公开(公告)号：US10290636B2

公开(公告)日：2019-05-14

申请号：US14461769

申请日：2014-08-18

Applicant: STMICROELECTRONICS, INC. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION ,  GLOBALFOUNDRIES Inc.

Inventor： Qing Liu ,  Chun-chen Yeh ,  Ruilong Xie ,  Xiuyu Cai

IPC: H01L27/092 ,  H01L29/167 ,  H01L29/161 ,  H01L29/10 ,  H01L21/8238 ,  H01L21/265 ,  H01L29/06

Abstract: A method for making a semiconductor device may include forming first and second semiconductor regions laterally adjacent one another and each comprising a first semiconductor material. The method may further include forming an in-situ doped, punch-through stopper layer above the second semiconductor region comprising the first semiconductor material and a first dopant, and forming a semiconductor buffer layer above the punch-through stopper layer, where the punch-through stopper layer includes the first semiconductor material. The method may also include forming a third semiconductor region above the semiconductor buffer layer, where the third semiconductor region includes a second semiconductor material different than the first semiconductor material. In addition, at least one first fin may be formed from the first semiconductor region, and at least one second fin may be formed from the second semiconductor region, the punch-through stopper layer, the semiconductor buffer layer, and the third semiconductor region.

公开(公告)号：US10256304B2

公开(公告)日：2019-04-09

申请号：US15890880

申请日：2018-02-07

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  GlobalFoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Xiuyu Cai ,  Qing Liu ,  Kejia Wang ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L29/78 ,  H01L29/10 ,  H01L29/41 ,  H01L29/66 ,  H01L21/306 ,  H01L29/20 ,  H01L29/417

Abstract: A semiconductor device includes a fin patterned in a substrate; a gate disposed over and substantially perpendicular to the fin; a pair of epitaxial contacts including a III-V material over the fin and on opposing sides of the gate; and a channel region between the pair of epitaxial contacts under the gate including an undoped III-V material between doped III-V materials, the doped III-V materials including a dopant in an amount in a range from about 1e18 to about 1e20 atoms/cm3 and contacting the epitaxial contacts.

公开(公告)号：US10134840B2

公开(公告)日：2018-11-20

申请号：US14739543

申请日：2015-06-15

Applicant: International Business Machines Corporation ,  Globalfoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Chun-Chen Yeh ,  Xiuyu Cai ,  Qing Liu ,  Ruilong Xie

IPC: H01L29/78 ,  H01L21/265 ,  H01L21/3065 ,  H01L29/06 ,  H01L29/66 ,  H01L21/02 ,  H01L21/306 ,  H01L29/08 ,  H01L29/423 ,  H01L29/786 ,  H01L29/10

Abstract: Embodiments are directed to a method of fabricating a portion of a nanowire field effect transistor (FET). The method includes forming a sacrificial layer and a nanowire layer, removing a sidewall portion of the sacrificial layer and forming a diffusion block in a space that was occupied by the removed sidewall portion of the sacrificial layer. The method further includes forming a source region and a drain region such that the diffusion block is between the sacrificial layer and at least one of the source region and the drain region, and removing the sacrificial layer using a sacrificial layer removal process, wherein the diffusion block prevents the sacrificial layer removal process from also removing portions of at least one of the source region and the drain region.

公开(公告)号：US09935201B2

公开(公告)日：2018-04-03

申请号：US15396743

申请日：2017-01-02

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  GlobalFoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Xiuyu Cai ,  Qing Liu ,  Kejia Wang ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L29/78 ,  H01L29/10 ,  H01L29/41 ,  H01L29/417 ,  H01L29/66 ,  H01L21/306

CPC classification number: H01L29/1033 ,  H01L21/30621 ,  H01L29/1054 ,  H01L29/20 ,  H01L29/41791 ,  H01L29/66522 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7851

Abstract: A semiconductor device includes a fin patterned in a substrate; a gate disposed over and substantially perpendicular to the fin; a pair of epitaxial contacts including a III-V material over the fin and on opposing sides of the gate; and a channel region between the pair of epitaxial contacts under the gate including an undoped III-V material between doped III-V materials, the doped III-V materials including a dopant in an amount in a range from about 1e18 to about 1e20 atoms/cm3 and contacting the epitaxial contacts.

