公开(公告)号：US07745248B2

公开(公告)日：2010-06-29

申请号：US12288009

申请日：2008-10-14

申请人： Kwan Kyu Park ,  Mario Kupnik ,  Butrus T. Khuri-Yakub

发明人： Kwan Kyu Park ,  Mario Kupnik ,  Butrus T. Khuri-Yakub

IPC分类号： H01L21/00

CPC分类号： B06B1/0292

摘要： The current invention provides methods of fabricating a capacitive micromachined ultrasonic transducer (CMUT) that includes oxidizing a substrate to form an oxide layer on a surface of the substrate having an oxidation-enabling material, depositing and patterning an oxidation-blocking layer to form a post region and a cavity region on the substrate surface and remove the oxidation-blocking layer and oxide layer at the post region. The invention further includes thermally oxidizing the substrate to grow one or more oxide posts from the post region, where the post defines the vertical critical dimension of the device, and bonding a membrane layer onto the post to form a membrane of the device. A maximum allowed second oxidation thickness t2 can be determined, that is partially based on a desired step height and a device size, and a first oxidation thickness t1 can be determined that is partially based on the determined thickness t2.

摘要翻译： 本发明提供制造电容微加工超声换能器（CMUT）的方法，其包括氧化基底以在具有可氧化的材料的基底的表面上形成氧化物层，沉积和图案化氧化阻挡层以形成柱 区域和衬底表面上的空腔区域，并且在后部区域移除氧化阻挡层和氧化物层。 本发明还包括热氧化衬底以从柱区域生长一个或多个氧化物柱，其中柱定义了器件的垂直临界尺寸，以及将膜层结合到柱上以形成器件的膜。 可以确定最大允许的第二氧化厚度t2，其部分地基于期望的台阶高度和装置尺寸，并且可以基于确定的厚度t2来确定第一氧化厚度t1。

公开(公告)号：US07741686B2

公开(公告)日：2010-06-22

申请号：US11880459

申请日：2007-07-20

申请人： Butrus T. Khuri-Yakub ,  Xuefeng Zhuang ,  Arif Sanli Ergun

发明人： Butrus T. Khuri-Yakub ,  Xuefeng Zhuang ,  Arif Sanli Ergun

IPC分类号： H01L29/93

CPC分类号： H01L27/1203 ,  B06B1/0292

摘要： A one or two-dimensional capacitive micro-machined ultrasonic transducer (CMUT) array with supporting frame is provided. The CMUT array has at least three array elements deposited on a conductive substrate. The invention also has at least one CMUT cell in the array element, a conductive top layer deposited to a top side of the element, and a conductive via disposed within the elements. The via is isolated from the conductive top layer and conducts with the substrate. There are at least two isolation trenches in the conductive substrate, and the trenches are disposed between adjacent vias to conductively isolating the vias. A substrate region between the trenches forms a mechanical support frame. At least one conductive electrode is deposited to a bottom surface of the conductive substrate, where the electrode conducts with the via. The support frame eliminates the need for a carrier wafer in the process steps.

摘要翻译： 提供具有支撑框架的一维或二维电容微加工超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在导电衬底上的至少三个阵列元件。 本发明还具有阵列元件中的至少一个CMUT单元，沉积到元件的顶侧的导电顶层和设置在元件内的导电通孔。 通孔与导电顶层隔离并与衬底导通。 在导电衬底中存在至少两个隔离沟槽，并且沟槽被布置在相邻的通孔之间以导电隔离通孔。 沟槽之间的衬底区域形成机械支撑框架。 至少一个导电电极沉积到导电基底的底表面上，其中电极与通孔导通。 支撑框架消除了在工艺步骤中对载体晶片的需要。

