公开(公告)号：US07518845B2

公开(公告)日：2009-04-14

申请号：US11422608

申请日：2006-06-07

申请人： Robert J. Gauthier, Jr. ,  Dimitrios K. Kontos ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Robert J. Gauthier, Jr. ,  Dimitrios K. Kontos ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H02H9/00 ,  H02H1/00

CPC分类号： H02H9/046

摘要： An electrostatic discharge (ESD) power clamp circuit including a RC-delay element coupled to a plurality of serialized inverter elements with a power clamp element and an ESD-triggered keeper device coupled to the plurality of inverters. During negative mode ESD events, the ESD-triggered keeper device is activated and assists the power clamp element to pull up and strongly conduct current to protect the circuit. Additionally, a method of ESD protection in a circuit is provided. The method includes coupling a RC-delay element to an input of a plurality of serialized inverter elements, coupling an output of the plurality of serialized inverters with an ESD-triggered keeper device and a power clamp element, triggering the ESD-triggered keeper device to turn on during negative ESD events and conducting current by the power clamp element with assistance of the ESD-triggered keeper device to protect the circuit as a result of negative ESD events.

摘要翻译： 一种静电放电（ESD）功率钳位电路，其包括耦合到多个串联反相器元件的RC延迟元件，其具有耦合到所述多个逆变器的功率钳位元件和ESD触发的保持器装置。 在负模式ESD事件期间，ESD触发的保护装置被激活，并且帮助电源钳位元件上拉并强烈地传导电流以保护电路。 另外，提供了电路中ESD保护的方法。 该方法包括将RC延迟元件耦合到多个串联反相器元件的输入端，将多个串联反相器的输出与ESD触发的保持器装置和功率钳位元件耦合，将ESD触发的保持器装置触发 在ESD ESD事件期间接通电源，并通过ESD触发的保护装置的辅助，通过电源钳位元件传导电流，以保护电路由于负ESD事件。

公开(公告)号：US08987073B2

公开(公告)日：2015-03-24

申请号：US13546509

申请日：2012-07-11

申请人： James P. Di Sarro ,  Robert J. Gauthier, Jr. ,  Junjun Li

发明人： James P. Di Sarro ,  Robert J. Gauthier, Jr. ,  Junjun Li

IPC分类号： H01L21/00 ,  H01L21/84 ,  H01L27/02 ,  H01L27/12 ,  H01L29/66

CPC分类号： H01L23/60 ,  H01L21/84 ,  H01L27/0251 ,  H01L27/1203 ,  H01L29/66545 ,  H01L29/66636 ,  H01L29/7841 ,  H01L2924/0002 ,  H01L2924/00

摘要： Device structures, design structures, and fabrication methods for a metal-oxide-semiconductor field-effect transistor. A gate structure is formed on a top surface of a substrate. First and second trenches are formed in the substrate adjacent to a sidewall of the gate structure. The second trench is formed laterally between the first trench and the first sidewall. First and second epitaxial layers are respectively formed in the first and second trenches. A contact is formed to the first epitaxial layer, which serves as a drain. The second epitaxial layer in the second trench is not contacted so that the second epitaxial layer serves as a ballasting resistor.

摘要翻译： 金属氧化物半导体场效应晶体管的器件结构，设计结构和制造方法。 栅极结构形成在衬底的顶表面上。 第一和第二沟槽形成在与栅极结构的侧壁相邻的衬底中。 第二沟槽横向形成在第一沟槽和第一侧壁之间。 第一和第二外延层分别形成在第一和第二沟槽中。 形成到作为漏极的第一外延层的接触。 第二沟槽中的第二外延层不接触，使得第二外延层用作镇流电阻器。

公开(公告)号：US08642452B2

公开(公告)日：2014-02-04

申请号：US13012137

申请日：2011-01-24

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H01L21/36

CPC分类号： H01L27/0255 ,  G06F17/5022 ,  G06F17/5045 ,  H01L27/0262 ,  H01L27/1203 ,  H01L29/6609 ,  H01L29/66393 ,  H01L29/7436 ,  H01L29/861

摘要： Device structures with a reduced junction area in an SOI process, methods of making the device structures, and design structures for a lateral diode. The device structure includes one or more dielectric regions, such as STI regions, positioned in the device region and intersecting the p-n junction between an anode and cathode. The dielectric regions, which may be formed using shallow trench isolation techniques, function to reduce the width of a p-n junction with respect to the width area of the cathode at a location spaced laterally from the p-n junction and the anode. The width difference and presence of the dielectric regions creates an asymmetrical diode structure. The volume of the device region occupied by the dielectric regions is minimized to preserve the volume of the cathode and anode.

