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    Prober for electronic device testing on large area substrates
    6.
    发明授权
    Prober for electronic device testing on large area substrates 有权
    用于在大面积基板上进行电子设备测试的探针

    公开(公告)号：US07786742B2

    公开(公告)日：2010-08-31

    申请号：US11746530

    申请日：2007-05-09

    申请人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

    发明人： Sriram Krishnaswami ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Ludwig Ledl ,  Ralf Schmid

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

    摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

    摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案而不从测试台移除探测器组件。

    Configurable prober for TFT LCD array test
    7.
    发明授权
    Configurable prober for TFT LCD array test 有权
    可配置探针用于TFT LCD阵列测试

    公开(公告)号：US07355418B2

    公开(公告)日：2008-04-08

    申请号：US10903216

    申请日：2004-07-30

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/305

    CPC分类号： G01R1/07364 ,  G01R31/2893 ,  G01R31/305 ,  G09G3/006

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

    Mini-prober for TFT-LCD testing
    8.
    发明授权
    Mini-prober for TFT-LCD testing 有权
    微型探针用于TFT-LCD测试

    公开(公告)号：US07602199B2

    公开(公告)日：2009-10-13

    申请号：US11746515

    申请日：2007-05-09

    申请人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

    发明人： Benjamin M. Johnston ,  Sriram Krishnaswami ,  Hung T. Nguyen ,  Matthias Brunner ,  Yong Liu

    IPC分类号： G01R31/02 ,  G01R31/00 ,  G01R31/26 ,  G01R31/28 ,  G02F1/133

    CPC分类号： G01R31/2808 ,  G09G3/006

    摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

    摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES
    10.
    发明申请
    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES 审中-公开
    将基板输入和输出到减少容积的多个基板的系统和方法

    公开(公告)号：US20080251019A1

    公开(公告)日：2008-10-16

    申请号：US11871510

    申请日：2007-10-12

    申请人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

    发明人： SRIRAM KRISHNASWAMI ,  Hung T. Nguyen ,  George Tzeng ,  Matthias Brunner

    IPC分类号： B05C11/00 ,  H01L21/02

    CPC分类号： H01L21/6719 ,  H01L21/67201 ,  H01L21/67236 ,  H01L21/67748

    摘要： The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

    摘要翻译： 本发明包括用于将衬底转入和移出被配置为容纳多个衬底的室的系统和方法。 在一个实施例中，系统包括腔室壳体，其包括第一衬底支撑托盘和可沿着垂直轴线独立移动的第二衬底支撑托盘以及可移入和移出腔室壳体的衬底输送器。 第一基板支撑托盘和第二基板支撑托盘可移动到第二基板支撑托盘的一部分被容纳在第一基板支撑托盘中的位置。