Charged particle beam device with cleaning unit and method of operation thereof
    1.
    发明授权
    Charged particle beam device with cleaning unit and method of operation thereof 有权
    具有清洁单元的带电粒子束装置及其操作方法

    公开(公告)号:US07355186B2

    公开(公告)日:2008-04-08

    申请号:US10547865

    申请日:2004-03-03

    申请人: Thomas Jasinski

    发明人: Thomas Jasinski

    IPC分类号: G21G5/00 A61N5/00

    摘要: The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.

    摘要翻译: 本发明提供一种带电粒子束装置,用于发射带电粒子束的发射器模块及其操作方法。 由此,实现了沿光轴(1)发射带电粒子的带电粒子束发射器(15)。 在相同的载体(32)上,实现了用于沿着光轴(1)近似地发射带电粒子的清洁发射器(16)。 因此,可以提供改进的清洁。

    Electron gun and an electron beam window
    2.
    发明申请
    Electron gun and an electron beam window 审中-公开
    电子枪和电子束窗

    公开(公告)号:US20050253496A1

    公开(公告)日:2005-11-17

    申请号:US10522240

    申请日:2004-11-29

    CPC分类号: H01J3/026 H01J33/04

    摘要: An electron beam window 20 is formed with six diamond panes 21 to transmit an electron beam 15. The panes 21 are formed in a cylindrical disc 17 of single crystal or of polycrystalline diamond such that each pane 21 is surrounded by a thicker integral peripheral rim 22 which conducts heat away from the panes 21. A heat sink ring 35 can be fitted to the outer cylindrical surface of the peripheral rim 22. A scanning means 36 indexes the electron beam 15 sequentially through each pane 21. The use of diamond panes reduces the electron beam energy converted to heat in each pane 21, the thicker peripheral rim 22 increases cooling of the panes 21, and the scanning movement 37 reduces the temperature rise of the panes 21.

    摘要翻译: 电子束窗20形成有六个金刚石窗玻璃21以透射电子束15。 窗玻璃21形成在单晶圆柱形盘17或多晶金刚石的圆柱形盘17中,使得每个玻璃板21被从玻璃板21传导热量的较厚的整体外围边缘22包围。 散热器环35可以装配到周边边缘22的外圆柱形表面。 扫描装置36依次通过每个窗格21对电子束15进行索引。 使用金刚石窗玻璃减少在每个窗格21中转换成热的电子束能量,较厚的外围边缘22增加了窗格21的冷却,并且扫描运动37降低了窗格21的温度上升。

    Beam generating system for electron tubes, particularly travelling wave
tubes
    3.
    发明授权
    Beam generating system for electron tubes, particularly travelling wave tubes 失效
    用于电子管的光束发生系统,特别是行波管

    公开(公告)号:US4644219A

    公开(公告)日:1987-02-17

    申请号:US667753

    申请日:1984-11-02

    申请人: Erwin Huebner

    发明人: Erwin Huebner

    CPC分类号: H01J3/026 H01J23/04

    摘要: A beam generating system for electron tubes, particularly travelling wave tubes, is formed of a beam shaping electrode and a dispenser cathode supported therein having an emission disk at its end face. A positional change of the dispenser cathode in the beam shaping electrode at different ambient temperatures is suppressed with the beam generating system, and thus a beam defocussing is avoided. According to the invention, the dispenser cathode is directly connected to the beam shaping electron and is connected below the emission disk by means of a radial cathode support. The beam generating system of this type is particularly employed in travelling wave tubes.

