公开(公告)号：US20090086214A1

公开(公告)日：2009-04-02

申请号：US12237744

申请日：2008-09-25

Applicant: Ken K. Chin ,  Guanhua Feng ,  Ivan Pardon ,  Harry Roman

Inventor： Ken K. Chin ,  Guanhua Feng ,  Ivan Pardon ,  Harry Roman

IPC: G01B9/02 ,  B29D11/00

CPC classification number: G01J9/02 ,  G01H9/004 ,  G01J2009/023 ,  G01L9/0079

Abstract: The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.

Abstract translation: 本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。 该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。 传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。 根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿其边缘夹持，并且单模光纤的端面。 通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。 为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关 和/或当设备插入液体介质时的低频噪声。

公开(公告)号：US20080075404A1

公开(公告)日：2008-03-27

申请号：US11750569

申请日：2007-05-18

Applicant: Ken Chin ,  Guanhua Feng ,  Ivan Padron ,  Harry Roman

Inventor： Ken Chin ,  Guanhua Feng ,  Ivan Padron ,  Harry Roman

IPC: G02B6/00 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01H9/004 ,  G01J2009/023 ,  G01L9/0079

Abstract: The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.

Abstract translation: 本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。 该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。 传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。 根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿着其边缘夹持，并且单模光纤的端面。 通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。 为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关 和/或当设备插入液体介质时的低频噪声。

公开(公告)号：US06937798B1

公开(公告)日：2005-08-30

申请号：US10759522

申请日：2004-01-15

Applicant: X. Steve Yao ,  Yongqiang Shi

Inventor： X. Steve Yao ,  Yongqiang Shi

IPC: G02B6/34 ,  G02B6/26

CPC classification number: G02B6/29349 ,  G01J9/0246 ,  G01J2009/023 ,  G02B6/29385

Abstract: Devices and techniques for monitoring spectrum of light. For example, a fiber spectral monitoring device and associated technique are described for monitoring spectral information in light based on an interferometer design.

Abstract translation: 用于监测光谱的装置和技术。 例如，描述了用于基于干涉仪设计来监视光的光谱信息的光纤监测设备和相关技术。

公开(公告)号：US6144449A

公开(公告)日：2000-11-07

申请号：US875351

申请日：1997-07-28

Applicant: Alexander Knuettel ,  Dirk Boecker

Inventor： Alexander Knuettel ,  Dirk Boecker

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/47 ,  G02B6/12

CPC classification number: G01N21/4795 ,  G01B9/02027 ,  G01B9/02051 ,  G01B9/02058 ,  G01B9/02063 ,  G01B9/0209 ,  G02B6/12004 ,  G01J2009/023 ,  G02B2006/12104

Abstract: Low coherence interferometer apparatus for investigation of a sample (15), in particular for multidimensional imaging, having an interferometer configuration (2) comprising a low coherence light source, a probe head (9) having a light exit opening (16) for irradiating light into the sample, an optical coupler, a reference reflector and a detector (13). The optical paths between the elements of the interferometer configuration (2) form interferometer arms. The optical coupler and the reference arm of the interferometer configuration (2) are integrated into a common optical chip (28). In addition to the reference reflector (11), the reference arm comprises a deflection reflector (33) formed on an end surface (35) of the optical chip (28) in such a manner that the reference light is cross-coupled between a first light guide (10a) forming a first portion of the reference arm (10) and a second light guide (10b) forming a second portion of the reference arm (10).

Abstract translation: PCT No.PCT / DE97 / 00167 Sec。 371日期1997年7月28日第 102（e）1997年7月28日PCT PCT 1997年1月23日PCT公布。 出版物WO97 / 27468 日期1997年7月31日用于研究样品（15）的低相干干涉仪装置，特别是用于多维成像，具有包括低相干光源的干涉仪配置（2），具有光出射开口的探头（9） 16），用于将光照射到样品中，光耦合器，参考反射器和检测器（13）。 干涉仪配置（2）的元件之间的光路形成干涉仪臂。 干涉仪配置（2）的光耦合器和参考臂被集成到公共光学芯片（28）中。 除了参考反射器（11）之外，参考臂包括形成在光学芯片（28）的端面（35）上的偏转反射器（33），使得参考光交替耦合在第一 形成参考臂（10）的第一部分的光导（10a）和形成参考臂（10）的第二部分的第二光导（10b）。

公开(公告)号：US5073024A

公开(公告)日：1991-12-17

申请号：US426425

申请日：1989-10-24

Applicant: Serge Valette ,  Stephane Renard

Inventor： Serge Valette ,  Stephane Renard

IPC: G01J9/02 ,  G01N21/45 ,  G02B6/12

CPC classification number: G02B6/12004 ,  G01N21/45 ,  G01J2009/023 ,  G01N2201/0873

Abstract: An integrated optical device for measuring the refractive index of a fluid comprises a light guide formed on a substrate and having a guiding layer for carrying light beams, inserted between a lower layer and an upper layer having refractive indices below that of the guiding layer. The device includes an interaction measurement zone of the light guide for coming into contact with the fluid, the upper layer at the measurement zone having a thickness less than the penetration distance of the evanescent wave of the guided light beam. Outside the interaction zone, that upper layer has a thinckness greater than the penetration distance of the same evanescent beam. The device also has an interferometric optical system at least partly formed in the light guide and having a reference optical circuit and a measurement optical circuit including the measurement zone, for measuring the phase shift introduced by an effective index change of the guided mode due to the fluid.

