公开(公告)号：US5557495A

公开(公告)日：1996-09-17

申请号：US313596

申请日：1994-09-29

申请人： Donald K. Belcher ,  David C. Bailey

发明人： Donald K. Belcher ,  David C. Bailey

IPC分类号： H01G5/06 ,  H01G5/01 ,  H01G5/16

CPC分类号： H01G5/06

摘要： A variable capacitor and method of varying capacitance in which two pressurally engaged plates having electrically conductive patterns on facing surfaces are separated by a low friction polytetrafluoroethylene (Teflon.TM.) dielectric disk so that the plates may be rotated relative to one another to vary capacitance. Each of the facing surfaces of the plates include two spaced semicircular patterns, one that is electrically connected to the capacitor and one that is not, for maintaining the separation of the plates from the disk. The dielectric disk may be ten to twenty times thicker than the semicircular patterns.

摘要翻译： 一种可变电容器和改变电容的方法，其中在相对表面上具有导电图案的两个压力接合板由低摩擦聚四氟乙烯（Teflon TM）电介质盘隔开，使得板可以相对于彼此旋转以改变电容。 板的每个相对表面包括两个间隔开的半圆形图案，一个电连接到电容器，另一个不是，用于保持板与盘的分离。 电介质盘可以比半圆形图案厚10至20倍。

公开(公告)号：US5355569A

公开(公告)日：1994-10-18

申请号：US951169

申请日：1992-09-25

申请人： Jiri Marek ,  Helmut Baumann ,  Guenther Findler ,  Michael Offenberg ,  Martin Willmann

发明人： Jiri Marek ,  Helmut Baumann ,  Guenther Findler ,  Michael Offenberg ,  Martin Willmann

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  H01G5/16

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/4979 ,  Y10T29/49792

摘要： A method for producing capacitive sensors which is used in particular for the parallel production of capacitive sensors with exactly defined stray capacitance. For this purpose, troughs (15, 16, 17) are cut along or parallel to the splitting lines (6), so that adjustment errors in the position of the cut, during separation of the sensors, and variations in the cut width have no effect on the stray capacitance.

摘要翻译： 一种用于制造电容传感器的方法，其特别用于并行生产具有精确定义的杂散电容的电容式传感器。 为此，沿分离线（6）切割槽（15,16,17），从而在分离传感器期间切割位置的调节误差和切割宽度的变化没有 影响杂散电容。

公开(公告)号：US5228341A

公开(公告)日：1993-07-20

申请号：US596367

申请日：1990-10-12

申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Satoshi Shimada ,  Masayuki Miki ,  Masahiro Matsumoto ,  Yoshihiro Yokota ,  Shotaro Naito

发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Satoshi Shimada ,  Masayuki Miki ,  Masahiro Matsumoto ,  Yoshihiro Yokota ,  Shotaro Naito

IPC分类号： G01D5/241 ,  G01P15/08 ,  G01P15/125 ,  H01G5/16 ,  H01L21/3065

CPC分类号： G01P15/125 ,  G01D5/2417 ,  G01P15/0802 ,  H01G5/16 ,  H01L21/3065 ,  G01P2015/0828

摘要： Disclosed is an acceleration detector which has an electrically conductive mass portion formed at a free end of a cantilever, and fixed electrodes arranged opposite to the mass portion through a gap so that the value of acceleration is detected on the basis of the change of capacitance between the mass portion and the fixed electrodes, and in which at least one space is formed in the inside of the mass portion to lighten the weight of the mass portion to thereby widen the range of measurement.

