公开(公告)号：US5808425A

公开(公告)日：1998-09-15

申请号：US667973

申请日：1996-06-19

Applicant: Rainer Harle

Inventor： Rainer Harle

IPC: H01J37/06 ,  H01J37/24 ,  H01J37/244 ,  H01J37/248 ,  H01J29/52

CPC classification number: H01J37/243

Abstract: The invention is directed to a method for controlling the emission current of an electron source and to a correspondingly controlled electron source. For this purpose, a parallel circuit comprising resistors 6 and field-effect transistors 7 is connected in the high-voltage circuit between the cathode 1 and the control electrode 2. The supply voltage for the field-effect transistors 7 is generated by voltage dividing the voltage across the resistors 6. The measurement of the emission current takes place at low-voltage potential and a control signal obtained from the measuring signal is optically transmitted via a light-conducting fiber or a light waveguide to the control circuit in the high-voltage part. The emission current control at high-voltage potential is provided without additional voltage supplies. Additional insulating transformers are therefore not required.

Abstract translation: 本发明涉及一种用于控制电子源和相应受控的电子源的发射电流的方法。 为此，在阴极1和控制电极2之间的高电压电路中连接包括电阻6和场效应晶体管7的并联电路。场效应晶体管7的电源电压是通过将 电压两端的电压。发射电流的测量发生在低电压电位，从测量信号获得的控制信号通过导光纤维或光波导光学传输到高电压的控制电路 部分。 在没有额外的电压供应的情况下提供高电压电位下的发射电流控制。 因此不需要额外的绝缘变压器。

公开(公告)号：US5644132A

公开(公告)日：1997-07-01

申请号：US579125

申请日：1995-12-27

Applicant: Alon Litman ,  Alexander Goldenstein ,  Steven R. Rogers

Inventor： Alon Litman ,  Alexander Goldenstein ,  Steven R. Rogers

IPC: H01J37/244 ,  H01J37/248 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: A particle beam column for high-resolution imaging and measurement of topographic and material features on a specimen. The particle beam column includes a particle source for providing a primary beam along a primary beam axis for impinging on the specimen so as to release secondary electrons and backscattered electrons therefrom. The particle beam column also includes an objective lens for focussing the electrons so as to provide a radial dispersion of electrons relative to the primary beam axis, the radial dispersion of electrons including an inner annulus of backscattered electrons and an outer annulus of secondary electrons. The particle beam column still further includes a backscattered electron detector for detecting the inner annulus of backscattered electrons and a secondary electron detector for detecting the outer annulus of secondary electrons.

Abstract translation: 用于高分辨率成像和测量样品上的地形和材料特征的粒子束柱。 粒子束柱包括用于沿着主光束轴提供主光束以撞击样本以便从其释放二次电子和反向散射电子的粒子源。 粒子束列还包括用于聚焦电子的物镜，以便提供电子相对于主光束轴的径向色散，包括反向散射电子的内环和二次电子的外环的电子的径向色散。 粒子束列还包括用于检测反向散射电子的内环的背散射电子检测器和用于检测二次电子的外环的二次电子检测器。

公开(公告)号：US5610452A

公开(公告)日：1997-03-11

申请号：US445827

申请日：1995-05-22

Applicant: Daniel W. Shimer ,  Arnold C. Lange

Inventor： Daniel W. Shimer ,  Arnold C. Lange

IPC: H01J37/248 ,  H01J37/24 ,  H01L21/027 ,  H02H7/00 ,  H02J1/00 ,  H02M3/28 ,  H02M3/337 ,  H02M7/08 ,  H02M7/12 ,  H02M7/537

CPC classification number: H01J37/241 ,  H02H7/00 ,  H02M3/3376 ,  Y10T307/582 ,  Y10T307/707

Abstract: A high power, solid state power supply is described for producing a controllable, constant high voltage output under varying and arcing loads suitable for powering an electron beam gun or other ion source. The present power supply is most useful for outputs in a range of about 100-400 kW or more. The power supply is comprised of a plurality of discrete switching type dc-dc converter modules, each comprising a voltage regulator, an inductor, an inverter for producing a high frequency square wave current of alternating polarity, an improved inverter voltage clamping circuit, a step up transformer, and an output rectifier for producing a dc voltage at the output of each module. The inputs to the converter modules are fed from a common dc rectifier/filter and are linked together in parallel through decoupling networks to suppress high frequency input interactions. The outputs of the converter modules are linked together in series and connected to the input of the transmission line to the load through a decoupling and line matching network. The dc-dc converter modules are phase activated such that for n modules, each module is activated equally 360.degree./n out of phase with respect to a successive module. The phased activation of the converter modules, combined with the square current waveforms out of the step up transformers, allows the power supply to operate with greatly reduced output capacitance values which minimizes the stored energy available for discharge into an electron beam gun or the like during arcing. The present power supply also provides dynamic response to varying loads by controlling the voltage regulator duty cycle using simulated voltage feedback signals and voltage feedback loops. Circuitry is also provided for sensing incipient arc currents reflected at the output of the power supply and for simultaneously decoupling the power supply circuitry from the arcing load.