Abstract translation: 用于测量流体的折射率的集成光学装置包括形成在基板上并具有用于承载光束的引导层的导光体，该引导层插入在折射率低于引导层的下层和上层之间。 该装置包括用于与流体接触的光导的相互作用测量区域，测量区域的上层具有小于引导光束的ev逝波的穿透距离的厚度。 在相互作用区域之外，该上层的厚度大于同一瞬逝光束的穿透距离。 该装置还具有至少部分地形成在光导中的干涉光学系统，并且具有参考光学电路和测量光学电路，该测量光学电路包括测量区域，用于测量由于引导模式的有效指数变化导致的相移 流体。

公开(公告)号：US20130222810A1

公开(公告)日：2013-08-29

申请号：US13882800

申请日：2011-11-02

Applicant: Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

Inventor： Herve Lefevre ,  Cedric Molucon ,  Jean-Jacques Bonnefois ,  Karl Aubry

IPC: G01B9/02

CPC classification number: G01B9/02055 ,  G01J9/0246 ,  G01J2009/023 ,  G01J2009/0261 ,  G01J2009/0288

Abstract: An interferometric system includes a polarization separation element (10), a first polarization conversion element (11), a Mach-Zehnder interferometer (2) including a first (4) and second (5) arms connected to one another by a first (6) and second (7) ends in order for a first and second beams (20, 21) having the same polarization to pass through the interferometer in a reciprocal manner in opposite directions of propagation, respectively, so as to form a first and second interferometric beam (22, 23), a second polarization conversion element (11) for obtaining an interferometric beam (24), the polarization of which is converted, a polarization-combining element (10), and a detection element (8) suitable for detecting an output beam (25).

Abstract translation: 干涉测量系统包括偏振分离元件（10），第一偏振转换元件（11），马赫曾德尔干涉仪（2），其包括通过第一（6）和第二（6）彼此连接的第一（4）和第二（5） ）和第二（7）端部，以使具有相同偏振的第一和第二光束（20,21）分别以相反的传播方向以相互的方式穿过干涉仪，以便形成第一和第二干涉仪 光束（22,23），用于获得其偏振变换的干涉光束（24）的第二偏振转换元件（11），偏振组合元件（10）和适于检测的检测元件（8） 输出光束（25）。

公开(公告)号：US06493088B1

公开(公告)日：2002-12-10

申请号：US09411649

申请日：1999-10-04

Applicant: Rongqing Hui ,  Maurice S. O'Sullivan

Inventor： Rongqing Hui ,  Maurice S. O'Sullivan

IPC: G01B902

CPC classification number: H04J14/02 ,  G01J9/02 ,  G01J2009/023 ,  G01J2009/0253 ,  H04B10/0795 ,  H04J14/0227 ,  H04J14/0276

Abstract: The present invention provides a method and apparatus for monitoring optical signals with an expand frequency resolution. The invention permits high-resolution measurements of optical signal spectrums while retaining wide bandwidth operation through appropriate control circuitry. An interferometer having a periodic frequency response formed of equally spaced narrow-band peaks is used to sweep the entire signal spectrum. The interferometer frequency response is incrementally tuned in cycles so that each of its frequency response peaks cyclically scans a particular spectral band of the signal spectrum. During each cycle, the interferometer isolates multiple,spectrally resolved portions of the optical signal spectrum where each portion originates frog different spectral band. In this way, a high-resolution measurement of the entire signal spectrum can be obtained. The invention may be network protocol independent and can be incorporated into an optical spectrum analyzer or directly into any optical terminal. The invention can be used for signal spectrum monitoring applications including link quality monitoring (LQM) in optical communications networks to monitor various transmission parameters such as such as carrier wavelengths, optical signal-to-noise ratios (SNR), amplified spontaneous emissions (ASE), noise levels, optical non-linearities or other signal baseband information such as data rates and formats.

