公开(公告)号：US06894245B2

公开(公告)日：2005-05-17

申请号：US10007367

申请日：2001-10-22

申请人： Daniel J. Hoffman ,  Yan Ye ,  Dan Katz ,  Douglas A. Buchberger, Jr. ,  Xiaoye Zhao ,  Kang-Lie Chiang ,  Robert B. Hagen ,  Matthew L. Miller

发明人： Daniel J. Hoffman ,  Yan Ye ,  Dan Katz ,  Douglas A. Buchberger, Jr. ,  Xiaoye Zhao ,  Kang-Lie Chiang ,  Robert B. Hagen ,  Matthew L. Miller

IPC分类号： H05H1/46 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065 ,  B23K10/00

CPC分类号： H01J37/3244 ,  H01J37/32082 ,  H01J37/32183 ,  H01J37/3266

摘要： A plasma reactor for processing a semiconductor workpiece, includes a reactor chamber having a chamber wall and containing a workpiece support for holding the semiconductor support, the electrode comprising a portion of the chamber wall, an RF power generator for supplying power at a frequency of the generator to the overhead electrode and capable of maintaining a plasma within the chamber at a desired plasma ion density level. The overhead electrode has a capacitance such that the overhead electrode and the plasma formed in the chamber at the desired plasma ion density resonate together at an electrode-plasma resonant frequency, the frequency of the generator being at least near the electrode-plasma resonant frequency. The reactor further includes a set of MERIE magnets surrounding the plasma process area overlying the wafer surface that produce a slowly circulating magnetic field which stirs the plasma to improve plasma ion density distribution uniformity.

摘要翻译： 一种用于处理半导体工件的等离子体反应器，包括具有室壁并具有用于保持半导体支撑件的工件支撑件的反应室，所述电极包括室壁的一部分，RF发电机，用于以 发电机到顶置电极并且能够将室内的等离子体保持在期望的等离子体离子密度水平。 顶置电极具有这样的电容，使得在期望的等离子体离子密度下在室中形成的顶置电极和等离子体以电极 - 等离子体共振频率共振，发电机的频率至少接近电极 - 等离子体共振频率。 反应器还包括围绕晶片表面的等离子体处理区域的一组MERIE磁体，其产生缓慢循环的磁场，其搅动等离子体以改善等离子体离子密度分布均匀性。

公开(公告)号：US06853141B2

公开(公告)日：2005-02-08

申请号：US10192271

申请日：2002-07-09

申请人： Daniel J. Hoffman ,  Matthew L. Miller ,  Jang Gyoo Yang ,  Heeyeop Chae ,  Michael Barnes ,  Tetsuya Ishikawa ,  Yan Ye

发明人： Daniel J. Hoffman ,  Matthew L. Miller ,  Jang Gyoo Yang ,  Heeyeop Chae ,  Michael Barnes ,  Tetsuya Ishikawa ,  Yan Ye

IPC分类号： H05H1/46 ,  H01J27/16 ,  H01J37/08 ,  H01J37/32 ,  H01L21/3065 ,  H01J7/24

CPC分类号： H01J37/32091 ,  H01J37/3244 ,  H01J37/32623 ,  H01J37/3266

摘要： A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the sidewall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.

摘要翻译： 等离子体反应器包括真空外壳，其包括限定真空室的侧壁和顶板，以及腔室内的工件支撑件，并面向天花板以支撑平面工件，工件支撑件和天花板一起限定了工件之间的加工区域 支持和天花板。 工艺气体入口将工艺气体提供到腔室中。 等离子体源功率电极连接到RF功率发生器，用于将等离子体源功率电容耦合到腔室中，以在腔室内维持等离子体。 所述反应器还包括至少邻近所述天花板的顶部螺线管电磁体，所述架空螺线管电磁体，所述天花板，所述侧壁和所述工件支撑件沿着公共对称轴线定位。 电流源连接到第一螺线管电磁体并且在第一螺线管电磁体中提供第一电流，从而在腔室内产生与第一电流有关的磁场，第一电流具有使得 磁场增加等离子体离子密度在工件支撑表面附近的对称轴的径向分布的均匀性。

