公开(公告)号：US20080169885A1

公开(公告)日：2008-07-17

申请号：US11972316

申请日：2008-01-10

申请人： Masanori Ueda ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Go Endo ,  Yasuyuki Saitou

发明人： Masanori Ueda ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Go Endo ,  Yasuyuki Saitou

IPC分类号： H01L41/22 ,  H03H9/00

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H2003/0428 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.

摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 设置在下电极上的压电膜; 设置在所述压电膜上以与所述下电极相对的所述压电膜的上电极，从而限定谐振部; 以及设置在所述上​​部电极上的重量载荷膜，所述重量载荷膜设置在所述共振部分中并且具有小于所述共振部分的面积的面积。

公开(公告)号：US08941450B2

公开(公告)日：2015-01-27

申请号：US13431669

申请日：2012-03-27

申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H03H9/17 ,  H03H9/02 ,  H03H3/04 ,  H03H9/00 ,  H03H9/13 ,  H03H9/56 ,  H03H9/60

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/0095 ,  H03H9/02086 ,  H03H9/131 ,  H03H9/132 ,  H03H9/568 ,  H03H9/605 ,  H03H2003/0471

摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.

摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 频率控制膜设置在谐振区域的上侧，其中上电极和下电极在主谐振器和子谐振器中的至少一个中彼此面对。 频率控制膜具有多个凸形图案，并且凸形图案以公共间距布置以​​进行杂散调整，并且在主谐振器和子谐振器中具有不同的区域。

公开(公告)号：US08344590B2

公开(公告)日：2013-01-01

申请号：US13431642

申请日：2012-03-27

申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H01L41/04 ,  H03H9/205

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/131 ,  H03H9/132 ,  H03H9/568 ,  H03H9/605 ,  H03H2003/0471

摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.

摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜，频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。

公开(公告)号：US09035536B2

公开(公告)日：2015-05-19

申请号：US13563505

申请日：2012-07-31

申请人： Masanori Ueda ,  Shinji Taniguchi ,  Tokihiro Nishihara

发明人： Masanori Ueda ,  Shinji Taniguchi ,  Tokihiro Nishihara

IPC分类号： H01L41/09 ,  H03H3/04 ,  H03H9/17 ,  H03H3/02

CPC分类号： H03H3/04 ,  H03H9/171 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/025 ,  H03H2003/0407 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.

摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 压电膜，其设置在所述下电极上并且包括至少两层; 上部电极，其设置在所述压电膜上，并且具有将所述压电膜与所述下部电极夹在中间且与所述下部电极相对的区域; 以及绝缘膜，其设置在所述下电极和所述上电极彼此面对并且在所述至少两层中的每一个之间的区域中，其中所述绝缘膜的上表面比所述绝缘膜的下表面平坦 。

公开(公告)号：US09240768B2

公开(公告)日：2016-01-19

申请号：US13610393

申请日：2012-09-11

申请人： Tokihiro Nishihara ,  Shinji Taniguchi

发明人： Tokihiro Nishihara ,  Shinji Taniguchi

IPC分类号： H03H9/70 ,  H03H9/72 ,  H03H9/02 ,  H03H9/60 ,  H03H9/64 ,  H03H9/54

CPC分类号： H03H9/02102 ,  H03H9/02834 ,  H03H9/542 ,  H03H9/605 ,  H03H9/6483 ,  H03H9/706 ,  H03H9/725

摘要： A duplexer includes a transmission filter and a reception filter having different passbands, wherein: first resonators that are series resonators or parallel resonators included in the transmission and reception filters so as to form a skirt characteristic at a guard band side are a temperature compensated type piezoelectric thin film resonator or a surface acoustic wave resonator using Love waves, and second resonators that form a skirt characteristic at an opposite side to the guard band are one of a temperature non-compensated type piezoelectric thin film resonator, a surface acoustic wave resonator using a lithium tantalate substrate or a substrate made by bonding a lithium tantalate substrate on a sapphire substrate, and a surface acoustic wave resonator using Love waves.

