公开(公告)号：US11955360B2

公开(公告)日：2024-04-09

申请号：US17642083

申请日：2020-12-24

Applicant: TOCALO Co., Ltd. ,  HITACHI HIGH-TECH CORPORATION

Inventor： Takeshi Takabatake ,  Tomohiro Nakasuji ,  Akira Itoh ,  Kentaro Seto ,  Yutaka Omoto ,  Hiroho Kitada ,  Kazuumi Tanaka

IPC: H01L21/683 ,  H01J37/32 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01J37/32715 ,  H01L21/68757

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

公开(公告)号：US20230220531A1

公开(公告)日：2023-07-13

申请号：US17796886

申请日：2021-03-04

Applicant: TOCALO CO., LTD.

Inventor： Kazuo HAMASHIMA ,  Masashi MORISASA ,  Shinsuke ANAI

IPC: C23C4/06 ,  H01J37/32

CPC classification number: C23C4/06 ,  H01J37/32495 ,  C23C4/134

Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating.
A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

公开(公告)号：US20230079853A1

公开(公告)日：2023-03-16

申请号：US18057187

申请日：2022-11-18

Applicant: TOCALO CO., LTD.

Inventor： Shikou ABUKAWA ,  Kensuke TAGUCHI ,  Yu ASAKIMORI ,  Ryutaro KAWAMURA

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

公开(公告)号：US20220090251A1

公开(公告)日：2022-03-24

申请号：US17272281

申请日：2019-07-23

Applicant: TOCALO CO., LTD.

Inventor： Shinya MIKI ,  Masaya NAGAI

IPC: C23C4/10 ,  C23C4/129

Abstract: Provided is a method for forming a thermal sprayed coating, including a step of spraying a non-oxide ceramic material on a substrate to form a coating by a high velocity oxy-fuel spraying process. An average particle size of the non-oxide ceramic material is 0.1 to 5.0 μm, and a particle size distribution of the non-oxide ceramic material contains one or more peaks in each of: a particle size range of 0.1 μm or more and less than 1.0 μm; and a particle size range of 1.0 μm or more and less than 10.0 μm. The non-oxide ceramic material is dispersed in a solvent to prepare slurry 11, and the slurry 11 is fed from the exterior to flame 10 jetted from a thermal spray gun 2 to form a dense thermal sprayed coating structure.

公开(公告)号：US11174812B2

公开(公告)日：2021-11-16

申请号：US16545252

申请日：2019-08-20

Applicant: TOYOTA MOTOR EAST JAPAN, INC. ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  TOCALO Co., Ltd.

Inventor： Ryo Koike ,  Kazuyoshi Manabe ,  Akihiro Kanno

IPC: B32B15/00 ,  F02F3/10 ,  C23C4/134 ,  C23C4/08 ,  C10M103/04 ,  B32B15/01 ,  C10N50/08

Abstract: A sliding member capable of improving friction characteristics under an environment of a lubricant containing Mo, and a production method therefor, is provided. The sliding member contains a sliding portion formed of a metallic material having a Ti-containing thermally sprayed coating on a surface layer part of the sliding portion. The sliding member slides under the environment of the lubricant containing Mo as an additive, in which active Ti exposed on a surface by sliding accelerates decomposition reaction of the additive contained in the lubricant to form a molybdenum disulfide-containing low-friction coating having low friction on the surface of the sliding portion.

公开(公告)号：US10793818B2

公开(公告)日：2020-10-06

申请号：US15753091

申请日：2016-08-19

Applicant: TOKYO ELECTRON LIMITED ,  TOCALO CO., LTD.

Inventor： Shinichi Gomi ,  Kenichi Kagawa ,  Yusuke Yoda ,  Shinya Miki ,  Tatsuya Hamaguchi

IPC: C12M1/22 ,  C12M1/12 ,  G02B21/34 ,  C12M1/00 ,  C12M1/34 ,  C12N5/074 ,  G02B21/14 ,  C12M1/32 ,  C12Q1/04 ,  G01N21/03

Abstract: The purpose of the present invention is to provide a culture container capable of preventing a concave meniscus without using a jig. In order to achieve this purpose, the present invention provides a culture container (1A) provided with: a base (3) having a concave portion (4); and a water-repellent layer (5) formed on an outer edge region (411) of the bottom (41) of the concave portion (4) and the inner circumferential surface (42) of the concave portion (4). One of the surfaces of the water-repellent layer (5) is exposed to the space in the concave portion (4).

