection between the passage to an external cooling circulating means 8 even when the driving shaft 11 is rotated.

    摘要翻译: 基板传送机器人具有要在高温真空气氛中布置的臂10,20,28。 为了有效地冷却臂,具有形成在其中用于循环冷却剂的冷却管线P的冷却块30被固定到第一臂10,作为容纳在其内部的传送室2中的臂10,20,28中的一个 在真空气氛中。 用于驱动第一臂10的驱动轴11设置有沿其轴向方向形成的进给通道13A和返回通道13B,用于向冷却块30的冷却管线P供应和从冷却管线P收集冷却剂。回转接头 40设置在驱动轴的下端,以允许即使在驱动轴11旋转时,也可以将通道连接到外部冷却循环装置8。

    Gripper assembly with integrated heat shield
    43.
    发明授权
    Gripper assembly with integrated heat shield 失效
    夹具组合带集成隔热罩

    公开(公告)号:US6039375A

    公开(公告)日:2000-03-21

    申请号:US14199

    申请日:1998-01-28

    申请人: Thomas C. Bauman

    发明人: Thomas C. Bauman

    IPC分类号: B25J15/02 B25J19/00 B25J15/00

    CPC分类号: B25J15/0253 B25J19/0054

    摘要: A gripper assembly with an integrated heat shield. The integrated heat shield is in the form of a shell having one or more openings through which a gas may flow into and out of in order to create a cooling current flow. Two axially aligned and opposed cylinders, each having a main portion, are individually mounted to the shell and the shell substantially surrounds the main portion of each cylinder. Each cylinder has a piston and each piston has a piston rod. Each piston rod is coupled to a jaw and each jaw is supported by one or more guide rods slidably received in one or more sleeves mounted to the shell. The jaws are positioned substantially parallel to one another and operable to grasp and release objects of interest. Motion of the jaws is synchronized by a synchronization mechanism.

    摘要翻译: 具有集成隔热罩的夹具组件。 集成的隔热罩是具有一个或多个开口的壳体的形式,气体可以通过该开口流入和流出,以产生冷却电流。 每个具有主要部分的两个轴向对准和相对的圆柱体分别安装到壳体上,壳体基本上围绕每个气缸的主要部分。 每个气缸都有一个活塞,每个活塞都有一个活塞杆。 每个活塞杆联接到钳口,并且每个钳口由可滑动地容纳在安装到壳体的一个或多个套筒中的一个或多个引导杆支撑。 夹爪基本上彼此平行地定位并且可操作地抓握并释放感兴趣的物体。 钳口的运动通过同步机构同步。

    Seam tracking device for an industrial robot
    44.
    发明授权
    Seam tracking device for an industrial robot 失效
    用于工业机器人的接缝跟踪装置

    公开(公告)号:US4794223A

    公开(公告)日:1988-12-27

    申请号:US87819

    申请日:1987-08-21

    摘要: A weld seam tracker for a welding robot has an optical sensor (4) for sensing the position of the seam and controlling the movement of a welding torch (10). The sensor (4) includes a light source, for example a laser, and a position-sensing detector. The sensor (4) is rotatably mounted at a housing (1) mounted on the robot hand (3) and is operated by a motor (6) arranged in the housing (1). A heat shield (40) with a window (42, 43) for the scanning light protects the sensor (4) against spatter and heat radiation. The welding torch (10) is mounted in a through-hole in the housing (1) and is surrounded by the sensor (4). Compressed air for cooling the sensor (4) is conducted to said sensor (4) via a gas-tight space (23) in the housing (1). Part of the cooling air is led out through a sleeve-formed screen (46) at the window (42, 43) of the heat shield ( 40), whereby fumes etc. are blown away from the visibility range located nearest the window.

    摘要翻译: 用于焊接机器人的焊缝跟踪器具有用于感测接缝的位置并控制焊炬(10)的移动的光学传感器(4)。 传感器(4)包括例如激光器的光源和位置感测检测器。 传感器(4)可旋转地安装在安装在机器人手(3)上的壳体(1)上并由布置在壳体(1)中的马达(6)操作。 具有用于扫描光的窗口(42,43)的隔热罩(40)保护传感器(4)免受飞溅和热辐射。 焊炬(10)安装在壳体(1)中的通孔中并被传感器(4)包围。 用于冷却传感器(4)的压缩空气通过壳体(1)中的气密空间(23)传导到所述传感器(4)。 冷却空气的一部分通过位于隔热罩(40)的窗口(42,43)处的套筒形筛网(46)引出,从而烟雾等从最靠近窗口的可见度范围吹走。

    Sealed joint for a robot and the like
    46.
    发明授权
    Sealed joint for a robot and the like 失效
    用于机器人的密封接头等

    公开(公告)号:US4678952A

    公开(公告)日:1987-07-07

    申请号:US765867

    申请日:1985-08-13

    摘要: A sealed joint having two adjacent, axially aligned sleeves separated by a rotating seal, one joint being movable with respect to the other. The joints contain a tubular passageway surrounded by a motor and a harmonic drive. A tachometer and a brake help to control the motor and a position encoder measures rotational motion between the sleeves. All components are mounted in sealed relation with respect to the outside of the sleeves. A sealable port communicates with the interior of the tubular passageway for each sleeve so that control cables and fluid conduits may pass into the joint through one port, along the tubular passageway and out of the other port.

