公开(公告)号：US11011486B1

公开(公告)日：2021-05-18

申请号：US16675200

申请日：2019-11-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L23/52 ,  H01L23/00 ,  H01L25/065

Abstract: A semiconductor structure is disclosed, including a substrate, an insulating layer on the substrate, a barrier layer on the insulating layer, a bonding dielectric layer on the barrier layer, and a bonding pad extending through the insulating layer, the barrier layer and the bonding dielectric layer. A top surface of the bonding pad exposed from the bonding dielectric layer for bonding to another bonding pad on another substrate. A liner on a bottom surface of the bonding pad directly contacts the substrate.

公开(公告)号：US11011430B2

公开(公告)日：2021-05-18

申请号：US16726201

申请日：2019-12-23

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Zhi-Cheng Lee ,  Kai-Lin Lee ,  Wei-Jen Chen

IPC: H01L21/8234 ,  H01L27/088 ,  H01L21/8238 ,  H01L27/12 ,  H01L27/092 ,  H01L27/108 ,  H01L29/06 ,  H01L21/02 ,  H01L29/66

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a first fin-shaped structure on the first region; forming a first gate structure and a second gate structure on the first fin-shaped structure; using a patterned mask to remove the first gate structure and part of the first fin-shaped structure to form a first trench; and forming a first dielectric layer in the first trench to form a first single diffusion break (SDB) structure and around the second gate structure.

公开(公告)号：US20210134981A1

公开(公告)日：2021-05-06

申请号：US16701051

申请日：2019-12-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Zhi-Cheng Lee ,  Wei-Jen Chen ,  Kai-Lin Lee

IPC: H01L29/66

Abstract: A method of fabricating a metal gate transistor includes providing a substrate. An interlayer dielectric layer covers the substrate. A dummy gate is embedded in the interlayer dielectric layer. A high-k dielectric layer is disposed between the dummy gate and the substrate. Later, the dummy gate is removed to form a trench, and the high-k dielectric layer is exposed through the trench. After the dummy gate is removed, an ion implantation process is performed to implant fluoride ions into the high-k dielectric layer. Finally, after the ion implantation process, a metal gate is formed to fill in the trench.

公开(公告)号：US20210125927A1

公开(公告)日：2021-04-29

申请号：US16695028

申请日：2019-11-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shih-Cheng Chen ,  Li-Hsuan Ho ,  Tsuo-Wen Lu ,  Shih-Hao Liang ,  Tsung-Hsun Wu ,  Po-Jen Chuang ,  Chi-Mao Hsu

IPC: H01L23/535 ,  H01L27/092 ,  H01L23/528 ,  H01L29/49 ,  H01L29/66 ,  H01L21/28 ,  H01L21/8238

Abstract: A semiconductor device includes a substrate having a NMOS region and a PMOS region; a gate structure extending along a first direction from the NMOS region to the PMOS region on the substrate; and a first contact plug landing directly on the gate structure closer to the PMOS region from a boundary separating the NMOS region and the PMOS region. Preferably, the semiconductor device further includes a first source/drain region extending along a second direction adjacent to two sides of the gate structure on the NMOS region and a second source/drain region extending along the second direction adjacent to two sides of the gate structure on the PMOS region.

公开(公告)号：US10991873B2

公开(公告)日：2021-04-27

申请号：US16166173

申请日：2018-10-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chen-Yi Weng ,  Jing-Yin Jhang

IPC: H01L43/02 ,  H01L43/12 ,  H01F10/32 ,  H01F41/34 ,  H01L23/528 ,  H01L21/768 ,  H01L27/22 ,  H01L23/522 ,  H01L43/10

Abstract: A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a liner on the MTJ; removing part of the liner to form a recess exposing the MTJ; and forming a conductive layer in the recess, wherein top surfaces of the conductive layer and the liner are coplanar. Preferably the MTJ further includes: a bottom electrode on the substrate, a fixed layer on the bottom electrode, and a top electrode on the fixed layer, in which the conductive layer and the top electrode are made of same material.

公开(公告)号：US10991806B2

公开(公告)日：2021-04-27

申请号：US16408214

申请日：2019-05-09

Applicant: United Microelectronics Corp.