公开(公告)号：US08610249B2

公开(公告)日：2013-12-17

申请号：US13434964

申请日：2012-03-30

申请人： James P. Di Sarro ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： James P. Di Sarro ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H01L21/02

CPC分类号： H01L27/0805 ,  H01L21/845 ,  H01L27/1211 ,  H01L28/90 ,  H01L29/94

摘要： Disclosed herein are embodiments of non-planar capacitor. The non-planar capacitor can comprise a plurality of fins above a semiconductor substrate. Each fin can comprise at least an insulator section on the semiconductor substrate and a semiconductor section, which has essentially uniform conductivity, stacked above the insulator section. A gate structure can traverse the center portions of the fins. This gate structure can comprise a conformal dielectric layer and a conductor layer (e.g., a blanket or conformal conductor layer) on the dielectric layer. Such a non-planar capacitor can exhibit a first capacitance, which is optionally tunable, between the conductor layer and the fins and a second capacitance between the conductor layer and the semiconductor substrate. Also disclosed herein are method embodiments, which can be used to form such a non-planar capacitor and which are compatible with current state of the art multi-gate non-planar field effect transistor (MUGFET) processing.

摘要翻译： 这里公开了非平面电容器的实施例。 非平面电容器可以包括在半导体衬底上方的多个鳍片。 每个翅片可以包括半导体衬底上的至少绝缘体部分和在绝缘体部分上方堆叠具有基本上均匀的导电性的半导体部分。 门结构可以穿过翅片的中心部分。 该栅极结构可以包括在电介质层上的共形介电层和导体层（例如，覆盖层或保形导体层）。 这种非平面电容器可以在导体层和散热片之间展现可选地可调谐的第一电容和导体层与半导体衬底之间的第二电容。 本文还公开了可用于形成这种非平面电容器并且与现有技术的多栅极非平面场效应晶体管（MUGFET）处理兼容的方法实施例。

公开(公告)号：US08575718B2

公开(公告)日：2013-11-05

申请号：US13289529

申请日：2011-11-04

申请人： Michael J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

发明人： Michael J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  William Tonti

IPC分类号： H01L23/52 ,  H01L21/82

CPC分类号： H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to e-fuse devices, and more particularly to a device and method of forming an e-fuse device, the method comprising providing a first conductive layer connected to a second conductive layer, the first and second conductive layers separated by a barrier layer having a first diffusivity different than a second diffusivity of the first conductive layer. A void is created in the first conductive layer by driving an electrical current through the e-fuse device.

摘要翻译： 本发明涉及电熔丝装置，更具体地说，涉及一种形成电熔丝装置的装置和方法，所述方法包括提供连接到第二导电层的第一导电层，所述第一和第二导电层由 阻挡层具有与第一导电层的第二扩散率不同的第一扩散率。 通过驱动电流通过电熔丝装置而在第一导电层中产生空隙。

公开(公告)号：US08445355B2

公开(公告)日：2013-05-21

申请号：US12969004

申请日：2010-12-15

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  Anthony K. Stamper

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam ,  Anthony K. Stamper

IPC分类号： H01L21/20

CPC分类号： H01L28/82 ,  H01L23/5223 ,  H01L27/0207 ,  H01L28/90 ,  H01L2924/0002 ,  H01L2924/00

摘要： Metal-insulator-metal (MIM) capacitors and methods for fabricating MIM capacitors. The MIM capacitor includes an interlayer dielectric (ILD) layer with apertures each bounded by a plurality of sidewalls and each extending from the top surface of the ILD layer into the first interlayer dielectric layer. A layer stack, which is disposed on the sidewalls of the apertures and the top surface of the ILD layer, includes a bottom conductive electrode, a top conductive electrode, and a capacitor dielectric between the bottom and top conductive electrodes.

摘要翻译： 金属绝缘体金属（MIM）电容器和制造MIM电容器的方法。 MIM电容器包括层间绝缘层（ILD）层，其中各孔由多个侧壁限定，并且各自从ILD层的顶表面延伸到第一层间电介质层。 布置在孔的侧壁和ILD层的顶表面上的层叠层包括底部导电电极，顶部导电电极和位于底部和顶部导电电极之间的电容器电介质。

公开(公告)号：US08421128B2

公开(公告)日：2013-04-16

申请号：US11960030

申请日：2007-12-19

申请人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

发明人： Michel J. Abou-Khalil ,  Robert J. Gauthier, Jr. ,  Tom C. Lee ,  Junjun Li ,  Souvick Mitra ,  Christopher S. Putnam

IPC分类号： H01L23/62

CPC分类号： H01L23/34 ,  H01L21/743 ,  H01L21/76877 ,  H01L21/84 ,  H01L23/3677 ,  H01L27/0255 ,  H01L27/1203 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： A heat generating component of a semiconductor device is located between two heavily doped semiconductor regions in a semiconductor substrate. The heat generating component may be a middle portion of a diode having a light doping, a lightly doped p-n junction between a cathode and anode of a silicon controlled rectifier, or a resistive portion of a doped semiconductor resistor. At least one thermally conductive via comprising a metal or a non-metallic conductive material is place directly on the heat generating component. Alternatively, a thin dielectric layer may be formed between the heat generating component and the at least one thermally conductive via. The at least one thermally conductive via may, or may not, be connected to a back-end-of-line metal wire, which may be connected to higher level of metal wiring or to a handle substrate through a buried insulator layer.

