摘要:
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.
摘要:
An electrophotographic toner that includes a colorant, a release agent, a non-crystalline resin and a crystalline resin, wherein the crystalline resin is a polyalkyl acrylate or polyalkyl methacrylate having an alkyl group of approximately 18 or more carbon atoms, and is produced by copolymerization with approximately 10 mol % or more, but no more than approximately 50 mol %, of a vinyl monomer having a carboxyl group.
摘要:
A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 μm/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.
摘要:
In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要:
In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要:
A shift control device of an automatic transmission comprising detection means for detecting a shift from a non-drive to a drive position; output means for outputting a command to execute an engine output lowering; detection means for detecting a transmission input revolution number and control means for engaging the friction engagement element by direct pressure control in response to a detection of said transmission input revolution number having been decreased to a predetermined value.
摘要:
The present invention's manufacturing method for a sealed battery includes: a process whereby a sealed battery application electrode assembly 11 is formed that has multiple positive electrode substrate exposed portions 14 at one end and multiple negative electrode substrate exposed portions 15 at the other end; a process whereby the negative electrode collector 181 and negative electrode collector receiving part 183 are brought against both surfaces of the part to be welded on at least the negative electrode substrate exposed portions 15, with tape 23a constituted of thermodeposited resin and having an opening 231 in the center being interposed; and a process whereby resistance welding is effected by passing current between the negative electrode collector 181 and negative electrode collector receiving part 183 positioned at the two sides.
摘要:
A method for producing a silicon-carbide nanostructure, which includes steps of: irradiating a carbon-source supplied to a reaction chamber at a pressure of 1. Pa to 70 Pa with microwaves of 0.5 kW to 3 kW; generating plasma in a space above the silicon substrate at a temperature of 350° C. to 600° C.; and forming a silicon-carbide nanostructure having cone-shaped silicon-carbide aggregates which are scattered on and protruded from a surface of a silicon substrate. The silicon-carbide aggregates have a crystal structure of 2H α-siC.
摘要:
A sliding material consisting of a carbon-fiber reinforced carbon composite material containing fine particles of a simple substance of any of Group IV to Group VI elements or a carbide, a nitride or an oxide thereof.