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105 条记录 (耗时 0.035 秒)

    Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
    54.
    发明授权
    Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems 有权
    飞行移动式机载椭圆仪，偏振计，反射计等系统

    公开(公告)号：US07746471B1

    公开(公告)日：2010-06-29

    申请号：US11890391

    申请日：2007-08-05

    申请人： Blaine D. Johs ,  Ping He ,  Martin M. Liphardt ,  Christopher A. Goeden ,  John A. Woollam ,  James D. Welch

    发明人： Blaine D. Johs ,  Ping He ,  Martin M. Liphardt ,  Christopher A. Goeden ,  John A. Woollam ,  James D. Welch

    IPC分类号： G01J4/00

    CPC分类号： G01N21/21 ,  G01N21/55 ,  G01N2021/151 ,  G01N2021/212 ,  G01N2021/214 ,  G01N2201/021 ,  G01N2201/0693

    摘要： A substantially self-contained “on-board” material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.

    摘要翻译： 一种基本上独立的“车载”材料系统调查系统，用于实现电磁辐射源和检测器之间的相对平移和旋转运动，以及样品，该系统功能地安装在三维位置系统上，以便能够定位在所需位置 包括能够容易且方便地影响旋转和/或将电磁辐射束的入射角改变到样品表面上和/或提供气流限制的能力 在具有UV，VUV，IR和/或NIR波长的电磁辐射的光束的位置处，在样品表面附近的微型室中被引入。

    Discrete polarization state spectroscopic ellipsometer system and method of use
    57.
    发明授权
    Discrete polarization state spectroscopic ellipsometer system and method of use 有权
    离散偏振态光谱椭偏仪系统及其使用方法

    公开(公告)号：US07075650B1

    公开(公告)日：2006-07-11

    申请号：US10613118

    申请日：2003-07-07

    申请人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

    发明人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

    IPC分类号： G01J4/00

    CPC分类号： G01N21/211 ,  G01N21/274 ,  G01N2021/213

    摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

    摘要翻译： 一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。 优选的光谱椭偏仪系统在数据收集期间没有移动的部分，并且其提供顺序的多个顺序离散而不是连续变化的偏振状态。

    Multiple order dispersive optics system and method of use
    58.
    发明授权
    Multiple order dispersive optics system and method of use 失效
    多阶色散光学系统及其使用方法

    公开(公告)号：US5805285A

    公开(公告)日：1998-09-08

    申请号：US818445

    申请日：1997-03-17

    申请人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

    发明人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

    IPC分类号： G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

    CPC分类号： G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

    摘要： Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.

    摘要翻译： 公开了一种分散光学系统，在样品衬底系统调查光谱反射计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多个“订单”的可用性允许在更大范围内同时测量更基本上单个波长的光束，而不仅仅是基本上单个波长束的“订单” 的光存在。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。 还公开了分散光学对准的象限检测器装置，以及用于减小检测器元件极化状态依赖性的影响的补偿器装置。

    Multiple order dispersive optics system and method of use
    59.
    发明授权
    Multiple order dispersive optics system and method of use 失效
    多阶色散光学系统及其使用方法

    公开(公告)号：US5666201A

    公开(公告)日：1997-09-09

    申请号：US530892

    申请日：1995-09-20

    申请人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

    发明人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

    IPC分类号： G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

    CPC分类号： G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

    摘要： Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.

    摘要翻译： 公开了一种分散光学系统，在椭偏仪或偏振计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多于一个“顺序”的可用性允许同时测量更基本上单个波长光束的光，比仅存在基本上单个波长光束的“顺序”是可能的。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。

    Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
    60.
    发明授权
    Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters 有权
    光谱椭偏仪在多层交替高/低折射率滤波器的原位实时制造中的应用

    公开(公告)号：US06940595B1

    公开(公告)日：2005-09-06

    申请号：US10194881

    申请日：2002-07-15

    申请人： Blaine D. Johs ,  Jeffrey S. Hale ,  John A. Woollam ,  Craig M. Herzinger

    发明人： Blaine D. Johs ,  Jeffrey S. Hale ,  John A. Woollam ,  Craig M. Herzinger

    IPC分类号： G01J4/00

    CPC分类号： G01J4/00

    摘要： Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.

    摘要翻译： 公开了倾斜入射角，反射和/或透射模式分光椭偏仪PSI和/或DELTA（包括其组合和/或数学等价物）与波长数据的应用以监测和/或控制多层高/ 低折射率带通，带阻和变化的衰减相对于波长滤波器，单独地或与透射非椭圆电磁波转折点相比，在基本上正常的入射角获得的层数据。