公开(公告)号：US06652712B2

公开(公告)日：2003-11-25

申请号：US10028646

申请日：2001-12-19

申请人： Shiang-Bau Wang ,  Daniel J. Hoffman ,  Chunshi Cui ,  Yan Ye ,  Gerardo Delgadino ,  David McParland ,  Matthew L. Miller ,  Douglas A. Buchberger, Jr. ,  Steven C. Shannon

发明人： Shiang-Bau Wang ,  Daniel J. Hoffman ,  Chunshi Cui ,  Yan Ye ,  Gerardo Delgadino ,  David McParland ,  Matthew L. Miller ,  Douglas A. Buchberger, Jr. ,  Steven C. Shannon

IPC分类号： C23C1600

CPC分类号： H01J37/321

摘要： An inductive antenna of a plasma reactor for processing a semiconductor wafer is connected to a radio frequency (RF) power source, and consists of a conductor arranged in successive loops that wind in opposing directions, adjacent pairs of the successive loops having facing portions in which current flow is parallel, the facing portions being sufficiently close to at least nearly share a common current path, whereby to form transitions across the facing portions between opposing magnetic polarizations.

摘要翻译： 用于处理半导体晶片的等离子体反应器的感应天线连接到射频（RF）电源，并且由布置在相反方向上的连续回路中的导体组成，相邻的一对连续的回路具有面对部分 电流流动是平行的，面对部分足够接近至少几乎共享公共电流路径，从而在相对的磁极化之间跨越相对部分形成过渡。

公开(公告)号：US06263087B1

公开(公告)日：2001-07-17

申请号：US09105495

申请日：1998-06-26

申请人： Matthew L. Miller

发明人： Matthew L. Miller

IPC分类号： G06K900

CPC分类号： H04L7/042 ,  H03M13/1515 ,  H03M13/152 ,  H03M13/19 ,  H03M13/23

摘要： A message in the form of a sequence of bits is encoded into relatively short, non-binary signals. The message (or vector) is divided into two halves. The encoder first determines an encoding of the message into a vector half the length of the eventual encoded vector. The half-length vector forms the first half of the encoded, and is negated to form the second half of the encoded vector. An identical synchronization signal is added to both halves of the encoded vector. The synchronization signal is used to compensate for the possibility that the received vector (or message) is cyclically rotated from the original vector. During decoding, the decoder first obtains the synchronization signal by adding the two halves of the vector together, canceling the encoded message. The synchronization signal is used to find the original cyclical shift of the vector. The decoder obtains the half-length encoded message vector by taking the difference between the two halves of the aligned full-length encoded vector. After decoding the vector into a bit sequence, the encoder re-encodes that bit sequence and compares the resulting vector with the original vector to determine whether the original vector truly encoded a message or was simply a noise signal.

摘要翻译： 以比特序列的形式的消息被编码成相对短的非二进制信号。 消息（或向量）分为两半。 编码器首先将消息的编码确定为最终编码向量长度的一半的向量。 半长矢量形成编码的前半部分，并且被否定以形成编码矢量的后半部分。 相同的同步信号被添加到编码矢量的两半。 同步信号用于补偿接收的矢量（或消息）从原始矢量循环旋转的可能性。 在解码期间，解码器首先通过将向量的两半加在一起来获得同步信号，取消编码的消息。 同步信号用于找到矢量的原始周期性移位。 解码器通过取得对准的全长编码矢量的两半之间的差来获得半长度编码的消息向量。 在将向量解码为比特序列之后，编码器对该比特序列进行重新编码，并将得到的矢量与原始矢量进行比较，以确定原始矢量是真实地编码消息还是仅仅是噪声信号。