摘要翻译： 公开了一种加速度检测器，其具有形成在悬臂的自由端的导电质量部分，以及通过间隙与质量部分相对布置的固定电极，使得基于电容值的变化来检测加速度值 质量部分和固定电极，并且其中在质量部分的内部中形成至少一个空间以减轻质量部分的重量，从而扩大测量范围。

公开(公告)号：USRE33651E

公开(公告)日：1991-07-30

申请号：US255918

申请日：1988-10-11

申请人： Greg E. Blonder ,  Angelo A. Lamola ,  Robert A. Lieberman

发明人： Greg E. Blonder ,  Angelo A. Lamola ,  Robert A. Lieberman

IPC分类号： G01L9/00 ,  G02B6/26 ,  G09F9/37 ,  H01G5/16

CPC分类号： G09F9/372 ,  G01L9/0072 ,  G01L9/0077 ,  G02B6/266 ,  H01G5/16 ,  Y10T29/435

摘要： A variable gap device which comprises a suitable material with a cavity formed therein mounted over a body. Elements are formed on the surface of the body and on the top surface of the cavity. In one embodiment, the elements are electrodes of a variable capacitance device, and in another embodiment the elements are partial or total reflectors of incident light from an optical fiber. The surface of the cavity opposite the body is preferably flat and of the order of microns from the body.The device is fabricated by forming a removable layer over a temporary substrate. An appropriate element pattern is formed over the removable layer and the layer is etched in a configuration which will define the cavity. The deformable material is encapsulated over this structure and then removed from the substrate with the element remaining in the cavity. Any removable material remaining in the cavity can then be etched away.

公开(公告)号：US4806783A

公开(公告)日：1989-02-21

申请号：US160256

申请日：1988-02-25

申请人： Richard S. Anderson

发明人： Richard S. Anderson

IPC分类号： G01L9/00 ,  G01L9/12 ,  H01G5/16 ,  H01G7/00

CPC分类号： H01G5/16 ,  G01L9/0005 ,  G01L9/0075 ,  G01L9/12 ,  Y10T307/779

摘要： Apparatus for producing output signal changes corresponding to fluid pressure changes includes:(a) a transducer responsive to applied input pressure changes to produce capacitance changes at a variable capacitor,(b) a first circuit to produce a cyclic wave, and connected with the variable capacitor,(c) a second circuit including a switch to connect the capacitor to ground when the cyclic wave is at a first level, thereby to charge the variable capacitor, and to connect the variable capacitor to a second capacitor when the cyclic wave is at a second level, whereby the charge becomes distributed on the variable and second capacitors, and whereby a sawtooth signal is produced at a junction associated with the capacitors,(d) an operational amplifier electrically coupled with that junction for integrating the sawtooth signal to produce a first output voltage,(e) the first circuit including a voltage controlled oscillator having an input side coupled with the output side of the operational amplifier thereby to produce the output signal in the form of a frequency which varies as a function of the first output voltage and which corresponds to the cyclic wave,(f) stray capacitance being introduced by electrical connections associated with the transducer and the second circuit, and including a third circuit operatively connected with second circuit for masking the effect of stray capacitance,(g) the second circuit including resistance connected between a source of DC voltage and the junction.

摘要翻译： 用于产生对应于流体压力变化的输出信号变化的装置包括：（a）响应于施加的输入压力变化以在可变电容器产生电容变化的换能器，（b）产生循环波的第一电路，并与变量 电容器，（c）第二电路，包括当循环波处于第一电平时将电容器连接到地的开关，从而对可变电容器充电，并且当循环波处于第一电平时将可变电容器连接到第二电容器 第二电平，由此电荷分布在可变和第二电容器上，并且由此在与电容器相关联的结处产生锯齿波信号，（d）与该结电耦合的运算放大器，用于积分锯齿波信号以产生 第一输出电压，（e）第一电路包括具有与操作的输出侧耦合的输入侧的压控振荡器 从而产生作为第一输出电压的函数而变化并且对应于循环波的频率形式的输出信号，（f）通过与换能器和第二电路相关联的电连接引入的寄生电容 ，并且包括与第二电路可操作地连接以掩蔽寄生电容的影响的第三电路，（g）包括连接在直流电压源和连接点之间的电阻的第二电路。