Abstract translation: 描述了一种高功率固态电源，用于在适于为电子束枪或其他离子源供电的变化和电弧负载下产生可控的恒定高压输出。 目前的电源对于在约100-400kW或更大的范围内的输出是最有用的。 电源由多个分立开关型DC-DC转换器模块组成，每个模块包括电压调节器，电感器，用于产生交流极性的高频方波电流的逆变器，改进的逆变器电压钳位电路，步骤 以及用于在每个模块的输出处产生直流电压的输出整流器。 转换器模块的输入从公共直流整流器/滤波器馈送，并通过去耦网络并联在一起，以抑制高频输入相互作用。 转换器模块的输出串联在一起，并通过去耦和线路匹配网络连接到传输线的输入端到负载。 DC-DC转换器模块被相位激活，使得对于n个模块，每个模块相对于连续模块同步360°/ n异相激活。 转换器模块的分阶段激活与升压变压器之间的平方电流波形相结合，允许电源以大大降低的输出电容值运行，这使得可用于放电到电子束枪等中的存储能量最小化 电弧 目前的电源还通过使用模拟电压反馈信号和电压反馈回路控制电压调节器占空比来提供对变化负载的动态响应。 还提供电路用于感测在电源的输出处反射的初始电弧电流，并且同时将电源电路与电弧负载分离。

公开(公告)号：US5566060A

公开(公告)日：1996-10-15

申请号：US445826

申请日：1995-05-22

Applicant: Daniel W. Shimer ,  Arnold C. Lange

Inventor： Daniel W. Shimer ,  Arnold C. Lange

IPC: H01J37/248 ,  H01J37/24 ,  H01L21/027 ,  H02H7/00 ,  H02J1/00 ,  H02M3/28 ,  H02M3/337 ,  H02M7/08 ,  H02M7/12 ,  H02M7/537

CPC classification number: H01J37/241 ,  H02H7/00 ,  H02M3/3376 ,  Y10T307/582 ,  Y10T307/707

Abstract: A high-power power supply produces a controllable, constant high voltage put under varying and arcing loads. The power supply includes a voltage regulator, an inductor, an inverter for producing a high frequency square wave current of alternating polarity, an improved inverter voltage clamping circuit, a step up transformer, an output rectifier for producing a dc voltage at the output of each module, and a current sensor for sensing output current. The power supply also provides dynamic response to varying loads by controlling the voltage regulator duty cycle and circuitry is provided for sensing incipient arc currents at the output of the power supply to simultaneously decouple the power supply circuitry from the arcing load. The power supply includes a plurality of discrete switching type dc--dc converter modules.

Abstract translation: 大功率电源在变化和电弧负载下产生可控的恒定高压输出。 电源包括电压调节器，电感器，用于产生交流极性的高频方波电流的逆变器，改进的逆变器电压钳位电路，升压变压器，用于在每个输出端产生直流电压的输出整流器 模块和用于感测输出电流的电流传感器。 电源还通过控制电压调节器占空比提供对变化负载的动态响应，并且提供用于感测电源输出端处的初始电弧电流的电路，以同时将电源电路与电弧负载分离。 电源包括多个分立开关型dc-dc转换器模块。

公开(公告)号：US5264703A

公开(公告)日：1993-11-23

申请号：US944449

申请日：1992-09-14

Applicant: Akira Shibano ,  Kiyoshi Harasawa

Inventor： Akira Shibano ,  Kiyoshi Harasawa

IPC: H01J37/141 ,  H01J37/21 ,  H01J37/248

CPC classification number: H01J37/21

Abstract: An electron beam instrument typified by a scanning electron microscope. The instrument does not suffer from defocus if the accelerating voltage is varied. The instrument has an objective lens, an electron gun emitting an electron beam, a control unit, an accelerating voltage-setting portion, first and second reference voltage sources. The control unit digitizes the accelerating voltage set by the accelerating voltage-setting portion and applies the digital voltage to the two reference voltage sources. The first voltage source consists of a first ROM and a first D/A converter. Similarly, the second voltage source consists of a second ROM and a second D/A converter. A signal V.sub.ref1 indicating the optimum objective lens current at a first working distance is stored in the first ROM. A signal .DELTA.V indicating the difference between the optimum objective lens current at a second working distance and the optimum objective lens current at the first working distance is stored in the second ROM. The output voltage from the second voltage source is applied to one end of a variable resistor acting as a focus-adjusting means. The first reference voltage is applied to one input terminal of an adder. The output voltage from the variable resistor is applied to the other input terminal of the adder. The output voltage from the adder can be varied from V.sub.ref1 (V.sub.H1) to V.sub.ref1 (V.sub.H1)+.DELTA.V(V.sub.H1) by adjusting the movable contact of the variable resistor. Hence, the focus can be adjusted.