公开(公告)号：US20100152559A1

公开(公告)日：2010-06-17

申请号：US12563887

申请日：2009-09-21

申请人： Xuefeng Cheng ,  Daniel Hwan Kim ,  Butrus T. Khuri-Yakub

发明人： Xuefeng Cheng ,  Daniel Hwan Kim ,  Butrus T. Khuri-Yakub

IPC分类号： A61B5/1455

CPC分类号： A61B5/0059 ,  A61B5/0048 ,  A61B5/0261 ,  A61B5/029 ,  A61B5/14539 ,  A61B5/14542 ,  A61B5/14551 ,  A61B5/1464 ,  A61B5/413 ,  A61B5/489 ,  A61B8/065 ,  A61B8/08 ,  A61B8/488 ,  G01S15/8968

摘要： Medical diagnostic system, apparatus and methods are disclosed. Optical transmitters generate radiation-containing photons having a specific interaction with at least one target chromophore in a target structure, preferably a blood vessel such as the interior jugular vein. The optical transmitters transmit the radiation into at least a first area including a substantial portion of the target structure and into a second area not including a substantial portion of the target structure. Optical receivers detect a portion radiation scattered from at least the first area and the second area. A processor estimates oxygenation, pH or cardiac output based on the scattered radiation detected from the first area, and the scattered radiation from the second area.

摘要翻译： 公开了医疗诊断系统，装置和方法。 光学发射器产生具有与目标结构中的至少一个目标发色团特别相互作用的辐射含有光子，优选为诸如颈内静脉的血管。 光发射机将辐射发射到包括目标结构的大部分的至少第一区域中，并进入不包括目标结构的大部分的第二区域。 光接收器检测从至少第一区域和第二区域散射的部分辐射。 处理器基于从第一区域检测到的散射辐射和来自第二区域的散射辐射来估计氧合，pH或心输出量。

公开(公告)号：US07530952B2

公开(公告)日：2009-05-12

申请号：US10817381

申请日：2004-04-01

申请人： Yongli Huang ,  Butrus T. Khuri-Yakub

发明人： Yongli Huang ,  Butrus T. Khuri-Yakub

IPC分类号： A61B8/00 ,  H04R19/00

CPC分类号： B06B1/0292

摘要： A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with a patterned isolation layer having isolation posts or areas located in said cavity to prevent the electrodes for coming into contact during operation of the transducer, and to minimize the accumulation of charge as compared to a non-patterned isolation layer for preventing contact of the electrodes during operation of the transducer.

摘要翻译： 描述了一种电容式超声波换能器，其包括一个或多个电池，其包括由支撑电极间隔开的隔离电极限定的空腔，绝缘壁与图案化隔离层具有位于所述空腔中的隔离柱或区域，以防止电极进入 在传感器的操作期间接触，并且与非图案化隔离层相比最小化电荷的累积，以防止在换能器的操作期间电极的接触。

公开(公告)号：US20080221448A1

公开(公告)日：2008-09-11

申请号：US12072906

申请日：2008-02-27

申请人： Butrus T. Khuri-Yakub ,  Omer Oralkan ,  Goksen G. Yaralioglu

发明人： Butrus T. Khuri-Yakub ,  Omer Oralkan ,  Goksen G. Yaralioglu

IPC分类号： A61B8/00 ,  A61B18/20 ,  A61N7/00

CPC分类号： B06B1/0292 ,  A61B8/0833 ,  A61B8/0841 ,  A61B8/12 ,  A61B8/4483 ,  A61B8/4488 ,  A61B8/483 ,  A61B10/04 ,  A61B18/24 ,  A61B90/36 ,  A61B2090/3782 ,  A61B2562/028 ,  A61N7/022

摘要： Imaged-guided therapy for minimally invasive surgeries and interventions is provided. An image-guided device includes an elongate tubular member, such as a catheter, an annular array of capacitive micromachined ultrasound transducers (cMUTs) for real-time three-dimensional forward-looking acoustic imaging, and a therapeutic tool. The therapeutic tool is positioned inside an inner lumen of the elongate tubular member and can be a device for tissue ablation, such as a high intensity focused ultrasound (HIFU) device or a laser. The HIFU device is operable at high frequencies to have a sufficiently small focus spot, thus a high focal intensity. The imaging annular array is also operable at high frequencies for good acoustic imaging resolution. The high resolution forward-looking imaging array, in combination with the high frequency HIFU transducer, provides a single image-guided therapy device for precise tissue ablation and real-time imaging feedback.