摘要翻译： 双工器包括具有不同通带的发送滤波器和接收滤波器，其中包括在发送和接收滤波器中的串联谐振器或并联谐振器的第一谐振器在保护带侧形成裙部特性是温度补偿型压电 使用爱波的薄膜谐振器或表面声波谐振器以及与保护带相反侧形成裙部特性的第二谐振器是温度非补偿型压电薄膜谐振器之一，使用 钽酸锂基板或通过将蓝宝石基板上的钽酸锂基板接合而制成的基板和使用爱波的表面声波谐振器。

公开(公告)号：US08222970B2

公开(公告)日：2012-07-17

申请号：US12503558

申请日：2009-07-15

申请人： Kazunori Inoue ,  Tokihiro Nishihara ,  Takashi Matsuda ,  Shinji Taniguchi

发明人： Kazunori Inoue ,  Tokihiro Nishihara ,  Takashi Matsuda ,  Shinji Taniguchi

IPC分类号： H03H9/54 ,  H03H9/70

CPC分类号： H03H3/04 ,  H03H9/02133 ,  H03H9/583 ,  H03H9/588 ,  H03H2003/023

摘要： A resonant device includes first and second piezoelectric thin film resonators. The first piezoelectric thin film resonator includes a substrate, a first lower electrode formed on the substrate, a first piezoelectric film formed over the first lower electrode, and a first upper electrode formed on the piezoelectric film and opposed to the first lower electrode. The second piezoelectric thin film resonator includes a second lower electrode formed above the first upper electrode, a second piezoelectric film formed over the second lower electrode, and a second upper electrode formed on the piezoelectric film and opposed to the second lower electrode. The first membrane region in which the first lower electrode opposes to the first upper electrode through the first piezoelectric film and a second membrane region in which the second lower electrode opposes to the second upper electrode through the second piezoelectric film are laminated through a second cavity.

摘要翻译： 谐振装置包括第一和第二压电薄膜谐振器。 第一压电薄膜谐振器包括基板，形成在基板上的第一下电极，形成在第一下电极上的第一压电膜，以及形成在压电膜上并与第一下电极相对的第一上电极。 第二压电薄膜谐振器包括形成在第一上电极上的第二下电极，形成在第二下电极上的第二压电薄膜和形成在压电薄膜上并与第二下电极相对的第二上电极。 其中第一下部电极通过第一压电膜与第一上部电极相对的第一膜区域和通过第二压电膜将第二下部电极与第二上部电极相对的第二膜区域通过第二腔层叠。

公开(公告)号：US20100013575A1

公开(公告)日：2010-01-21

申请号：US12503558

申请日：2009-07-15

申请人： Kazunori INOUE ,  Tokihiro Nishihara ,  Takashi Matsuda ,  Shinji Taniguchi

发明人： Kazunori INOUE ,  Tokihiro Nishihara ,  Takashi Matsuda ,  Shinji Taniguchi

IPC分类号： H03H9/15

CPC分类号： H03H3/04 ,  H03H9/02133 ,  H03H9/583 ,  H03H9/588 ,  H03H2003/023

摘要： A resonant device includes first and second piezoelectric thin film resonators. The first piezoelectric thin film resonator includes a substrate, a first lower electrode formed on the substrate, a first piezoelectric film formed over the first lower electrode, and a first upper electrode formed on the piezoelectric film and opposed to the first lower electrode. The second piezoelectric thin film resonator includes a second lower electrode formed above the first upper electrode, a second piezoelectric film formed over the second lower electrode, and a second upper electrode formed on the piezoelectric film and opposed to the second lower electrode. The first membrane region in which the first lower electrode opposes to the first upper electrode through the first piezoelectric film and a second membrane region in which the second lower electrode opposes to the second upper electrode through the second piezoelectric film are laminated through a second cavity.