公开(公告)号：US4625561A

公开(公告)日：1986-12-02

申请号：US678902

申请日：1984-12-06

申请人： Mati Mikkor

发明人： Mati Mikkor

IPC分类号： G01L9/12 ,  G01L9/00 ,  H01L29/84 ,  H01G5/16

CPC分类号： G01L9/0073 ,  Y10T29/43 ,  Y10T29/49877

摘要： A capacitive pressure sensor uses two silicon wafers hermetically sealed to each other by recrystallized silicon formed by the migration of a ring of silicon-aluminum eutectic material from the wafer interface to the surface of one wafer. Within the ring of the eutectic a cavity with opposing conductive plates forms a capacitor. Another high conductivity path through the wafer can be formed simultaneously with the ring of eutectic material by placing an aluminum dot on the interior side of one silicon wafer. Thus, a high conductivity path is available through a silicon wafer for each of the two capacitor plates.

摘要翻译： 电容式压力传感器使用通过由硅 - 铝共晶材料环从晶片界面迁移到一个晶片的表面而形成的再结晶硅彼此气密密封的两个硅晶片。 在共晶体的环内，具有相对导电板的腔形成电容器。 可以通过在一个硅晶片的内侧放置铝点，通过晶片的另一高导电性路径与共晶材料环同时形成。 因此，通过用于两个电容器板中的每一个的硅晶片可获得高导电性路径。

公开(公告)号：US4609966A

公开(公告)日：1986-09-02

申请号：US784198

申请日：1985-10-04

申请人： Heikki Kuisma

发明人： Heikki Kuisma

IPC分类号： H01L27/04 ,  G01L9/00 ,  G01L9/12 ,  H01G5/16 ,  H01L21/822 ,  H01G7/00

CPC分类号： G01L9/0073 ,  H01G5/16

摘要： Described herein is a capacitive absolute pressure transducer including a flat base plate (9) of insulating material, e.g., of glass, with a fixed capacitor electrode (10), aligned on the base plate. A silicon-material moving diaphragm electrode (5) of the capacitor is at least partly aligned with the fixed electrode (10), properly spaced to implement a hermetically sealed vacuum chamber (7) between the fixed electrode (10) and moving diaphragm electrode (5). Electrical contacts (12) are attached to the fixed electrode (10) and the moving diaphragm electrode (5). According to the invention, the flat base plate (9) is bonded to an electrically conductive wafer (8) to implement a laminated substrate (2), the diaphragm electrode (5) fabricated integral with a surrounding and essentially thicker collar part (18), and the electrical contact to the fixed capacitor plate (10) in the area of the vacuum chamber (7) is a well (11, 12) extending through the base plate (9) to the wafer (8).

摘要翻译： 这里描述的是一种电容式绝对压力传感器，其包括具有固定电容器电极（10）的绝缘材料（例如玻璃）的平坦基板（9），其在基板上对准。 电容器的硅材料移动隔膜电极（5）至少部分地与固定电极（10）对齐，适当地隔开以在固定电极（10）和活动隔膜电极（10）之间实现密封的真空室（7） 5）。 电触头（12）附接到固定电极（10）和活动隔膜电极（5）。 根据本发明，平板式基板（9）与导电晶片（8）接合以实现叠层基板（2），隔膜电极（5）与周围的和基本上较厚的凸缘部分（18）整体制成， ，并且在真空室（7）的区域中与固定电容器板（10）的电接触是穿过基板（9）延伸到晶片（8）的阱（11,12）。

