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公开(公告)号：US5546011A
公开(公告)日：1996-08-13
申请号：US513240
申请日：1995-08-10
CPC分类号： G01R15/241
摘要： An electro-optic material constituting an E-O probe has a refractive index for light from a semiconductor laser, which is changed in accordance with an electric field from a device to be measured. The electro-optic effect is substantially canceled upon incidence of light from an Ar.sup.+ laser. A mechanical chopper modulates the light emitted from the Ar.sup.+ laser and causes the light to be incident on the E-O probe. A lock-in amplifier detects the polarized state of the light reflected by the E-O probe synchronized with the modulation, thereby measuring the voltage of the device.
摘要翻译： 构成E-O探针的电光材料具有来自半导体激光器的光的折射率，该折射率根据来自被测定装置的电场而变化。 当从Ar +激光器入射光时，电光效应基本消除。 机械斩波器调制从Ar +激光器发射的光，并使光入射到E-O探头上。 锁定放大器检测与调制同步的E-O探头反射的光的极化状态，从而测量器件的电压。
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公开(公告)号：US5499190A
公开(公告)日：1996-03-12
申请号：US5091
申请日：1993-01-15
IPC分类号： G01R13/34 , G01R31/308 , G04F13/02 , H03K5/26
CPC分类号： G01R13/347 , G01R31/308 , G04F13/02 , H03K5/26
摘要： A system for measuring timing relationship between two signals for accurately measuring a timing relationship between signals includes an electro-optic measuring unit and a waveform storage and processing unit. The electro-optic measuring unit samples electrical signals from a device under measurement via a strobe light so as to measure the signal waveform. The electro-optic unit uses a laser diode as a light source. The waveform storage and processing unit stores the electrical signal waveforms measured by the electro-optic measuring unit in digital form. The waveform storage and processing unit also calculates a correlation between two stored electrical signal waveforms via a correlation calculation unit, and also detects a peak of the correlation to detect a timing relationship between the signals.
摘要翻译： 用于测量用于精确测量信号之间的定时关系的两个信号之间的定时关系的系统包括电光测量单元和波形存储和处理单元。 电光测量单元通过闪光灯对来自被测器件的电信号进行采样，以测量信号波形。 电光单元使用激光二极管作为光源。 波形存储和处理单元以数字形式存储由电光测量单元测量的电信号波形。 波形存储和处理单元还经由相关计算单元计算两个存储的电信号波形之间的相关性，并且还检测相关的峰值以检测信号之间的定时关系。
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公开(公告)号：US5444365A
公开(公告)日：1995-08-22
申请号：US113239
申请日：1993-08-30
IPC分类号： G01R15/24 , G01R1/07 , G01R19/00 , G01R31/302 , G01R31/319 , G01R1/04
CPC分类号： G01R1/071 , Y10S435/808
摘要： A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
摘要翻译： 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间，第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头，并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时，根据电压，EO探针的折射率改变，从EO探针发射的光被卵巢极化，然后激光谐振器的共振状态变化 。 因此，通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此，可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。
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公开(公告)号：US20110274128A1
公开(公告)日：2011-11-10
申请号：US13143604
申请日：2009-12-04
IPC分类号： H01S3/02
CPC分类号： B23K26/0736 , B23K26/0617 , B23K26/0738 , B23K26/08 , B23K26/53
摘要： A cylindrical lens (4) diverges a laser beam (L1) in the Y-axis direction (i.e., within the YZ plane) but neither diverges nor converges it in the X-axis direction (i.e., within the ZX plane). An objective lens (5) converges the laser beam (L1) emitted from the cylindrical lens (4) into a point P1 in the Y-axis direction and into a point P2 in the X-axis direction. As a consequence, the cross section of the laser beam (L1) becomes elongated forms extending in the X- and Y-axis directions at the points P1, P2, respectively. Therefore, when the points P1, P2 are located on the outside and inside of the work (S), respectively, an elongated working area extending in the Y-axis direction can be formed in a portion where the point P2 is positioned within the work (S).
