公开(公告)号：US20050087133A1

公开(公告)日：2005-04-28

申请号：US10779397

申请日：2004-02-13

申请人： Naoki Shindo ,  Tadashi Iino

发明人： Naoki Shindo ,  Tadashi Iino

IPC分类号： H01L21/304 ,  H01L21/00 ,  C23C16/00

CPC分类号： H01L21/6708 ,  Y10S134/902

摘要： This substrate processing apparatus supplies wafers W accommodated in a closed processing container 10 with ozone gas and steam for processing the wafers W. The apparatus includes an ozone-gas generator 40 for supplying the ozone gas into the processing container 10, a steam generator 30 for supplying the steam into the processing container 10 and a steam nozzle 35 arranged in the processing container 10 and connected to the steam generator 30. The steam nozzle 35 is equipped with a nozzle body 35a having a plurality of steam ejecting orifices 35f formed at appropriate intervals and a heater 35h for preventing dewdrops of the steam from being produced in the nozzle body 35a. Consequently, it is possible to prevent the formation of dewdrops of solvent steam, which may produce origins of particles in the closed processing container, unevenness in cleaning (etching), etc., and also possible to improve the processing efficiency.

摘要翻译： 该基板处理装置将容纳在封闭处理容器10内的晶片W供给臭氧气体和蒸汽用于处理晶片W.该装置包括用于向处理容器10供给臭氧气体的臭氧气体发生器40，用于 将蒸汽供应到处理容器10中，以及布置在处理容器10中并连接到蒸汽发生器30的蒸汽喷嘴35.蒸汽喷嘴35配备有喷嘴体35a，喷嘴体35a具有形成在多个蒸汽喷射孔35f 适当的间隔和加热器35h，用于防止在喷嘴体35a中产生蒸汽的露珠。 因此，可以防止在封闭的加工容器中产生颗粒的起因，清洗（蚀刻）等不均匀的溶剂蒸汽的露珠的形成，也可以提高加工效率。

公开(公告)号：US20050051246A1

公开(公告)日：2005-03-10

申请号：US10957003

申请日：2004-10-01

申请人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

发明人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

IPC分类号： G03F7/42 ,  B08B5/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01L21/311 ,  C22B9/05

CPC分类号： H01L21/6708 ,  H01L21/31138 ,  Y10S134/902

摘要： Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. An ozone gas feed system 40 for feeding ozone gas 2 into a processing vessel 10 holding wafers W, and a steam feed means 30 for feeding steam 1 into the processing vessel 10 are provided. An on-off valve 49 inserted in the ozone gas feed pipe 42, an on-off valve 36 inserted in the steam feed pipe 34 and a switch 48 and an on-off valve 49 of ozone gas generator 41 are connected to CPU 100 which is control means and are controlled by the CPU 100. Ozone gas 2 is fed into the processing vessel 10 to pressurize the atmosphere surrounding the wafers W, and then steam 1 is fed into the processing vessel 10 while ozone gas 2 is fed into the processing vessel 10, whereby a resist of the wafers W can be removed with the steam 1 and the ozone 2 while metal corrosion, etc. can be prevented.

摘要翻译： 可以去除抗蚀剂，同时抑制晶片等的金属污染和颗粒的产生以及氧化膜的生长被抑制。 提供用于将臭氧气体2供给到保持晶片W的处理容器10中的臭氧气体供给系统40，以及用于将蒸汽1供给到处理容器10中的蒸汽供给装置30。 插入臭氧气体供给管42的开闭阀49，插入蒸汽供给管34的开关阀36，臭氧气体发生器41的开关48和开关阀49连接到CPU100，CPU100 是控制装置，由CPU100控制。臭氧气体2被送入处理容器10中以对周围的晶片W加压，然后将蒸汽1送入处理容器10，同时将臭氧气体2送入处理 容器10，由此可以用蒸汽1和臭氧2除去晶片W的抗蚀剂，同时可以防止金属腐蚀等。

公开(公告)号：US06817368B2

公开(公告)日：2004-11-16

申请号：US09971136

申请日：2001-10-03

申请人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

发明人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

IPC分类号： B08B302

CPC分类号： H01L21/6708 ,  H01L21/31138 ,  Y10S134/902

摘要： Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. An ozone gas feed system 40 for feeding ozone gas 2 into a processing vessel 10 holding wafers W, and a steam feed means 30 for feeding steam 1 into the processing vessel 10 are provided. An on-off valve 49 inserted in the ozone gas feed pipe 42, an on-off valve 36 inserted in the steam feed pipe 34 and a switch 48 and an on-off valve 49 of ozone gas generator 41 are connected to CPU 100 which is control means and are controlled by the CPU 100. Ozone gas 2 is fed into the processing vessel 10 to pressurize the atmosphere surrounding the wafers W, and then steam 1 is fed into the processing vessel 10 while ozone gas 2 is fed into the processing vessel 10, whereby a resist of the wafers W can be removed with the steam 1 and the ozone 2 while metal corrosion, etc. can be prevented.

