Carbon nanotube fiber cathode
    55.
    发明授权
    Carbon nanotube fiber cathode 有权
    碳纳米管纤维阴极

    公开(公告)号:US08766522B1

    公开(公告)日:2014-07-01

    申请号:US13105249

    申请日:2011-05-11

    Abstract: Improved field emission cathodes comprise a fiber of highly aligned and densely packed single-wall carbon nanotubes, double-wall carbon nanotubes, multi-wall carbon nanotubes, grapheme nanoribbons, carbon nanofibers, and/or carbon planar nanostructures. The fiber cathodes provide superior current carrying capacity without degradation or adverse effects under high field strength testing. The fibers also can be configured as multi-fiber field emission cathodes, and the use of low work function coatings and different tip configurations further improves their performance.

    Abstract translation: 改进的场发射阴极包括高度排列和密集堆叠的单壁碳纳米管,双壁碳纳米管,多壁碳纳米管,图形纳米带,碳纳米纤维和/或碳平面纳米结构的纤维。 纤维阴极在高场强测试下提供卓越的载流能力而不降解或不利影响。 纤维也可以配置为多纤维场发射阴极,并且使用低功函数涂层和不同尖端配置进一步提高其性能。

    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
    56.
    发明授权
    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission 有权
    用于多光束光刻的系统,方法和装置,包括用于均匀电子发射的分配器阴极

    公开(公告)号:US07710009B2

    公开(公告)日:2010-05-04

    申请号:US11650310

    申请日:2007-01-05

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
    57.
    发明授权
    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission 失效
    用于多光束光刻的系统,方法和装置,包括用于均匀电子发射的分配器阴极

    公开(公告)号:US07215070B2

    公开(公告)日:2007-05-08

    申请号:US10778787

    申请日:2004-02-13

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

    Dispenser cathode
    58.
    发明申请
    Dispenser cathode 失效
    分配器阴极

    公开(公告)号:US20060028114A1

    公开(公告)日:2006-02-09

    申请号:US10778787

    申请日:2004-02-13

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

    Electron gun having a cathode with limited electron discharge region
    59.
    发明授权
    Electron gun having a cathode with limited electron discharge region 失效
    电子枪具有有限的电子放电区域的阴极

    公开(公告)号:US5990608A

    公开(公告)日:1999-11-23

    申请号:US975248

    申请日:1997-11-21

    CPC classification number: H01J3/029 H01J1/20 H01J29/04

    Abstract: An electron gun provides an improved focusing characteristic of electron beams surely and effectively, and permits position alignment to be relatively easy in assembling thereof. In an electron gun which includes a cathode for discharging electrons and a plurality of grids each having electron passing-through holes for guiding the electrons discharged from the cathode unidirectionally, an electron dischargeable region is formed in an electron discharging plane of the cathode, which is band-shaped. In addition, the length of the band-shaped area constituting the electron dischargeable region on its shorter side is less than 80% of the diameter of the area from where electrons are discharged when a practical maximum current is taken out without limiting the electron dischargeable region.

    Abstract translation: 电子枪确保和有效地提供电子束的改进的聚焦特性,并且允许位置对准在组装时相对容易。 在包括用于放电电子的阴极的电子枪和多个具有用于引导从阴极单向排出的电子的电子通过孔的栅格中,在阴极的电子放电平面中形成电子放电区域,这是 带状。 此外,构成电子可放电区域的短边的带状区域的长度小于当取出实际最大电流时电子排出的区域的直径的80%,而不限制电子可放电区域 。

    Fabrication method of cathode member and electronic tube equipped
therewith
    60.
    发明授权
    Fabrication method of cathode member and electronic tube equipped therewith 失效
    阴极部件和配备有电子管的电子管的制造方法

    公开(公告)号:US5881355A

    公开(公告)日:1999-03-09

    申请号:US120373

    申请日:1998-07-22

    Abstract: A method of fabricating a cathode member or pellet is provided, which realizes the sufficiently large increase of the electron emission capability by the current activation process and that prevents the maximum cathode current from being lowered as long as an electron emissive agent exists in the cathode member. First, (a) a nickel powder and a rare-earth-metal oxide powder are provided. (b) The nickel powder and the rare-earth-metal oxide powder are uniformly mixed together, thereby producing a first powder mixture. (c) The first powder mixture is heated in a hydrogen atmosphere, an inert atmosphere, or a vacuum atmosphere, thereby producing an intermetallic compound of nickel and the rare-earth metal in the first powder mixture. (d) The first powder mixture containing the intermetallic compound is uniformly mixed with an electron-emissive agent powder, thereby producing a second powder mixture. (e) The second powder mixture is sintered by a HIP process, thereby forming a cathode member. The intermetallic compound produced in the first powder mixture has a function to chemically decompose the electron emissive agent to thereby increase the electron emission performance of the electron emissive agent.

    Abstract translation: 提供一种制造阴极部件或丸粒的方法,其通过电流活化过程实现了电子发射能力的足够大的增加,并且只要阴极部件中存在电子发射剂,就可以防止最大的阴极电流降低 。 首先,提供(a)镍粉和稀土金属氧化物粉末。 (b)将镍粉末和稀土金属氧化物粉末均匀混合,制成第一粉末混合物。 (c)将第一粉末混合物在氢气氛,惰性气氛或真空气氛中加热,由此在第一粉末混合物中产生镍和稀土金属的金属间化合物。 (d)将含有金属间化合物的第一粉末混合物与电子发射剂粉末均匀混合,从而产生第二粉末混合物。 (e)通过HIP工艺烧结第二粉末混合物,从而形成阴极部件。 在第一粉末混合物中产生的金属间化合物具有化学分解电子发射剂的功能,从而增加电子发射剂的电子发射性能。

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