摘要翻译： 柱面透镜（4）在Y轴方向（即，在YZ平面内）分散激光束（L1），但是在X轴方向（即，ZX平面内）中也不会发散或会聚。 物镜（5）将从柱面透镜（4）射出的激光束（L1）向Y轴方向的点P1会聚，并将X轴方向的点P2会聚。 因此，激光束（L1）的横截面分别成为在点P1，P2处沿X轴方向和Y轴方向延伸的细长形状。 因此，当点P1，P2分别位于工件（S）的外侧和内部时，可以在点P2位于工件（S）内的部分中形成沿Y轴方向延伸的细长工作区域 （S）。
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公开(公告)号：US5357532A
公开(公告)日：1994-10-18
申请号：US15436
申请日：1993-02-09
申请人： Shinichiro Aoshima , Haruyasu Ito
发明人： Shinichiro Aoshima , Haruyasu Ito
摘要： To provide a wavelength tunable laser device having a wavelength variable range of a broad band, and capable of simply changing the output wavelength. Excitation means 1 excites a laser medium 2a in a main resonator 2. The main resonator 2 is provided with two resonator mirrors 2b and an optical input/output port 2c in addition to the laser medium 2a. By the excitation means 1 and the main resonator 2, laser oscillation can be produced. A sub-resonator 3 is provided with wavelength selection means 3a and optical feedback means 3b. And, the sub-resonater selects a desired wavelength of the laser beam outputted from said main resonator and returns the laser beam of the desired wavelength back to said laser medium. In a device comprising the excitation means 1, the main resonator 2 and the sub-resonator 3, an optical output port 4 is provided. Since this wavelength tunable laser device has no necessity of providing wavelength selection means within the main resonator, laser oscillation is easily produced. Accordingly, even in the case where the gain of the laser medium is small, or the excitation energy is small, oscillation can be produced. In addition, since the main resonator can be placed in an oscillating state at all times, the wavelength tunable laser device can be prevented from being stopped.
摘要翻译： 提供具有宽带的波长可变范围的波长可调激光器件，并能够简单地改变输出波长。 励磁装置1激励主谐振器2中的激光介质2a。除了激光介质2a之外，主谐振器2还设置有两个谐振镜2b和光输入/输出端口2c。 通过激励装置1和主谐振器2，可以产生激光振荡。 副谐振器3设置有波长选择装置3a和光反馈装置3b。 并且，副谐振器选择从所述主谐振器输出的激光束的期望波长，并将期望波长的激光束返回到所述激光介质。 在包括激励装置1，主谐振器2和副谐振器3的装置中，设置有光输出端口4。 由于该波长可调激光器件不需要在主谐振器内提供波长选择装置，因此容易产生激光振荡。 因此，即使在激光介质的增益小或激发能小的情况下，也能产生振荡。 此外，由于主谐振器可以一直处于振荡状态，因此可以防止波长可调激光器件停止。
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公开(公告)号：US5220579A
公开(公告)日：1993-06-15
申请号：US735647
申请日：1991-07-25
IPC分类号： H01S3/0915 , H01S3/106 , H01S3/108 , H01S3/11
CPC分类号： H01S3/117 , H01S3/108 , H01S3/0805
摘要： A pulse laser has a laser resonator, a laser medium in the laser resonator, and a deflecting device. The laser medium emits an emission light. The deflecting device switches an optical path of the emission light to output the emission light as a laser pulse. The deflecting device includes a deflecting member and a pumping device. The deflecting member is arranged in the optical path of the emission light. The deflection member has a refractive index which changes based on a pumping light incident thereon. The pumping device radiates the pumping light on a predetermined region of the deflection member and varies the refractive index of the predetermined region to switch the optical path of the emission light.