摘要翻译： 可以去除抗蚀剂，同时抑制晶片等的金属污染和颗粒的产生以及氧化膜的生长被抑制。 提供用于将臭氧气体2供给到保持晶片W的处理容器10中的臭氧气体供给系统40，以及用于将蒸汽1供给到处理容器10中的蒸汽供给装置30。 插入臭氧气体供给管42的开闭阀49，插入蒸汽供给管34的开关阀36，臭氧气体发生器41的开关48和开关阀49连接到CPU100，CPU100 是控制装置，由CPU100控制。臭氧气体2被送入处理容器10中以对周围的晶片W加压，然后将蒸汽1送入处理容器10，同时将臭氧气体2送入处理 容器10，由此可以利用蒸汽1和臭氧2除去晶片W的抗蚀剂，同时可以防止金属腐蚀等。

公开(公告)号：US06627689B2

公开(公告)日：2003-09-30

申请号：US09890233

申请日：2001-07-30

申请人： Tadashi Iino ,  Mitsuhiro Imaizumi

发明人： Tadashi Iino ,  Mitsuhiro Imaizumi

IPC分类号： C08J510

CPC分类号： H01M8/0226 ,  H01B1/24 ,  H01M8/0204

摘要： An electroconductive curable resin composition comprising (A) a graphite powder containing boron in the graphite crystal and (B) a curable resin and/or a curable resin composition, at a ratio of 20 to 99.9:80 to 0.1 in terms of the mass ratio of the component (A) to component (B); and a cured product thereof and a formed product obtained by using the curable resin composition. The cured product exhibits excellent electroconductivity even with a relatively small amount of electroconductive filler charged, and also exhibits a high heat resistance, a good heat-radiating property and superior formability or workability.

摘要翻译： 一种导电固化树脂组合物，其包含（A）在石墨晶体中含有硼的石墨粉末和（B）固化性树脂和/或固化性树脂组合物，其比例为20〜99.9:80〜 （A）成分（B）成分; 其固化物和通过使用该固化性树脂组合物得到的成型体。 即使使用相对少量的导电填充剂，固化物也具有优异的导电性，并且还具有高耐热性，良好的散热性和优异的成形性或可加工性。

公开(公告)号：US5825339A

公开(公告)日：1998-10-20

申请号：US787447

申请日：1991-11-04

申请人： Yoshiyuki Furuya ,  Kunimitsu Aoki ,  Tadashi Iino

发明人： Yoshiyuki Furuya ,  Kunimitsu Aoki ,  Tadashi Iino

IPC分类号： B60K35/00 ,  G02B27/00 ,  G02B27/01 ,  G09F9/00 ,  G09G3/00

CPC分类号： B60K35/00 ,  G02B27/0018 ,  G02B27/0101 ,  B60K2350/2052 ,  G02B2027/012 ,  G02B2027/0121 ,  G02B2027/0165

摘要： The object of the present invention is to eliminate a double image of a display apparatus for automobiles in which an image of displayer is reflected by a transparent reflection plate toward a driver's seat so that the display image for displaying information on the condition of the vehicle such as vehicle speed can be seen as a virtual image. A display apparatus for automobiles according to the present invention comprising: a displayer for emitting display light; a reflection plate having a first surface on a driver's seat side and a second surface on a side opposite to the driver's seat, the display light diagonally falling on the first surface and being reflected on the first surface to be directed to an eye range, a display image of the displayer being recognized from the driver's seat side within a display range on the first surface, at least a portion of the second surface corresponding to the display range of the first surface being diagonally disposed in relation to the first surface.

