公开(公告)号：US5001416A

公开(公告)日：1991-03-19

申请号：US488118

申请日：1990-03-05

申请人： John W. Bittner ,  Richard W. Biscardi

发明人： John W. Bittner ,  Richard W. Biscardi

IPC分类号： G01R19/10 ,  H05H7/00

CPC分类号： H05H7/00 ,  G01R19/10

摘要： An electronic measurement circuit for high speed comparison of the relative amplitudes of a predetermined number of electrical input signals independent of variations in the magnitude of the sum of the signals. The circuit includes a high speed electronic switch that is operably connected to receive on its respective input terminals one of said electrical input signals and to have its common terminal serve as an input for a variable-gain amplifier-detector circuit that is operably connected to feed its output to a common terminal of a second high speed electronic switch. The respective terminals of the second high speed electronic switch are operably connected to a plurality of integrating sample and hold circuits, which in turn have their outputs connected to a summing logic circuit that is operable to develop first, second and third output voltages, the first output voltage being proportional to a predetermined ratio of sums and differences between the compared input signals, the second output voltage being proportional to a second summed ratio of predetermined sums and differences between said input signals, and the third output voltage being proportional to the sum of signals to the summing logic circuit. A servo system that is operably connected to receive said third output signal and compare it with a reference voltage to develop a slowly varying feedback voltage to control the variable-gain amplifier in said common amplifier-detector circuit in order to make said first and second output signals independent of variations in the magnitude of the sum of said input signals.

摘要翻译： 一种电子测量电路，用于高速比较预定数量的电输入信号的相对幅度，与信号之和的幅度的变化无关。 电路包括高速电子开关，其可操作地连接以在其相应的输入端子上接收所述电输入信号中的一个，并且使其公共端子用作可操作地连接到馈电的可变增益放大器 - 检测器电路的输入 其输出到第二高速电子开关的公共端子。 第二高速电子开关的各个端子可操作地连接到多个积分采样和保持电路，它们的输出又连接到可操作以产生第一，第二和第三输出电压的求和逻辑电路，第一 输出电压与所比较的输入信号之间的和和差的预定比例成比例，第二输出电压与预定和的第二加和比和所述输入信号之间的差成比例，并且第三输出电压与 信号到求和逻辑电路。 一种可操作地连接以接收所述第三输出信号并将其与参考电压进行比较以产生缓慢变化的反馈电压以控制所述公共放大器检测器电路中的可变增益放大器的伺服系统，以便使所述第一和第二输出 独立于所述输入信号之和的幅度变化的信号。

公开(公告)号：US4785188A

公开(公告)日：1988-11-15

申请号：US102448

申请日：1987-09-29

申请人： Haruhisa Mori ,  Tadayuki Kojima ,  Satoshi Hasui ,  Hiroshi Ohmori ,  Shuji Kikuchi

发明人： Haruhisa Mori ,  Tadayuki Kojima ,  Satoshi Hasui ,  Hiroshi Ohmori ,  Shuji Kikuchi

IPC分类号： G21K5/04 ,  H01J37/304 ,  H01J37/317 ,  H01L21/265 ,  H05H7/00

CPC分类号： H01J37/3171 ,  H01J37/304

摘要： A primary particle beam irradiation apparatus comprising a stage on which a target is placed; a device for irradiating a predetermined scan region on the stage with a primary particle beam; a secondary ion sensor for detecting a secondary ion, generated by an irradiation of the primary particle beam, from the stage or the target; and a device, connected to the irradiating device and the secondary ion sensor, for controlling the irradiating means on the basis of an output signal from the secondary ion sensor.Further, a method for irradation of a primary particle beam comprising the step of detecting the irradiation position of a primary particle beam scanned on a target over a predetermined width or predetermined region by using the output of a secondary ion sensor provided near the surface of the target; the step of correcting the deviation of the irradiation position based on the information of the irradiation position which is detected, and further scanning the primary particle beam to irradiate the surface of the target based on the information obtained at the correction step.

公开(公告)号：US4737727A

公开(公告)日：1988-04-12

申请号：US13816

申请日：1987-02-12

申请人： Tadatoshi Yamada ,  Shiro Nakamura ,  Takafumi Nakagawa ,  Yuuichi Yamamoto

发明人： Tadatoshi Yamada ,  Shiro Nakamura ,  Takafumi Nakagawa ,  Yuuichi Yamamoto

IPC分类号： H01F6/00 ,  H05H7/00 ,  H05H7/04 ,  H05H7/06 ,  H05H13/04 ,  H01F7/22

CPC分类号： H05H7/04 ,  H01F6/00 ,  H05H13/04 ,  H05H7/00 ,  H05H7/06

摘要： A charged beam apparatus comprises vacuum vessels for accommodating superconducting coils in a heat-insulating manner, a charged beam vacuum chamber that provides a passage for a charged beam, and a vacuum chamber for synchrotron radiation that is coupled to the charged beam vacuum chamber and through which is passed the synchrotron radiation that is produced by the charged beam when it is bent by the superconducting coils, the vacuum vessels being detachable from the charged beam vacuum chamber.