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公开(公告)号：US5077745A
公开(公告)日：1991-12-31
申请号：US505468
申请日：1990-04-06
CPC分类号： H01S3/1109 , H01S3/0606 , H01S3/083 , H01S3/1068 , H01S3/109
摘要： Part of a solid-state lasing medium is made to be a mode locking section. An ultrasonic transducer being supplied with a high-frequency voltage generates an ultrasonic wave to propagate through the mode locking section. As a result, laser light pulses having a repetition frequency determined by the frequency of the ultrasonic wave are output from a laser apparatus.
摘要翻译： 固体激光介质的一部分被制成模式锁定部分。 提供高频电压的超声换能器产生超声波，以通过模式锁定部分传播。 结果，从激光装置输出具有由超声波的频率确定的重复频率的激光脉冲。
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公开(公告)号：US4760577A
公开(公告)日：1988-07-26
申请号：US7645
申请日：1987-01-28
申请人： Shinichiro Aoshima
发明人： Shinichiro Aoshima
CPC分类号： H01S3/1115 , H01S3/082 , H01S3/094034 , H01S3/0813
摘要： A CPM pulse laser device is provided which has a means for emitting pulses in two separate directions. A return system is provided for returning one of the pulses to the laser resonator in such a manner that the returned pulse is superposed on the other pulse which was propagated in the other direction. The return system preferably includes a total reflecting mirror or a nonlinear crystal. The position of the total reflecting mirror or nonlinear crystal is precisely adjusted to create the superposition.
摘要翻译： 提供了CPM脉冲激光装置，其具有用于在两个分开的方向上发射脉冲的装置。 提供一种返回系统，用于将一个脉冲返回到激光谐振器，使得返回的脉冲叠加在沿另一个方向传播的另一个脉冲上。 返回系统优选地包括全反射镜或非线性晶体。 全反射镜或非线性晶体的位置被精确调整以产生叠加。
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公开(公告)号：US06707021B2
公开(公告)日：2004-03-16
申请号：US10098317
申请日：2002-03-18
IPC分类号： G01J132
CPC分类号： B23K26/0652 , B23K26/032 , B23K26/0604 , B23K26/0613 , B23K26/0624 , B23K26/067 , B23K26/53 , C03B33/0222
摘要： The transparent medium processing device comprises: a light control section 2 for performing variable control for the status of the laser beam emitted from the light source section 1, and a light status measurement section 4 for measuring the status of the laser beam inside the processing target TG. The light control section is adjusted based on the output of the light status measurement section so that the status of the laser beam inside the processing target becomes a desired status. Since the status of the laser beam inside the processing target, which is made of such a transparent medium as glass, is measured by the light status measurement section, and is fed back to the light control section, laser processing can be executed while maintaining an optimum status at a processing point inside the processing target.
摘要翻译： 透明介质处理装置包括：用于对从光源部分1发射的激光束的状态执行可变控制的光控制部分2和用于测量处理目标内的激光束状态的光状态测量部分4 TG。 基于光状态测量部的输出调整光控制部，使得处理对象内的激光束的状态成为期望状态。 由于由玻璃制的透明介质构成的处理对象内部的激光束的状态由光状态测量部测量，并被反馈到光控制部，因此可以在维持 处理目标内处理点的最佳状态。
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公开(公告)号：US5585044A
公开(公告)日：1996-12-17
申请号：US365482
申请日：1994-12-28
CPC分类号： B01F3/04978 , B01J19/10 , Y10S261/48
摘要： The liquid treating method according to the present invention introduces a bubble into liquid phase and applies vibration waves, such as ultrasonic waves, from each sides of the bubble. Collision of the vibration waves with the bubble imparts the compression pressure to the bubble. This effect is used to dissolve a gas forming the bubble into the liquid phase or to improve liquid quality of this liquid phase.
摘要翻译： 根据本发明的液体处理方法将气泡引入液相，并从气泡的每一侧施加诸如超声波的振动波。 具有气泡的振动波的碰撞赋予气泡压缩压力。 该效果用于将形成气泡的气体溶解到液相中或改善该液相的液体质量。
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