公开(公告)号：US09809736B2

公开(公告)日：2017-11-07

申请号：US13601365

申请日：2012-08-31

申请人： Robert J. Murphy ,  Matthew L. Miller

发明人： Robert J. Murphy ,  Matthew L. Miller

IPC分类号： C09K8/03 ,  C09K8/512 ,  C09K8/516 ,  C09K8/68 ,  E21B21/00

CPC分类号： C09K8/03 ,  C09K8/512 ,  C09K8/516 ,  C09K8/685 ,  C09K2208/04 ,  E21B21/003

摘要： A method of servicing a wellbore in a subterranean formation comprising placing a wellbore servicing fluid comprising a lost-circulation composite material into a wellbore, wherein the lost-circulation composite material comprises a swellable component and a reinforcing component. A wellbore servicing fluid comprising a reinforcing component disposed within a swellable component wherein the swellable component comprises a crosslinked polymer.

公开(公告)号：US09285355B2

公开(公告)日：2016-03-15

申请号：US13361755

申请日：2012-01-30

申请人： Robert J. Murphy ,  Dale E. Jamison ,  Matthew L. Miller

发明人： Robert J. Murphy ,  Dale E. Jamison ,  Matthew L. Miller

IPC分类号： E21B49/00 ,  G01N33/28

CPC分类号： E21B49/008 ,  G01N33/2823

摘要： An apparatus for testing lost circulation materials (“LCMs”) for use in a formation is disclosed. The apparatus may comprise a LCM cell that contains at least one formation simulation component. A pressurized tank may be in fluid communication with the LCM cell, and may force a sample LCM slurry into the LCM cell. An LCM receiver may also be in fluid communication with the LCM cell, and may receive the LCM slurry that flows through the LCM cell.

摘要翻译： 公开了一种在地层中使用的用于测试流失物质（“LCM”）的装置。 该装置可以包括包含至少一个地层模拟部件的LCM单元。 加压罐可以与LCM电池流体连通，并且可以迫使样品LCM浆料进入LCM电池。 LCM接收器还可以与LCM单元流体连通，并且可以接收流过LCM单元的LCM浆料。

公开(公告)号：US09188522B2

公开(公告)日：2015-11-17

申请号：US13468802

申请日：2012-05-10

申请人： Dale E. Jamison ,  Robert J. Murphy ,  Matthew L. Miller ,  Sharath Savari

发明人： Dale E. Jamison ,  Robert J. Murphy ,  Matthew L. Miller ,  Sharath Savari

IPC分类号： G01N11/04 ,  G01N33/28

CPC分类号： G01N11/04 ,  G01N33/2823

摘要： Apparatus and methods for simulation of bore hole fractures are disclosed. A device for simulating a fracture in a subterranean formation comprises a housing, a gap in the housing, and one or more shims positioned inside the gap. The shims cover at least a portion of a surface of a wall forming the gap. The device further comprises an inlet for directing a sample fluid into the gap. The sample fluid flows through the gap and flows out of the gap through an outlet.

摘要翻译： 公开了用于模拟钻孔裂缝的装置和方法。 用于模拟地层中的断裂的装置包括壳体，壳体中的间隙和位于间隙内的一个或多个垫片。 垫片覆盖形成间隙的壁的表面的至少一部分。 该装置还包括用于将样品流体引导到间隙中的入口。 样品流体流过间隙并通过出口流出间隙。

公开(公告)号：US20130298662A1

公开(公告)日：2013-11-14

申请号：US13468802

申请日：2012-05-10

申请人： Dale E. Jamison ,  Robert J. Murphy ,  Matthew L. Miller ,  Sharath Savari

发明人： Dale E. Jamison ,  Robert J. Murphy ,  Matthew L. Miller ,  Sharath Savari

IPC分类号： E21B47/10

CPC分类号： G01N11/04 ,  G01N33/2823

摘要： Apparatus and methods for simulation of bore hole fractures are disclosed. A device for simulating a fracture in a subterranean formation comprises a housing, a gap in the housing, and one or more shims positioned inside the gap. The shims cover at least a portion of a surface of a wall forming the gap. The device further comprises an inlet for directing a sample fluid into the gap. The sample fluid flows through the gap and flows out of the gap through an outlet.

