公开(公告)号：US5718339A

公开(公告)日：1998-02-17

申请号：US468007

申请日：1995-06-06

申请人： Daniel J. Woodruff

发明人： Daniel J. Woodruff

IPC分类号： G11B15/68 ,  G11B17/26 ,  A47F5/00

CPC分类号： G11B15/688 ,  G11B17/26

摘要： A cartridge rack (60) houses a plurality of data storage cartridges (62) in an automated cartridge library (30). The rack comprises four sidewalls connected to define a rectangular perimeter of the cartridge rack, a backwall, and a plurality of ribs bridging opposite ones of the sidewalls, thereby forming a plurality of cartridge-receiving slots. Ramps (164, 120) are formed on an exterior surface of at least one of the side walls. An orientation fin (172) orthogonally extends from an underside of the backwall. At least one of the ramps (164) is a scalene triangularly-shaped crown ramp which is centrally located between opposing ones of two other of the sidewalls. Others of the ramps are feet ramps (120) formed on an opposite one of the sidewalls from the sidewall upon which the crown ramp (164) is formed. Apparatus is also provided mounting a data cartridge (60) in the cartridge library (30), including a rack mount (110) having a base plate (112). The base plate (120) has an elongated orientation slot (170) formed therein through which the orientation fin (172) extends when the cartridge rack is properly mounted on the base plate of the rack mount. The base plate (120) is also provided with stabilization flanges (130) for guiding the rack (60) into the base plate (112) and maintaining the rack (60) therein.

公开(公告)号：US5607275A

公开(公告)日：1997-03-04

申请号：US337621

申请日：1994-11-10

申请人： Daniel J. Woodruff ,  Daniel W. Hoekstra ,  Christopher L. Scott ,  Thomas W. Volckhausen ,  Thomas J. Studebaker ,  Bruce L. Younglove

发明人： Daniel J. Woodruff ,  Daniel W. Hoekstra ,  Christopher L. Scott ,  Thomas W. Volckhausen ,  Thomas J. Studebaker ,  Bruce L. Younglove

IPC分类号： G11B15/68 ,  G11B17/26

CPC分类号： G11B15/688 ,  G11B17/26

摘要： An automated library (30) handles a plurality of data storage units (e.g., data cartridges) stored therein. The library comprises an octagonal drum-like member (34) mounted above a library frame (32). The drum (34) has a plurality of faces on an exterior periphery thereof, each for selectively accommodating a cartridge rack (62). Each face of the drum has a rack mount (110) selectively attachable thereto. The library further comprises a rack (38) for accommodating a plurality of modular I/O drive-containing drawers (64). A picker device (80) engages and transports data cartridges between drives (320), an active rack (60), and an entry/exit port transport (500). The entry/exit transport device (500) transports a selected cartridge between a predetermined position in the cabinet and the entry/exit port (100). The entry/exit transport device (500) is both rotatable and extensible. A picker move method and library inventory method are also provided.

摘要翻译： 自动库（30）处理存储在其中的多个数据存储单元（例如，数据盒）。 该图书馆包括安装在图书馆框架（32）上方的八角形鼓状构件（34）。 鼓（34）在其外周上具有多个面，每个面用于选择性地容纳盒架（62）。 滚筒的每个表面具有可选择性地附接到其上的机架安装件（110）。 库还包括用于容纳多个模块化I / O驱动器的抽屉（64）的机架（38）。 拾取装置（80）在驱动器（320），活动支架（60）和入口/出口端口输送装置（500）之间啮合并传送数据盒。 入口/出口传送设备（500）在机柜中的预定位置和入口/出口（100）之间传送所选择的盒。 入口/出口运输装置（500）既可旋转又可延伸。 还提供了选择器移动方法和图书馆库存方法。

公开(公告)号：US5498116A

公开(公告)日：1996-03-12

申请号：US112259

申请日：1993-08-26

申请人： Daniel J. Woodruff ,  Daniel W. Hoekstra ,  Christopher L. Scott ,  Thomas W. Volckhausen ,  Thomas J. Studebaker ,  Bruce L. Younglove

发明人： Daniel J. Woodruff ,  Daniel W. Hoekstra ,  Christopher L. Scott ,  Thomas W. Volckhausen ,  Thomas J. Studebaker ,  Bruce L. Younglove

IPC分类号： G11B15/68 ,  G11B17/26

CPC分类号： G11B15/688 ,  G11B17/26

摘要： An automated library (30) for handling a plurality of data storage units comprises a frame (32), an I/O drive (320); a unit engagement device (80) which transports data storage units between the drive and the storage receptacle. A cabinet substantially encloses the frame and has an entry/exit port (100) formed therein. The library is further provided with an entry/exit transport device (500) which pivots 90 degrees about an axis perpendicular to a unit orientation plane to transport a selected data storage unit between the entry/exit port and a predetermined position in the cabinet. The entry/exit transport device has a cartridge engagement portion with two edges (574, 576), a first of the edges being configured to load/unload the selected data storage unit at the entry/exit port and a second of the edges being configured to load/unload the selected data storage cartridge at the predetermined position. The first and second edges are orthogonal to one another in the entry/exit transport plane.