公开(公告)号：US09793171B2

公开(公告)日：2017-10-17

申请号：US15179620

申请日：2016-06-10

Applicant: International Business Machines Corporation ,  GLOBALFOUNDRIES INC. ,  STMICROELECTRONICS, INC.

Inventor： Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh ,  Xiuyu Cai ,  William J. Taylor

IPC: H01L21/336 ,  H01L21/8234 ,  H01L29/417 ,  H01L29/78 ,  H01L29/66 ,  H01L21/84 ,  H01L27/12 ,  H01L21/285

CPC classification number: H01L21/823475 ,  H01L21/28518 ,  H01L21/823418 ,  H01L21/823431 ,  H01L21/845 ,  H01L27/1211 ,  H01L29/41791 ,  H01L29/66795 ,  H01L29/785

Abstract: An integrated circuit transistor is formed on a substrate. A trench in the substrate is at least partially filled with a metal material to form a source (or drain) contact buried in the substrate. The substrate further includes a source (or drain) region in the substrate which is in electrical connection with the source (or drain) contact. The substrate further includes a channel region adjacent to the source (or drain) region. A gate dielectric is provided on top of the channel region and a gate electrode is provided on top of the gate dielectric. The substrate may be of the silicon on insulator (SOI) or bulk type. The buried source (or drain) contact makes electrical connection to a side of the source (or drain) region using a junction provided at a same level of the substrate as the source (or drain) and channel regions.

公开(公告)号：US20170110583A1

公开(公告)日：2017-04-20

申请号：US15396743

申请日：2017-01-02

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  GlobalFoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Xiuyu Cai ,  Qing Liu ,  Kejia Wang ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L29/78 ,  H01L29/417 ,  H01L29/10

CPC classification number: H01L29/1033 ,  H01L21/30621 ,  H01L29/1054 ,  H01L29/20 ,  H01L29/41791 ,  H01L29/66522 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7851

Abstract: A semiconductor device includes a fin patterned in a substrate; a gate disposed over and substantially perpendicular to the fin; a pair of epitaxial contacts including a III-V material over the fin and on opposing sides of the gate; and a channel region between the pair of epitaxial contacts under the gate comprising an undoped III-V material between doped III-V materials, the doped III-V materials including a dopant in an amount in a range from about le18 to about le20 atoms/cm3 and contacting the epitaxial contacts.

公开(公告)号：US20170033221A1

公开(公告)日：2017-02-02

申请号：US14812425

申请日：2015-07-29

Applicant: International Business Machines Corporation ,  GlobalFoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Xiuyu Cai ,  Qing Liu ,  Kejia Wang ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L29/78 ,  H01L29/08 ,  H01L29/10 ,  H01L29/66 ,  H01L21/306

CPC classification number: H01L29/1033 ,  H01L21/30621 ,  H01L29/1054 ,  H01L29/20 ,  H01L29/41791 ,  H01L29/66522 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7851

Abstract: A semiconductor device includes a fin patterned in a substrate; a gate disposed over and substantially perpendicular to the fin; a pair of epitaxial contacts including a III-V material over the fin and on opposing sides of the gate; and a channel region between the pair of epitaxial contacts under the gate including an undoped III-V material between doped III-V materials, the doped III-V materials including a dopant in an amount in a range from about 1e18 to about 1e20 atoms/cm3 and contacting the epitaxial contacts.

Abstract translation: 半导体器件包括在衬底中图案化的鳍; 设置在所述翅片上并基本上垂直于所述翅片的门; 一对外延触点，包括在鳍的上方和栅极的相对侧上的III-V材料; 以及在栅极下方的一对外延触点之间的沟道区，包括在掺杂III-V材料之间的未掺杂的III-V材料，掺杂的III-V材料包括量为约1e18至约1e20原子/ 并与外延触点接触。

公开(公告)号：US09559018B2

公开(公告)日：2017-01-31

申请号：US15252315

申请日：2016-08-31

Applicant: International Business Machines Corporation ,  GLOBALFOUNDRIES, Inc. ,  STMICROELECTRONICS, INC.

