公开(公告)号：US09423349B2

公开(公告)日：2016-08-23

申请号：US14178442

申请日：2014-02-12

Applicant: OLYMPUS CORPORATION

Inventor： Tetsuya Tanabe ,  Mitsushiro Yamaguchi

IPC: G01N21/64 ,  G01N21/51 ,  G01N15/14 ,  G02B21/00

CPC classification number: G01N21/64 ,  G01N15/14 ,  G01N15/1429 ,  G01N15/1434 ,  G01N21/51 ,  G01N21/6408 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/103 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/008

Abstract: In the scanning molecule counting method detecting light of a light-emitting particle in a sample solution using a confocal or multiphoton microscope, there is provided an optical analysis technique enabling the scanning in a sample solution with moving a light detection region in a broader area or along a longer route while making the possibility of detecting the same light-emitting particle as different particles as low as possible and remaining the size or shape of the light detection region unchanged as far as possible. In the inventive optical analysis technique, there are performed detecting light from the light detection region and generating time series light intensity data during moving the light detection region along the second route whose position is moved along the first route, and thereby, the signal indicating light from each light-emitting particle in a predetermined route is individually detected using the time series light intensity data.

Abstract translation: 在使用共聚焦或多光子显微镜检测样品溶液中的发光粒子的光的扫描分子计数方法中，提供了一种光学分析技术，其能够在较宽区域中移动光检测区域的样品溶液中进行扫描，或 沿着较长的路线，同时尽可能地检测与不同粒子相同的发光粒子的可能性，并尽可能地保持光检测区域的尺寸或形状不变。 在本发明的光学分析技术中，在沿着沿第一路线移动位置的第二路径移动光检测区域的同时，进行来自光检测区域的检测光并产生时间序列光强度数据，由此，指示光 使用时间序列光强度数据分别检测来自预定路线中的每个发光粒子。

公开(公告)号：US20160025644A1

公开(公告)日：2016-01-28

申请号：US14876187

申请日：2015-10-06

Applicant: GII ACQUISITION, LLC dba GENERAL INSPECTION, LLC

Inventor： Michael G. Nygaard ,  Laura L. Poletti

IPC: G01N21/88 ,  G01B11/02

CPC classification number: G01N21/952 ,  B07C5/342 ,  F42B35/00 ,  G01B11/2425 ,  G01B11/2433 ,  G01N21/909 ,  G01N21/9515 ,  G01N2201/02 ,  G01N2201/0621 ,  G01N2201/0638 ,  G01N2201/103 ,  G01N2201/12

Abstract: A method and system for optically inspecting a manufactured part at a single inspection station having a measurement axis are provided. The system comprises a fixture assembly which includes a rotatable first fixturing component to support a part in a generally vertical orientation and a rotatable second fixturing component mating with and removably connected to the first fixturing component to transmit torque from the first fixturing component to the second fixturing component. The second fixturing component includes a device for holding the part in a generally horizontal orientation and to permit rotation of the horizontally held part about the measurement axis between first and second predetermined angular positions about the axis. The system also comprises an actuator assembly, a backside illumination assembly, a frontside illumination device, a lens and detector assembly and at least one processor to process electrical signals generated by the lens and detector assembly.

Abstract translation: 提供了在具有测量轴的单个检查站上光学检查制造部件的方法和系统。 该系统包括夹具组件，其包括可旋转的第一夹持部件以支撑大致垂直的方向的部件，以及可旋转的第二夹紧部件，其与第一夹持部件配合并可拆卸地连接，以将转矩从第一夹持部件传递到第二夹持 零件。 第二固定部件包括用于将部件保持在大体上水平的方向并且允许水平保持部分围绕测量轴线围绕轴线在第一和第二预定角度位置之间旋转的装置。 该系统还包括致动器组件，背面照明组件，前侧照明装置，透镜和检测器组件以及用于处理由透镜和检测器组件产生的电信号的至少一个处理器。

公开(公告)号：US09244014B2

公开(公告)日：2016-01-26

申请号：US14175554

申请日：2014-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung-ho Kim ,  Won-seok Chung ,  Sung-min Chi ,  Joon-ho Kim ,  Kak Namkoong ,  Chin-sung Park

