公开(公告)号：US20080105370A1

公开(公告)日：2008-05-08

申请号：US11300201

申请日：2005-12-14

申请人： Marc Schaepkens ,  Hua Wang ,  Christian Maria Anton Heller ,  Kevin Warner Flanagan ,  Paul Alan McConnelee

发明人： Marc Schaepkens ,  Hua Wang ,  Christian Maria Anton Heller ,  Kevin Warner Flanagan ,  Paul Alan McConnelee

IPC分类号： B32B37/00 ,  B29C65/00

CPC分类号： H01L51/5256 ,  Y10T428/31504 ,  Y10T428/31507 ,  Y10T428/31511 ,  Y10T428/31551 ,  Y10T428/31678 ,  Y10T428/31721 ,  Y10T428/31725 ,  Y10T428/31931 ,  Y10T428/31935 ,  Y10T428/31938

摘要： A composite article comprises two polymeric substrate layers, each of which has at least a diffusion-inhibiting barrier on one of the surfaces. The diffusion-inhibiting barriers are disposed such that they face each other within the composite articles. Electronic devices are disposed on such composite articles to reduce the rate of diffusion of chemical species in the environment into the devices.

摘要翻译： 复合制品包括两个聚合物基底层，每个基底层在其中一个表面上至少具有扩散抑制屏障。 扩散抑制屏障被布置成使得它们在复合制品内相互面对。 电子设备被布置在这样的复合制品上以降低化学物质在环境中扩散到装置中的速度。

公开(公告)号：US20080016684A1

公开(公告)日：2008-01-24

申请号：US11557905

申请日：2006-11-08

申请人： Benjamin J. Olechnowicz ,  David M. Rusinko ,  Wei Fan ,  Demetrius Sarigiannis ,  Marc Schaepkens ,  Douglas A. Longworth

发明人： Benjamin J. Olechnowicz ,  David M. Rusinko ,  Wei Fan ,  Demetrius Sarigiannis ,  Marc Schaepkens ,  Douglas A. Longworth

IPC分类号： H01R43/00

CPC分类号： H01L21/67103 ,  C03C3/062 ,  C03C4/20 ,  H01L21/6875 ,  H01L21/68757 ,  H01L21/68785 ,  Y10T29/53213

摘要： A wafer processing apparatus characterized by having corrosion resistant connections for its electrical connections, gas feed-through channels, recessed areas, raised areas, MESA, through-holes such as lift-pin holes, threaded bolt holes, blind holes, and the like, with the special configurations employing connectors and fillers having excellent chemical resistant properties and optimized CTEs, i.e., having a coefficient of thermal expansion (CTE) that closely matches the CTE of the base substrate layer, the electrode(s), as well as the CTE of coating layer. In one embodiment, a nickel plated molybdenum insert is employed.

摘要翻译： 一种晶片处理装置，其特征在于具有用于其电连接，气体馈通通道，凹陷区域，凸起区域，MESA，诸如提升针孔，螺纹孔，盲孔等通孔的耐腐蚀连接， 具有采用具有优异的耐化学性能和优化的CTE的连接器和填料的特殊构造，即具有与基底衬底层，电极以及CTE的CTE密切匹配的热膨胀系数（CTE） 的涂层。 在一个实施例中，使用镀镍的钼插入件。

公开(公告)号：US07112352B2

公开(公告)日：2006-09-26

申请号：US10626253

申请日：2003-07-23

申请人： Marc Schaepkens

发明人： Marc Schaepkens

IPC分类号： H05H1/24 ,  H01L21/31

CPC分类号： H01J37/32009 ,  C23C16/325 ,  C23C16/401 ,  C23C16/50

摘要： A method and apparatus for depositing a uniform coating on a large area, planar surface using an array of multiple plasma sources and a common reactant gas injector. The apparatus includes at least one array of a plurality of plasma sources, wherein each of the plurality of plasma sources includes a cathode, an anode, and an inlet for a non-reactive plasma source gas disposed in a plasma chamber, and a common reactant gas injector disposed in a deposition chamber that contains the substrate. The common reactant gas injector provides a uniform flow of at least one reactant gas to each of the multiple plasmas generated the multiple plasma sources through a single delivery system. The at least one reactant gas reacts with the plurality of plasmas to form a uniform coating on a substrate.