Inventor： Xiuyu Cai ,  Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L27/12 ,  H01L21/84 ,  H01L29/78

CPC classification number: H01L21/845 ,  H01L27/1211 ,  H01L29/7849

Abstract: Fabricating a semiconductor device includes providing a strained semiconductor material (SSM) layer disposed on a dielectric layer, forming a first plurality of fins on the SSOI structure, at least one fin of the first plurality of fins is in a nFET region and at least one fin is in a pFET region, etching portions of the dielectric layer under portions of the SSM layer of the at least one fin in the pFET region, filling areas cleared by the etching, forming a second plurality of fins from the at least one fin in the nFET region such that each fin comprises a portion of the SSM layer disposed on the dielectric layer, and forming a third plurality of fins from the at least one fin in the pFET region such that each fin comprises a portion of the SSM layer disposed on a flowable oxide.

Abstract translation: 制造半导体器件包括提供设置在电介质层上的应变半导体材料（SSM）层，在SSOI结构上形成第一多个鳍片，第一组多个鳍片中的至少一个鳍片在nFET区域中，并且至少一个 鳍状物在pFET区域中，在pFET区域中的至少一个鳍片的SSM层的部分之下蚀刻介电层的部分，通过蚀刻清除的填充区域，从至少一个鳍片形成第二多个鳍片 所述nFET区域使得每个鳍片包括设置在所述电介质层上的所述SSM层的一部分，以及从所述pFET区域中的所述至少一个翅片形成第三多个翅片，使得每个翅片包括设置在所述SSM层上的部分 可流动的氧化物。

公开(公告)号：US20160372493A1

公开(公告)日：2016-12-22

申请号：US15252315

申请日：2016-08-31

Applicant: International Business Machines Corporation ,  GLOBALFOUNDRIES, Inc. ,  STMICROELECTRONICS, INC.

Inventor： Xiuyu Cai ,  Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L27/12 ,  H01L29/78 ,  H01L27/092

CPC classification number: H01L21/845 ,  H01L27/1211 ,  H01L29/7849

Abstract: Fabricating a semiconductor device includes providing a strained semiconductor material (SSM) layer disposed on a dielectric layer, forming a first plurality of fins on the SSOI structure, at least one fin of the first plurality of fins is in a nFET region and at least one fin is in a pFET region, etching portions of the dielectric layer under portions of the SSM layer of the at least one fin in the pFET region, filling areas cleared by the etching, forming a second plurality of fins from the at least one fin in the nFET region such that each fin comprises a portion of the SSM layer disposed on the dielectric layer, and forming a third plurality of fins from the at least one fin in the pFET region such that each fin comprises a portion of the SSM layer disposed on a flowable oxide.

公开(公告)号：US09496185B2

公开(公告)日：2016-11-15

申请号：US14670800

申请日：2015-03-27

Applicant: International Business Machines Corporation ,  GLOBALFOUNDRIES, Inc. ,  STMICROELECTRONICS, INC.

Inventor： Xiuyu Cai ,  Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L27/12 ,  H01L21/84 ,  H01L29/78

CPC classification number: H01L21/845 ,  H01L27/1211 ,  H01L29/7849

Abstract: Fabricating a semiconductor device includes providing a strained semiconductor material (SSM) layer disposed on a dielectric layer, forming a first plurality of fins on the SSOI structure, at least one fin of the first plurality of fins is in a nFET region and at least one fin is in a pFET region, etching portions of the dielectric layer under portions of the SSM layer of the at least one fin in the pFET region, filling areas cleared by the etching, forming a second plurality of fins from the at least one fin in the nFET region such that each fin comprises a portion of the SSM layer disposed on the dielectric layer, and forming a third plurality of fins from the at least one fin in the pFET region such that each fin comprises a portion of the SSM layer disposed on a flowable oxide.

Abstract translation: 制造半导体器件包括提供设置在电介质层上的应变半导体材料（SSM）层，在SSOI结构上形成第一多个鳍片，第一组多个鳍片中的至少一个鳍片在nFET区域中，并且至少一个 鳍状物在pFET区域中，在pFET区域中的至少一个鳍片的SSM层的部分之下蚀刻介电层的部分，通过蚀刻清除的填充区域，从至少一个鳍片形成第二多个鳍片 所述nFET区域使得每个鳍片包括设置在所述电介质层上的所述SSM层的一部分，以及从所述pFET区域中的所述至少一个翅片形成第三多个翅片，使得每个翅片包括设置在所述SSM层上的部分 可流动的氧化物。