公开(公告)号：US20150116717A1

公开(公告)日：2015-04-30

申请号：US14581719

申请日：2014-12-23

Applicant: Kla-Tencor Corporation

Inventor： Amnon MANASSEN ,  Andrew HILL ,  Daniel KANDEL ,  Ilan SELA ,  Ohad BACHAR ,  Barak BRINGOLTZ

IPC: G01N21/55 ,  G01B11/00

CPC classification number: G01N21/55 ,  G01B11/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/104

Abstract: Angle-resolved reflectometers and reflectometry methods are provided, which comprise a coherent light source, an optical system arranged to scan a test pattern using a spot of coherent light from the light source to yield realizations of the light distribution in the collected pupil, wherein the spot covers a part of the test pattern and the scanning is carried out optically or mechanically according to a scanning pattern, and a processing unit arranged to generate a composite image of the collected pupil distribution by combining the pupil images. Metrology systems and methods are provided, which reduce diffraction errors by estimating, quantitatively, a functional dependency of measurement parameters on aperture sizes and deriving, from identified diffraction components of the functional dependency which relate to the aperture sizes, correction terms for the measurement parameters with respect to the measurement conditions.

Abstract translation: 提供了角度分辨反射计和反射测量方法，其包括相干光源，光学系统布置成使用来自光源的相干光的光点扫描测试图案，以产生收集的瞳孔中的光分布的实现，其中 斑点覆盖测试图案的一部分，并且根据扫描图案光学地或机械地执行扫描;以及处理单元，被配置为通过组合瞳孔图像来生成收集的瞳孔分布的合成图像。 提供了测量系统和方法，其通过估计定量地测量参数对孔径尺寸的功能依赖性并且从与孔径尺寸相关的功能依赖性的识别的衍射分量推导出测量参数的校正项，从而降低衍射误差， 相对于测量条件。

公开(公告)号：US08116555B2

公开(公告)日：2012-02-14

申请号：US12266437

申请日：2008-11-06

Applicant: Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

Inventor： Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

IPC: G06K9/00

CPC classification number: G01N21/88 ,  G01N21/8901 ,  G01N21/8903 ,  G01N2201/104

Abstract: A vision inspection system and a workpiece inspection method are used in inspecting a workpiece. The vision inspection system includes a level block having an upper surface whose opposite end regions are defined as a first position and a second position. A first transfer device has a table for supporting the workpiece. The first transfer device is installed on the upper surface of the level block for rectilinearly moving the table between the first position and the second position. A camera is arranged above the level block for taking an image of the workpiece to output image data. A second transfer device is installed on the upper surface of the level block for rectilinearly moving the camera between the first position and the second position. A computer is connected to the first transfer means, the camera and the second transfer means to control them in a specified manner.

Abstract translation: 在检查工件时使用视觉检查系统和工件检查方法。 视觉检查系统包括具有上表面的水平块，其相对的端部区域被定义为第一位置和第二位置。 第一传送装置具有用于支撑工件的工作台。 第一传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线移动工作台。 摄像机布置在水平块上方，用于拍摄工件的图像以输出图像数据。 第二传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线地移动照相机。 计算机连接到第一传送装置，照相机和第二传送装置，以指定方式控制它们。

公开(公告)号：US20110006219A1

公开(公告)日：2011-01-13

申请号：US12666035

申请日：2009-02-13

Applicant: Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

Inventor： Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

IPC: G01T1/10

CPC classification number: G02B21/26 ,  G01N21/278 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2201/104 ,  G01N2201/11 ,  G02B21/0076

Abstract: The invention relates to a data acquisition method using a laser scanner for the pixel-precise imaging of fluorescent samples which are on object carriers and have been treated with fluorescent dyes. Such a laser scanner comprises a sample table; at least one laser and a first optical system for providing at least one laser beam for exciting the fluorescent samples; a scanner head (50) having an optical deflecting element for scanning this sample in at least one direction of movement (75); a first lens; a second optical system for forwarding emission beams, which are triggered by the laser beams on the sample and are deflected by the first lens and the deflecting element, to at least one detector; a position encoder (91) which emits position encoder signals (92) which indicate the instantaneous location of the scanner head (50) in relation to a zero point; an electronic element for filtering the detector signals (93) with a defined time constant; and an A/D converter for digitizing the filtered detector signals (93). The data acquisition method according to the invention is characterized in that the filtered detector signals (93) from the A/D converter and the position encoder signals (92) are acquired independently, in a parallel manner and continuously by a computer unit or a controller (40) and are related to a common time base (94), wherein the A/D conversion is carried out so often that each pixel (95) of an image is always assigned more than one data point of the A/D converter.