摘要翻译： 公开了用于模拟钻孔裂缝的装置和方法。 用于模拟地层中的断裂的装置包括壳体，壳体中的间隙和位于间隙内的一个或多个垫片。 垫片覆盖形成间隙的壁的表面的至少一部分。 该装置还包括用于将样品流体引导到间隙中的入口。 样品流体流过间隙并通过出口流出间隙。

公开(公告)号：US20130192358A1

公开(公告)日：2013-08-01

申请号：US13361755

申请日：2012-01-30

申请人： Robert J. Murphy ,  Dale E. Jamison ,  Matthew L. Miller

发明人： Robert J. Murphy ,  Dale E. Jamison ,  Matthew L. Miller

IPC分类号： E21B49/00

CPC分类号： E21B49/008 ,  G01N33/2823

摘要： An apparatus for testing lost circulation materials (“LCMs”) for use in a formation is disclosed. The apparatus may comprise a LCM cell that contains at least one formation simulation component. A pressurized tank may be in fluid communication with the LCM cell, and may force a sample LCM slurry into the LCM cell. An LCM receiver may also be in fluid communication with the LCM cell, and may receive the LCM slurry that flows through the LCM cell.

摘要翻译： 公开了一种在地层中使用的用于测试流失物质（“LCM”）的装置。 该装置可以包括包含至少一个地层模拟部件的LCM单元。 加压罐可以与LCM电池流体连通，并且可以迫使样品LCM浆料进入LCM电池。 LCM接收器还可以与LCM单元流体连通，并且可以接收流过LCM单元的LCM浆料。

公开(公告)号：US08379961B2

公开(公告)日：2013-02-19

申请号：US12496785

申请日：2009-07-02

申请人： Eric Cosatto ,  Harold Christopher Burger ,  Matthew L. Miller

发明人： Eric Cosatto ,  Harold Christopher Burger ,  Matthew L. Miller

IPC分类号： G06K9/00

CPC分类号： G06K9/00147

摘要： A method and system for detecting and counting mitotic figures in an image of a biopsy sample stained with at least one dye, includes color filtering the image in a computer process to identify pixels in the image that have a color which is indicative a mitotic figure; extracting the mitotic pixels in the image that are connected to one another in a computer process, thereby producing blobs of mitotic pixels; shape-filtering and clustering the blobs of mitotic pixels in a computer process to produce mitotic figure candidates; extracting sub-images of mitotic figures by cropping the biopsy sample image at the location of the blobs; extracting two sets of features from the mitotic figure candidates in two separate computer processes; determining which of the mitotic figure candidates are mitotic figures in a computer classification process based on the extracted sets of features; and counting the number of mitotic figures per square unit of biopsy sample tissue.

摘要翻译： 一种用于检测和计数用至少一种染料染色的活检样品的图像中的有丝分裂象的方法和系统，包括在计算机过程中对图像进行颜色过滤以识别图像中具有指示有丝分裂图的颜色的像素; 提取在计算机过程中彼此连接的图像中的有丝分裂像素，从而产生有丝分裂像素的斑点; 在计算机过程中形状过滤和聚集有丝分裂像素的斑点以产生有丝分裂的人物候选者; 通过在斑点的位置裁剪活检样本图像来提取有丝分裂图像的子图像; 在两个独立的计算机进程中从有丝分裂的人物中提取两组特征; 基于提取的特征集合确定计算机分类过程中的有丝分裂象候选者中的哪一个是有丝分裂图; 并计算每平方单位活检样本组织的有丝分裂数目。