摘要翻译： 带电波束装置包括用于以绝热方式容纳超导线圈的真空容器，为带电束提供通道的带电束真空室和用于同步加速器辐射的真空室，其耦合到带电束的真空室并通过 当被超导线圈弯曲时，其通过由带电束产生的同步加速器辐射，真空容器可从带电束真空室拆卸。

公开(公告)号：US4633208A

公开(公告)日：1986-12-30

申请号：US614917

申请日：1984-05-29

申请人： Erich Voss ,  Hermann Wollnik

发明人： Erich Voss ,  Hermann Wollnik

IPC分类号： H01J37/141 ,  G21K1/08 ,  G21K1/093 ,  H01J3/20 ,  H01J29/64 ,  H01J37/10 ,  H05H7/00 ,  H05H7/04 ,  H01F7/00 ,  H01F1/00

CPC分类号： G21K1/08 ,  H01J3/20 ,  H05H7/04

摘要： An nth order magnetic multipole arrangement for influencing the trajectory of charged particles is disclosed. In order to avoid using structural parts that are manufactured separately, it has been found to provide as the multipole arrangement, the stator of a multi-pole alternating current machine, the stator winding of which is fed by a voltage source in such a way that the produce of current and number of turns (number of ampere turns) in a groove or group of grooves disposed under the azimuth angle .theta. is proportional to cos (n .theta.), n corresponding to the order (order number) of the multipole arrangement, and the factors a and b being taken from the ratio b/a which states the orientation of the multipole relative to the azmith angle .theta.=0. As the multipole arrangement there may be provided also a stator, excited by permanent magnets, of a direct current machine.

摘要翻译： 公开了用于影响带电粒子的轨迹的第n级磁多极装置。 为了避免使用单独制造的结构部件，已经发现，提供多极装置，多极交流电机的定子，其定子绕组由电压源馈送，使得 设置在方位角θ下方的槽或一组槽中的电流和匝数（安培匝数）的产生与对应于多极装置的顺序（顺序号）的cos（nθ），n成正比， 并且因子a和b取自表示多极相对于立方角θ= 0的取向的比率b / a。 作为多极装置，还可以设置直流电机的由永磁体激励的定子。

公开(公告)号：US4629899A

公开(公告)日：1986-12-16

申请号：US817167

申请日：1986-01-08

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： G21K1/08 ,  G21K1/093 ,  G21K5/04 ,  H01J37/141 ,  H01J37/30 ,  H01L21/027 ,  H05H7/00 ,  H05H3/00

CPC分类号： H01J37/141 ,  G21K1/08 ,  G21K5/04

摘要： An apparatus for deflecting and focusing a beam of neutral particles for operating on extremely small workpieces, such as for doping or inscribing micro-electronic components, has a deflection system for generating at least one magnetic field through which the beam of neutral particles is directed for focusing and shaping of the beam on the workpiece. The lens system may include one or more six-pole or eight-pole lenses.

摘要翻译： 用于偏转和聚焦用于在非常小的工件上操作的中性粒子束的装置，例如用于掺杂或刻录微电子部件的装置具有用于产生至少一个磁场的偏转系统，中性粒子束通过该磁场被引导 工件上的梁的聚焦和成形。 透镜系统可以包括一个或多个六极或八极透镜。

公开(公告)号：USH148H

公开(公告)日：1986-11-04

申请号：US628096

申请日：1984-07-05

申请人： James K. Thompson

发明人： James K. Thompson

IPC分类号： H02N11/00 ,  H05H7/00

CPC分类号： H05H7/00 ,  H02N11/004

摘要： An explosively operated device by which a strong magnetic field pulse and an electric current pulse of microseconds duration is produced. A cylindrical magnet is used to initiate the field, and its energy source is an explosive filled metal tube. Within the converter itself, the lines of magnetic flux are essentially axial. When an explosive charge in the central tube is detonated, the end of the tube flares radially, and the tube begins to expand along its length. As it does so, the tube compresses the magnetic field against the inner surface of a magnet. Simultaneously, a helical coil inside the converter experiences a rapid increase in flux density, thus satisfying Faraday's law. This interaction causes a pulse of electric current to be fed into the turns of the magnetocumulative generator as its initial magnetic field is maximized. As the central tube expands against the inside of the coil, it shorts out the turns one-by-one as the detonation wave travels axially along the converter. This action progressively reduces the inductance of the circuit, thus increasing the current output of the converter.