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  G01N2021/6421 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/103 ,  G01N2201/1053

Abstract: Provided are a multi-channel fluorescence detecting module and a nucleic acid analysis system including the multi-channel fluorescence detecting module. The nucleic acid analysis system includes: a plurality of loaders configured to accommodate a plurality of cartridges respectively, the cartridges comprising microfluidic devices; a transfer module including a linear actuator, the linear actuator including a movable unit configured to move linearly; and a fluorescence detecting module fixed to the movable unit, the fluorescence detecting module being configured to emit excitation light to the cartridges and detect fluorescence emitted from samples on the cartridges. The loaders are arranged in a row in a linearly moving direction of the movable unit.

Abstract translation: 提供了多通道荧光检测模块和包括多通道荧光检测模块的核酸分析系统。 所述核酸分析系统包括：多个装载器，其分别容纳多个盒，所述盒包括微流体装置; 包括线性致动器的转移模块，所述线性致动器包括构造成线性运动的可移动单元; 以及荧光检测模块，其固定到所述可移动单元，所述荧光检测模块被配置为向所述盒发射激发光并检测从所述盒上的样品发出的荧光。 装载机沿可移动单元的线性移动方向排成一列。

公开(公告)号：US20150268174A1

公开(公告)日：2015-09-24

申请号：US14217848

申请日：2014-03-18

Applicant: Corning Incorporated

Inventor： Joseph Henry Citriniti ,  Parasuram Padmanabhan Harihara

IPC: G01N21/89 ,  G01N21/95

CPC classification number: B28B19/0023 ,  B01D46/2418 ,  B01D2279/30 ,  B28B17/0072 ,  B28B19/0038 ,  C04B38/0006 ,  C04B41/009 ,  C04B41/5076 ,  C04B41/85 ,  G01N21/8422 ,  G01N21/8914 ,  G01N21/95 ,  G01N21/952 ,  G01N21/95692 ,  G01N2201/06113 ,  G01N2201/103

Abstract: An in situ inspection system and method to inspect a honeycomb body skin in a skinning system. The inspection system includes a line illuminator to generate a line illumination on the skin perpendicular to an axial direction of the honeycomb body travel, and a detector to detect the line illumination scattered from the skin and generate a signal based on the detected line illumination. A controller is configured to receive the signal generated by the detector, compare the received signal to a previously stored defect free signal in real-time, and control at least one skinning process parameter based on the comparison. The method includes in situ inspecting the skin and controlling at least one skinning process parameter based on the inspection. In the method, the in situ inspection includes illuminating a line of the skin perpendicular to the axial direction and detecting the illuminated line scattered from the skin.

Abstract translation: 一种在皮肤系统中检测蜂窝体皮肤的原位检查系统和方法。 该检查系统包括：垂直于蜂窝体行进轴向的皮肤上产生线照明的线照明器;检测器，用于检测从皮肤散射的线照明，并根据所检测的线照明产生信号。 控制器被配置为接收由检测器产生的信号，将接收到的信号与先前存储的无缺陷信号进行实时比较，并且基于该比较来控制至少一个剥皮处理参数。 该方法包括基于检查原位检查皮肤并控制至少一个剥皮过程参数。 在该方法中，原位检查包括照射垂直于轴向的皮肤线并检测从皮肤散射的照明线。

公开(公告)号：US20150055128A1

公开(公告)日：2015-02-26

申请号：US14532989

申请日：2014-11-04

Applicant: KLA-Tencor Corporation

Inventor： Christian Wolters ,  Juergen Reich

IPC: G01N21/95 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/103

Abstract: A surface scanning wafer inspection system with independently adjustable scan pitch and associated methods of operation are presented. The scan pitch may be adjusted independently from an illumination area on the surface of a wafer. In some embodiments, scan pitch is adjusted while the illumination area remains constant. For example, defect sensitivity is adjusted by adjusting the rate of translation of a wafer relative to the rate of rotation of the wafer without additional optical adjustments. In some examples, the scan pitch is adjusted to achieve a desired defect sensitivity over an entire wafer. In other examples, the scan pitch is adjusted during wafer inspection to optimize defect sensitivity and throughput. In other examples, the scan pitch is adjusted to maximize defect sensitivity within the damage limit of a wafer under inspection.

