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    Beam generating system for electron beam measuring instruments having cathode support structure
    61.
    发明授权
    Beam generating system for electron beam measuring instruments having cathode support structure 失效
    具有阴极支撑结构的电子束测量仪的光束发生系统

    公开(公告)号：US4924136A

    公开(公告)日：1990-05-08

    申请号：US219580

    申请日：1988-07-15

    Applicant: Burkhard Lischke ,  Dieter Winkler

    Inventor： Burkhard Lischke ,  Dieter Winkler

    IPC: H01J37/06 ,  H01J1/18 ,  H01J37/07 ,  H01J49/08

    CPC classification number: H01J37/07 ,  H01J1/18

    Abstract: Beam generating system for electron beam measuring instruments. In prior art beam generators, the life expectancy of directly heated boride cathodes is limited by their thermally disadvantageous mount. The present invention provides a cathode not clamped at the lower end of the crystal shank as was previously standard, but clamped immediately below the cathode tip. The inventive mount of the boride cathode results in the crystal being only insignificantly hotter in the region of the clamping plane than at the electron-emitting tip.

    Abstract translation: 用于电子束测量仪器的光束发生系统。 在现有技术的光束发生器中，直接加热的硼化物阴极的寿命受其不利的安装限制。 本发明提供了一个阴极，不像以前标准那样夹在晶体柄的下端，而是紧紧地夹在阴极尖端的正下方。 本发明的硼化阴极的安装导致晶体在夹持平面的区域中比在电子发射尖端处仅显着更热。

    Apparatus for introducing oxygen gas
    62.
    发明授权
    Apparatus for introducing oxygen gas 失效
    用于引入氧气的设备

    公开(公告)号：US4772821A

    公开(公告)日：1988-09-20

    申请号：US911786

    申请日：1986-09-26

    Applicant: Shigeyuki Hosoki ,  Mikio Ichihashi ,  Keiji Takata ,  Hiroyasu Kaga

    Inventor： Shigeyuki Hosoki ,  Mikio Ichihashi ,  Keiji Takata ,  Hiroyasu Kaga

    IPC: H01J37/06 ,  B01J3/02 ,  H01J37/07 ,  H01J37/073 ,  H01J37/18 ,  H01J17/26 ,  A61L9/00

    CPC classification number: H01J37/073 ,  B01J3/02 ,  H01J37/18

    Abstract: An oxygen gas introducing apparatus for introducing oxygen gas into a vacuum electron optical column of an electron beam apparatus having an electron beam source as a cathode that needs the oxygen gas is disclosed which comprises a silver cylinder having a closed end and provided on a side wall of the vacuum electron optical column so as to project from an outside atmospheric side to an interior of the vacuum electron optical column, and a heating member electrically insulated and disposed within an interior of the silver cylinder which interior is in communication with the atmosphere.

    Abstract translation: 公开了一种氧气引入装置，用于将氧气引入具有电子束装置的电子束装置的真空电子光学柱中，所述电子束装置具有需要氧气的阴极，该电子束装置包括具有闭合端的银圆筒并设置在侧壁 的真空电子光学柱从外部大气侧突出到真空电子光学柱的内部;以及加热构件，其电绝缘并设置在与气氛连通的银圆筒内部。

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