公开(公告)号：US20130222810A1

公开(公告)日：2013-08-29

申请号：US13882800

申请日：2011-11-02

Applicant: Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

Inventor： Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

IPC: G01B9/02

CPC classification number: G01B9/02055 ,  G01J9/0246 ,  G01J2009/023 ,  G01J2009/0261 ,  G01J2009/0288

Abstract: An interferometric system includes a polarization separation element (10), a first polarization conversion element (11), a Mach-Zehnder interferometer (2) including a first (4) and second (5) arms connected to one another by a first (6) and second (7) ends in order for a first and second beams (20, 21) having the same polarization to pass through the interferometer in a reciprocal manner in opposite directions of propagation, respectively, so as to form a first and second interferometric beam (22, 23), a second polarization conversion element (11) for obtaining an interferometric beam (24), the polarization of which is converted, a polarization-combining element (10), and a detection element (8) suitable for detecting an output beam (25).

Abstract translation: 干涉测量系统包括偏振分离元件（10），第一偏振转换元件（11），马赫曾德尔干涉仪（2），其包括通过第一（6）和第二（6）彼此连接的第一（4）和第二（5） ）和第二（7）端部，以使具有相同偏振的第一和第二光束（20,21）分别以相反的传播方向以相互的方式穿过干涉仪，以便形成第一和第二干涉仪 光束（22,23），用于获得其偏振变换的干涉光束（24）的第二偏振转换元件（11），偏振组合元件（10）和适于检测的检测元件（8） 输出光束（25）。

公开(公告)号：US20100103403A1

公开(公告)日：2010-04-29

申请号：US12605017

申请日：2009-10-23

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G03B27/52 ,  G01B9/02 ,  G01B11/02 ,  H01S3/13

CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.

Abstract translation: 本发明的波长偏移测量装置是一种波长偏移检测传感器（WLCD1），其测量从光源发射的光束的波长偏移，并且包括分束器（BS2），其将从 光源分割为多个光束，并且在多个光束中合成两个光束以产生干涉光;间隔部件（SP），其设置成使得由分束器分离的两个光束的光路长度差异 （PBS2）是恒定的，并且多个光电传感器（PD）检测由分束器（BS2）产生的干涉光。 多个光电传感器（PD）基于干涉光输出具有相位偏移的多个干涉信号，以使用多个干涉信号计算波长偏移。

公开(公告)号：US07280224B2

公开(公告)日：2007-10-09

申请号：US11112681

申请日：2005-04-22

Applicant: Henry A. Hill ,  Gary Womack

Inventor： Henry A. Hill ,  Gary Womack

IPC: G01B9/02

CPC classification number: G01B9/02061 ,  G01B9/02018 ,  G01B9/02027 ,  G01B9/02059 ,  G01B9/02072 ,  G01B9/02084 ,  G01B2290/15 ,  G01B2290/70 ,  G01J2009/0261 ,  G03F7/70775

Abstract: In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.

Abstract translation: 通常，在一个方面，本发明的特征在于，在将测量对象相对于干涉测量组件移动的同时，包括干涉测量组件和测量对象之间的距离沿着三个不同测量轴中的每一个进行干涉测量的方法，确定不同的参数的值 测量对象距监测距离的位置，其中对于给定位置，该参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的距离，以及导出关于测量的表面图形轮廓的信息 至少对参数值进行频率变换。

公开(公告)号：US20070177157A1

公开(公告)日：2007-08-02

申请号：US10590443

申请日：2005-03-04

Applicant: David McMurtry ,  James Henshaw ,  Michael Homer ,  Mark Chapman ,  Raymond Chaney ,  William Lee ,  Jason Slack

Inventor： David McMurtry ,  James Henshaw ,  Michael Homer ,  Mark Chapman ,  Raymond Chaney ,  William Lee ,  Jason Slack

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B9/02041 ,  G01B9/02084 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: Interferometry apparatus which comprises a measurement light beam (2a, 2b) and a reference light beam (2c, 2d) which interact with each other to cause a spatial fringe pattern (24). An optical device (12) is provided which interacts with the spatial fringe pattern (24), such that light is spatially separated into different directions (30, 32, 34, 36). The intensity modulation in two or more directions of the spatially separated light is phase shifted. The optical device may comprise, for example, a diffractive device, a refractive device or a diffractive optical element.

Abstract translation: 干涉测量装置，其包括彼此相互作用以产生空间条纹图案（24）的测量光束（2a，2b）和参考光束（2c，2d）。 提供了与空间条纹图案（24）相互作用的光学装置（12），使得光在空间上分离成不同的方向（30,32,34,36）。 在空间分离的光的两个或更多个方向上的强度调制是相移的。 光学装置可以包括例如衍射装置，折射装置或衍射光学元件。

公开(公告)号：US07136167B2

公开(公告)日：2006-11-14

申请号：US10796320

申请日：2004-03-10

Applicant: Michael Failes

Inventor： Michael Failes

IPC: G01B9/02

CPC classification number: G01B9/02091 ,  G01B2290/70 ,  G01J2009/0261 ,  G01N21/4795

Abstract: A fiber optic scanning interferometer in a Michelson arrangement using a polarization splitting coupler is disclosed. The splitting of s and p polarization modes into the fast and slow axes of a birefringent fiber allows the temporal separation of interference phenomena from multiple reflections such that signal recovery is simplified.

