Abstract:
A method of making a hole in a substrate having a first surface and a second surface opposing the first surface and on which the hole is formed, includes forming a first depression in which the first depression is formed at the first surface of the substrate; forming a film in which the film is formed at the first depression; forming a second depression in which the second depression is formed at a location opposing the first depression of the second surface; and forming a hole in which the film is removed, the first depression and the second depression communicate with each other and thereby the hole is formed, wherein the second depression includes a plurality of straight lines and arcs in a plan view.
Abstract:
A nozzle plate manufacturing method that offers excellent protection against discharge liquid, and that enables a nozzle plate having high nozzle-hole accuracy to be manufactured with good yield. The invention also provides a nozzle plate, a droplet discharge head manufacturing method, and a droplet discharge head.
Abstract:
A network device of is a network device that transfers frames by repeating, in a constant cycle, a reserved transfer interval and a free transfer interval. The network device includes a transmission port, a cycle timer, a mode switching control unit that monitors a transfer state of the transmission port and selects a store-and-forward system when the transmission port is in the transfer process and selects a cut-through system when the transmission port is not in the transfer process, and a transfer prohibition control unit that selects the cut-through system as a transfer system when a non-reserved frame is transmitted and switches a transfer method of the non-reserved frame to the store-and-forward system when a reserved transfer interval is established, with reference to the cycle timer.
Abstract:
In a network system of this invention including a plurality of network devices that transfer frames by repeating, in a constant cycle, a reserved transfer interval that is a time band, in which a frame is transferred with a reservation and a free transfer interval that is a time band, in which a frame is freely transferred, a relay network device that links a first network device that is a transmission source of a frame and a second network device that is a transmission destination of the frame and the first network device execute a reservation processing such that the same time band within the reserved transfer interval is reserved and transfer the frame from the first network device to the second network device on the basis of the reservation result.
Abstract:
Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.
Abstract:
Producing a ceramic coating member for a semiconductor processing apparatus with a purpose of improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment and as a means for solution, forming a porous layer by irradiating an oxide of an element in Group IIIa of the Periodic Table to be coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and further forming a secondary recrystallized layer of the oxide on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.
Abstract:
A network management apparatus in a mobile communication network holds a communication quality index in a normal operation and periodically receives input of a communication quality measurement result from a radio base station control apparatus. When a connection failure count f with respect to a connection request count a of each radio cell is obtained as a measurement result, letting p0 be the call loss rate in the normal operation, an upper probability B of a binomial distribution representing the connection failure count becomes larger than f is obtained (step 524). The negative logarithm of the upper probability B is obtained as the score of the degree of abnormality (step 525). Anomaly of communication is detected when the score of the degree of abnormality exceeds a predetermined threshold value (steps 526 and 527). After that, maintenance control is executed in accordance with the calculated score of the degree of abnormality, thereby appropriately avoiding a fault of the communication system. This allows to calculate the degree of abnormality from the measurement result of the communication quality index in the mobile communication network in consideration of the statistical reliability and execute maintenance corresponding to the degree of abnormality.
Abstract:
A two-way communication circuit is connected to one end of a cable performing half-duplex communication. The two-way communication circuit includes a controller register storing a control signal including switch indication information switching a transmission direction and a reception direction; a communication controller managing timing depending on the control signal stored in the controller register; and a transmission and reception circuit periodically switching the transmission direction and the reception direction according to an indication by the communication controller depending on the control signal.
Abstract:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Abstract:
For sequentially input data string, the outliner and the change point are detected through calculation of the outlier score and the change point score by combining a time-series model learning device to learn the generation mechanism of the read data series as the time-series statistic model, a score calculator to calculate the outlier score of each data based on the time-series model parameter and the input data, a moving average calculator to calculate the moving average of the outlier score, a time-series model learning device to learn the generation mechanism of the moving average series as the time-series statistic model and the above score calculator that further calculates the outlier score of the moving average based on the moving average of the outlier score and outputs the result as the change point score of the original data.