公开(公告)号：US20060181669A1

公开(公告)日：2006-08-17

申请号：US11398724

申请日：2006-04-06

申请人： Marc Schaepkens ,  Kevin Flanagan

发明人： Marc Schaepkens ,  Kevin Flanagan

IPC分类号： G02F1/1333

CPC分类号： H01L51/5268 ,  B82Y20/00 ,  B82Y30/00 ,  C23C16/30 ,  G02F1/133305 ,  G02F2201/50 ,  H01L51/5036 ,  H01L51/5253 ,  H01L2251/5338 ,  H01L2251/5346 ,  H01L2251/5369 ,  Y10T428/12021 ,  Y10T428/1321 ,  Y10T428/1352 ,  Y10T428/24802 ,  Y10T428/31667

摘要： A composite article comprises a substrate having at least a substrate surface and a graded-composition coating disposed on a substrate surface. The composition of the coating material varies substantially continuously across its thickness. The coating reduces the transmission rates of oxygen, water vapor, and other chemical species through the substrate such that the composite article can be used effectively as a diffusion barrier to protect chemically sensitive devices or materials. An organic light-emitting device incorporates such a composite article to provide an extended life thereto.

公开(公告)号：US20060001040A1

公开(公告)日：2006-01-05

申请号：US10988481

申请日：2004-11-15

申请人： Tae Kim ,  Min Yan ,  Christian Heller ,  Marc Schaepkens ,  Thomas Gorczyca ,  Paul Mc Connelee ,  Ahmet Erlat

发明人： Tae Kim ,  Min Yan ,  Christian Heller ,  Marc Schaepkens ,  Thomas Gorczyca ,  Paul Mc Connelee ,  Ahmet Erlat

IPC分类号： H01L29/24 ,  H01L21/44

CPC分类号： H01L51/5256

摘要： A composite article with at least one high integrity protective coating, the high integrity protective coating having at least one planarizing layer and at least one organic-inorganic composition barrier coating layer. A method for depositing a high integrity protective coating.

摘要翻译： 具有至少一个高完整性保护涂层的复合制品，所述高完整性保护涂层具有至少一个平坦化层和至少一个有机 - 无机组合物阻挡涂层。 一种用于沉积高完整性保护涂层的方法。

公开(公告)号：US20050253509A1

公开(公告)日：2005-11-17

申请号：US11188983

申请日：2005-07-26

申请人： Marc Schaepkens ,  Kevin Flanagan

发明人： Marc Schaepkens ,  Kevin Flanagan

IPC分类号： H05B33/02 ,  B32B5/14 ,  C23C16/30 ,  H01L51/50 ,  H01L51/52 ,  H05B33/04 ,  H05B33/12 ,  H05B33/24 ,  H05B33/00

CPC分类号： H01L51/5268 ,  B82Y20/00 ,  B82Y30/00 ,  C23C16/30 ,  G02F1/133305 ,  G02F2201/50 ,  H01L51/5036 ,  H01L51/5253 ,  H01L2251/5338 ,  H01L2251/5346 ,  H01L2251/5369 ,  Y10T428/12021 ,  Y10T428/1321 ,  Y10T428/1352 ,  Y10T428/24802 ,  Y10T428/31667

摘要： A composite article comprises a substrate having at least a substrate surface and a graded-composition coating disposed on a substrate surface. The composition of the coating material varies substantially continuously across its thickness. The coating reduces the transmission rates of oxygen, water vapor, and other chemical species through the substrate such that the composite article can be used effectively as a diffusion barrier to protect chemically sensitive devices or materials. An organic light-emitting device incorporates such a composite article to provide an extended life thereto.

公开(公告)号：US06948448B2

公开(公告)日：2005-09-27

申请号：US09683149

申请日：2001-11-27

申请人： Marc Schaepkens

发明人： Marc Schaepkens

IPC分类号： C23C16/32 ,  C23C16/40 ,  C23C16/50 ,  H01J37/32 ,  C23C16/00 ,  H05H1/00 ,  H05H1/02

CPC分类号： H01J37/32009 ,  C23C16/325 ,  C23C16/401 ,  C23C16/50

摘要： A method and apparatus for depositing a uniform coating on a large area, planar surface using an array of multiple plasma sources and a common reactant gas injector. The apparatus includes at least one array of a plurality of plasma sources, wherein each of the plurality of plasma sources includes a cathode, an anode, and an inlet for a non-reactive plasma source gas disposed in a plasma chamber, and a common reactant gas injector disposed in a deposition chamber that contains the substrate. The common reactant gas injector provides a uniform flow of at least one reactant gas to each of the multiple plasmas generated the multiple plasma sources through a single delivery system. The at least one reactant gas reacts with the plurality of plasmas to form a uniform coating on a substrate.