Abstract translation: 公开了一种使用偏振分束耦合器的迈克尔逊布置的光纤扫描干涉仪。 将s和p偏振模式分离成双折射光纤的快轴和慢轴允许干扰现象与多次反射的时间分离，从而简化信号恢复。

公开(公告)号：US20060140638A1

公开(公告)日：2006-06-29

申请号：US11020930

申请日：2004-12-23

Applicant: Christophe Dorrer

Inventor： Christophe Dorrer

IPC: H04B10/00

CPC classification number: H04B10/2507 ,  G01J9/04 ,  G01J2009/0261

Abstract: A method and apparatus for polarization-independent RF spectrum analysis of an optical source, the apparatus including a coupler for coupling the light from an optical source under test with light from a continuous-wave (CW) laser. A nonlinear apparatus is coupled to the coupler for modulating the electric field of the light from the CW laser using the temporal intensity of the light from the source under test to generate a modulated signal. The nonlinear apparatus is adapted to mitigate or compensate for any phase difference between polarization components of signals propagated through the nonlinear apparatus. A polarizer is coupled to the nonlinear apparatus for generating a linearly polarized signal from the modulated signal. An optical spectrum analyzer is coupled to the polarizer for measuring the optical spectrum of the linearly polarized signal to determine an RF spectrum of the optical source under test.

公开(公告)号：US5486919A

公开(公告)日：1996-01-23

申请号：US76951

申请日：1993-06-15

Applicant: Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

Inventor： Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

IPC: G01J9/02 ,  G01J9/04 ,  G01N21/88 ,  G01N21/94 ,  G03F7/20 ,  G01B9/02

CPC classification number: G03F7/70616 ,  G01N21/88 ,  G01N21/94 ,  G03F7/7065 ,  G03F7/70916 ,  G01J2009/0261 ,  G01J9/04 ,  G01N2021/4792 ,  G01N21/8806

Abstract: Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

Abstract translation: 公开了一种检查方法和装置：其中（i）具有第一偏振状态和第一波长的第一光，以及（ii）具有与第一偏振态不同的第二极化状态的第二光，以及第二波长 ，与第一波长不同; 至少第一个光被投射到检查的位置; 并且检测基于第二光产生的外差干涉光和在检查位置上散射并且具有从第一极化状态通过散射改变其偏振状态的光。

公开(公告)号：US5235404A

公开(公告)日：1993-08-10

申请号：US722338

申请日：1991-06-27

Applicant: Martin M. Fejer ,  Aharon Kapitulnik ,  Kenneth A. Fesler

Inventor： Martin M. Fejer ,  Aharon Kapitulnik ,  Kenneth A. Fesler

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/21 ,  G02B21/00

CPC classification number: G01N21/21 ,  G02B21/002 ,  G01J2009/0261 ,  G01J2009/0273 ,  G01N2021/216 ,  G01N2021/218

Abstract: A method and apparatus for measuring nonreciprocal optical effects contemplates directing two circularly polarized optical beams having a known phase relation to each other at a sample, and detecting the difference in phase between the two beams after they have encountered the sample. In a transmission measurement the two circularly polarized beams have the same handedness, but pass through the sample in opposite directions. In a reflection measurement, the two circularly polarized beams have opposite handedness, but encounter the sample in the same direction. In a particular embodiment of the invention a linearly polarized beam is introduced into a Sagnac interferometer and split into two linearly polarized beams which are ultimately recombined.

Abstract translation: 用于测量不可逆光学效应的方法和装置预期在样本处引导具有彼此已知相位关系的两个圆偏振光束，并且在两个光束遇到样本之后检测两相之间的相位差。 在透射测量中，两个圆偏振光束具有相同的螺旋性，但是在相反方向穿过样品。 在反射测量中，两个圆偏振光束具有相反的手性，但是在相同方向上遇到样品。 在本发明的一个具体实施例中，线性偏振光束被引入到Sagnac干涉仪中，并被分成两个最终重组的线性偏振光束。

公开(公告)号：US5061070A

公开(公告)日：1991-10-29

申请号：US184639

申请日：1988-04-22

Applicant: John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

Inventor： John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

IPC: G01N15/14 ,  G01J9/02 ,  G01N15/00 ,  G01N15/02 ,  G01N15/06 ,  G01N21/23 ,  G01N21/45 ,  G01N21/94

CPC classification number: G01N21/45 ,  G01J2009/0261 ,  G01N2015/0011 ,  G01N2015/0053 ,  G01N2015/0238 ,  G01N21/94

Abstract: A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.

公开(公告)号：US5037202A

公开(公告)日：1991-08-06

申请号：US547735

申请日：1990-07-02

Applicant: John S. Batchelder ,  Marc A. Taubenblatt

Inventor： John S. Batchelder ,  Marc A. Taubenblatt

IPC: G01J9/02 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/45

CPC classification number: G01N15/0205 ,  G01J2009/0261 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N21/45

Abstract: An apparatus is described for classifying particles and includes an optical system for transmitting to a focal plane which includes at least one particle, two substantially parallel optical beams, the beams being initially mutually coherent but of different polarizations. The beams are displaced and focused in the focal plane. A further optical system is positioned in the path which the beam takes after depating from the focal plane and combines the beams so that a particle-induced phase shift in one beam is manifest by a change in elliptical polarization of the combined beams. A first detector is responsive to the beam's intensity along a first polarization axis to produce a first output and a second detector is responsive to the beams intensity along a second polarization axis to produce a second output. The first and second outputs are added to provide an extinction signal and, in a separate device, are subtracted to provide to phase shift signal. The extinction signal and phase shift signal are both fed to a processor which classifies a particle in accordance therewith.