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    Capacitance type accelerometer
    8.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5392651A

    公开(公告)日：1995-02-28

    申请号：US161456

    申请日：1993-12-06

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leading wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的槽分别连接到导电层的导线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

    Capacitive type semiconductor accelerometer
    9.
    发明授权
    Capacitive type semiconductor accelerometer 失效
    电容式半导体加速度计

    公开(公告)号：US5243861A

    公开(公告)日：1993-09-14

    申请号：US755838

    申请日：1991-09-06

    申请人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    发明人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    IPC分类号： B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

    CPC分类号： B81B7/007 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48463

    摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.

    摘要翻译： 电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。 第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。 第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。 下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。 首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极 所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极， 下玻璃板。

    Capacitance type accelerometer
    10.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5559290A

    公开(公告)日：1996-09-24

    申请号：US457491

    申请日：1995-06-01

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leeding wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的凹槽连接到导电层的引线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。