Laser-Induced Borane Production for Ion Implantation
    69.
    发明申请
    Laser-Induced Borane Production for Ion Implantation 审中-公开
    激光诱导离子植入的硼烷生产

    公开(公告)号:US20160175804A1

    公开(公告)日:2016-06-23

    申请号:US14576549

    申请日:2014-12-19

    摘要: Systems and methods for the production of laser induced high mass molecular borane is disclosed for an ion implantation system. The system comprises a laser, a diborane gas source, a heated interaction chamber for generating a high mass molecular borane, a transport system for transferring the high mass molecular borane, and an ion source chamber for generating an ion beam in an ion beam path for implantation of a workpiece. The transport system comprises at least a first and a second flow control component at least a first heated chamber, wherein the first heated chamber is disposed between the first and second flow control components, and wherein the first heated chamber is configured to condense the high mass molecular borane. The laser comprises a CO2 laser configured to irradiate the diborane source gas at a wavelength of about 10.6 μm at a R-16 (973 cm−1) line of excitation.

    摘要翻译: 公开了用于离子注入系统的用于生产激光诱导的高质量分子量硼烷的系统和方法。 该系统包括激光器,乙硼烷气体源,用于产生高质量分子量硼烷的加热相互作用室,用于转移高质量分子量硼烷的输送系统和用于在离子束路径中产生离子束的离子源室, 植入工件。 输送系统至少包括第一和第二流量控制部件至少第一加热室,其中第一加热室设置在第一和第二流量控制部件之间,并且其中第一加热室被配置为冷凝高质量 分子硼烷。 激光器包括配置成在R-16(973cm-1)激发线处照射约10.6μm波长的乙硼烷源气体的CO 2激光器。

    Stable complexes of non-metal elements and hydride as novel reagents
    70.
    发明授权
    Stable complexes of non-metal elements and hydride as novel reagents 有权
    非金属元素和氢化物的稳定配合物作为新试剂

    公开(公告)号:US09260312B2

    公开(公告)日:2016-02-16

    申请号:US14269909

    申请日:2014-05-05

    摘要: A reagent and its method of production are provided. The reagent includes at least one zero-valent atom, whether metal, metalloid, or non-metal, in complex with at least one hydride molecule. The method of production includes ball-milling a mixture which includes an elemental (i.e. zero-valent) material and a hydride. In some cases, the elemental material is a non-metal such as carbon. The reagent can be useful as a reagent for the synthesis of elemental nanoparticles composed of zero-valent metal, metalloid, or non-metal.

    摘要翻译: 提供试剂及其生产方法。 试剂包括与至少一种氢化物分子复合的至少一个零价原子,无论是金属,准金属还是非金属。 生产方法包括球磨一种包含元素(即零价)材料和氢化物的混合物。 在某些情况下,元素材料是非金属如碳。 该试剂可用作合成由零价金属,准金属或非金属组成的元素纳米颗粒的试剂。