摘要翻译： 本发明的目的是消除用于汽车的显示装置的双重图像，其中显示器的图像被透明反射板反射到驾驶员座位，使得用于显示关于车辆状况的信息的显示图像 因为车速可以看作是一个虚像。 根据本发明的用于汽车的显示装置，包括：用于发射显示灯的显示器; 反射板，其具有在驾驶员座侧的第一表面和与驾驶员座椅相对的一侧上的第二表面，所述显示灯对角地落在所述第一表面上并被反射到所述第一表面以被引导到眼睛范围， 在第一表面的显示范围内从驾驶员座侧识别显示器的显示图像，与第一表面的显示范围对应的第二表面的至少一部分相对于第一表面对角地设置。

公开(公告)号：US5502456A

公开(公告)日：1996-03-26

申请号：US486263

申请日：1995-06-07

申请人： Hidenobu Korenaga ,  Makoto Takashima ,  Tadashi Iino

发明人： Hidenobu Korenaga ,  Makoto Takashima ,  Tadashi Iino

IPC分类号： B60K35/00 ,  G02B5/04 ,  G02B5/30 ,  G02B27/00 ,  G02B27/01 ,  G02B27/28 ,  G02F1/1335 ,  G02F1/13357 ,  G09F9/00 ,  G09G5/00

CPC分类号： G02F1/13362 ,  G02B27/0101 ,  G02B27/283 ,  G02B2027/0118 ,  G02B2027/012 ,  G02B2027/0165 ,  G02B5/04 ,  G02B5/30 ,  G02F1/133536 ,  G02F2001/13355

摘要： The display apparatus for vehicles being reduced in reflection at the external light suppression prisms disposed on the surface of the display device and providing a bright display image, in which included are the display device and the external light suppression prisms consisting of first and second prisms being stacked together by directing the prism apex angles in opposite directions to each other and disposed close to the display surface of the display device, a reflecting member to reflect the display light emitted from the display device, which light has passed through the prisms, toward the viewing point of the driver, and a polarized direction rotating means being disposed between the prisms and the reflecting member for rotating the polarization direction of the display light by 90 degrees, whereby the display light is emitted as a P-polarization light with respect to the reflecting surface of the reflecting member.

摘要翻译： 用于车辆的显示装置在设置在显示装置的表面上的外部光抑制棱镜处被反射减少并且提供明亮的显示图像，其中包括由第一和第二棱镜组成的显示装置和外部光抑制棱镜 通过将棱镜顶角彼此相反地指向彼此并且靠近显示装置的显示表面布置的反射构件，将反射构件反射到已经穿过棱镜的显示装置发出的显示光，朝向 以及偏振方向旋转装置，其设置在棱镜和反射构件之间，用于使显示光的偏振方向旋转90度，由此显示光作为P偏振光发射相对于 反射构件的反射面。

公开(公告)号：US5418651A

公开(公告)日：1995-05-23

申请号：US105612

申请日：1993-08-13

申请人： Tadashi Iino ,  Kunimitsu Aoki ,  Yoshiyuki Furuya

发明人： Tadashi Iino ,  Kunimitsu Aoki ,  Yoshiyuki Furuya

IPC分类号： B60K35/00 ,  B60K37/00 ,  G02B5/00 ,  G02B27/00 ,  G02B27/01 ,  G09F13/12 ,  G02B23/08 ,  B60R1/04 ,  G02B5/08

CPC分类号： B60K37/00 ,  G02B27/0101 ,  G02B5/00 ,  B60K2350/2052 ,  G02B2027/0118 ,  G02B2027/0165

摘要： An object of this invention is to provide a vehicle's display system in which the display surface of a display unit set deep in an opening structure of the instrument panel is prevented from being directly seen obliquely of the display window from side. In a vehicle's display system, a light control film (LCF) 7 is bonded to a half mirror 12 to cover its predetermined portion which spreads upwardly from the line thereof which is closest to the display surface of a display unit, to regulate light transmitting through the film obliquely from side.

摘要翻译： 本发明的目的是提供一种车辆显示系统，其中防止从仪表板的开口结构设置得较深的显示单元的显示面从侧面倾斜地直接看到显示窗。 在车辆显示系统中，将光控制膜（LCF）7接合到半反射镜12上以覆盖从其最靠近显示单元的显示表面的直线向上扩展的预定部分，以调节透光通过的光 电影从侧面倾斜。

公开(公告)号：US5386216A

公开(公告)日：1995-01-31

申请号：US2759

申请日：1993-01-13

申请人： Tadashi Iino

发明人： Tadashi Iino

IPC分类号： B60K35/00 ,  B60K37/02 ,  G09G3/02

CPC分类号： G02B27/0101 ,  B60K37/02 ,  G02B27/0149 ,  G02B2027/0118

摘要： The indication display unit according to the present invention is constructed such that an image indicated by an indicator disposed within the dashboard is projected towards and reflected on a prism provided at the lower portion of the windshield so that the driver can observe the image behind the prism as the virtual image thereof, and is characterized in that the prism can be shifted namely between the first and the second positions thereof, wherein when the prism is located in the first position, the indicated image projected from the indicator is reflected on the surface of the prism and directed to the driver's visual point, whereas in the second position thereof, the prism has been completely shifted away from the driver's visual field by position shifting elements, and the indicated image projected from the indicator is thereby reflected on the inner surface of the windshield and directed to the driver's visual point. Further, the indication display unit constructed as above is also characterized in that the prism is shifted upward or downward along with the inner surface of the windshield, or that the prism is pivoted on a rotational shaft provided near the bottom surface thereof so as to be set either in the first position or in the second position thereof.