    摘要翻译: 用于电子管,特别是行波管的光束产生系统由束形成电极和支撑在其中的分配器阴极形成,其端面具有发射盘。 波束形成电极在不同环境温度下的分配器阴极的位置变化被光束产生系统抑制,因此避免了光束聚焦。 根据本发明,分配器阴极直接连接到光束成形电子,并且通过径向阴极支撑件连接在发射盘下方。 这种波束发生系统特别适用于行波管。

    Gridded convergent flow electron gun for linear beam tubes
    4.
    发明授权
    Gridded convergent flow electron gun for linear beam tubes 失效
    用于线性束管的网格会聚流量电子枪

    公开(公告)号:US3983446A

    公开(公告)日:1976-09-28

    申请号:US160045

    申请日:1971-07-06

    摘要: The electron gun includes a spherically concave cathode emitter with a pair of axially spaced spherically concave focus and control grids closely spaced overlaying the cathode emitter for controlling the beam current. The grids are supported from a common thermally conductive tubular grid support structure via the intermediary of first and second annular members one of which is a thermally conductive insulator. One or more of the grids are serrated about their peripheries to define a plurality of radially directed fingers bonded to the end of a respective annular grid support member. In an alternative embodiment, the end of the annular grid support member, as bonded to the serrated grid, is castellated to accommodate differences in thermal expansion between the grid and the annular grid support member.

    摘要翻译: 电子枪包括球形凹阴极发射器,其具有一对轴向间隔开的球形凹焦点和控制栅格,其紧密间隔地覆盖阴极发射器以控制束电流。 栅格由通常的导热管状栅格支撑结构经由第一和第二环形构件的介质支撑,其中一个是导热绝缘体。 一个或多个栅格围绕它们的周边锯齿以限定结合到相应的环形栅格支撑构件的端部的多个径向指向的指状物。 在替代实施例中,环形格栅支撑构件的结合到锯齿形格栅的端部被浇铸以适应栅格和环形栅格支撑构件之间的热膨胀差异。

    Electron beam apparatus
    9.
    发明申请
    Electron beam apparatus 失效
    电子束装置

    公开(公告)号:US20060164001A1

    公开(公告)日:2006-07-27

    申请号:US11331111

    申请日:2006-01-13

    IPC分类号: H01J63/04 H01J1/62

    CPC分类号: H01J3/026 H01J31/127

    摘要: There provided is an electron beam apparatus of preventing surface creeping discharge from newly arising due to discharge that arises between an anode electrode and an electron-emitting device. In an electron-emitting device including a scan signal device electrode and an information signal device electrode, a portion of the scan signal device electrode is covered by an insulating layer of insulating scan signal wiring from information signal wiring, an additional electrode is connected to the scan signal device electrode at an end portion of the insulating layer and the additional electrode is configured so that energy Ee being lost due to melting of the additional electrode is larger than energy Ea of discharge current flowing in to the electron-emitting device.

    摘要翻译: 提供了一种电子束装置,其防止由于在阳极电极和电子发射器件之间产生的放电而新出现的表面蠕变放电。 在包括扫描信号器件电极和信息信号器件电极的电子发射器件中,扫描信号器件电极的一部分被来自信息信号布线的绝缘扫描信号布线的绝缘层覆盖,附加电极连接到 在绝缘层的端部处的扫描信号器件电极和附加电极被配置为使得由于附加电极的熔化而损失的能量Ee大于流入电子发射器件的放电电流的能量Ea。

    Electron beam generating source
    10.
    发明授权
    Electron beam generating source 失效
    电子束生成源

    公开(公告)号:US3808498A

    公开(公告)日:1974-04-30

    申请号:US24689572

    申请日:1972-04-24

    申请人: JEOL LTD

    发明人: FUJISAWA M

    摘要: This specification discloses an electron beam generating source having a control electrode comprising electrically conductive and nonconductive or slightly conductive layers, said nonconductive or slightly conductive layer facing an anode. The surface of said conductive layer in contact with said nonconductive or slightly conductive layer faces a cathode, thereby preventing electron emission from said contact surface and so by eliminating or almost entirely eliminating micro discharge.

    摘要翻译: 本说明书公开了一种具有控制电极的电子束产生源,该控制电极包括导电和非导电或稍微导电的层,所述非导电或微导电层面向阳极。 与所述非导电或略导电层接触的所述导电层的表面面向阴极,从而防止从所述接触表面发射电子,因此通过消除或几乎完全消除微量放电。