摘要翻译： 提供了用于微创手术和干预措施的成像指导治疗。 图像引导装置包括细长管状构件，例如导管，用于实时三维前瞻性声学成像的电容微加工超声换能器（cMUT）的环形阵列和治疗工具。 治疗工具位于细长管状构件的内腔内，并且可以是用于组织消融的装置，例如高强度聚焦超声（HIFU）装置或激光。 HIFU装置可以在高频下操作以具有足够小的焦点，因此具有高焦距。 成像环形阵列也可在高频下操作以获得良好的声学成像分辨率。 高分辨率前瞻性成像阵列与高频HIFU传感器结合，提供了一个单一的图像引导治疗装置，用于精确的组织消融和实时成像反馈。

公开(公告)号：US20080190181A1

公开(公告)日：2008-08-14

申请号：US12069730

申请日：2008-02-11

申请人： Butrus T. Khuri-Yakub ,  Goksen G. Yaralioglu

发明人： Butrus T. Khuri-Yakub ,  Goksen G. Yaralioglu

IPC分类号： G01N29/04

CPC分类号： G01N29/022 ,  G01N2291/014 ,  G01N2291/02466

摘要： A mechanical resonator capable of providing an intrinsically high mechanical quality factor in immersion is provided. The resonator includes a membrane attached at its perimeter to a frame, such that a front side of the membrane is in contact with the liquid, and the back side of the membrane is not in contact with the liquid or the frame. The membrane can act as a mechanical resonator. The quality factor of this resonator is enhanced by providing a pressure release boundary region on the frame in proximity to the membrane and in contact with the liquid. The pressure release boundary region provides a soft boundary condition, in the sense that a mechanical impedance on the solid side of the solid-liquid interface is less than the liquid mechanical impedance. Providing such a soft boundary condition reduces the mechanical energy loss due to excitation of waves in the liquid, thereby improving resonator quality factor. Such high-Q resonators are particularly useful for sensor applications.

摘要翻译： 提供一种能够提供本质上高的浸入机械品质因子的机械谐振器。 谐振器包括在其周边附接到框架的膜，使得膜的前侧与液体接触，并且膜的背面不与液体或框架接触。 膜可以用作机械谐振器。 通过在框架上靠近膜并与液体接触来提供压力释放边界区域来增强该谐振器的品质因数。 压力释放边界区域提供了软边界条件，这在固体 - 液体界面的固体侧的机械阻抗小于液体机械阻抗的意义上。 提供这样的软边界条件降低了由于液体中的波的激发引起的机械能损失，从而改善了谐振器品质因数。 这种高Q谐振器对于传感器应用特别有用。

公开(公告)号：US06854338B2

公开(公告)日：2005-02-15

申请号：US09905087

申请日：2001-07-12

申请人： Butrus T. Khuri-Yakub ,  F. Levent Degertekin

发明人： Butrus T. Khuri-Yakub ,  F. Levent Degertekin

IPC分类号： G01F1/66 ,  G01N29/02 ,  G01N29/22

CPC分类号： B01F11/0258 ,  B01F13/0059 ,  G01F1/662 ,  G01F1/667 ,  G01N29/022 ,  G01N29/222 ,  G01N29/223 ,  G01N2291/011 ,  G01N2291/014 ,  G01N2291/017 ,  G01N2291/018 ,  G01N2291/02818 ,  G01N2291/02836 ,  G01N2291/02872 ,  G01N2291/0426 ,  G01N2291/0427

摘要： The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.