摘要翻译： 半导体器件的发热元件位于半导体衬底中的两个重掺杂半导体区之间。 发热部件可以是具有轻掺杂的二极管的中间部分，可控硅整流器的阴极和阳极之间的轻掺杂p-n结或掺杂半导体电阻器的电阻部分。 至少一个包含金属或非金属导电材料的导热通孔直接放置在发热部件上。 或者，可以在发热部件和至少一个导热通孔之间形成薄介电层。 至少一个导热通孔可以连接到或可以不连接到后端金属线，其可以通过掩埋绝缘体层连接到较高级别的金属布线或者与手柄基板连接。

公开(公告)号：US08373267B2

公开(公告)日：2013-02-12

申请号：US13196404

申请日：2011-08-02

申请人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Ankit Srivastava

发明人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Ankit Srivastava

IPC分类号： H01L29/66 ,  H01L23/62

CPC分类号： H01L29/66386 ,  H01L24/06 ,  H01L27/0262 ,  H01L29/74 ,  H01L29/7436 ,  H01L2224/05554 ,  H01L2924/14 ,  H01L2924/00

摘要： A structure includes first and second silicon controlled rectifiers (SCRs) formed in a substrate. The first and the second SCRs each include at least one component commonly shared between the first and the second SCRs.

公开(公告)号：US07826188B2

公开(公告)日：2010-11-02

申请号：US12140485

申请日：2008-06-17

申请人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Ankit Srivastava

发明人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Ankit Srivastava

IPC分类号： H02H9/00 ,  H01C7/12 ,  H02H1/00 ,  H02H1/04 ,  H02H3/22 ,  H02H9/06

CPC分类号： H03F3/45188 ,  H01L27/0251 ,  H03F1/52 ,  H03F1/523 ,  H03F2203/45466 ,  H03F2203/45486 ,  H03F2203/45504

摘要： A hardware description language (HDL) design structure encoded on a machine readable data storage medium, the HDL design comprising elements that when processed in a computer aided design system generates a machine executable representation of a device for implementing dynamic refresh protocols for DRAM based cache. The HDL design structure further comprises an integrated circuit having a differential driver, comprising: a first driver and a second driver forming the differential driver, the drivers are coupled in parallel between a first voltage source and a second voltage source; a first switch coupled to the first driver and configured to turn off the first driver during an ESD event such that the first driver sustains stress during the ESD event; and a second switch coupled to the second driver and configured to turn off the second driver during the ESD event such that the second driver sustains stress during the ESD event.

摘要翻译： 在机器可读数据存储介质上编码的硬件描述语言（HDL）设计结构，所述HDL设计包括在计算机辅助设计系统中处理时的元件，生成用于实现基于DRAM的高速缓存的动态刷新协议的设备的机器可执行表示。 HDL设计结构还包括具有差分驱动器的集成电路，包括：形成差分驱动器的第一驱动器和第二驱动器，驱动器并联耦合在第一电压源和第二电压源之间; 第一开关，其耦合到所述第一驱动器并且被配置为在ESD事件期间关闭所述第一驱动器，使得所述第一驱动器在所述ESD事件期间保持应力; 以及耦合到所述第二驱动器并被配置为在所述ESD事件期间关闭所述第二驱动器的第二开关，使得所述第二驱动器在所述ESD事件期间维持应力。

公开(公告)号：US07399665B2

公开(公告)日：2008-07-15

申请号：US11781370

申请日：2007-07-23

申请人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Souvick Mitra ,  Mahmoud A. Mousa ,  Christopher Stephen Putnam

发明人： Robert J. Gauthier, Jr. ,  Junjun Li ,  Souvick Mitra ,  Mahmoud A. Mousa ,  Christopher Stephen Putnam

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L29/7436 ,  H01L21/84 ,  H01L27/0262 ,  H01L27/1203

摘要： A silicon control rectifier, a method of making the silicon control rectifier and the use of the silicon control rectifier as an electrostatic discharge protection device of an integrated circuit. The silicon control rectifier includes a silicon body formed in a silicon layer in direct physical contact with a buried oxide layer of a silicon-on-insulator substrate, a top surface of the silicon layer defining a horizontal plane; and an anode of the silicon control rectifier formed in a first region of the silicon body and a cathode of the silicon control rectifier formed in an opposite second region of the silicon body, wherein a path of current flow between the anode and the cathode is only in a single horizontal direction parallel to the horizontal plane.

摘要翻译： 硅控制整流器，制造硅控制整流器的方法和使用硅控制整流器作为集成电路的静电放电保护器件。 硅控制整流器包括形成在硅层中的硅体，其与绝缘体上硅衬底的掩埋氧化物层直接物理接触，硅层的顶表面限定水平面; 并且形成在硅体的第一区域中的硅控制整流器的阳极和形成在硅体的相对的第二区域中的硅控制整流器的阴极，其中阳极和阴极之间的电流路径仅为 在平行于水平面的单个水平方向上。