Multilayer substrate and method for producing the same, diamond film and method for producing the same
    61.
    发明申请
    Multilayer substrate and method for producing the same, diamond film and method for producing the same 审中-公开
    多层基板及其制造方法,金刚石膜及其制造方法

    公开(公告)号:US20100178234A1

    公开(公告)日:2010-07-15

    申请号:US12654797

    申请日:2010-01-04

    Inventor: Hitoshi Noguchi

    CPC classification number: C30B29/04 C30B25/105 C30B25/18 Y10T428/31678

    Abstract: The present invention is a multilayer substrate comprising, at least, a single crystal substrate, a diamond film vapor-deposited on the single crystal substrate, wherein the single crystal substrate is a single crystal Ir or a single crystal Rh and a method for producing a multilayer substrate comprising, at least, a step of vapor-depositing a diamond film on a single crystal substrate, wherein a single crystal Ir or a single crystal Rh is used as the single crystal substrate. As a result, there is provided a multilayer substrate having a high quality single crystal diamond film with a large area and with a high crystallinity as a continuous film in which the diamond and the single crystal substrate are not broken and a method for producing the multilayer substrate at low cost.

    Abstract translation: 本发明是至少包括单晶衬底,气相沉积在单晶衬底上的金刚石膜的多层衬底,其中单晶衬底是单晶Ir或单晶Rh,以及制造方法 至少包括在单晶衬底上气相沉积金刚石膜的步骤,其中使用单晶Ir或单晶Rh作为单晶衬底。 结果,提供了具有大面积且具有高结晶度的高质量单晶金刚石膜的多层基板作为不破坏金刚石和单晶基板的连续膜,以及制造多层膜的方法 底物低成本。

    Magnetic recording medium
    62.
    发明授权
    Magnetic recording medium 有权
    磁记录介质

    公开(公告)号:US07515383B2

    公开(公告)日:2009-04-07

    申请号:US11237973

    申请日:2005-09-29

    CPC classification number: G11B5/70678 G11B5/70 G11B5/714

    Abstract: Provided is a magnetic recording medium exhibiting good electromagnetic characteristics in high-density recording The magnetic recording medium employed for magnetically recording signals with a track width equal to or less than 2.0 μm and reproducing the magnetically recorded signals, wherein said magnetic recording medium comprises a magnetic layer comprising a hexagonal ferrite ferromagnetic powder and a binder or comprises a nonmagnetic layer comprise a nonmagnetic powder and a binder and a magnetic layer comprising a hexagonal ferrite ferromagnetic powder and a binder in this order on a nonmagnetic support. Said magnetic layer has a thickness equal to or less than 0.2 μm, and said hexagonal ferrite ferromagnetic powder has an average plate diameter being 1/30 or less of the magnetically recorded track width as well as ½ or less of the thickness of the magnetic layer.

    Abstract translation: 提供了一种在高密度记录中表现出良好电磁特性的磁记录介质。磁记录介质,用于磁记录磁道宽度等于或小于2.0μm的信号,并再现磁记录信号,其中所述磁记录介质包括磁 包含六方晶系铁氧体铁磁性粉末和粘合剂的层或包含非磁性层的非磁性层在非磁性载体上依次包含非磁性粉末和粘合剂以及包含六方晶系铁磁铁磁性粉末和粘合剂的磁性层。 所述磁性层具有等于或小于0.2μm的厚度,并且所述六方晶系铁氧体铁磁粉末的平均板直径是磁记录磁道宽度的1/30或更小,以及磁层的厚度的1/2或更小 。

    Stencil mask for ion implantation
    63.
    发明授权
    Stencil mask for ion implantation 失效
    用于离子注入的模板掩模

    公开(公告)号:US06979520B2

    公开(公告)日:2005-12-27

    申请号:US10854710

    申请日:2004-05-27

    Inventor: Hitoshi Noguchi

    CPC classification number: G03F1/20 H01J37/3171

    Abstract: There is disclosed a stencil mask for ion implantation used in an ion implantation process of semiconductor device fabrication comprising at least a base material portion and a stencil portion, wherein the stencil portion has a diamond layer. Thereby, there can be provided a stencil mask for ion implantation used in an ion implantation process of semiconductor device fabrication, which has high resistance to ion irradiation, and which can stably perform ion implantation of high precision and high purity for long time.

    Abstract translation: 公开了用于半导体器件制造的离子注入工艺中的用于离子注入的模板掩模,其包括至少基材部分和模板部分,其中模版部分具有金刚石层。 因此,可以提供一种用于半导体器件制造的离子注入工艺中的用于离子注入的模版掩模,其具有高的离子照射能力,并且可以长时间稳定地执行高精度和高纯度的离子注入。

    Polishing plate
    64.
    发明授权
    Polishing plate 失效
    抛光板

    公开(公告)号:US06860803B2

    公开(公告)日:2005-03-01

    申请号:US10269313

    申请日:2002-10-11

    Inventor: Hitoshi Noguchi

    CPC classification number: B24D7/14

    Abstract: There is disclosed a polishing plate for polishing a workpiece by rubbing the workpiece to be processed with the polishing plate, comprising at least a substrate and a polishing material, the polishing material being a vapor phase synthetic polycrystalline diamond film deposited on a surface of the substrate to rub the workpiece to be processed. The present invention provides a polishing plate of which production cost is low and which can effectively polish a surface of a workpiece to be processed comprising a very hard material such as DLC, SiC, SiN, Si or the like and extremely smooth the surface.

