MASK FOR CRYSTALLIZING POLYSILICON AND A METHOD FOR FORMING THIN FILM TRANSISTOR USING THE MASK
    51.
    发明申请
    MASK FOR CRYSTALLIZING POLYSILICON AND A METHOD FOR FORMING THIN FILM TRANSISTOR USING THE MASK 有权
    用于晶体结晶的掩模和使用掩模形成薄膜晶体管的方法

    公开(公告)号:US20070187846A1

    公开(公告)日:2007-08-16

    申请号:US11737245

    申请日:2007-04-19

    IPC分类号: H01L21/027

    摘要: A mask for forming polysilicon has a first slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, a second slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while baring the same width, a third slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, and a fourth slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width. The slit patterns arranged at the first to fourth slit regions are sequentially enlarged in width in the horizontal direction in multiple proportion to the width d of the slit pattern at the first slit region. The centers of the slit patterns arranged at the first to fourth slit regions in the horizontal direction are placed at the same line. The slit patterns arranged at the respective slit regions in the vertical direction are spaced from each other with a distance 8*d. Alternatively, the first to fourth slit regions may be arranged in reverse order, or in the vertical direction.

    摘要翻译: 用于形成多晶硅的掩模具有第一狭缝区域,其中垂直方向上布置多个水平狭缝图案,同时承载相同的宽度;第二狭缝区域,其中沿垂直方向布置多个水平狭缝图案,同时使其相同 宽度,在垂直方向上布置多个水平狭缝图案同时具有相同宽度的第三狭缝区域,以及沿垂直方向布置多个水平狭缝图案的第四狭缝区域,同时承载相同的宽度。 布置在第一至第四狭缝区域的狭缝图案在第一狭缝区域上与狭缝图案的宽度d成一定比例地沿水平方向的宽度依次增大。 沿水平方向布置在第一至第四狭缝区域处的狭缝图案的中心位于相同的线上。 在垂直方向的各个狭缝区域上排列的狭缝图案间隔8 * d。 或者,第一至第四狭缝区域可以以相反的顺序或在垂直方向上布置。

    Mask for polycrystallization and method of manufacturing thin film transistor using polycrystallization mask
    54.
    发明授权
    Mask for polycrystallization and method of manufacturing thin film transistor using polycrystallization mask 有权
    多结晶掩模和使用多结晶掩模制造薄膜晶体管的方法

    公开(公告)号:US07011911B2

    公开(公告)日:2006-03-14

    申请号:US10663081

    申请日:2003-09-16

    IPC分类号: G03F9/00

    CPC分类号: H01L29/66757 H01L29/78675

    摘要: In a method of manufacturing a thin film transistor according to the present invention, an amorphous silicon thin film is firstly formed on an insulating substrate and a planarization layer is formed thereon. Thereafter, the amorphous silicon thin film is crystallized by a solidification process using a laser-irradiation to form a polysilicon thin film. Next, the polysilicon thin film and the planarization layer are patterned to form a semiconductor layer, and a gate insulating layer covering the semiconductor layer is formed. Then, a gate electrode is formed on the gate insulating layer opposite the semiconductor layer. Next, impurities are implanted into the semiconductor layer to form a source region and a drain region opposite each other with respect to the gate electrode, and a source electrode and a drain electrode electrically connected to the source region and the drain region, respectively, are formed.

    摘要翻译: 在本发明的薄膜晶体管的制造方法中,首先在绝缘基板上形成非晶硅薄膜,在其上形成平坦化层。 此后,通过使用激光照射的固化工艺使非晶硅薄膜结晶,形成多晶硅薄膜。 接下来,对多晶硅薄膜和平坦化层进行构图以形成半导体层,并且形成覆盖半导体层的栅极绝缘层。 然后,在与半导体层相对的栅极绝缘层上形成栅电极。 接下来,将杂质注入到半导体层中以形成相对于栅极彼此相对的源极区域和漏极区域,并且分别与源极区域和漏极区域电连接的源极电极和漏极电极是 形成。

    Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask
    56.
    发明申请
    Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask 有权
    用于结晶多晶硅的掩模和使用掩模形成薄膜晶体管的方法

    公开(公告)号:US20050079693A1

    公开(公告)日:2005-04-14

    申请号:US10495673

    申请日:2002-01-24

    摘要: A mask for forming polysilicon has a first slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, a second slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, a third slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, and a fourth slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width. The slit patterns arranged at the first to fourth slit regions are sequentially enlarged in width in the horizontal direction in multiple proportion to the width d of the slit pattern at the first slit region. The centers of the slit patterns arranged at the first to fourth slit regions in the horizontal direction are placed at the same line. The slit patterns arranged at the respective slit regions in the vertical direction are spaced from each other with a distance of 8*d. Alternatively, the first to fourth slit regions may be arranged in reverse order, or in the vertical direction.

    摘要翻译: 用于形成多晶硅的掩模具有第一狭缝区域,其中垂直方向上布置多个水平狭缝图案,同时承载相同的宽度,在垂直方向上布置多个水平狭缝图案的第二狭缝区域,同时承载相同的宽度 宽度,在垂直方向上布置多个水平狭缝图案同时具有相同宽度的第三狭缝区域,以及沿垂直方向布置多个水平狭缝图案的第四狭缝区域,同时承载相同的宽度。 布置在第一至第四狭缝区域的狭缝图案在第一狭缝区域上与狭缝图案的宽度d成一定比例地沿水平方向的宽度依次增大。 沿水平方向布置在第一至第四狭缝区域处的狭缝图案的中心位于相同的线上。 在垂直方向的各个狭缝区域上排列的狭缝图案彼此间隔8 * d。 或者,第一至第四狭缝区域可以以相反的顺序或在垂直方向上布置。

    Method for controlling interference
    57.
    发明授权
    Method for controlling interference 有权
    控制干扰的方法

    公开(公告)号:US08717914B2

    公开(公告)日:2014-05-06

    申请号:US12770210

    申请日:2010-04-29

    IPC分类号: H04L12/26 H04L12/28 H04B7/00

    摘要: A method for controlling interference between a plurality of neighboring base stations for a terminal by a serving base station of the terminal in a communication system is provided. The method includes receiving interference amount information on a first region of a downlink frame from the terminal, determining an interference amount estimate for the first region based on the received interference amount information, comparing the determined interference amount estimate with an interference amount tolerance for the first region; and transmitting an interference indicator requesting reduction in transmission power for the first region to the plurality of neighboring base stations when the interference amount estimate exceeds the interference amount tolerance.

    摘要翻译: 提供了一种用于在通信系统中控制终端的服务基站的终端的多个相邻基站之间的干扰的方法。 该方法包括从终端接收关于下行链路帧的第一区域的干扰量信息,基于接收到的干扰量信息确定第一区域的干扰量估计,将确定的干扰量估计与第一区域的干扰量容限进行比较 地区; 以及当所述干扰量估计超过所述干扰量容差时,向所述多个相邻基站发送请求减少所述第一区域的发射功率的干扰指示符。