Abstract translation: 提出了具有独立可调的扫描间距和相关操作方法的表面扫描晶片检查系统。 可以独立于晶片表面上的照明区域来调整扫描间距。 在一些实施例中，在照明区域保持恒定的同时调整扫描间距。 例如，通过调整晶片相对于晶片的旋转速率的平移速率来调整缺陷灵敏度，而无需额外的光学调整。 在一些示例中，调整扫描间距以在整个晶片上实现期望的缺陷灵敏度。 在其他示例中，在晶片检查期间调整扫描间距以优化缺陷灵敏度和产量。 在其他示例中，调整扫描间距以使在检查的晶片的损伤极限内的缺陷灵敏度最大化。

公开(公告)号：US20150037876A1

公开(公告)日：2015-02-05

申请号：US14175554

申请日：2014-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung-ho Kim ,  Won-seok Chung ,  Sung-min Chi ,  Joon-ho Kim ,  Kak Namkoong ,  Chin-sung Park

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  G01N2021/6421 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/103 ,  G01N2201/1053

Abstract: Provided are a multi-channel fluorescence detecting module and a nucleic acid analysis system including the multi-channel fluorescence detecting module. The nucleic acid analysis system includes: a plurality of loaders configured to accommodate a plurality of cartridges respectively, the cartridges comprising microfluidic devices; a transfer module including a linear actuator, the linear actuator including a movable unit configured to move linearly; and a fluorescence detecting module fixed to the movable unit, the fluorescence detecting module being configured to emit excitation light to the cartridges and detect fluorescence emitted from samples on the cartridges. The loaders are arranged in a row in a linearly moving direction of the movable unit.

Abstract translation: 提供了多通道荧光检测模块和包括多通道荧光检测模块的核酸分析系统。 所述核酸分析系统包括：多个装载器，其分别容纳多个盒，所述盒包括微流体装置; 包括线性致动器的转移模块，所述线性致动器包括构造成线性运动的可移动单元; 以及荧光检测模块，其固定到所述可移动单元，所述荧光检测模块被配置为向所述盒发射激发光并检测从所述盒上的样品发出的荧光。 装载机沿可移动单元的线性移动方向排成一列。

公开(公告)号：US08949043B2

公开(公告)日：2015-02-03

申请号：US13202734

申请日：2010-02-02

Applicant: Kenji Oka ,  Kenji Mitomo ,  Kenichiro Komeda

Inventor： Kenji Oka ,  Kenji Mitomo ,  Kenichiro Komeda

IPC: G01N21/94 ,  G01N21/93 ,  G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/93 ,  G01N2201/103

Abstract: While an illumination optical system is irradiating the surface of a contaminated standard wafer with illumination light, this illumination light is scanned over the surface of the contaminated standard wafer, then detectors of a detection optical system each detect the light scattered from the surface of the contaminated standard wafer, next a predefined reference value in addition to detection results on the scattered light is used to calculate a compensation parameter “Comp” for detection sensitivity correction of photomultiplier tubes of the detectors, and the compensation parameter “Comp” is separated into a time-varying deterioration parameter “P”, an optical characteristics parameter “Opt”, and a sensor characteristics parameter “Lr”, and correspondingly managed. This makes is easy to calibrate the detection sensitivity.

Abstract translation: 当照明光学系统用照明光照射污染的标准晶片的表面时，该照明光被扫描在受污染的标准晶片的表面上，然后检测光学系统的检测器每个都检测从污染的表面散射的光 标准晶片，接下来的预定参考值除了散射光上的检测结果之外，用于计算检测器的光电倍增管的检测灵敏度校正的补偿参数“Comp”，并将补偿参数“Comp”分为时间 - 变化劣化参数“P”，光学特性参数“Opt”和传感器特性参数“Lr”，并相应地管理。 这使得检测灵敏度变得容易。

公开(公告)号：US08440971B2

公开(公告)日：2013-05-14

申请号：US13142554

申请日：2009-12-16

Applicant: Toshihiko Ouchi ,  Shintaro Kasai

Inventor： Toshihiko Ouchi ,  Shintaro Kasai

IPC: G01J5/00

CPC classification number: G01N21/3581 ,  G01N21/3563 ,  G01N21/8806 ,  G01N21/9505 ,  G01N2201/103