摘要翻译： 用于处理多个数据存储单元的自动库（30）包括帧（32），I / O驱动器（320）; 单元接合装置（80），其在驱动器和存储容器之间传送数据存储单元。 机柜基本上围绕框架并且具有形成在其中的进/出口（100）。 图书馆还设置有一个入口/出口传送装置（500），该入口/出口传送装置围绕垂直于单元定向平面的轴线枢转90度，以便在入口/出口与机柜中的预定位置之间输送选定的数据存储单元。 入口/出口传送设备具有带有两个边缘（574,576）的盒接合部分，第一边缘被配置为在入口/出口处加载/卸载所选择的数据存储单元，并且第二边缘被配置 以在预定位置加载/卸载所选择的数据存储盒。 第一和第二边缘在入口/出口传送平面中彼此正交。

公开(公告)号：US20110042224A1

公开(公告)日：2011-02-24

申请号：US12917997

申请日：2010-11-02

申请人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff

发明人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff

IPC分类号： H01L21/02 ,  C25D5/02

CPC分类号： C25D7/12 ,  C25D7/123 ,  C25D17/001 ,  C25D17/10 ,  C25F3/30

摘要： Apparatus and methods for electrochemically processing microfeature wafers. The apparatus can have a vessel including a processing zone in which a microfeature wafer is positioned for electrochemical processing. The apparatus further includes at least one counter electrode in the vessel that can operate as an anode or a cathode depending upon the particular plating or electropolishing application. The apparatus further includes a supplementary electrode and a supplementary virtual electrode. The supplementary electrode is configured to operate independently from the counter electrode in the vessel, and it can be a thief electrode and/or a de-plating electrode depending upon the type of process. The supplementary electrode can further be used as another counter electrode during a portion of a plating cycle or polishing cycle. The supplementary virtual electrode is located in the processing zone, and it is configured to counteract an electric field offset relative to the wafer associated with an offset between the wafer and the counter electrode in the vessel when the wafer is in the processing zone.

摘要翻译： 用于电化学处理微片的装置和方法。 该装置可以具有容器，该容器包括处理区域，微处理区域定位用于电化学处理。 该装置还包括容器中的至少一个对电极，其可以根据具体的电镀或电解抛光应用而作为阳极或阴极操作。 该装置还包括辅助电极和辅助虚拟电极。 辅助电极被配置为独立于容器中的对电极操作，并且其可以是根据工艺类型的小电极和/或去镀电极。 在电镀循环或抛光循环的一部分期间，辅助电极可以进一步用作另一个对电极。 辅助虚拟电极位于处理区域中，并且其被配置为当晶片处于处理区域时，相对于与晶片和对置电极之间的偏移相关联的晶片抵消相对于晶片的电场偏移。

公开(公告)号：US07842173B2

公开(公告)日：2010-11-30

申请号：US11699768

申请日：2007-01-29

申请人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff

发明人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff

IPC分类号： C25B9/00

CPC分类号： C25D7/12 ,  C25D7/123 ,  C25D17/001 ,  C25D17/10 ,  C25F3/30

摘要： Apparatus and methods for electrochemically processing microfeature wafers. The apparatus can have a vessel including a processing zone in which a microfeature wafer is positioned for electrochemical processing. The apparatus further includes at least one counter electrode in the vessel that can operate as an anode or a cathode depending upon the particular plating or electropolishing application. The apparatus further includes a supplementary electrode and a supplementary virtual electrode. The supplementary electrode is configured to operate independently from the counter electrode in the vessel, and it can be a thief electrode and/or a de-plating electrode depending upon the type of process. The supplementary electrode can further be used as another counter electrode during a portion of a plating cycle or polishing cycle. The supplementary virtual electrode is located in the processing zone, and it is configured to counteract an electric field offset relative to the wafer associated with an offset between the wafer and the counter electrode in the vessel when the wafer is in the processing zone.

