FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
    61.
    发明申请
    FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE 有权
    浮动接口的浮动阀门

    公开(公告)号:US20110287374A1

    公开(公告)日:2011-11-24

    申请号:US13195592

    申请日:2011-08-01

    IPC分类号: F26B11/00

    摘要: The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.

    摘要翻译: 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。

    Floating slit valve for transfer chamber interface
    62.
    发明授权
    Floating slit valve for transfer chamber interface 有权
    用于传送室接口的浮动狭缝阀

    公开(公告)号:US07988129B2

    公开(公告)日:2011-08-02

    申请号:US12040291

    申请日:2008-02-29

    IPC分类号: F16K3/00

    摘要: The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.

    摘要翻译: 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。

    ELECTRONIC DEVICE MANUFACTURING CHAMBER AND METHODS OF FORMING THE SAME
    64.
    发明申请
    ELECTRONIC DEVICE MANUFACTURING CHAMBER AND METHODS OF FORMING THE SAME 审中-公开
    电子设备制造室及其形成方法

    公开(公告)号:US20100281683A1

    公开(公告)日:2010-11-11

    申请号:US12840262

    申请日:2010-07-20

    IPC分类号: B23P19/00

    摘要: A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.

    摘要翻译: 提供非多边形形状的多片式室。 非多边形多片式室可以包括(1)具有第一侧和第二侧的中心件,(2)适于与中心件的第一侧连接的第一侧件,以及(3) 适于与中心件的第二侧联接的第二侧件。 当连接在一起时,中心件,第一侧件和第二侧件形成圆柱形的整体形状。 提供了许多其他方面。

    Methods and apparatus for depositing ink onto substrates
    65.
    发明授权
    Methods and apparatus for depositing ink onto substrates 失效
    用于在基材上沉积墨的方法和设备

    公开(公告)号:US07681986B2

    公开(公告)日:2010-03-23

    申请号:US11761832

    申请日:2007-06-12

    IPC分类号: B41J2/25

    CPC分类号: B41J2/2132

    摘要: Embodiments of an ink jet printing system include a motion stage adapted to move a substrate having a display object in a printing direction and a first printing assembly mounted over the motion stage including a set of print heads aligned and arranged consecutively in the printing direction such that the display object moves under the print heads sequentially. Embodiments of a method of ink jet printing include moving a substrate under the print heads of printing assembly sequentially in a printing direction, activating alternate ink jetting channels within each print head of the first printing assembly, activating corresponding channels within adjacent print heads in the first printing assembly alternately, and depositing ink in alternating sub-pixels within one or more pixels on the substrate.

    摘要翻译: 喷墨打印系统的实施例包括适于在打印方向上移动具有显示对象的基板的运动台和安装在运动台上的第一印刷组件,该第一印刷组件包括在打印方向上对齐和排列的一组打印头,使得 显示对象顺序地在打印头下移动。 喷墨打印方法的实施例包括在打印方向上顺序地移动印刷组件的打印头下的基板,激活第一印刷组件的每个打印头内的交替喷墨通道,在第一印刷组件的相邻打印头内激活相应的通道 交替地印刷组件,并且在基板上的一个或多个像素内的交替子像素中沉积墨。

    SLOTTED TSSL DOOR TO COUPLE O-RING WITH MOVING MATING PART
    66.
    发明申请
    SLOTTED TSSL DOOR TO COUPLE O-RING WITH MOVING MATING PART 有权
    滑动TSSL门与移动部件接合O形圈

    公开(公告)号:US20100050534A1

    公开(公告)日:2010-03-04

    申请号:US12548553

    申请日:2009-08-27

    IPC分类号: E06B7/16 E06B3/00

    摘要: Embodiments disclosed herein generally relate to a slit valve door assembly for sealing an opening in a chamber. A slit valve door that is pressed against the chamber to seal the slit valve opening moves with the chamber as the slit valve opening shrinks so that an o-ring pressed between the slit valve door and the chamber may move with the slit valve door and the chamber. Thus, less rubbing of the o-ring against the chamber may occur. With less rubbing, fewer particles may be generated and the o-ring lifetime may be extended. With a longer lifetime for the o-ring, substrate throughput may be increased.

