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    Measurement apparatus and method
    43.
    发明授权
    Measurement apparatus and method 有权
    测量装置及方法

    公开(公告)号：US09423447B2

    公开(公告)日：2016-08-23

    申请号：US14007344

    申请日：2012-04-05

    Applicant: Adrian Kiermasz

    Inventor： Adrian Kiermasz

    IPC: G01R31/00 ,  G01R31/26 ,  G01N5/02 ,  G01N15/08 ,  H01L21/66 ,  C30B7/00 ,  G01N1/00

    CPC classification number: G01R31/2601 ,  C30B1/00 ,  C30B7/00 ,  C30B23/00 ,  G01N1/00 ,  G01N5/00 ,  G01N5/02 ,  G01N15/0893 ,  G01N2201/00 ,  G01N2203/00 ,  H01J49/26 ,  H01L22/12

    Abstract: A method and apparatus for extracting the contents (39) of voids (13) and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material (41) in a collector, and measuring a consequential change in mass of the semiconductor wafer (29) and/or the collector (37), to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.

    Abstract translation: 一种用于提取存在于半导体器件中的空隙（13）和/或孔的内容物（39）的方法和装置，以获得指示空隙和/或孔的性质的信息，例如， 协助测量测量。 该方法包括加热半导体晶片以排出空隙和/或孔的内容物，将排出的材料（41）收集在收集器中，并测量半导体晶片（29）和/或集电体（29）的质量的相应变化 37），提取指示空洞性质的信息。 该信息可以包括关于空隙和/或孔的分布，和/或空隙和/或孔的尺寸和/或空隙和/或孔的化学成分的信息。 收集器可以包括具有用于冷凝排出的材料的温度控制表面（例如与制冷单元热连通）的冷凝器。

    COIN-SHAPED DETECTION OBJECT DISCRIMINATING DEVICE
    44.
    发明申请
    COIN-SHAPED DETECTION OBJECT DISCRIMINATING DEVICE 有权
    硬币检测对象辨识装置

    公开(公告)号：US20160163141A1

    公开(公告)日：2016-06-09

    申请号：US14905076

    申请日：2014-04-07

    Applicant: NIDEC SANKYO CORPORATION

    Inventor： Shogo MOMOSE

    IPC: G07D5/08

    CPC classification number: G07D5/08 ,  G01N1/00 ,  G01N2201/00 ,  H01F1/00

    Abstract: A coin-shaped detection object discriminating device may be used with a detection object in a coin shape, and the coin-shaped detection object discriminating device may include a passage through which the detection object is passed; a permanent magnet; and a magnetic sensor disposed opposite to the permanent magnet across the passage.

    Abstract translation: 硬币形检测对象识别装置可以与硬币形状的检测对象一起使用，并且硬币形检测对象识别装置可以包括检测对象通过的通路; 永久磁铁 以及与通过该通道的永磁体相对设置的磁传感器。

    Sensor apparatus for detecting properties of liquid
    45.
    发明授权
    Sensor apparatus for detecting properties of liquid 有权
    用于检测液体性能的传感器装置

    公开(公告)号：US09347906B2

    公开(公告)日：2016-05-24

    申请号：US13742443

    申请日：2013-01-16

    Applicant: Seuffer GmbH & Co. KG

    Inventor： Roman Gruden

    IPC: G01R27/26 ,  G01N27/22 ,  D06F39/00 ,  G01R1/00 ,  G01N1/00 ,  G01N33/18 ,  A47L15/42 ,  G01N27/30

    CPC classification number: G01N27/221 ,  A47L15/4297 ,  D06F39/004 ,  G01N1/00 ,  G01N27/30 ,  G01N33/18 ,  G01N2201/00 ,  G01R1/00

    Abstract: The invention relates to a sensor device for detecting properties of fluid media in a container, comprising at least one base plate (42) made of an insulating material and having a first surface (42a) exposed to the medium (3), at least two sensor elements (41) having at least a first and a second electrode (41a, 41b) arranged insulated from one another on the first surface of the base plate and around which the medium flows, the at least two sensor elements being arranged in a predetermined spatial position relative to each other.

    Abstract translation: 本发明涉及一种用于检测容器中流体介质性质的传感器装置，包括至少一个由绝缘材料制成并具有暴露于介质（3）的第一表面（42a）的基板（42），至少两个 传感器元件（41）具有至少第一和第二电极（41a，41b），所述第一和第二电极彼此绝缘地布置在所述基板的第一表面上，所述介质流过所述第一和第二电极，所述至少两个传感器元件布置成预定的 相对于彼此的空间位置。

    System comprising a probe and a measuring device
    47.
    发明申请
    System comprising a probe and a measuring device 有权
    包括探针和测量装置的系统

    公开(公告)号：US20150247885A1

    公开(公告)日：2015-09-03

    申请号：US14634508

    申请日：2015-02-27

    Applicant: Rohde & Schwarz GmbH & Co. KG

    Inventor： Markus Freidhof ,  Martin Peschke

    IPC: G01R19/22 ,  G01R19/12 ,  G01R1/067

    CPC classification number: G01R19/22 ,  G01N1/00 ,  G01N2201/00 ,  G01R1/00 ,  G01R1/06766 ,  G01R1/06777 ,  G01R19/12 ,  G01R21/06

    Abstract: The invention relates to a system comprising a probe and a measuring device, wherein the probe is connected to an input of the measuring device, and wherein an analog-digital converter is connected downstream of the input of the measuring device. The probe provides an analog-digital converter for the generation of a value-discrete and/or time-discrete signal from an analog input signal, wherein the value-discrete and/or time-discrete signal is supplied to the analog-digital converter of the measuring device. The invention further relates to a method for the registration of an analog signal by means of a system comprising a probe and a measuring device.

