Capacitor and method for fabricating the same and semiconductor device

    公开(公告)号:US06731494B2

    公开(公告)日:2004-05-04

    申请号:US10352028

    申请日:2003-01-28

    申请人: Shunji Nakamura

    发明人: Shunji Nakamura

    IPC分类号: H01G4228

    CPC分类号: H01L28/60 H01L21/76895

    摘要: A capacitor 19 comprises a lower electrode 14 formed on a substrate 10, an upper electrode 18 opposed to the lower electrode, and a capacitor dielectric film 16 formed between the lower electrode and the upper electrode, in which at least one of the lower electrode and the upper electrodes is an electrode of a metal substituted layer. The lower electrodes of polysilicon are formed, and then after the high-temperature heat processing for improving film quality of the capacitor dielectric film has been performed, the lower electrodes of polysilicon is substituted with aluminum to form the lower electrodes of aluminum, whereby aluminum, which cannot withstand the heat processing for improving film quality of the capacitor dielectric film can be used as a material of the lower electrodes. Thus, capacitors having good high-speed response can be formed.

    Semiconductor device and its manufacture
    52.
    发明授权
    Semiconductor device and its manufacture 失效
    半导体器件及其制造

    公开(公告)号:US06586794B2

    公开(公告)日:2003-07-01

    申请号:US09808188

    申请日:2001-03-15

    IPC分类号: H01L27108

    摘要: A semiconductor device having: a substrate having a first area and a second area surrounding the first area; an insulating film formed in the second area; electrodes formed above the surface of the substrate in the first area; dielectric films formed above the electrodes; and an opposing electrode formed above the dielectric films, wherein the shape of a side wall of the insulating film includes a shape reflecting the outer peripheral shape of a side wall of the electrode facing the side wall of the insulating film. The semiconductor device of high integration, low cost and high reliability can be realized.

    摘要翻译: 一种半导体器件,具有:具有第一区域的基板和围绕所述第一区域的第二区域; 形成在第二区域中的绝缘膜; 形成在第一区域中的衬底表面上方的电极; 形成在电极上方的电介质膜; 以及形成在所述电介质膜上方的对置电极,其中所述绝缘膜的侧壁的形状包括反映所述电极的与所述绝缘膜的侧壁相对的侧壁的外周形状的形状。 可以实现高集成,低成本,高可靠性的半导体器件。

    Semiconductor device and method for fabricating the same

    公开(公告)号:US06423591B1

    公开(公告)日:2002-07-23

    申请号:US09815011

    申请日:2001-03-23

    申请人: Shunji Nakamura

    发明人: Shunji Nakamura

    IPC分类号: H01L2972

    摘要: The method for fabricating the semiconductor device comprises the steps of: forming an insulation film 56 above a substrate 10; forming an opening 60 in the insulation film 56 down to the substrate 10; forming a plate electrode 62 on at least a side wall of the opening 60; removing the insulation film 56 to form an opening 68 having a side wall surrounded by a plate electrode 62; forming a capacitor dielectric film 70 on at least a side wall of the opening 68; and forming a storage electrode 72 on the capacitor dielectric film 70. Whereby electric characteristics between the electrode, etc. in the below structure and the storage electrode are prevented from deterioration in high-temperature thermal processing in the step of forming the capacitor dielectric film.

    Semiconductor device and method for fabricating the same
    54.
    发明授权
    Semiconductor device and method for fabricating the same 失效
    半导体装置及其制造方法

    公开(公告)号:US06312994B1

    公开(公告)日:2001-11-06

    申请号:US08915629

    申请日:1997-08-21

    申请人: Shunji Nakamura

    发明人: Shunji Nakamura

    IPC分类号: H01L21336

    摘要: A method for fabricating a semiconductor device comprises the step of forming an interconnection 18 having the upper surface covered with an insulation film 20 on a base substrate 10, the step of sequentially depositing an insulation film 24 and an insulation film 26 on the base substrate 10 with the interconnection 18 formed on, the step of etching the insulation film 26 with the insulation film 24 as a stopper to form openings in a region containing a region where the interconnection 18 is formed, and the step of etching the insulation film 24 in the opening to form sidewall insulation films 30 of the insulation film 24 on the side walls of the interconnection 18 and form contact holes 34, 36 to be connected to the base substrate 10 in alignment with the interconnection 18.

