摘要:
A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要:
A method for manufacturing magnetic recording media is provided, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. The method includes the steps of: depositing a first filling material over a workpiece to cover recording elements formed as convex portions of the concavo-convex pattern, and to fill at least part of a concave portion; depositing a detection material over the first filling material; depositing a second filling material over the detection material; and irradiating a surface of the workpiece with a process gas to flatten the surface. In the flattening step, a component of the detection material removed from and flying off the workpiece is detected to stop the irradiation with the process gas based on a result of detecting the component of the detection material.
摘要:
A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要:
A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
摘要:
A magnetic recording medium is provided which includes a recording layer formed in a concavo-convex pattern including recording elements formed as convex portions, provides a good flying performance of a magnetic head, and has high reliability. A magnetic recording and reproducing apparatus including that magnetic recording medium and a manufacturing method of that magnetic recording medium are also provided. The magnetic recording medium includes: the recording layer formed in a predetermined concavo-convex pattern over a substrate, the recording elements being formed as convex portions of the concavo-convex pattern; filling elements with which concave portions between the recording elements are filled; a conductive film which has a smaller electric resistivity than the filling elements and is formed over the filling elements; and a protective layer which covers the recording elements and the filling elements and is in contact with an upper surface of the conductive film.
摘要:
To provide a dry etching method and the like that can precisely process regions targeted for etching of objects to be processed using reactive ion etching that uses carbon monoxide gas, to which a nitrogen-containing compound gas is added, as a reactive gas. A material containing silicon and tantalum is used to form a first mask layer 18 that covers a magnetic thin film layer 16.
摘要:
Liquid nitrogen is filled in a low temperature vessel; an ejector that sucks liquid nitrogen by blowing a cooling agent (liquid or gas) such as low temperature helium gas or liquid helium of pressure higher than in the space within the vessel is disposed in the vessel; the liquid nitrogen blown with the cooling agent is cooled by the cooling agent to become fine particles of solid nitrogen which fall down; and gas in a space of the vessel is discharged out of the vessel so as to maintain the pressure of the space higher than the atmospheric pressure. A gaseous phase of liquid nitrogen in an adiabatic vessel is depressurized to vaporize nitrogen in a liquid phase so that a temperature of the nitrogen is reached to the triple point of nitrogen by lowering temperature thereby and solid nitrogen is produced by keeping at the triple point, and that the produced solid nitrogen is transformed into slush by stirring the content of the adiabatic vessel. In a method for cooling a super conductive body in which a material showing a state of super conductance in the vicinity of the temperature of liquid nitrogen or of the temperature liquid nitrogen and solid nitrogen coexist is used, a method for cooling a super conductive body characterized in that the super conductive body is immersed in slush nitrogen held in an adiabatic vessel, and that the body is contacted with slush nitrogen to cool.
摘要:
A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要:
In an automatic deboning apparatus, an X-ray irradiation unit is provided on the upstream side of a meat cutting unit in a direction of transport of the work. In the X-ray irradiation unit, an X-ray r is irradiated to a work w from an X-ray irradiation device, an image of the X-ray transmitted through the work is subjected to image processing in an image analysis process unit, and two-dimensional position coordinates of a bone part are thereby obtained. In the meat cutting unit, three robot arms are provided with cutting blades. A storage unit of a controller stores three-dimensional position coordinates of a target operation course of each of the cutting blades. The target operation course is corrected on the basis of the two-dimensional position coordinates of the bone part obtained for each work in the image analysis process unit.
摘要:
Disclosed herein is a lens barrel including a lens having a reference portion, a barrel body having a supporting portion adapted to come into contact with the reference portion of the lens, and a lens holding member for holding the lens so that the lens is sandwiched between the lens holding member and the barrel body in the condition where the reference portion of the lens is biased against the supporting portion of the barrel body.