Abstract:
A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
Abstract:
There is a sweep lock having a housing with a sweep connected to the bottom surface of the housing. The sweep has a handle portion and a tongue portion, and is adapted to move from a first position to a second position, whereby said tongue is in an extended position in one of said first and second positions. The housing has a spring means having first and second ends. The first end is secured to the housing, and the second end is secured to the sweep.
Abstract:
A facility procuring information about a distinguished property from its owner that is usable to refine an automatic valuation of the distinguished property is described. The facility displays information about the distinguished property used in the automatic valuation of the distinguished property. The facility obtains user input from the owner adjusting at least one aspect of information about the distinguished property used in the automatic valuation of the distinguished property. The facility then displays to the owner a refined valuation of the distinguished property that is based on the adjustment of the obtained user input.
Abstract:
A spark plug capable of removing the remaining electric charges is proposed. The spark plug can be installed in a vehicle and has an insulating body, a center electrode, a conductive housing and a conductive wire. The center electrode is passed through the insulating body. The conductive housing is disposed outside the insulating body. One end of the conductive wire is connected to the conductive housing and the other end of the conductive wire is fixed on a negative electrode of a battery of the vehicle. Since the electric charges remaining in the spark plug can be removed by the conductive wire after the high-voltage current sent from the ignition system induces the sparks, the present invention can avoid the damage of the spark plug to keep the spark plug in good status, maintain the efficiency of the engine, and make the car safer in usage.
Abstract:
A resistance induction wire layout on a touch panel includes a substrate, a first resistance induction wire, a second resistance induction wire, a third resistance induction wire, a fourth resistance induction wire and a fifth resistance induction wire. The substrate has a first surface being coated with a conductive material. The first, the second, the third, the fourth and the fifth resistance induction wires are laid on the conductive material in a way of being arranged discontinuosly. When a voltage signal entering the touch panel from one of the four nodal points can be reached to each sector of the fifth resistance inducting wire via the first, the second, the third and the fourth resistance inducting wires such that each of the sectors can acquire a consistent voltage value.
Abstract:
A multiple test probe system is disclosed. The multiple test probe system includes a support and a mount pivotally coupled to the support. The mount is capable of pivoting to a number of testing positions. A number of probe assemblies are coupled to the mount and associated with a corresponding number of testing positions. The probe assemblies include a number of electrical contacts coupled to a number of wires in a probe bus regardless of a testing position of the mount. The multiple test probe system further includes an indexing device coupled to the mount to cause the mount to move between the testing positions, whereby the indexing device is a Geneva Mechanism.
Abstract:
An electroplating apparatus includes a cathode structure, an anode structure, a power supply, and a pressurized electrolyte source. The cathode structure is configured to engage a perimeter portion of a workpiece such as a semiconductor wafer, and the anode structure includes an outlet. The power supply is coupled between the cathode structure and the anode structure. The pressurized electrolyte source is coupled to the anode structure to provide an electrically continuous fluid jet of an electrolyte from the outlet to be directed to a surface of the workpiece that is to be electroplated. A method for electroplating a workpiece includes electrically engaging a perimeter portion of the workpiece with a cathode structure, and directing an electrically continuous fluid jet of electrolyte having positively charged ions towards a surface of the workpiece that is to be electroplated. Preferably, there is a mechanism for providing relative motion between the workpiece and the jet of electrolytes, such as a mechanism for moving the electrically continuous fluid jet of electrolyte to a number of radial positions as the workpiece is rotated around an axis of rotation.
Abstract:
Disclosed is a wafer handling and testing apparatus. The wafer handling and testing apparatus includes a support assembly, a wafer handling assembly, and a probe assembly. The support assembly is capable of supporting a wafer to be tested and is also capable of rotating the wafer for testing. The wafer handling assembly is arranged to move the wafer to and from the support assembly. The wafer handling assembly is capable of moving the along a first axis and a second axis. The first axis is preferably orthogonal to the second axis. The wafer probe is arranged to test the wafer when the wafer is placed on the support assembly.
Abstract:
This invention relates to compounds which possess immunosuppressive and/or anti tumor and/or antinflammatory activity in vivo and/or inhibit thymocyte proliferation in vitro. These compounds are therefore useful in the treaiment of transplantation rejection, autoimmune diseases such as lupus, rheumatoid ardiritis, diabetes mellitus, multiple sclerosis and in the treatment of Candida albicans infections and also in treatment of diseases of inflammation. These compounds are represented by the formula below ##STR1## wherein W and Y are OR.sup.1 and X and Z together form a bond or W and X are OR.sup.2 and Y and Z together form a bond, wherein:R.sup.1 is selected from --(CH.sub.2).sub.n --Ar with a proviso that Ar is not phenyl,--(CH.sub.2 CH.sub.2 O).sub.n CH.sub.3 with a proviso that n is greater than one,--CH.sub.2 CH.sub.2 CH.sub.2 O(CH.sub.2 CH.sub.2 O).sub.m --CH.sub.3,--(CH.sub.2).sub.n --CH.sub.2 CH(OR.sup.3)CH.sub.2 OR.sup.4 where R.sup.3 and R.sup.4 are H, C.sub.1 -C.sub.10 alkyl, or R.sup.3 and R.sup.4 together are ethylene, methylene or dimethylmethylene;--CH.sub.2 (CH.sub.2).sub.n --OR.sup.3 with a proviso that R.sup.3 is not H, C.sub.1 -C.sub.10 alkyl, or C(O)C.sub.1 -C.sub.10 alkyl;and --CH.sub.2 (CH.sub.2).sub.n --X where X is F, Cl, Br or I;R.sup.2 is selected from H, C.sub.1 -C.sub.10 alkyl, Ar(CH.sub.2).sub.n --, C.sub.3 -C.sub.10 alkenyl, --(CH.sub.2 (CH.sub.2 O).sub.n CH.sub.3, --CH.sub.2 CH.sub.2 CH.sub.2 O(CH.sub.2 CH.sub.2 O).sub.m --CH.sub.3, --CH.sub.2 (CH.sub.2).sub.n --OR.sup.3, --CH.sub.2 (CH.sub.2).sub.n --Xwhere X is F, Cl, Br or I;and --(CH.sub.2).sub.n --CH.sub.2 CH(OR.sup.5)CH.sub.2 OR.sup.6 where R.sup.5 and R.sup.6 are selected independently from H, C.sub.1 -C.sub.10 alkyl, --(CH.sub.2).sub.n --Ar, --CONH(CH.sub.2).sub.n --Ar or COC(CH.sub.3).sub.2 --(CH.sub.2).sub.n --Ar, --COR.sup.7 and --CO.sub.2 R.sup.7, where R.sup.7 is C.sub.1 -C.sub.6 alkyl, C.sub.2 -C.sub.6 alkenyl, or Ar; or R.sup.5 and R.sup.6 together are methylene, ethylene, or dimethylmethylene;R.sup.3 and R.sup.4 indepently are H, methyl, --(CH.sub.2).sub.n CH.sub.3, --(CH.sub.2).sub.n Ar, --(CH.sub.2).sub.n CH.dbd.CH.sub.2, --C(O)R.sup.7, --CO.sub.2 R.sup.7, --CONH(CH.sub.2).sub.n Ar or --C(O)C(CH.sub.3).sub.2 --(CH.sub.2).sub.n Ar;Ar is selected independently from phenyl, pyridinyl, quinolinyl, indolyl, furanyl, 1, 2, 3-triazolyl and tetrazolyl;n=1-10 independently; andm=1-5 independently,or a pharmaceutically acceptable acid addition salt where one can be formed.
Abstract:
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R--.THETA. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.