摘要:
A capacitor 19 comprises a lower electrode 14 formed on a substrate 10, an upper electrode 18 opposed to the lower electrode, and a capacitor dielectric film 16 formed between the lower electrode and the upper electrode, in which at least one of the lower electrode and the upper electrodes is an electrode of a metal substituted layer. The lower electrodes of polysilicon are formed, and then after the high-temperature heat processing for improving film quality of the capacitor dielectric film has been performed, the lower electrodes of polysilicon is substituted with aluminum to form the lower electrodes of aluminum, whereby aluminum, which cannot withstand the heat processing for improving film quality of the capacitor dielectric film can be used as a material of the lower electrodes. Thus, capacitors having good high-speed response can be formed.
摘要:
A semiconductor device having: a substrate having a first area and a second area surrounding the first area; an insulating film formed in the second area; electrodes formed above the surface of the substrate in the first area; dielectric films formed above the electrodes; and an opposing electrode formed above the dielectric films, wherein the shape of a side wall of the insulating film includes a shape reflecting the outer peripheral shape of a side wall of the electrode facing the side wall of the insulating film. The semiconductor device of high integration, low cost and high reliability can be realized.
摘要:
The method for fabricating the semiconductor device comprises the steps of: forming an insulation film 56 above a substrate 10; forming an opening 60 in the insulation film 56 down to the substrate 10; forming a plate electrode 62 on at least a side wall of the opening 60; removing the insulation film 56 to form an opening 68 having a side wall surrounded by a plate electrode 62; forming a capacitor dielectric film 70 on at least a side wall of the opening 68; and forming a storage electrode 72 on the capacitor dielectric film 70. Whereby electric characteristics between the electrode, etc. in the below structure and the storage electrode are prevented from deterioration in high-temperature thermal processing in the step of forming the capacitor dielectric film.
摘要:
A method for fabricating a semiconductor device comprises the step of forming an interconnection 18 having the upper surface covered with an insulation film 20 on a base substrate 10, the step of sequentially depositing an insulation film 24 and an insulation film 26 on the base substrate 10 with the interconnection 18 formed on, the step of etching the insulation film 26 with the insulation film 24 as a stopper to form openings in a region containing a region where the interconnection 18 is formed, and the step of etching the insulation film 24 in the opening to form sidewall insulation films 30 of the insulation film 24 on the side walls of the interconnection 18 and form contact holes 34, 36 to be connected to the base substrate 10 in alignment with the interconnection 18.
摘要:
A drying oven for curing paint applied to a vehicle comprising a housing, radiant heat panel located on the side walls of the housing, a conveyor for carrying a vehicle through the housing and a convection heater unit positioned at a height below the conveyor such that heat from the convection heater is directed onto the under floor of the vehicle passing through the housing on the conveyor. In a first embodiment, the convection heater unit includes a feed pipe positioned below the conveyor and a plurality of nozzles extending from the feed pipe for directing hot air onto the under floor of the vehicle. In a second embodiment, a plurality of heat ducts are located below and to the side of the conveyor, each heat duct having an opening directed at the under floor of the vehicle on the conveyor for directing hot air onto the under floor of the vehicle.
摘要:
A charging device for contact-charging a member to be charged. A charging device for charging a movable member to be charged includes a contacting member adapted to contacting the member to be charged, and means for forming a vibratory electric field between the member to be charged and the contacting member, the vibratory electric field forming means applying between the members a vibratory voltage having a peak-to-peak value not less than twice an absolute value of a charge starting voltage to the member to be charged. The member to be charged can be uniformly charged.
摘要:
A ring-shaped emitter region is formed either in a region a little toward an inner periphery or in a region a little toward an outer periphery in an upper layer portion of a ring-shaped base region of a bipolar transistor. A conductive layer is laminated through an insulating layer in a region surrounded by the ring-shaped emitter region provided a little toward the inner periphery of the base region, a conductive side wall is formed on the sides of the conductive layer and the insulating layer, and the ring-shaped emitter region and the conductive layer are connected through the conductive side wall. A metallic emitter electrode is connected to the conductive layer. On the other hand, in a region surrounded by the ring-shaped base region in which the ring-shaped emitter region is formed a little toward the outer periphery, a conductive layer is laminated through an insulating layer, a conductive side wall is formed on the sides of the conductive layer and the insulating layer, and the ring-shaped base region and the conductive layer are connected through the conductive side wall. A metallic base electrode is connected to the conductive layer. Since an emitter region and a collector region have the same conduction type in a bipolar transistor, such a bipolar transistor that has a construction in which the emitter described above is used as a collector is also available.
摘要:
An image heating apparatus includes a heater; a temperature detecting member for detecting a temperature of the heater; the controller for controlling electric power supplied to the heater so that the temperature detected by the temperature detecting member is maintained at a predetermined temperature; comparing device for comparing the temperature detected by the temperature detecting member to the reference temperature; wherein, when the detected temperature remains to be no less than the reference temperature for a predetermined period of time, the controller reduces a duty ratio of the electric power to be supplied to the heater.
摘要:
Information code for conveying devices on which an item to be processed is placed has the data of the same item to be processed stored as a set in a memory. The information code inputted into a register undergoes tracking corresponding to the conveyance of the item to be processed. Accordingly, by referring to the identification code in the register and the contents of the memory, it is possible to know the data relating to an item to be processed and the position thereof.
摘要:
An image heating apparatus includes a heater and a film movable together with a recording material carrying an image so that the image on the recording material is heated by heat from the heater through the film. A guiding member guides a surface of the film that contacts the heater, and the guiding member has a surface with projections effective to reduce a contact area between the guiding surface and the film. In addition, a lubricant is supplied between the guiding surface and the film so as to reduce frictional contact.