Multibeam generating apparatus and electron beam drawing apparatus
    61.
    发明申请
    Multibeam generating apparatus and electron beam drawing apparatus 失效
    多光束发生装置和电子束描绘装置

    公开(公告)号:US20040056578A1

    公开(公告)日:2004-03-25

    申请号:US10618008

    申请日:2003-07-14

    Abstract: This invention provides a multielectron gun which generates a plurality of electron beams having uniform characteristics. A multielectron gun (2) is formed of a plurality of electron guns (2a-2c). The electron gun (2a) has, in addition to an electron source (21a), Wehnelt electrode (22a), and anode electrode (23), a shield electrode (24) between the Wehnelt electrode (22a) and anode electrode (23). The shield electrode reduces field interference among the electron guns.

    Abstract translation: 本发明提供一种多电子枪,其产生具有均匀特性的多个电子束。 多电子枪(2)由多个电子枪(2a-2c)形成。 电子枪(2a)除了电子源(21a),Wehnelt电极(22a)和阳极电极(23)之外还具有在Wehnelt电极(22a)和阳极电极(23)之间的屏蔽电极(24) 。 屏蔽电极减少电子枪之间的场干扰。

    Electron gun comprising a tubular electrode having a coiled portion formed therein
    62.
    发明授权
    Electron gun comprising a tubular electrode having a coiled portion formed therein 失效
    电子枪包括其中形成有螺旋部分的管状电极

    公开(公告)号:US06696780B1

    公开(公告)日:2004-02-24

    申请号:US09469029

    申请日:1999-12-21

    CPC classification number: H01J3/029 H01J29/488 H01J2229/4803

    Abstract: An electron gun that can provide a desired electron beam modulation effect without preventing a modulation magnetic field from passing from an exterior of the vacuum portion is provided. A part of a tubular G3 electrode in an electron gun is formed into a coiled portion to allow the modulation magnetic field to pass through the clearances between parts of a wire composing the coiled portion.

    Abstract translation: 提供一种可以提供所需电子束调制效果而不防止调制磁场从真空部分外部通过的电子枪。 电子枪中的管状G3电极的一部分形成为线圈部分,以允许调制磁场通过构成卷绕部分的导线的部分之间的间隙。

    Electron gun having a cathode with limited electron discharge region
    63.
    发明授权
    Electron gun having a cathode with limited electron discharge region 失效
    电子枪具有有限的电子放电区域的阴极

    公开(公告)号:US5990608A

    公开(公告)日:1999-11-23

    申请号:US975248

    申请日:1997-11-21

    CPC classification number: H01J3/029 H01J1/20 H01J29/04

    Abstract: An electron gun provides an improved focusing characteristic of electron beams surely and effectively, and permits position alignment to be relatively easy in assembling thereof. In an electron gun which includes a cathode for discharging electrons and a plurality of grids each having electron passing-through holes for guiding the electrons discharged from the cathode unidirectionally, an electron dischargeable region is formed in an electron discharging plane of the cathode, which is band-shaped. In addition, the length of the band-shaped area constituting the electron dischargeable region on its shorter side is less than 80% of the diameter of the area from where electrons are discharged when a practical maximum current is taken out without limiting the electron dischargeable region.

    Abstract translation: 电子枪确保和有效地提供电子束的改进的聚焦特性,并且允许位置对准在组装时相对容易。 在包括用于放电电子的阴极的电子枪和多个具有用于引导从阴极单向排出的电子的电子通过孔的栅格中,在阴极的电子放电平面中形成电子放电区域,这是 带状。 此外,构成电子可放电区域的短边的带状区域的长度小于当取出实际最大电流时电子排出的区域的直径的80%,而不限制电子可放电区域 。

    Zero-bias gridded gun
    65.
    发明授权
    Zero-bias gridded gun 失效
    零偏网格枪

    公开(公告)号:US4227116A

    公开(公告)日:1980-10-07

    申请号:US927087

    申请日:1978-07-24

    CPC classification number: H01J23/065 H01J1/46 H01J3/029

    Abstract: A gun for a linear-beam electron tube has a control grid for modulating the beam current which consists of an array of conductive web elements whose spacing from each other is much larger than their spacing from the concave emissive surface of the cathode. It was found that when this condition is met the grid can be operated at cathode potential while beam current is being drawn without distorting the electric accelerating field enough to ruin the focusing of the beam. Thus, when the grid is used to pulse the beam current on and off, it can have zero bias in the "on" condition, whereby the pulse modulator can be greatly simplified.