    Abstract translation: 本发明涉及一种包括探针和测量装置的系统，其中探针连接到测量装置的输入端，并且其中模拟数字转换器连接在测量装置的输入端的下游。 探头提供用于从模拟输入信号产生值离散和/或时间离散信号的模数转换器，其中将值离散和/或时间离散信号提供给模数转换器 测量装置。 本发明还涉及一种通过包括探针和测量装置的系统来注册模拟信号的方法。

    CORROSION SENSOR
    48.
    发明申请
    CORROSION SENSOR 有权
    腐蚀传感器

    公开(公告)号：US20150204776A1

    公开(公告)日：2015-07-23

    申请号：US14414006

    申请日：2013-07-02

    Applicant: BAE SYSTEMS plc

    Inventor： Mark David Balmond ,  Mark Alcuin Venables ,  Ian Michael Sturland ,  Alan Peter Pritchard

    IPC: G01N17/04 ,  G01R27/08

    CPC classification number: G01N17/04 ,  G01N1/00 ,  G01N2201/00 ,  G01R27/08 ,  H01L21/00

    Abstract: A corrosion sensor for detecting the action of corrosive media on a metallic component when the sensor is mounted in the vicinity of the metallic component in use is disclosed. The sensor includes an electrically conducting corrodible element mounted on a non conducting substrate, the corrodible element being covered with a protective coating such as paint adapted to protect the corrodible element from corrosive media. The protective coating defines a temporary feature such as a paint defect which extends across the corrodible element and is designed to permit attack on the corrodible element by corrosive media after a predetermined period of time. The corrodible element comprises a pair of spaced tracks extending generally in a longitudinal direction and a series of corrodible tracks, each corrodible track extending generally in a lateral direction and forming an electrical connection between the spaced tracks. The temporary feature extends longitudinally, in the space between the pair of tracks, across a number of the corrodible tracks whereby to permit a corrosive attack on a number of the corrodible tracks after the predetermined period of time

    Abstract translation: 公开了一种用于在传感器安装在使用中的金属部件附近时用于检测金属部件上的腐蚀性介质的作用的腐蚀传感器。 传感器包括安装在非导电衬底上的导电可腐蚀元件，可腐蚀元件被保护涂层覆盖，例如适用于保护可腐蚀元件免受腐蚀性介质的涂料。 保护涂层定义了临时特征，例如延伸穿过可腐蚀元件的油漆缺陷，并被设计成允许在预定时间段之后通过腐蚀性介质侵蚀可腐蚀元件。 可腐蚀元件包括大致沿纵向方向延伸的一对间隔的轨道和一系列可腐蚀的轨道，每个可腐蚀的轨道大体上沿横向方向延伸并且在间隔的轨道之间形成电连接。 临时特征在一对轨道之间的空间中纵向延伸穿过若干可腐蚀的轨道，从而允许在预定时间段之后对若干可腐蚀轨道进行腐蚀性攻击

    Measurement Apparatus and Method
    49.
    发明申请
    Measurement Apparatus and Method 有权
    测量装置及方法

    公开(公告)号：US20140015557A1

    公开(公告)日：2014-01-16

    申请号：US14007344

    申请日：2012-04-05

    Applicant: Adrian Kiermasz

    Inventor： Adrian Kiermasz

    IPC: G01R31/26

    CPC classification number: G01R31/2601 ,  C30B1/00 ,  C30B7/00 ,  C30B23/00 ,  G01N1/00 ,  G01N5/00 ,  G01N5/02 ,  G01N15/0893 ,  G01N2201/00 ,  G01N2203/00 ,  H01J49/26 ,  H01L22/12

    Abstract: A method and apparatus for extracting the contents (39) of voids (13) and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material (41) in a collector, and measuring a consequential change in mass of the semiconductor wafer (29) and/or the collector (37), to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.

    Abstract translation: 一种用于提取存在于半导体器件中的空隙（13）和/或孔的内容物（39）的方法和装置，以获得指示空隙和/或孔的性质的信息，例如， 协助测量测量。 该方法包括加热半导体晶片以排出空隙和/或孔的内容物，将排出的材料（41）收集在收集器中，并测量半导体晶片（29）和/或集电体（29）的质量的相应变化 37），提取指示空洞性质的信息。 该信息可以包括关于空隙和/或孔的分布，和/或空隙和/或孔的尺寸和/或空隙和/或孔的化学成分的信息。 收集器可以包括具有用于冷凝排出的材料的温度控制表面（例如与制冷单元热连通）的冷凝器。

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