    Abstract translation: 公开了一种抛光板,用于通过用至少包括基板和抛光材料的抛光板摩擦待处理的工件来抛光工件,抛光材料是沉积在基板的表面上的气相合成多晶金刚石膜 摩擦要加工的工件。 本发明提供了一种抛光板,其制造成本低,并且可以有效地抛光包括非常硬的材料(例如DLC,SiC,SiN,Si等)的待处理工件的表面,并使表面非常光滑。

    Surface acoustic wave device
    65.
    发明申请
    Surface acoustic wave device 有权
    表面声波装置

    公开(公告)号:US20050001512A1

    公开(公告)日:2005-01-06

    申请号:US10836201

    申请日:2004-05-03

    CPC classification number: H03H9/02582 H03H3/08

    Abstract: There is disclosed a surface acoustic wave device having at least a diamond film, a piezoelectric-material film, and an electrode on a base material wherein all or some part of the diamond film consists of an electroconductive diamond in which a dopant is doped. Thereby, there can be provided a surface acoustic wave device wherein breakage of the substrate due to generation of static electricity can be prevented in a device manufacturing process so that the device manufacture yield can be increased, and electrification can be prevented at the time of real use so that high performance can be maintained for a long time, even if it is a surface acoustic wave device using diamond.

    Abstract translation: 公开了一种表面声波装置,其至少具有金刚石膜,压电材料膜和基材上的电极,其中金刚石膜的全部或部分由掺杂掺杂剂的导电金刚石构成。 因此,可以提供一种表面声波装置,其中在器件制造过程中可以防止由于静电产生导致的基板的断裂,从而可以提高器件的制造成品率,并且可以在实际的时候防止通电 使用这样的高性能可以长时间保持,即使它是使用金刚石的表面声波装置。

    Process for producing magnetic disk

    公开(公告)号:US06458432B1

    公开(公告)日:2002-10-01

    申请号:US09995274

    申请日:2001-11-26

    CPC classification number: G11B5/845 G11B5/70678 Y10S428/90

    Abstract: A process for producing a magnetic disk having a randomly oriented magnetic powder, comprises: applying a magnetic coating solution containing at least a magnetic powder to a web that is being continuously conveyed, so as to prepare a magnetic layer; applying a first external magnetic field to the magnetic layer while the magnetic layer is wet; and applying a second external magnetic field to the magnetic layer while the magnetic layer is wet, wherein: the first external magnetic field is applied with a set of a first pair of same-pole-opposed magnets with the web interposed therebetween and a second pair of same-pole-opposed magnets with the web interposed therebetween; the first and second pairs are provided on the same plane of the web and on two equal sides of an isosceles triangle so that a perpendicular line dropped from a base of the isosceles triangle forms a line perpendicular to a conveying direction of the web; and the second external magnetic field is an alternating magnetic field, and is applied with a pair of magnets with the web interposed therebetween; the pair of magnets being provided on the same plane of the web, and in a direction perpendicular to the conveying direction of the web.

    Diamond film for x-ray lithography and making method
    68.
    发明授权
    Diamond film for x-ray lithography and making method 失效
    金刚石薄膜用于X射线光刻和制作方法

    公开(公告)号:US06413681B1

    公开(公告)日:2002-07-02

    申请号:US09448295

    申请日:1999-11-24

    Inventor: Hitoshi Noguchi

    CPC classification number: C23C16/277 C23C16/271 C23C16/274 G03F1/22

    Abstract: A diamond film is formed on a silicon single crystal substrate by a microwave plasma CVD or hot filament CVD process using a source gas. The source gas consists essentially of 3.0% to 8.0% by volume of CH4, 87.0% to less than 97.0% by volume of H2, and more than 0.0% to 5.0% by volume of O2. A diamond film having a sufficient crystallinity to serve as a membrane for x-ray lithography and a precisely controlled tensile stress can be formed.

    Abstract translation: 通过使用源气体的微波等离子体CVD或热丝CVD工艺在硅单晶衬底上形成金刚石膜。 源气体基本上由3.0体积%至8.0体积%的CH 4,87.0%至小于97.0体积%的H 2和超过0.0%至5.0体积%的O 2组成。 可以形成具有足够的结晶度以用作用于x射线光刻的膜和精确控制的拉伸应力的金刚石膜。

    Magnetic recording medium
    69.
    发明授权
    Magnetic recording medium 失效
    磁记录介质

    公开(公告)号:US06291052B1

    公开(公告)日:2001-09-18

    申请号:US09106933

    申请日:1998-06-29

    Abstract: A magnetic recording medium which comprises a support having thereon a substantially nonmagnetic lower layer and a magnetic layer comprising a ferromagnetic metal powder or a ferromagnetic hexagonal ferrite powder dispersed in a binder provided on the lower layer, which is a magnetic recording medium for recording signals of from 0.17 to 2 G bit/inch2 of areal recording density, wherein the coercive force of the magnetic layer is 1,800 Oe or more, and the thickness unevenness of the support is 5% or less of the thickness of the support.

    Abstract translation: 一种磁记录介质,包括其上具有基本上非磁性的下层的支撑体和包含分散在下层中的粘合剂中的铁磁性金属粉末或铁磁性六角铁氧体粉末的磁性层,所述粘合剂是用于记录信号的信号的磁记录介质 面积记录密度为0.17至2G比特/英寸2,其中磁性层的矫顽力为1800Oe以上,并且载体的厚度不均匀度为载体厚度的5%以下。

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