    Abstract translation: 用于线性束电子管的枪具有用于调制束电流的控制栅格,该栅极电流由导电网状元件阵列组成,它们彼此的间隔比它们与阴极的凹形发射表面的间隔大得多。 已经发现,当满足这种条件时,栅极可以在阴极电位下操作,而束电流被拉伸而不使电加速场扭曲到足以破坏光束的聚焦。 因此,当栅格用于脉冲束电流通/断时,它可以在“导通”状态下具有零偏置,从而可以大大简化脉冲调制器。

    Electron gun with stationary beam during blanking
    66.
    发明授权
    Electron gun with stationary beam during blanking 失效
    在消隐期间具有固定光束的电子枪

    公开(公告)号:US4218635A

    公开(公告)日:1980-08-19

    申请号:US23096

    申请日:1979-03-23

    CPC classification number: H01J29/488 H01J3/029

    Abstract: Shifting of the electron beam emitted from an electron gun is eliminated by placement of deflection electrodes between the electron gun anode and object electrode, whereby the electron beam, during blanking, is deflected away from the electron gun central axis and caused to totally impinge upon blanking and spray electrodes. For deflections less than the deflection required for total blanking, the electron beam is diminished in intensity but is not moved in position from the central gun axis.

    Abstract translation: 通过在电子枪阳极和目标电极之间设置偏转电极来消除从电子枪发射的电子束的移动,由此在消隐期间电子束被偏离电子枪中心轴并且完全撞击到消隐 和喷雾电极。 对于小于总消隐所需的偏转的偏转,电子束的强度减小,但不会从中心枪的轴线移动到位置。

    Electron gun
    68.
    发明授权
    Electron gun 失效
    电子枪

    公开(公告)号:US3932749A

    公开(公告)日:1976-01-13

    申请号:US454038

    申请日:1974-03-22

    Inventor: Norman J. Taylor

    CPC classification number: H01J3/029

    Abstract: Electron gun having a source of electrons, means for forming the electrons into a beam directed along an axis, and an output electrode comprising a plurality of semi-cylindrical plates disposed coaxially of the axis of the beam. This electrode is part of the final lens of the gun, and voltages for deflecting the beam and correcting astigmatism are superposed on the plates of this electrode.

    Abstract translation: 具有电子源的电子枪,用于将电子形成为沿着轴指向的光束的装置,以及包括与光束的轴线同轴设置的多个半圆柱形板的输出电极。 该电极是枪的最终透镜的一部分,并且用于偏转光束和校正像散的电压叠加在该电极的板上。

    Electron gun having cathode with cylindrical extension and control grid with conical section
    69.
    发明授权
    Electron gun having cathode with cylindrical extension and control grid with conical section 失效
    具有圆柱形延伸的阴茎电子枪和带有环形部分的控制网

    公开(公告)号:US3659135A

    公开(公告)日:1972-04-25

    申请号:US3659135D

    申请日:1970-11-12

    Applicant: PHILIPS CORP

    CPC classification number: H01J3/029 H01J29/56

    Abstract: The rotationally-symmetric electron gun of a cathode-ray tube device comprises successively a cathode, a disk-shaped control grid provided with a central control, grid aperture and a diskshaped anode grid provided with a central circular-cylindrical anode grid aperture. The cathode comprises a first conductive circular cylinder from the base of which a second conductive circular cylinder projects the base of which forms the emitting surface. The control grid aperture, on the side of the anode grid, has a circular-cylindrical part and, on the side of the cathode, has a conical part which narrows towards the circularcylindrical part, the wall of which encloses substantially an angle of 45* with the axis of the electron gun. The diameter of the said first conductive circular cylinder and the diameter of the said circular-cylindrical part are substantially six times as large as the diameter of the emitting surface, while the diameter of the anode grid aperture is substantially four times as large, the length of the said second conductive cylinder is substantially twice as large, the distance between the emitting surface and the said circular-cylindrical part is substantially equally large, the axial length of the said conical part is at least equally large and the distance between the control grid and the anode grid is substantially one and a half times as large as the diameter of the emitting surface. The control grid is kept at a negative potential relative to the cathode. The anode is kept at a positive potential which is substantially four and a half times as large, relative to the cathode, while the space on the side of the anode grid remote from the control grid is kept substantially field-free.

    Abstract translation: 阴极射线管装置的旋转对称电子枪依次包括阴极,设有中心控制器的格盘控制栅格,格栅孔和设置有中心圆柱形阳极栅格孔的盘形阳极栅格。 阴极包括从其底部的第一导电圆柱体,第二导​​电圆柱体突出其底部形成发射表面。 在阳极栅格侧的控制栅格孔具有圆柱形部分,并且在阴极侧具有圆锥形部分,该圆锥形部分朝向圆柱形部分变窄,该圆形部分的壁基本上包围 45°与电子枪的轴。 所述第一导电圆柱体的直径和所述圆柱形部分的直径基本上是发射表面直径的六倍,而阳极栅格孔径的直径基本上是四倍,长度 所述第二导电圆柱体的轴向长度基本上是两倍,发射表面与所述圆柱形部分之间的距离基本相等,所述锥形部分的轴向长度至少相当大,并且控制网格之间的距离 并且阳极栅格基本上是发射表面的直径的1.5倍。 控制栅格相对于阴极保持在负电位。 阳极保持在相对于阴极基本上为四分之一倍的正电位,而远离控制电网的阳极栅极侧的空间基本上保持不变。

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