    摘要翻译: 一种制造半导体器件的方法包括在基底10上形成具有被绝缘膜20覆盖的上表面的布线18的步骤,在基底基板10上依次沉积绝缘膜24和绝缘膜26的步骤 其上形成有布线18,绝缘膜26用绝缘膜24作为止动器进行蚀刻的步骤,以在包含形成互连18的区域的区域中形成开口;以及在其中蚀刻绝缘膜24的步骤 打开以在互连18的侧壁上形成绝缘膜24的侧壁绝缘膜30,并形成与互连18对准的接触孔34,36以连接到基底基板10。

    Paint curing oven
    55.
    发明授权
    Paint curing oven 有权
    油漆固化炉

    公开(公告)号:US6062850A

    公开(公告)日:2000-05-16

    申请号:US196325

    申请日:1998-11-19

    摘要: A drying oven for curing paint applied to a vehicle comprising a housing, radiant heat panel located on the side walls of the housing, a conveyor for carrying a vehicle through the housing and a convection heater unit positioned at a height below the conveyor such that heat from the convection heater is directed onto the under floor of the vehicle passing through the housing on the conveyor. In a first embodiment, the convection heater unit includes a feed pipe positioned below the conveyor and a plurality of nozzles extending from the feed pipe for directing hot air onto the under floor of the vehicle. In a second embodiment, a plurality of heat ducts are located below and to the side of the conveyor, each heat duct having an opening directed at the under floor of the vehicle on the conveyor for directing hot air onto the under floor of the vehicle.

    摘要翻译: 一种用于固化施涂到车辆上的涂料的干燥炉,包括壳体,位于壳体侧壁上的辐射热板,用于通过壳体运送车辆的输送机和位于输送机下方高度的对流加热器单元,使得热量 从对流加热器被引导到通过传送带上的壳体的车辆底部。 在第一实施例中,对流加热器单元包括位于输送机下方的进料管和从进料管延伸的多个喷嘴,用于将热空气引导到车辆底部。 在第二实施例中,多个热管道位于输送机的下方并且位于输送机的侧面,每个热管道具有在输送机上指向车辆底部的开口,用于将热空气引导到车辆的底部。

    Charging device
    56.
    再颁专利
    Charging device 失效
    充电装置

    公开(公告)号:USRE35581E

    公开(公告)日:1997-08-12

    申请号:US562788

    申请日:1995-11-27

    IPC分类号: G03G15/02

    CPC分类号: G03G15/0216

    摘要: A charging device for contact-charging a member to be charged. A charging device for charging a movable member to be charged includes a contacting member adapted to contacting the member to be charged, and means for forming a vibratory electric field between the member to be charged and the contacting member, the vibratory electric field forming means applying between the members a vibratory voltage having a peak-to-peak value not less than twice an absolute value of a charge starting voltage to the member to be charged. The member to be charged can be uniformly charged.

    摘要翻译: 一种充电装置,用于对要充电的构件进行接触充电。 用于对要充电的可动构件进行充电的充电装置包括适于使待充电构件接触的接触构件和用于在待充电构件与接触构件之间形成振动电场的装置,所述振动电场形成装置施加 在所述构件之间具有不小于充电构件的充电起始电压的绝对值的两倍的峰 - 峰值的振动电压。 要充电的会员可以均匀充电。

    Method of manufacturing bipolar transistor having ring-shaped emitter
and base
    57.
    发明授权
    Method of manufacturing bipolar transistor having ring-shaped emitter and base 失效
    制造具有环形发射极和基极的双极晶体管的方法

    公开(公告)号:US5501992A

    公开(公告)日:1996-03-26

    申请号:US313571

    申请日:1994-09-27

    申请人: Shunji Nakamura

    发明人: Shunji Nakamura

    摘要: A ring-shaped emitter region is formed either in a region a little toward an inner periphery or in a region a little toward an outer periphery in an upper layer portion of a ring-shaped base region of a bipolar transistor. A conductive layer is laminated through an insulating layer in a region surrounded by the ring-shaped emitter region provided a little toward the inner periphery of the base region, a conductive side wall is formed on the sides of the conductive layer and the insulating layer, and the ring-shaped emitter region and the conductive layer are connected through the conductive side wall. A metallic emitter electrode is connected to the conductive layer. On the other hand, in a region surrounded by the ring-shaped base region in which the ring-shaped emitter region is formed a little toward the outer periphery, a conductive layer is laminated through an insulating layer, a conductive side wall is formed on the sides of the conductive layer and the insulating layer, and the ring-shaped base region and the conductive layer are connected through the conductive side wall. A metallic base electrode is connected to the conductive layer. Since an emitter region and a collector region have the same conduction type in a bipolar transistor, such a bipolar transistor that has a construction in which the emitter described above is used as a collector is also available.