    摘要翻译: 本文公开的实施例通常涉及用于密封腔室中的开口的狭缝阀门组件。 当狭缝阀开口收缩时,被压靠在腔室上以密封狭缝阀开口的狭缝阀门随着腔室移动,使得压紧在狭缝阀门和腔室之间的O形环可以与狭缝阀门一起移动,并且 房间。 因此,可能会发生O形环相对于室的摩擦较少。 随着摩擦的减少,可能产生更少的颗粒,并且可以延长O形环的寿命。 随着O形圈的寿命更长,衬底产量可能会增加。

    LASER-SCRIBING PLATFORM
    67.
    发明申请
    LASER-SCRIBING PLATFORM 审中-公开
    激光扫描平台

    公开(公告)号:US20090321397A1

    公开(公告)日:2009-12-31

    申请号:US12422200

    申请日:2009-04-10

    IPC分类号: B23K26/38

    摘要: Laser-scribing systems and translation stages operable to support a workpiece during laser scribing are provided. A laser-scribing system includes a base section, a bed supported by the base section, a laser, a first driving mechanism operable to move a workpiece longitudinally along the bed, and a second driving mechanism. The bed comprises a movable section configured to translate with respect to the base section. The movable section comprises a gap to allow a laser beam to pass through. The laser is positioned to direct the laser beam through the gap. The second driving mechanism is operable to laterally translate the laser and the movable section in order to scribe a pattern on the workpiece.

    摘要翻译: 提供激光划线系统和可操作以在激光划线期间支撑工件的平移台。 激光划线系统包括基部,由基部支撑的床,激光器,可操作以沿着床沿纵向移动工件的第一驱动机构和第二驱动机构。 该床包括被配置为相对于基部平移的可移动部分。 可移动部分包括允许激光束通过的间隙。 激光被定位成将激光束引导通过间隙。 第二驱动机构可操作以横向平移激光器和可移动部分,以便在工件上刻划图案。

    METHODS AND APPARATUS FOR INKJET PRINTING USING MULTIPLE SETS OF PRINT HEADS
    69.
    发明申请
    METHODS AND APPARATUS FOR INKJET PRINTING USING MULTIPLE SETS OF PRINT HEADS 审中-公开
    使用多组打印头进行喷墨打印的方法和装置

    公开(公告)号:US20070222817A1

    公开(公告)日:2007-09-27

    申请号:US11690507

    申请日:2007-03-23

    IPC分类号: B41J2/15

    摘要: In a first aspect, a system is provided for inkjet printing. The system includes (1) a first set including a first inkjet print head having a first plurality of nozzles adapted to selectively dispense a first ink, and a second inkjet print head having a second plurality of nozzles adapted to selectively dispense a second ink, (2) a second set including a third inkjet print head having a third plurality of nozzles adapted to selectively dispense a third ink and a fourth inkjet print head having a fourth plurality of nozzles adapted to selectively dispense a fourth ink and (3) a stage adapted to support and transport the substrate below the first and second sets during a printing pass such that the first set and second sets are adapted to dispense respective first/second and third/fourth inks into adjacent color wells of a display pixel on a substrate.

    摘要翻译: 在第一方面,提供一种用于喷墨打印的系统。 该系统包括(1)第一组,其包括具有适于选择性地分配第一油墨的第一多个喷嘴的第一喷墨打印头和具有适于选择性分配第二墨的第二多个喷嘴的第二喷墨打印头( 2)包括第三喷墨打印头的第二组,其具有适于选择性地分配第三墨的第三多个喷嘴和具有适于选择性地分配第四墨的第四多个喷嘴的第四喷墨打印头,以及(3)适于 以在打印通过期间支撑并运输基板在第一和第二组之下,使得第一组和第二组适于将相应的第一/第二和第三/第四墨水分配到基板上的显示像素的相邻色阱中。