Abstract translation: 本发明提供一种以扩展频率分辨率监视光信号的方法和装置。 本发明允许光信号频谱的高分辨率测量，同时通过适当的控制电路保持宽带宽操作。 使用具有由等间隔的窄带峰值形成的周期性频率响应的干涉仪来扫描整个信号频谱。 干涉仪频率响应以周期递增调谐，使得其每个频率响应峰值对信号频谱的特定谱带进行循环扫描。 在每个周期期间，干涉仪隔离光信号频谱的多个光谱解析部分，其中每个部分起源于青蛙不同的光谱带。 以这种方式，可以获得整个信号频谱的高分辨率测量。 本发明可以是与网络协议无关的，并且可以并入到光谱分析仪中或直接并入任何光学终端。 本发明可用于信号频谱监测应用，包括光通信网络中的链路质量监测（LQM），以监测各种传输参数，例如载波波长，光信噪比（SNR），放大自发辐射（ASE） ，噪声电平，光学非线性或其他信号基带信息，如数据速率和格式。

公开(公告)号：US06330063B1

公开(公告)日：2001-12-11

申请号：US09613748

申请日：2000-07-11

Applicant: Alexander Knuettel ,  Dirk Boecker

Inventor： Alexander Knuettel ,  Dirk Boecker

IPC: G01B902

CPC classification number: G01N21/4795 ,  G01B9/02027 ,  G01B9/02051 ,  G01B9/02058 ,  G01B9/02063 ,  G01B9/0209 ,  G01J2009/023 ,  G02B6/12004 ,  G02B2006/12104

Abstract: Low coherence interferometer apparatus for investigation of a sample (15), in particular for multi-dimensional imaging, having an interferometer configuration (2) comprising a low coherence light source, a probe head (9) having a light exit opening (16) for irradiating light into the sample, an optical coupler, a reference reflector and a detector (13). The optical paths between the elements of the interferometer configuration (2) form interferometer arms. The optical coupler and the reference arm of the interferometer configuration (2) are integrated into a common optical chip (28). In addition to the reference reflector (11), the reference arm comprises a deflection reflector (33) formed on an end surface (35) of the optical chip (28) in such a manner that the reference light is cross-coupled between a first light guide (10a) forming a first portion of the reference arm (10) and a second light guide (10b) forming a second portion of the reference arm (10).

Abstract translation: 用于研究样品（15）的低相干干涉仪装置，特别是用于具有包括低相干光源的干涉仪配置（2）的多维成像的探针头（9），具有光出射开口（16）的探针头（9） 将光照射到样品中，光耦合器，参考反射器和检测器（13）。 干涉仪配置（2）的元件之间的光路形成干涉仪臂。 干涉仪配置（2）的光耦合器和参考臂被集成到公共光学芯片（28）中。 除了参考反射器（11）之外，参考臂包括形成在光学芯片（28）的端面（35）上的偏转反射器（33），使得参考光交替耦合在第一 形成参考臂（10）的第一部分的光导（10a）和形成参考臂（10）的第二部分的第二光导（10b）。

公开(公告)号：US5349437A

公开(公告)日：1994-09-20

申请号：US954521

申请日：1992-09-30

Applicant: Lloyd C. Bobb

Inventor： Lloyd C. Bobb

IPC: G01J5/58 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J5/58 ,  G01J9/02 ,  G01J2009/023 ,  G01J2009/0288

Abstract: Apparatus is provided to detect electromagnetic radiation, in which a radion-absorbing element is disposed on a short section of an optical waveguide to provide a thermal interface therebetween. Radiation is absorbed by the element, which thereby heats the waveguide, causing it to change its optical pathlength in proportion to the radiation absorbed. Interferometer apparatus is connected to measure this change in optical pathlength as a change in the interference condition. This device is highly sensitive and can be operated at room temperature.

Abstract translation: 提供了用于检测电磁辐射的装置，其中辐射吸收元件设置在光波导的短部分上以在其间提供热界面。 辐射被元件吸收，从而加热波导，导致其与吸收的辐射成比例地改变其光程长度。 连接干涉仪装置以测量光路长度的变化作为干扰条件的变化。 该设备高度灵敏，可在室温下运行。

公开(公告)号：US4515430A

公开(公告)日：1985-05-07

申请号：US502348

申请日：1983-06-10

Applicant: Leonard M. Johnson

Inventor： Leonard M. Johnson

IPC: G01J9/02 ,  G01N21/45 ,  G02B6/12 ,  G02B6/28 ,  G02B6/30 ,  G02B6/34 ,  G02F1/225 ,  G02B5/174

CPC classification number: G02B6/12007 ,  G01N21/45 ,  G02B6/12004 ,  G02B6/2804 ,  G02B6/29355 ,  G02B6/30 ,  G02B6/4215 ,  G02F1/225 ,  G01J2009/023

Abstract: An integrated optical transducer includes a single mode input optical waveguide, two single mode optical waveguide branches having different physical lengths, and a single mode output optical waveguide. When used as a transducer, the optical path lengths of the waveguide branches are dependent on the physical quantity measured. A plurality of such transducer elements may be used jointly to provide a binary output of high sensitivity and wide range of measurement. The waveguide element may also be used as an optical pulse source.

Abstract translation: 集成光学换能器包括单模输入光波导，具有不同物理长度的两个单模光波导分支和单模输出光波导。 当用作换能器时，波导分支的光路长度取决于测量的物理量。 多个这种换能器元件可以联合使用以提供高灵敏度和宽范围测量的二进制输出。 波导元件也可以用作光脉冲源。