Abstract translation: 以扫描电子显微镜为代表的电子束仪器。 如果加速电压变化，仪器不会发生散焦。 仪器具有物镜，发射电子束的电子枪，控制单元，加速电压设定部分，第一和第二参考电压源。 控制单元将由加速电压设定部分设定的加速电压数字化，并将数字电压施加到两个参考电压源。 第一电压源由第一ROM和第一D / A转换器组成。 类似地，第二电压源由第二ROM和第二D / A转换器组成。 指示第一工作距离处的最佳物镜电流的信号Vref1存储在第一ROM中。 指示第二工作距离处的最佳物镜电流与第一工作距离处的最佳物镜电流之间的差的信号DELTA V被存储在第二ROM中。 来自第二电压源的输出电压被施加到用作聚焦调节装置的可变电阻器的一端。 第一参考电压被施加到加法器的一个输入端。 来自可变电阻器的输出电压加到加法器的另一个输入端。 通过调整可变电阻的可动触点，来自加法器的输出电压可以从Vref1（VH1）到Vref1（VH1）+ DELTA V（VH1）变化。 因此，重点可以调整。

公开(公告)号：US5235188A

公开(公告)日：1993-08-10

申请号：US741282

申请日：1991-08-07

Applicant: Petrus M. Mul

Inventor： Petrus M. Mul

IPC: H01J37/06 ,  H01J37/073 ,  H01J37/16 ,  H01J37/18 ,  H01J37/248 ,  H01J37/26

CPC classification number: H01J37/18 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/0216

Abstract: In a charged particle beam device, comprising a charged particle source for emitting a charged particle beam, a column comprising particle-optical elements which are enclosed by a column jacket and which serve to accelerate and focus the charged particle beam, the charged particle source comprising an emitter which is accommodated in an emitter chamber, a vibration-insensitive suspension of the emitter is achieved by connecting the emitter chamber to the column jacket via a tubular electrode system. Because the pumping device cooperating with the emitter chamber is arranged above the emitter chamber and in the prolongation of the column, disturbing effects of the pumping device on the emitter are reduced. Because the power supply unit is arranged in the vicinity of the emitter, high-voltage supply leads can be dispensed with, so that interference signals cannot reach the emitter via the supply leads. The use of optical communication via optical fibres prevents the occurrence of undesirable potentials in the equipment.

公开(公告)号：US4687902A

公开(公告)日：1987-08-18

申请号：US763024

申请日：1985-08-06

Applicant: Russell K. Colegrove ,  Glen S. Lawrence

Inventor： Russell K. Colegrove ,  Glen S. Lawrence

IPC: H01J37/248 ,  H01J37/315 ,  B23K15/00

CPC classification number: H01J37/248 ,  H01J37/315

Abstract: Electron beam welding apparatus, suitable as a mobile welding apparatus, having a solid dielectric insulator for the high voltage electrical conductors and also having liquid coolants for cooling the conductors and the insulator which are heated by the cathode. The apparatus also includes a valve for sealing the cathode and the anode in an outer housing in one position of the valve and for allowing the passage therethrough of an electron beam in another position of the valve and for providing precision television optical viewing of the welded seam. The apparatus also includes high-voltage connecting apparatus including a plug having a resilient tapered insulating member and a socket in the solid dielectric insulator, and having the shape of a tapered opening for the plug for exerting laterally compressive forces on the plug as the plug is inserted into the socket to avoid trapping air in the socket. The electron beam gun includes a conductive cartridge having a housing for disposition around a conductive base member and having a bayonet lock protruding internally therefrom for locking in the recess of the base member. The cartridge allows changing of the cartridge in a few minutes or changing of the cathode filament in a few minutes.