Inventor： Chin-Chin Tsai

IPC: H01L29/423 ,  H01L29/792 ,  H01L21/02 ,  H01L21/762 ,  H01L29/66

Abstract: A structure of memory device is provided. The structure of memory device includes a first gate structure, disposed on a substrate, wherein the first gate structure is for storing charges. In addition, a second gate structure is disposed on the substrate. An insulating layer is in contact between the first gate structure and the second gate structure. An isolation structure integrated with the insulating layer is between the first gate structure and the second gate structure and at a top portion of the first gate structure and the second gate structure. The isolation structure provides an isolation distance between the first gate structure and the second gate structure.

公开(公告)号：US20210119014A1

公开(公告)日：2021-04-22

申请号：US17117090

申请日：2020-12-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shih-Yin Hsiao ,  Kuan-Liang Liu ,  Ching-Chung Yang ,  Ping-Hung Chiang

IPC: H01L29/66 ,  H01L29/423 ,  H01L29/78 ,  H01L29/06

Abstract: A high voltage semiconductor device and a manufacturing method thereof are provided in the present invention. A recess is formed in a semiconductor substrate, and a gate dielectric layer and a main gate structure are formed in the recess. Therefore, the high voltage semiconductor device formed by the manufacturing method of the present invention may include the main gate structure lower than a top surface of an isolation structure formed in the semiconductor substrate. Problems about integrated manufacturing processes of the high voltage semiconductor device and other kinds of semiconductor devices when the gate structure is relatively high because of the thicker gate dielectric layer required in the high voltage semiconductor device may be improved accordingly.

公开(公告)号：US20210118507A1

公开(公告)日：2021-04-22

申请号：US17114373

申请日：2020-12-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Ching-Cheng Lung ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Chun-Yen Tseng

IPC: G11C15/04 ,  H01L27/02 ,  H01L27/11

Abstract: A layout pattern of a two-port ternary content addressable memory (TCAM) includes a first storage unit, a second storage unit, a first comparison circuit and a second comparison circuit. The first comparison circuit and the second comparison circuit are positioned in a first side area of a side and a second side area of another side of the layout pattern, respectively. The first storage unit and the second storage unit are positioned in a first middle area and a second middle area between the first side area and the second side area, respectively. The first storage unit is connected to the first comparison circuit through a first gate structure and connected to the second comparison circuit through a second gate structure. The second storage unit is connected to the first comparison circuit through a third gate structure and connected to the second comparison circuit through a fourth gate structure.

公开(公告)号：US10985166B2

公开(公告)日：2021-04-20

申请号：US16177348

申请日：2018-10-31

Applicant: UNITED MICROELECTRONICS CORP. ,  Fujian Jinhua Integrated Circuit Co., Ltd.

Inventor： Hsu-Yang Wang ,  Ping-Cheng Hsu ,  Shih-Fang Tzou ,  Chin-Lung Lin ,  Yi-Hsiu Lee ,  Koji Taniguchi ,  Harn-Jiunn Wang ,  Tsung-Ying Tsai

IPC: H01L27/108 ,  H01L21/308 ,  H01L21/762

Abstract: A method for forming a memory device is disclosed, including providing a substrate, forming an isolation structure and plural active regions in the substrate, forming a plurality of island features on the substrate respectively covering two of the terminal portions of the active regions, using the island features as an etching mask to etch the substrate to perform a first etching process to define a first recessed region and plural island structures on the substrate. The island structures respectively comprise the two terminal portions of the active regions and the first recessed region comprises the central portions of the active regions.

公开(公告)号：US10978556B2

公开(公告)日：2021-04-13

申请号：US16280047

申请日：2019-02-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wanxun He ,  Su Xing

IPC: H01L29/06 ,  H01L29/78 ,  H01L29/165 ,  H01L21/28 ,  H01L21/285 ,  H01L21/768 ,  H01L29/08 ,  H01L29/16 ,  H01L29/161 ,  H01L29/24 ,  H01L29/45 ,  H01L29/66 ,  H01L29/51 ,  H01L29/10 ,  H01L29/49

Abstract: A method for fabricating semiconductor device includes the steps of first providing a substrate, forming a gate structure on the substrate, forming a hard mask on the substrate and the gate structure, patterning the hard mask to form trenches exposing part of the substrate, and forming raised epitaxial layers in the trenches. Preferably, the gate structure is extended along a first direction on the substrate and the raised epitaxial layers are elongated along a second direction adjacent to two sides of the gate structure.