公开(公告)号：US07106454B2

公开(公告)日：2006-09-12

申请号：US10795808

申请日：2004-03-08

Applicant: Peter J. De Groot ,  Robert Stoner ,  Xavier Colonna De Lega

Inventor： Peter J. De Groot ,  Robert Stoner ,  Xavier Colonna De Lega

IPC: G01B11/02

CPC classification number: G01B11/0675 ,  G01B9/0201 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211 ,  G01N21/8422 ,  G01N21/9501

Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Abstract translation: 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于所述测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。

公开(公告)号：US20050057757A1

公开(公告)日：2005-03-17

申请号：US10941631

申请日：2004-09-15

Applicant: Xavier Colonna De Lega ,  Peter De Groot ,  Michael Kuchel

Inventor： Xavier Colonna De Lega ,  Peter De Groot ,  Michael Kuchel

IPC: G01B9/02 ,  G01B11/00 ,  G01B11/06 ,  G03F7/20 ,  G03F9/00

CPC classification number: G03F7/70491 ,  G01B9/02019 ,  G01B9/02022 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70608 ,  G03F7/70641 ,  G03F7/70775 ,  G03F9/7003 ,  G03F9/7049 ,  G03F9/7088

Abstract: An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.

Abstract translation: 光学系统包括光刻系统，低相干干涉仪和检测器。 光刻系统被配置为用光图案照射物体的一部分并具有参考表面。 低相干干涉仪具有参考光路和测量光路。 沿着基准光路通过的光至少从参考面反射一次，并且沿测量光路通过的光至少反射一次。 检测器被配置为检测包括沿着参考光路已经通过的光和沿着测量光路已经通过的光的低相干干涉信号。 低相干干涉信号指示参考表面和对象之间的空间关系。