Abstract translation: 电子束焊接装置，适合作为移动式焊接装置，具有用于高压电导体的固体电介质绝缘体，并且还具有冷却由阴极加热的导体和绝缘体的液体冷却剂。 该装置还包括一个阀门，用于将外壳中的阴极和阳极密封在阀的一个位置，并允许电子束在阀的另一位置通过，并提供精密的电视光学观察焊缝 。 该装置还包括高压连接装置，其包括具有弹性锥形绝缘构件的插头和固体电介质绝缘体中的插座，并且具有用于插头的锥形开口的形状，用于在插头上施加横向压缩力 插入插座，以避免在插座中捕获空气。 电子束枪包括导电盒，该导电盒具有用于配置在导电基底构件周围的壳体，并且具有在其内部突出的卡口锁，用于锁定在基座构件的凹部中。 墨盒允许在几分钟内更换墨盒，或者在几分钟内更换阴极灯丝。

公开(公告)号：US4467205A

公开(公告)日：1984-08-21

申请号：US425311

申请日：1982-09-28

Applicant: Siegfried Beisswenger ,  Wolfgang Boppel

Inventor： Siegfried Beisswenger ,  Wolfgang Boppel

IPC: H01J37/04 ,  H01J37/06 ,  H01J37/24 ,  H01J37/248 ,  G01K1/00 ,  H01J3/00

CPC classification number: H01J37/243 ,  H01J37/06

Abstract: An electron beam generating system provides a high degree of steadiness of the beam current and comprises a heated cathode, an auxiliary electrode lying at a more negative potential than the cathode, and a transpierced anode. A diaphragm surrounding the beam and connected to a precision resistor is further provided at that side of the auxiliary electrode facing away from the cathode. A portion of the beam current influenced by the control electrode is blanked out by the diaphragm. The precision resistor is connected as an actual value generator to a regulator which is connected to a reference voltage, the output of the regulator influencing the potential of the control electrode over a final control element for the purpose of maintaining the beam current measured by the diaphragm constant.

Abstract translation: 电子束产生系统提供了束流电流的高度稳定性，并且包括加热的阴极，位于比阴极更负的电位的辅助电极和透过的阳极。 在辅助电极的背离阴极的一侧还设置有围绕光束并连接到精密电阻器的隔膜。 由控制电极影响的一部分光束电流被隔膜消隐。 精密电阻器作为实际值发生器连接到连接到参考电压的调节器，调节器的输出影响控制电极在最终控制元件上的电位，以保持由隔膜测量的电流电流 不变。

公开(公告)号：US4396861A

公开(公告)日：1983-08-02

申请号：US184524

申请日：1980-09-05

Applicant: Dietrich Hoffmeister ,  Wilhelm Egle

Inventor： Dietrich Hoffmeister ,  Wilhelm Egle

IPC: H01J37/06 ,  H01J37/248 ,  H01J5/50

CPC classification number: H01J37/248 ,  H01J37/06

Abstract: The invention contemplates lead-through structure for the high-voltage electrode of an electron microscope or the like, in conjunction with shaping of the high-voltage electrode and of the body of insulating material via which the lead-through is supported, in reference to metal envelope structure. The high-voltage electrode has a step-wise enlargement, and the surface of the insulating material which is exposed to the vacuum commences at the start of the step-wise enlargement. As a result, the field strength along the vacuum-exposed insulator surface is so influenced that a minimum electric field strength is produced at the boundary line between the vacuum and the high-voltage electrode. The further result is to prevent occurrence of microdischarges.

Abstract translation: 本发明考虑到电子显微镜等的高电压电极的引线结构，结合高压电极和支撑导通的绝缘材料体的成形，参照 金属外壳结构。 高压电极具有逐步扩大，暴露于真空的绝缘材料的表面在逐步扩大开始时开始。 结果，沿着真空暴露的绝缘体表面的场强受到影响，使得在真空和高压电极之间的边界线处产生最小的电场强度。 进一步的结果是防止微放电的发生。

公开(公告)号：US4337422A

公开(公告)日：1982-06-29

申请号：US131205

申请日：1980-03-17

Applicant: Lee H. Veneklasen

Inventor： Lee H. Veneklasen

IPC: H01J37/24 ,  H01J37/248 ,  H01J29/52

CPC classification number: H01J37/243 ,  H01J37/248

Abstract: A field emission gun, for either electron or positive ion emission, in which the beam current between source and sample is measured at accelerating voltage potential between two concentric shields that enclose the gun, its power supplies, and the measuring circuitry. The outer shield is directly connected to the high voltage terminal of the accelerating voltage supply while the inner shield is at the local ground reference of the emission source and associated components. The current between the concentric shields is measured, converted to a proportional voltage signal, compared with the reference voltage, and applied to a field strength controlling electrode in the vicinity of the emission source to modulate the emission and to maintain a constant beam current.

Abstract translation: 用于电子或正离子发射的场发射枪，其中源和样本之间的射束电流在围绕枪，其电源和测量电路的两个同心屏蔽之间的加速电压电位处被测量。 外部屏蔽层直接连接到加速电压源的高压端子，同时内部屏蔽层位于发射源和相关部件的局部接地参考。 测量同心屏蔽之间的电流，与参考电压相比转换成比例电压信号，并将其施加到发射源附近的场强控制电极，以调制发射并保持恒定的射束电流。