摘要翻译： 本发明提供了将微加工的超声换能器集成到微通道中的流体装置和系统。 超声波换能器产生和接收超声波。 传感器可以被设置和操作以测量诸如压力，密度，粘度，流速之类的流体特性，并且还可用于混合和泵送流体。

公开(公告)号：US06493288B2

公开(公告)日：2002-12-10

申请号：US09728713

申请日：2000-11-30

申请人： Butrus T. Khuri-Yakub ,  Abdullah Atalar ,  Arif S. Ergun ,  F. Levent Degertekin

发明人： Butrus T. Khuri-Yakub ,  Abdullah Atalar ,  Arif S. Ergun ,  F. Levent Degertekin

IPC分类号： H04R1900

CPC分类号： B06B1/0292 ,  G01H11/06 ,  G01S3/808 ,  G01S7/003 ,  H04R1/44 ,  H04R3/06 ,  H04R19/04

摘要： A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.

摘要翻译： 一种宽频带微机械麦克风，包括多个微加工单元，其类型包括由支撑在公共电极上的膜承载的电极，导电线与互连电极。 还描述了操作麦克风阵列的方法。

公开(公告)号：US06474786B2

公开(公告)日：2002-11-05

申请号：US09791991

申请日：2001-02-22

申请人： Gökhan Percin ,  Butrus T. Khuri-Yakub

发明人： Gökhan Percin ,  Butrus T. Khuri-Yakub

IPC分类号： B41J215

CPC分类号： B41J2/04 ,  B41J2202/15

摘要： A droplet ejector including a cylindrical reservoir closed at one end with an elastic membrane including at least one aperture. A bulk actuator at the other end for actuating the fluid for ejection through the aperture. Also disclosed is a micromachined two-dimensional array droplet ejector. The ejector includes a two-dimensional array of elastic membranes having orifices closing the ends of cylindrical fluid reservoirs. The fluid in the ejectors is bulk actuated to set up pressure waves in the fluid which cause fluid to form a meniscus at each orifice. Selective actuation of the membranes ejects droplets. In an alternative mode of operation, the bulk pressure wave has sufficient amplitude to eject droplets while the individual membranes are actuated to selectively prevent ejection of droplets.

摘要翻译： 一种液滴喷射器，其包括圆柱形容器，其一端在其上封闭，弹性膜包括至少一个孔。 在另一端处的用于致动流体以通过孔径喷射的主体致动器。还公开了一种微加工的二维阵列液滴喷射器。 喷射器包括具有闭合圆柱形流体储存器端部的孔的弹性膜的二维阵列。 喷射器中的流体被大量地致动以在流体中设置压力波，这导致流体在每个孔处形成弯液面。 膜的选择性驱动会喷出液滴。 在替代的操作模式中，主压力波具有足够的幅度来喷射液滴，同时单独的膜被致动以选择性地防止液滴喷射。

公开(公告)号：US06250161B1

公开(公告)日：2001-06-26

申请号：US09116649

申请日：1998-07-16

申请人： Butrus T. Khuri-Yakub ,  Susan Morton ,  F. Levent Degertekin

发明人： Butrus T. Khuri-Yakub ,  Susan Morton ,  F. Levent Degertekin

IPC分类号： G01N2900

CPC分类号： G01N29/07 ,  G01N29/075 ,  G01N29/46 ,  G01N2291/011 ,  G01N2291/014 ,  G01N2291/0237 ,  G01N2291/02881 ,  G01N2291/0421 ,  G01N2291/044 ,  G01N2291/048

摘要： There is provided a monitor and method for monitoring the condition of a photoresist film on a wafer in which the phase of high frequency ultrasonic pulses reflected from the wafer/photoresist interface provides an indication of the condition of the photoresist film.

摘要翻译： 提供了一种用于监测晶片上的光致抗蚀剂膜的状况的监视器和方法，其中从晶片/光致抗蚀剂界面反射的高频超声脉冲的相位提供光致抗蚀剂膜的状态的指示。