Abstract: In an examining apparatus or method, values of thickness and characteristic of an object, or distributions thereof can be simultaneously acquired. The examining apparatus includes a portion 9 for irradiating an object 2 with radiation, a portion 10 for detecting the radiation from the object, an acquiring portion 26, a storing portion 21 and a calculating portion 20. The acquiring portion acquires transmission time associated with detection time of radiation, and amplitude of the radiation. The storing portion beforehand stores relationship data between the transmission time and amplitude, and representative values of characteristic of the object. The calculating portion obtains values of thickness and characteristic of the object based on the transmission time, amplitude and relationship data.

Abstract translation: 在检查装置或方法中，可以同时获取对象的厚度和特征值或其分布。 检查装置包括用于对物体2照射辐射的部分9，用于检测来自物体的辐射的部分10，获取部分26，存储部分21和计算部分20.获取部分获取与检测相关的传输时间 辐射时间和辐射幅度。 存储部预先存储发送时间和振幅之间的关系数据以及对象的特征的代表值。 计算部分根据传输时间，幅度和关系数据，获得对象的厚度和特征值。

公开(公告)号：US20120229802A1

公开(公告)日：2012-09-13

申请号：US13413521

申请日：2012-03-06

Applicant: Christian Wolters ,  Juergen Reich

Inventor： Christian Wolters ,  Juergen Reich

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/103

Abstract: A surface scanning wafer inspection system with independently adjustable scan pitch and associated methods of operation are presented. The scan pitch may be adjusted independently from an illumination area on the surface of a wafer. In some embodiments, scan pitch is adjusted while the illumination area remains constant. For example, defect sensitivity is adjusted by adjusting the rate of translation of a wafer relative to the rate of rotation of the wafer without additional optical adjustments. In some examples, the scan pitch is adjusted to achieve a desired defect sensitivity over an entire wafer. In other examples, the scan pitch is adjusted during wafer inspection to optimize defect sensitivity and throughput. In other examples, the scan pitch is adjusted to maximize defect sensitivity within the damage limit of a wafer under inspection.

Abstract translation: 提出了具有独立可调的扫描间距和相关操作方法的表面扫描晶片检查系统。 可以独立于晶片表面上的照明区域来调整扫描间距。 在一些实施例中，在照明区域保持恒定的同时调整扫描间距。 例如，通过调整晶片相对于晶片的旋转速率的平移速率来调整缺陷灵敏度，而无需额外的光学调整。 在一些示例中，调整扫描间距以在整个晶片上实现期望的缺陷灵敏度。 在其他示例中，在晶片检查期间调整扫描间距以优化缺陷灵敏度和产量。 在其他示例中，调整扫描间距以使在检查的晶片的损伤极限内的缺陷灵敏度最大化。

公开(公告)号：US20090164130A1

公开(公告)日：2009-06-25

申请号：US11917023

申请日：2006-06-09

Applicant: Anand T. N. Kumar ,  David Alan Boas ,  Adrew K. Dunn

Inventor： Anand T. N. Kumar ,  David Alan Boas ,  Adrew K. Dunn

IPC: G01N21/64 ,  G06F19/00

CPC classification number: G01N21/6456 ,  G01N21/39 ,  G01N21/4795 ,  G01N21/6408 ,  G01N2021/1787 ,  G01N2201/0697 ,  G01N2201/0846 ,  G01N2201/103

Abstract: Methods, apparatus (100), and computer program products for determining lifetimes and distribution of fluorophores (102) embedded in samples (104). Fluorophores are placed into the sample, light from a source (110) selected to excite the fluorophores illuminates the sample, light emitted from the excited fluorophores is detected by a device (138), and a time-domain analysis is performed on the detected emitted light to determine a three-dimensional distribution of the fluorophores in the sample.

Abstract translation: 用于确定嵌入样品（104）中的荧光团（102）的寿命和分布的方法，装置（100）和计算机程序产品。 将荧光团放置在样品中，来自选择用于激发荧光团的源（110）的光照射样品，由装置（138）检测从激发的荧光团发射的光，并且对所检测到的发射 以确定样品中荧光团的三维分布。