    摘要翻译: 密封接头,具有由旋转的密封件分开的两个相邻的轴向对准的套筒,一个接头可相对于另一个接合。 接头包含由马达和谐波驱动器围绕的管状通道。 转速计和制动器有助于控制电机,位置编码器可测量套筒之间的旋转运动。 所有部件相对于套筒的外部以密封关系安装。 可密封端口与用于每个套管的管状通道的内部连通,使得控制电缆和流体管道可以沿着管状通道并通过另一端口通过一个端口进入接头。

    Lightweight electric robotic actuator
    47.
    发明授权
    Lightweight electric robotic actuator 失效
    轻型电动机器人执行机构

    公开(公告)号:US4577127A

    公开(公告)日:1986-03-18

    申请号:US563912

    申请日:1983-12-21

    摘要: An improved electric actuator is provided, having in association therewith a resolver. The actuator includes a stationary and a rotatable housing, and an electric motor within it. The electric motor drives the rotary housing through a speed reducing harmonic drive mechanism. The actuator has an opening in the rotary housing, and a cavity inwardly of the opening having a mating anchoring element connected with the stationary housing. A modular resolver is provided, of a shape and size to have a major portion of it occupy the cavity provided in the actuator, and having a mating part for engaging the mating part of the stationary housing, upon assemblage of the resolver to the actuator. A rotatable part of the resolver is secured to the rotary housing. A heat dissipation system is provided, including a fan mounted on a rotary member of the actuator and a closed circuit for the passage of air between the fan and a heat conductive plate forming a part of the stationary housing. Stability for the rotary housing is provided by widely spaced ball bearings supporting a rotary shaft extending from the rotary housing, the ball bearings being located at the maximum axial spacing within the stationary housing. In addition, an electromagnetic brake of lightweight construction is provided to prevent rotation of the rotary housing, and the resolver includes a coupling of the bellows type for elastic isolation from distortion of the parts, due to stresses between the fixed and rotary parts of the resolver.

    摘要翻译: 提供了一种改进的电致动器,其具有与其一起的旋转变压器。 致动器包括固定的和可旋转的壳体,以及在其内的电动机。 电动机通过减速谐波驱动机构来驱动旋转壳体。 致动器在旋转壳体中具有开口,并且开口内部的空腔具有与固定壳体连接的配合锚定元件。 提供了一种模块化旋转变压器,其形状和尺寸使其主要部分占据设置在致动器中的空腔,并且当旋转变压器组装到致动器上时,具有用于接合固定壳体的配合部分的配合部件。 旋转变压器的可旋转部分被固定到旋转壳体。 提供一种散热系统,包括安装在致动器的旋转构件上的风扇和用于风扇和形成固定壳体的一部分的导热板之间的空气通过的闭合回路。 旋转壳​​体的稳定性由支撑从旋转壳体延伸的旋转轴的宽间距球轴承提供,球轴承位于固定壳体内的最大轴向间隔处。 另外,提供轻便结构的电磁制动器以防止旋转壳体的旋转,并且旋转变压器包括用于弹性隔离的波纹管类型的耦合,以及由于分解器的固定和旋转部件之间的应力而导致的部件变形 。

    INDUSTRIAL ROBOT COMPRISING AN AXLE DRIVE WITH A COMPACT CONSTRUCTION

    公开(公告)号:US20240316758A1

    公开(公告)日:2024-09-26

    申请号:US18574421

    申请日:2022-06-25

    摘要: An industrial robot has at least one translational or rotational axis, having an output element that has a toothing and at least one axis drive assembly that is associated with the translational or rotational axis and that meshes with the output element. The axis drive assembly has a drive motor and at least one transmission arranged downstream of the drive motor. In the case of a translational axis, the output element is a toothed rod. In the case of a rotational axis, the output element is a spur gear with an outer toothing. In addition, the transmission has at least one branching stage that distributes the rotational movement of the motor shaft of the drive motor to at least two gear trains, such that at least two pinions driven by means of the drive motor mesh with the output element.

    SUBSTRATE TRANSFER SYSTEM
    49.
    发明公开

    公开(公告)号:US20240222185A1

    公开(公告)日:2024-07-04

    申请号:US18605892

    申请日:2024-03-15

    摘要: A substrate transfer system includes a substrate processing assembly, a substrate transfer assembly, and a controller. The substrate processing assembly includes a substrate processing chamber, a substrate support, and a first temperature sensor that measures a temperature of the substrate support. The substrate transfer assembly includes a substrate transfer chamber, a robotic substrate transferrer, and a temperature control system. The robotic substrate transferrer includes a first end-effector that holds a high-temperature substrate, a second end-effector that holds a low-temperature substrate, and a deposit detector located adjacent to at least one of the end-effectors. The temperature control system includes a cooling gas supply that supplies a cooling gas into the robotic substrate transferrer, a second temperature sensor that measures a temperature of an internal space of the robotic substrate transferrer, and a temperature adjuster that adjusts a temperature of the cooling gas based on an output from the second temperature sensor.