OPTICAL WAVEGUIDE PASSIVATION FOR MOISTURE PROTECTION

    公开(公告)号:US20220011507A1

    公开(公告)日:2022-01-13

    申请号:US17373576

    申请日:2021-07-12

    Abstract: In part, in one aspect, the disclosure relates to a method for passivating a waveguide of an optical circuit. The method includes etching a suspended waveguide in the optical circuit; the suspended waveguide having a top surface, a bottom surface, and side surfaces; and covering the top surface and side surfaces of the suspended waveguide with a passivation coating having a thickness that ranges from between about 10 nm to about 20 nm. In one embodiment, the method further includes removing one or more coatings from a portion of the optical circuit. The disclosure also relates to various passivated optical silicon circuit embodiments.

    Suspended cantilever waveguide
    58.
    发明授权

    公开(公告)号:US11221447B1

    公开(公告)日:2022-01-11

    申请号:US16794759

    申请日:2020-02-19

    Abstract: Cantilevered waveguides suspended above an air cavity in an underlying substrate are described. The waveguide is formed by patterning a waveguide layer in some embodiments, and the air cavity is formed by etching the substrate beneath the waveguide. The topside of the air cavity may be sealed by filling the openings used to etch the cavity with a sealant, such as optical epoxy. In some embodiments, the waveguide is a facet coupler, positioned at a chip facet.

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