公开(公告)号：US4495820A

公开(公告)日：1985-01-29

申请号：US426084

申请日：1982-09-28

申请人： Satoshi Shimada ,  Kazuji Yamada ,  Seikou Suzuki ,  Motohisa Nishihara

发明人： Satoshi Shimada ,  Kazuji Yamada ,  Seikou Suzuki ,  Motohisa Nishihara

IPC分类号： G01L9/12 ,  G01L9/00 ,  H01G5/16 ,  H01L27/20 ,  H01G7/00 ,  H01L29/84

CPC分类号： H01L27/20 ,  G01L9/0073 ,  H01G5/16

摘要： A capacitive pressure sensor and its manufacturing method are disclosed. An amplifier is formed on the main surface of a first semiconductor substrate by a diffusion process, and its surface is covered with an insulating film. An electrode is vapor-deposited on the surface of the amplifier and electrically connected to the amplifier through a through hole formed in the insulating film. For forming a diaphragm, the surface of a second semiconductor substrate disposed facing the electrode to form a capacitor, which is opposite to the surface of the second semiconductor substrate facing the electrode, is partially etched away to form a depression. The first and second semiconductor substrates are anodically bonded to each other using a glass layer.

摘要翻译： 公开了一种电容式压力传感器及其制造方法。 通过扩散处理在第一半导体衬底的主表面上形成放大器，并且其表面被绝缘膜覆盖。 电极沉积在放大器的表面上，并通过形成在绝缘膜上的通孔与放大器电连接。 为了形成光阑，第二半导体衬底的与电极相对配置以形成与面向电极的第二半导体衬底的表面相反的电容器的表面被部分蚀刻掉以形成凹陷。 使用玻璃层将第一和第二半导体衬底彼此阳极接合。

公开(公告)号：US4475142A

公开(公告)日：1984-10-02

申请号：US529915

申请日：1983-09-07

申请人： Daniel R. Sparks

发明人： Daniel R. Sparks

IPC分类号： H01H13/00 ,  H01H13/50 ,  H03K17/975 ,  H01G5/16 ,  H01H3/12

CPC分类号： H01H13/50 ,  H03K17/975

摘要： A capacitance keyboard switch is provided which reduces in a keyboard the overall space requirements therefore while providing at the same time the property of increasing the switch module force curve in the activating movement thereof. The tactile feel construction includes a reduced number of integrally molded inexpensive parts.

摘要翻译： 提供了一种电容式键盘开关，其减少了键盘的整体空间要求，同时同时提供了在其启动运动中增加开关模块力曲线的性质。 触觉结构包括减少数量的整体成型的廉价部件。

公开(公告)号：US4408252A

公开(公告)日：1983-10-04

申请号：US349349

申请日：1982-02-16

申请人： Andrew Voge ,  Daniel R. Sparks ,  Barry W. Mullins

发明人： Andrew Voge ,  Daniel R. Sparks ,  Barry W. Mullins

IPC分类号： G06F3/02 ,  H01H13/00 ,  H03K17/975 ,  H01G5/16 ,  H01H3/12

CPC分类号： H03K17/975

摘要： A capacitance keyboard switch is provided which is of substantially reduced vertical dimensions for reducing in a keyboard the overall space requirements therefore. The switch of the invention has an overall height of only 0.750 inches (19.05 mm), and a length of travel of as much as 0.150 inches (3.81 mm). This is achieved by eliminating a housing for the switch altogether, utilizing a cooperating plunger-snap-in guide combination, and a single sheet movable capacitor plate which cooperates with a plate on the printed circuit board. In addition, the entire assembly is mounted and supported on the printed circuit board with the components snapped together without the use of separate hardware, such as screws or nuts.

摘要翻译： 提供了一种电容键盘开关，其具有基本上减小的垂直尺寸，从而减少了键盘的整体空间要求。 本发明的开关的整体高度仅为0.750英寸（19.05mm），行程长度为0.150英寸（3.81mm）。 这通过使用配合的柱塞 - 卡入式导向组合来消除用于开关的壳体，以及与印刷电路板上的板配合的单个片状可移动电容器板来实现。 此外，整个组件安装和支撑在印刷电路板上，其组件被卡扣在一起，而不使用单独的硬件，例如螺钉或螺母。