摘要翻译： 谐振装置包括第一和第二压电薄膜谐振器。 第一压电薄膜谐振器包括基板，形成在基板上的第一下电极，形成在第一下电极上的第一压电膜，以及形成在压电膜上并与第一下电极相对的第一上电极。 第二压电薄膜谐振器包括形成在第一上电极上的第二下电极，形成在第二下电极上的第二压电薄膜和形成在压电薄膜上并与第二下电极相对的第二上电极。 其中第一下部电极通过第一压电膜与第一上部电极相对的第一膜区域和通过第二压电膜将第二下部电极与第二上部电极相对的第二膜区域通过第二腔层叠。

公开(公告)号：US06584240B2

公开(公告)日：2003-06-24

申请号：US09820634

申请日：2001-03-30

申请人： Masaharu Doi ,  Shinji Taniguchi ,  Masaaki Ohyama ,  Masaki Sugiyama

发明人： Masaharu Doi ,  Shinji Taniguchi ,  Masaaki Ohyama ,  Masaki Sugiyama

IPC分类号： G02F1035

CPC分类号： G02F1/2255

摘要： The invention provides an optical modulator which suppresses the loss of a microwave which advances through an electrode and of light which propagates in a waveguide and makes the losses in individual arm waveguides substantially equal to each other to suppress the deterioration of the extinction coefficient to improve the transmission quality. The optical modulator includes a substrate having an electro-optical effect and having a ridge, first and second grooves and first and second banks formed thereon, a Mach-Zehnder optical waveguide, an electrode, and first and second recesses formed at symmetrical positions with respect to the ridge on the first and second banks, respectively. The optical modulator is applied, for example, to a transmission side apparatus for a long distance optical transmission system.

摘要翻译： 本发明提供一种光调制器，其抑制通过电极前进的微波和在波导中传播的光的损耗，并使各个臂波导中的损耗基本相等，以抑制消光系数的劣化，从而改善 传输质量。 该光学调制器包括具有电光效应的基片，并具有脊，第一和第二凹槽以及形成在其上的第一和第二堤，马赫 - 曾德尔光波导，电极以及形成在对称位置的第一和第二凹槽 分别到第一和第二银行的山脊。 光调制器例如用于长距离光传输系统的发送侧设备。

公开(公告)号：US06580843B2

公开(公告)日：2003-06-17

申请号：US09826089

申请日：2001-04-05

申请人： Masaharu Doi ,  Shinji Taniguchi ,  Masaaki Ohyama ,  Masaaki Norimatsu

发明人： Masaharu Doi ,  Shinji Taniguchi ,  Masaaki Ohyama ,  Masaaki Norimatsu

IPC分类号： G02B612

CPC分类号： G02F1/2255 ,  G02F1/0316 ,  H04B10/505

摘要： The invention provides an optical device which can lower the drive voltage which is used as one of the parameters for performance evaluation of the optical device. The optical device includes a substrate having first and second ridges, first and second grooves, a third groove, and first and second banks formed thereon, a Mach-Zehnder optical waveguide formed on the substrate, and an electrode set including first and second signal electrodes and a grounding electrode for controlling light which propagates in the optical waveguide. The grounding electrode extends to the first groove adjacent to the first bank and the second groove adjacent to the second bank. The optical device is applied, for example, to a transmission side apparatus for a long distance optical transmission system.

公开(公告)号：US06370308B1

公开(公告)日：2002-04-09

申请号：US09106260

申请日：1998-06-29

申请人： Tadao Nakazawa ,  Minoru Seino ,  Shinji Taniguchi

发明人： Tadao Nakazawa ,  Minoru Seino ,  Shinji Taniguchi

IPC分类号： G02B612

CPC分类号： G02F1/125 ,  G02F2201/07

摘要： An acousto-optical device includes a light waveguide path formed on an acousto-optical substrate, a transducer which crosses the light waveguide path and propagates a surface acoustic wave along the light waveguide path, and a buffer layer provided so that finger electrodes of the transducer are spaced apart from the light waveguide path in crossing portions in which the finger electrodes cross the light waveguide path. The finger electrodes have other portions which directly contact the substrate.

摘要翻译： 声光装置包括形成在声光基板上的光波导路径，穿过光波导路径并沿着光波导路径传播表面声波的换能器，以及设置成使得换能器的指状电极 在手指电极穿过光波导路径的交叉部分中与光波导路径间隔开。 手指电极具有直接接触衬底的其它部分。