Abstract translation: 本发明涉及一种使用激光扫描仪进行像素精确成像的数据采集方法，其中荧光样品位于物体载体上并用荧光染料处理。 这种激光扫描器包括样品台; 至少一个激光器和第一光学系统，用于提供用于激发荧光样品的至少一个激光束; 扫描头（50）具有用于在至少一个运动方向（75）扫描该样品的光学偏转元件; 第一个镜头; 用于转发发射光束的第二光学系统，其由样品上的激光束触发并被第一透镜和偏转元件偏转到至少一个检测器; 位置编码器（91），其发射指示扫描器头（50）相对于零点的瞬时位置的位置编码器信号（92） 用于以确定的时间常数对检测器信号（93）进行滤波的电子元件; 以及用于数字化滤波的检测器信号（93）的A / D转换器。 根据本发明的数据获取方法的特征在于，来自A / D转换器的滤波检测器信号（93）和位置编码器信号（92）以并行方式独立地获取并且由计算机单元或控制器 （40）并且与公共时基（94）相关，其中所述A / D转换经常被执行，使得图像的每个像素（95）总是被分配多个A / D转换器的一个数据点。

公开(公告)号：US07595874B1

公开(公告)日：2009-09-29

申请号：US11672794

申请日：2007-02-08

Applicant: Vladimir M. Pelekhaty ,  Anatoliy Kachurin ,  William Warren ,  Kenneth Church ,  Heather Fahlenkamp ,  Russell Higbee

Inventor： Vladimir M. Pelekhaty ,  Anatoliy Kachurin ,  William Warren ,  Kenneth Church ,  Heather Fahlenkamp ,  Russell Higbee

IPC: G01J3/30

CPC classification number: G01N21/6458 ,  G01N1/36 ,  G01N15/1434 ,  G01N2201/104 ,  G01N2201/1045 ,  G01N2201/112 ,  G02B21/26 ,  G02B21/365

Abstract: Detection of a rarely occurring event within one or more biological samples includes (a) processing each biological sample to provide a gellable liquid solution comprising concentrated biological sample and a flourochrome designed to associate with a rarely occurring event within the concentrated biological sample; (b) depositing the solution in a layer on a surface of a slide; and (c) scanning the solution on the slide with energy adapted to cause fluorescence of the flourochrome to detect potential instances of the rarely occurring event within the concentrated biological sample in the solution.

Abstract translation: 在一个或多个生物样品中检测到很少发生的事件包括（a）处理每个生物样品以提供包含浓缩的生物样品和设计成与浓缩的生物样品中罕见事件相关的荧光染料的可胶凝液体溶液; （b）将溶液沉积在载玻片表面上的层中; 和（c）用适于引起荧光色素的能量扫描载玻片上的溶液以检测溶液中浓缩的生物样品内很少发生的事件的潜在情况。

公开(公告)号：US07589835B2

公开(公告)日：2009-09-15

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US20080212081A1

公开(公告)日：2008-09-04

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00 ,  G02B27/10 ,  G01N21/55 ,  G01J3/00 ,  G01N21/47 ,  G02B5/122

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US20060132758A1

公开(公告)日：2006-06-22

申请号：US11317156

申请日：2005-12-22

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

公开(公告)号：US20030227618A1

公开(公告)日：2003-12-11

申请号：US10386973

申请日：2003-03-11

Applicant: Applied Materials Israel Ltd

Inventor： Daniel Some

IPC: G01N021/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

公开(公告)号：US4965454A

公开(公告)日：1990-10-23

申请号：US298574

申请日：1989-01-18

Applicant: Toshihiko Yamauchi ,  Nobuyuki Akiyama

Inventor： Toshihiko Yamauchi ,  Nobuyuki Akiyama

IPC: G01N21/33 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20

CPC classification number: G03F7/70483 ,  G01N21/94 ,  G01N2021/4702 ,  G01N2021/473 ,  G01N2021/95676 ,  G01N21/33 ,  G01N2201/104

Abstract: The present invention resides in a method and apparatus for detecting a foreign particle, wherein an ultraviolet light beam is radiated in the form of a spot to a sample having a protective film formed on a circuit pattern or a wiring pattern; the spot and the sample are scanned relative to each other; the ultraviolet light is absorbed by the protective film; diffracted light produced from a foreign particle present on the protective film is condensed by an integrating sphere; the thus-condensed light is sensed by an optoelectro transducer to convert it into an electric signal; and the foreign particle present on the protective film formed on the circuit pattern or the wiring pattern is detected on the basis of the electric signal provided from the optoelectro transducer.

Abstract translation: 本发明涉及一种用于检测外来颗粒的方法和装置，其中将紫外光束以斑点的形式照射到具有形成在电路图形或布线图案上的保护膜的样品; 斑点和样品相对于彼此扫描; 紫外线被保护膜吸收; 存在于保护膜上的异物产生的衍射光被积分球冷凝， 这样聚光由光电转换器感测，以将其转换为电信号; 并且基于从光电转换器提供的电信号检测存在于形成在电路图案或布线图案上的保护膜上的异物。