摘要翻译： 用于电化学处理微片的装置和方法。 该装置可以具有容器，该容器包括处理区域，微处理区域定位用于电化学处理。 该装置还包括容器中的至少一个对电极，其可以根据具体的电镀或电解抛光应用而作为阳极或阴极操作。 该装置还包括辅助电极和辅助虚拟电极。 辅助电极被配置为独立于容器中的对电极操作，并且其可以是根据工艺类型的小电极和/或去镀电极。 在电镀循环或抛光循环的一部分期间，辅助电极可以进一步用作另一个对电极。 辅助虚拟电极位于处理区域中，并且其被配置为当晶片处于处理区域时，相对于与晶片和对置电极之间的偏移相关联的晶片抵消相对于晶片的电场偏移。

公开(公告)号：US07393439B2

公开(公告)日：2008-07-01

申请号：US10733807

申请日：2003-12-11

申请人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

发明人： Paul R. McHugh ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Nolan Zimmerman ,  James J. Erickson

IPC分类号： C25D17/16 ,  C25B9/18 ,  C25C7/00

CPC分类号： C25D17/001 ,  C25D17/02 ,  C25D21/10

摘要： Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.

摘要翻译： 公开了具有配准系统的安装模块的工具。 安装模块包括用于精确定位处理室的定位元件和将工件移至和离开处理室的输送系统。 模块的定位元件之间的相对位置是固定的，使得当处理室被移除并被另一处理室更换时，输送系统不需要重新校准。 处理室包括用于在工件的处理表面处搅拌处理液体的桨装置。 处理室中的桨装置，处理室和电极被配置为减少由工件表面上的桨形成的电阴影的可能性，并且当桨叶往复运动时考虑对电场的三维效应 相对于工件。

公开(公告)号：US07313462B2

公开(公告)日：2007-12-25

申请号：US10860385

申请日：2004-06-03

申请人： Daniel J. Woodruff ,  David P. Mattson ,  James J. Erickson ,  Matthew C. Egloff

发明人： Daniel J. Woodruff ,  David P. Mattson ,  James J. Erickson ,  Matthew C. Egloff

IPC分类号： G06F19/00

CPC分类号： H01L21/6723 ,  B01D61/425 ,  C25D17/00 ,  H01L21/67005 ,  H01L21/6719 ,  H01L21/67742 ,  H01L21/68707

摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。

公开(公告)号：US07074246B2

公开(公告)日：2006-07-11

申请号：US10157762

申请日：2002-05-28

申请人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

发明人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

IPC分类号： H01L21/00 ,  H01L21/64

CPC分类号： H01L21/67173 ,  C25D7/12 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/6723 ,  H01L21/67742 ,  Y10S414/141 ,  Y10T29/40 ,  Y10T29/41

摘要： The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool may have a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.

公开(公告)号：US06752584B2

公开(公告)日：2004-06-22

申请号：US09875300

申请日：2001-06-05

申请人： Daniel J. Woodruff ,  Randy Harris

发明人： Daniel J. Woodruff ,  Randy Harris

IPC分类号： B66C2300

CPC分类号： B25J5/02 ,  B25J9/042 ,  B25J18/02 ,  H01L21/67173 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10T74/20317

摘要： Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm.

摘要翻译： 用于处理微电子工件的转移装置，用于处理微电子工件的装置，以及用于制造和使用这种转移装置的方法。 传送装置的一个实施例包括传送单元，其构造成沿着线性轨道和由传送单元承载的升降组件移动。 传送装置还可以包括臂组件，其具有由提升组件承载的臂致动器，以沿着提升路径移动，以及由臂致动器承载的臂围绕提升路径旋转。 臂可以包括从提升路径的一侧突出的第一延伸部和从提升路径的另一侧突出的第二延伸部。 手臂致动器可以围绕提升路径旋转手臂。 转移装置还可以包括第一末端执行器和第二末端执行器。 第一端部执行器可旋转地联接到臂的第一部分以围绕第一旋转轴线旋转，并且第二端部执行器可旋转地联接到臂的第二延伸部以围绕第二旋转轴线旋转。 第一和第二旋转轴线可以大致平行于提升路径，其本身可以是大致垂直的，并且第一和第二端部执行器可以相对于臂处于不同的高度。

公开(公告)号：US06654122B1

公开(公告)日：2003-11-25

申请号：US09618707

申请日：2000-07-18

申请人： Kyle Hanson ,  Mark Dix ,  Vladimir Zila ,  Daniel J. Woodruff

发明人： Kyle Hanson ,  Mark Dix ,  Vladimir Zila ,  Daniel J. Woodruff

IPC分类号： G01B1114

CPC分类号： H01L21/67259 ,  H01L21/67173 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/67781

摘要： A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.