公开(公告)号：US08747554B2

公开(公告)日：2014-06-10

申请号：US11554561

申请日：2006-10-30

申请人： Yuji Morikawa ,  Kazuo Kawasaki ,  Sun-joong Hwang ,  Marc Schaepkens

发明人： Yuji Morikawa ,  Kazuo Kawasaki ,  Sun-joong Hwang ,  Marc Schaepkens

IPC分类号： F27B14/00 ,  C30B35/00 ,  C30B15/00 ,  B22D7/00 ,  B22D33/00

CPC分类号： C30B15/00 ,  B22D7/00 ,  B22D33/00 ,  C30B23/066 ,  C30B25/02 ,  C30B35/00 ,  Y10S117/90 ,  Y10T117/10 ,  Y10T117/1016 ,  Y10T117/1064

摘要： A unibody, multi-piece crucible for use in for use in elemental purification, compounding, and growth of semi-conductor crystals, e.g., in the process of molecular beam epitaxy (MBE) for melting silicon and the like at high temperature. The crucible has an outer coating layer that fixedly joins the multi pieces making up the crucible. The invention also provides a method for making a unibody containing structure comprising pyrolytic boron nitride having a negative draft, which method obviates the need of complicated overhang structure of graphite mandrels or the removal of the graphite mandrels by burning at high temperatures.

摘要翻译： 用于元素纯化，复合和半导体晶体生长的单体，多件式坩埚，例如在用于在高温下熔化硅等的分子束外延（MBE）的过程中。 坩埚具有固定连接构成坩埚的多个部件的外部涂层。 本发明还提供了一种制备含有具有负牵伸的热解氮化硼的含有单体的结构的方法，该方法消除了石墨心轴的复杂突出结构或通过在高温下燃烧而去除石墨心轴的需要。

公开(公告)号：US08704211B2

公开(公告)日：2014-04-22

申请号：US10988481

申请日：2004-11-15

申请人： Tae Won Kim ,  Min Yan ,  Christian Maria Anton Heller ,  Marc Schaepkens ,  Thomas Bert Gorczyca ,  Paul Alan McConnelee ,  Ahmet Gun Erlat

发明人： Tae Won Kim ,  Min Yan ,  Christian Maria Anton Heller ,  Marc Schaepkens ,  Thomas Bert Gorczyca ,  Paul Alan McConnelee ,  Ahmet Gun Erlat

IPC分类号： H01L35/24 ,  H01L51/00

CPC分类号： H01L51/5256

摘要： A composite article with at least one high integrity protective coating, the high integrity protective coating having at least one planarizing layer and at least one organic-inorganic composition barrier coating layer. A method for depositing a high integrity protective coating.

摘要翻译： 具有至少一个高完整性保护涂层的复合制品，所述高完整性保护涂层具有至少一个平坦化层和至少一个有机 - 无机组合物阻挡涂层。 一种用于沉积高完整性保护涂层的方法。

公开(公告)号：US20120074329A1

公开(公告)日：2012-03-29

申请号：US12891016

申请日：2010-09-27

申请人： Paul Richard Granfors ,  John Robert Lamberty ,  Richard Gordon Cronce ,  Ping Xue ,  Marc Schaepkens ,  Aaron Judy Couture ,  Douglas Albagli

发明人： Paul Richard Granfors ,  John Robert Lamberty ,  Richard Gordon Cronce ,  Ping Xue ,  Marc Schaepkens ,  Aaron Judy Couture ,  Douglas Albagli

IPC分类号： G01T1/24

CPC分类号： H01L27/14658 ,  H01L27/14623 ,  H04N5/32 ,  H04N5/35563

摘要： In one embodiment, a digital X-ray detector is provided with a plurality of pixel regions. Each pixel region includes a first photodiode having a first area and a second photodiode having a second area equal to or smaller than the first area. The digital X-ray detector also includes a shielding structure that overlies the first and second photodiodes of each pixel region with the shielding structure shielding proportionally less of the first photodiode than of the second photodiode to provide the first photodiode with a first sensitivity and the second photodiode with a second sensitivity lower than the first sensitivity.

摘要翻译： 在一个实施例中，数字X射线检测器设置有多个像素区域。 每个像素区域包括具有第一区域的第一光电二极管和具有等于或小于第一区域的第二区域的第二光电二极管。 数字X射线检测器还包括覆盖每个像素区域的第一和第二光电二极管的屏蔽结构，屏蔽结构屏蔽第一光电二极管比第二光电二极管成比例地少，以提供第一光敏二极管的第一灵敏度，而第二光电二极管 光电二极管的灵敏度低于第一灵敏度。