    摘要翻译: 在双极型晶体管的环状基极区域的上层部分的内周部分或稍微朝向外周的区域中形成环状发射极区域。 导电层通过绝缘层层叠在由基部区域的内周稍微设置的环状发射极区域围绕的区域中,在导电层和绝缘层的侧面形成导电性侧壁, 并且环形发射极区域和导电层通过导电侧壁连接。 金属发射极连接到导电层。 另一方面,在由环状的发射极区域朝向外周形成一点的环状基极区域围绕的区域中,导电层通过绝缘层层叠,导电侧壁形成在 导电层和绝缘层的侧面以及环状基极区域和导电层通过导电侧壁连接。 金属基极连接到导电层。 由于发射极区域和集电极区域在双极晶体管中具有相同的导电类型,所以具有其中使用上述发射极的结构的双极晶体管也可用作集电极。

    Image heating apparatus capable of changing duty ratio
    58.
    发明授权
    Image heating apparatus capable of changing duty ratio 失效
    能够改变占空比的图像加热装置

    公开(公告)号:US5365314A

    公开(公告)日:1994-11-15

    申请号:US38881

    申请日:1993-03-29

    IPC分类号: G03G15/20 G05D23/00 H05B3/00

    摘要: An image heating apparatus includes a heater; a temperature detecting member for detecting a temperature of the heater; the controller for controlling electric power supplied to the heater so that the temperature detected by the temperature detecting member is maintained at a predetermined temperature; comparing device for comparing the temperature detected by the temperature detecting member to the reference temperature; wherein, when the detected temperature remains to be no less than the reference temperature for a predetermined period of time, the controller reduces a duty ratio of the electric power to be supplied to the heater.

    摘要翻译: 图像加热装置包括加热器; 温度检测部件,用于检测加热器的温度; 所述控制器用于控制供给到所述加热器的电力,使得由所述温度检测部件检测到的温度保持在预定温度; 用于将温度检测部件检测到的温度与基准温度进行比较的比较装置; 其中,当检测到的温度保持不低于基准温度一段预定的时间时,控制器降低要供给加热器的电力的占空比。

    System and method for line production management
    59.
    发明授权
    System and method for line production management 失效
    线生产管理系统和方法

    公开(公告)号:US5347463A

    公开(公告)日:1994-09-13

    申请号:US722606

    申请日:1991-06-26

    摘要: Information code for conveying devices on which an item to be processed is placed has the data of the same item to be processed stored as a set in a memory. The information code inputted into a register undergoes tracking corresponding to the conveyance of the item to be processed. Accordingly, by referring to the identification code in the register and the contents of the memory, it is possible to know the data relating to an item to be processed and the position thereof.

    摘要翻译: 用于在其上放置待处理物品的输送装置的信息代码将具有要处理的相同物品的数据作为一组存储在存储器中。 输入到寄存器的信息代码对应于要处理的物品的传送进行跟踪。 因此,通过参考寄存器中的识别码和存储器的内容,可以知道与要处理的项目有关的数据及其位置。

    Image heater having film guide with projections
    60.
    发明授权
    Image heater having film guide with projections 失效
    图像加热器具有带有突出物的导片

    公开(公告)号:US5280155A

    公开(公告)日:1994-01-18

    申请号:US913923

    申请日:1992-07-17

    IPC分类号: G03G15/20 H05B3/00

    CPC分类号: G03G15/2064

    摘要: An image heating apparatus includes a heater and a film movable together with a recording material carrying an image so that the image on the recording material is heated by heat from the heater through the film. A guiding member guides a surface of the film that contacts the heater, and the guiding member has a surface with projections effective to reduce a contact area between the guiding surface and the film. In addition, a lubricant is supplied between the guiding surface and the film so as to reduce frictional contact.

    摘要翻译: 图像加热装置包括加热器和可携带图像的记录材料一起移动的膜,使得记录材料上的图像通过加热器通过膜被加热。 引导构件引导与加热器接触的膜的表面,并且引导构件具有具有有效减小引导表面和膜之间的接触面积的突起的表面。 此外,在引导面和膜之间供给润滑剂,以减少摩擦接触。