公开(公告)号：US10605300B2

公开(公告)日：2020-03-31

申请号：US15522743

申请日：2015-10-28

Applicant: FUJIMI INCORPORATED ,  TOCALO CO., Ltd.

Inventor： Noriyuki Yasuo ,  Takeshi Takabatake ,  Tatsuo Suidzu ,  Hiroaki Mizuno ,  Takaya Masuda ,  Tatsuya Kuno

IPC: F16C13/00 ,  C23C4/10 ,  C23C2/00 ,  C23C4/129 ,  C23C4/067 ,  C22C29/02 ,  C22C1/10 ,  C23C4/06 ,  C23C4/12

Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element formed of Si. The amount of the second element in the thermal spray powder is 40% by mole or less. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.002 or greater and 0.03 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.

公开(公告)号：US20200063688A1

公开(公告)日：2020-02-27

申请号：US16545252

申请日：2019-08-20

Applicant: TOYOTA MOTOR EAST JAPAN, INC. ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  Tocalo Co., Ltd.

Inventor： Ryo Koike ,  Kazuyoshi Manabe ,  Akihiro Kanno

IPC: F02F3/10 ,  C23C4/134 ,  C23C4/08 ,  B32B15/01 ,  C10M103/04

Abstract: A problem is to provide a sliding member capable of improving friction characteristics under an environment of a lubricant containing Mo, and a production method therefor. A solution is a sliding member 10, wherein a sliding portion 11 is formed of a metallic material, and the sliding member 10 has, at a surface layer part of the sliding portion 11, a Ti-containing thermally sprayed coating 12 formed by thermally spraying, as a thermal spraying material, a metallic material containing Ti as a composition. The sliding member 10 slides under the environment of the lubricant containing Mo as an additive, in which active Ti exposed on a surface by sliding accelerates decomposition reaction of the additive contained in the lubricant to form a molybdenum disulfide-containing low-friction coating having low friction on the surface of the sliding portion 11.

公开(公告)号：US10539176B2

公开(公告)日：2020-01-21

申请号：US15522703

申请日：2015-10-28

Applicant: FUJIMI INCORPORATED ,  TOCALO CO., Ltd.

Inventor： Tatsuo Suidzu ,  Noriyuki Yasuo ,  Takeshi Takabatake ,  Hiroaki Mizuno ,  Takaya Masuda ,  Tatsuya Kuno

IPC: C23C4/06 ,  C23C4/10 ,  C23C4/12 ,  C23C4/129 ,  C23C4/067 ,  F16C13/00 ,  C22C29/08 ,  C22C19/00 ,  C22C19/07 ,  C22C29/14 ,  C22C1/10 ,  C25D17/06

Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element selected from Al and Mg. The amount of the second element in the thermal spray powder is 20% by mole or greater. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.05 or greater and 0.5 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.

公开(公告)号：US20190032239A1

公开(公告)日：2019-01-31

申请号：US16077169

申请日：2017-02-14

Applicant: JFE STEEL CORPORATION ,  TOCALO CO., LTD.

Inventor： Yuya BABA ,  Junichi TAKEUCHI ,  Yoshifumi KOBAYASHI

IPC: C25D17/10 ,  C22C29/08 ,  C23C4/10 ,  C25D5/04

Abstract: Disclosed is a cermet powder that enables preparation of a cermet coating having both high wear resistance and high corrosion resistance against a strong acid having a pH of less than 1. The disclosed cermet powder contains tungsten carbide particles in an amount of 40 mass % or more; molybdenum carbide particles in an amount of 10 mass % to 40 mass %; and Ni or a Ni alloy as a matrix metal, wherein the cermet powder further contains chromium, either as a carbide or a metal or alloy element contained in the matrix metal, in an amount of 8 mass % or more.