摘要翻译： 根据本发明的指示显示单元被构造成使得由设置在仪表板内的指示符指示的图像投影到设置在挡风玻璃的下部的棱镜上并且被反射在设置在挡风玻璃的下部的棱镜上，使得驾驶员可以观察棱镜后面的图像 作为其虚像，并且其特征在于，棱镜可以在其第一和第二位置之间移动，其中当棱镜位于第一位置时，从指示器投影的指示图像被反射在 棱镜并且指向驾驶员的视点，而在其第二位置，棱镜已经通过位置移动元件完全偏离驾驶员的视野，并且从指示器投射的指示图像由此在 挡风玻璃并指示驾驶员的视线。 此外，如上构造的指示显示单元的特征还在于，棱镜与挡风玻璃的内表面一起向上或向下偏移，或者棱镜在设置在其底表面附近的旋转轴上枢转，以便于 设置在第一位置或其第二位置。

公开(公告)号：US5272463A

公开(公告)日：1993-12-21

申请号：US826965

申请日：1992-01-28

申请人： Yoshiyuki Furuya ,  Tadashi Iino ,  Kunimitsu Aoki

发明人： Yoshiyuki Furuya ,  Tadashi Iino ,  Kunimitsu Aoki

IPC分类号： G01D7/00 ,  B60Q3/04 ,  G01D11/28 ,  G01D13/04 ,  G01D13/22 ,  B60Q1/00

CPC分类号： B60Q3/044 ,  G01D13/22 ,  Y10S116/36

摘要： This invention is to provide a display device for a vehicle with the pointer portion of light transmission type placed over characters etc, the value indicated by the pointer portion can be accurately read with high visibility. A display device for a vehicle comprises a dial and an indicating board laid on the dial. The dial includes a disk-shaped light transmitting portion, light transmitting characters and graduations outside the light transmitting portion, and an annular light transmitting portion outside the characters and the graduations The indicating board includes a light transmitting pointer's inner end portion and a light transmitting pointer's outer end portion which overlap the light transmitting portions of the dial, respectively, and an annular light transmitting portion which is laid over the characters and the graduations. The indicating board further includes a light transmitting pointer's outer end portion which is in alignment with the pointer's inner end portion and the pointer's outer end portion.

摘要翻译： 本发明提供一种用于车辆的显示装置，其中通过放置在字符等上的光传输类型的指针部分，可以以高可见度精确地读取由指针部分指示的值。 一种用于车辆的显示装置，包括拨盘（1）和布置在表盘（1）上的指示板（7）。 表盘（1）包括盘状光透射部分（2a），透光部分（2a）外部的透光字符（3a）和刻度（3b）和在字符（2a）外部的环形光透射部分 3a）和刻度（3b）。 指示板（7）分别包括一个透光指针的内端部分（8a）和一个与表盘（1）的透光部分（2a，2b）重叠的透光指针的外端部分（8b），和 放置在字符（3a）和刻度（3b）上的环形透光部分（10）。

公开(公告)号：US5201277A

公开(公告)日：1993-04-13

申请号：US812981

申请日：1991-12-24

申请人： Kunimitsu Aoki ,  Tadashi Iino ,  Yoshiyuki Furuya

发明人： Kunimitsu Aoki ,  Tadashi Iino ,  Yoshiyuki Furuya

IPC分类号： B60K37/02 ,  G01D13/04 ,  G01D13/22 ,  G01D13/28 ,  G12B11/04

CPC分类号： G01D13/04 ,  G12B11/04

摘要： The object of the present invention is to provide a display apparatus for a vehicle in which luminance of the display pattern of letters, graduations, a pointer, and the like are increased without unevenness in the luminance but also the distance between a front face of a pointer plate and a rear face of the movement of the display apparatus is shortened. A circular pointer plate with a transmitting slit is disposed on front a portion of the display apparatus. An outer periphery of the pointer plate is toothed and is engaged with a driving gear fixed to a driving shaft of the movement to be directly driven by the movement. A dial is disposed on a back face of the pointer plate. A portion where the dial overlaps the pointer plate, and other portion for graduations and the like which surrounds the portion are formed as light transmitting portion, but, other portions are formed as light intercepting portion. Behind the pointer plate is installed a discharge lamp with a reflector.