摘要:
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
摘要:
An electron beam window 20 is formed with six diamond panes 21 to transmit an electron beam 15. The panes 21 are formed in a cylindrical disc 17 of single crystal or of polycrystalline diamond such that each pane 21 is surrounded by a thicker integral peripheral rim 22 which conducts heat away from the panes 21. A heat sink ring 35 can be fitted to the outer cylindrical surface of the peripheral rim 22. A scanning means 36 indexes the electron beam 15 sequentially through each pane 21. The use of diamond panes reduces the electron beam energy converted to heat in each pane 21, the thicker peripheral rim 22 increases cooling of the panes 21, and the scanning movement 37 reduces the temperature rise of the panes 21.
摘要:
A beam generating system for electron tubes, particularly travelling wave tubes, is formed of a beam shaping electrode and a dispenser cathode supported therein having an emission disk at its end face. A positional change of the dispenser cathode in the beam shaping electrode at different ambient temperatures is suppressed with the beam generating system, and thus a beam defocussing is avoided. According to the invention, the dispenser cathode is directly connected to the beam shaping electron and is connected below the emission disk by means of a radial cathode support. The beam generating system of this type is particularly employed in travelling wave tubes.
摘要:
The electron gun includes a spherically concave cathode emitter with a pair of axially spaced spherically concave focus and control grids closely spaced overlaying the cathode emitter for controlling the beam current. The grids are supported from a common thermally conductive tubular grid support structure via the intermediary of first and second annular members one of which is a thermally conductive insulator. One or more of the grids are serrated about their peripheries to define a plurality of radially directed fingers bonded to the end of a respective annular grid support member. In an alternative embodiment, the end of the annular grid support member, as bonded to the serrated grid, is castellated to accommodate differences in thermal expansion between the grid and the annular grid support member.
摘要:
A filament assembly includes a core and a filament. At least a central portion of the filament is disposed on the core. At least the central portion may be straight or may have a high-resistance configuration such as one in which the filament follows a path that changes direction. A thermionically emissive layer may be disposed on the core so as to encapsulate at least the central portion. The filament assembly may be utilized in any application requiring the production of electrons.
摘要:
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.
摘要:
There provided is an electron beam apparatus of preventing surface creeping discharge from newly arising due to discharge that arises between an anode electrode and an electron-emitting device. In an electron-emitting device including a scan signal device electrode and an information signal device electrode, a portion of the scan signal device electrode is covered by an insulating layer of insulating scan signal wiring from information signal wiring, an additional electrode is connected to the scan signal device electrode at an end portion of the insulating layer and the additional electrode is configured so that energy Ee being lost due to melting of the additional electrode is larger than energy Ea of discharge current flowing in to the electron-emitting device.
摘要:
This specification discloses an electron beam generating source having a control electrode comprising electrically conductive and nonconductive or slightly conductive layers, said nonconductive or slightly conductive layer facing an anode. The surface of said conductive layer in contact with said nonconductive or slightly conductive layer faces a cathode, thereby preventing electron emission from said contact surface and so by eliminating or almost entirely eliminating micro discharge.