公开(公告)号：US4455489A

公开(公告)日：1984-06-19

申请号：US323009

申请日：1981-11-19

申请人： Karl L. Brown

发明人： Karl L. Brown

IPC分类号： H01J35/00 ,  A61N5/10 ,  G21K1/093 ,  H05H7/00 ,  H01J3/20 ,  H01J3/32

CPC分类号： G21K1/093

摘要： A first order achromatic magnetic deflection system for use in conjunction with a charged particle accelerator is realized from a stepped gap magnet wherein charged particles propagating through the system are subject to at least two adjacent homogeneous magnetic fields in adjacent regions (54 and 56) in traversing one-half of a symmetric trajectory through the system. A quadrupole singlet element Q disposed substantially at the entrance plane of such a symmetric system makes possible the coincidence of the waists of the beam in both the vertical (transverse) and (radial) bending planes.

摘要翻译： 与带电粒子加速器结合使用的一级消色差磁偏转系统由阶梯式间隙磁体实现，其中通过系统传播的带电粒子在相邻区域（54和56）中经历至少两个相邻的均匀磁场 通过系统的对称轨迹的一半。 基本上设置在这种对称系统的入射面处的四极单极子元件Q使得在垂直（横向）和（径向）弯曲平面中的梁的腰部重合是可能的。

公开(公告)号：US4335309A

公开(公告)日：1982-06-15

申请号：US172085

申请日：1980-07-24

申请人： Klaus Anger ,  Juergen Frosien

发明人： Klaus Anger ,  Juergen Frosien

IPC分类号： G21K1/087 ,  H01J37/147 ,  H01L21/027 ,  H05H7/00 ,  H01J37/00

CPC分类号： H01J37/1474

摘要： In an exemplary system, a two stage deflection system responds to a first control signal of low frequency such that extra-axial chromatic errors due to electrostatic and magnetic deflection are made equal and opposite. The magnetic and electrostatic deflection systems may be arranged in either order along the beam path just so the low frequency electrostatic deflection is one-half the magnetic deflection and is in an opposite direction at the target. A second higher frequency control signal controls only the electrostatic deflection system. Preferably the deflection velocities at the target produced by the two control signals are equal, with the higher frequency being an integral multiple of the lower frequency and with the control signals being poled to provide opposite deflections. When the two deflection velocities are superimposed, the resultant is then a step type deflection as a function of time.

摘要翻译： 在示例性系统中，两级偏转系统响应于低频的第一控制信号，使得由于静电和磁偏转引起的异轴色差误差相等而相反。 磁性和静电偏转系统可以沿着光束路径以任何顺序布置，因此低频静电偏转是磁偏转的一半，并且在目标处是相反的方向。 第二高频控制信号仅控制静电偏转系统。 优选地，由两个控制信号产生的目标处的偏转速度相等，其中较高的频率是较低频率的整数倍，并且控制信号极化以提供相反的偏转。 当两个偏转速度叠加时，所得到的是随时间变化的阶梯型偏转。

公开(公告)号：US4296327A

公开(公告)日：1981-10-20

申请号：US155461

申请日：1980-06-02

申请人： John L. Adamski

发明人： John L. Adamski

IPC分类号： H01J27/02 ,  H05H7/00 ,  H01J27/00

CPC分类号： H01J27/02 ,  H05H7/00

摘要： The accelerator includes a source of an ensemble or bunch of ions and a plurality of relatavistic electron beam stages, each of which generate a high current electron beam which in turn are injected along the accelerator centerline in a timed sequence to accelerate the ion bunch to increasingly high kinetic energy levels. In each relatavistic electron beam stage, a region of high electric charge is created by the discharge of a high current, short duration pulse between a cathode and anode. The electron beam created by the discharge stops a short distance beyond the anode, due to the buildup of its electric charge, thereby creating a region of high charge which accelerates the ion bunch. Each successive relatavistic electron beam stage is timed to fire when the ion bunch arrives at the region of high charge of that stage, and in operation, increases the kinetic energy of the ion bunch by a factor equal to or greater than the kinetic energy of the electron beam.

摘要翻译： 加速器包括一组或多束离子的源和多个相对电子束级，每个级产生高电流电子束，其依次沿着加速器中心线以定时序列注入以加速离子束越来越多 高动能水平。 在每个相对电子束级中，通过在阴极和阳极之间放电高电流，短持续时间脉冲来产生高电荷区域。 由于其电荷的积聚，由放电产生的电子束阻止了远离阳极的短距离，从而产生高电荷的区域，其加速了离子束。 当离子束到达该阶段的高电荷区域时，每个连续的相对电子束级定时触发，并且在操作中，将离子束的动能增加等于或大于其的动能 电子束。

公开(公告)号：US4181894A

公开(公告)日：1980-01-01

申请号：US900128

申请日：1978-04-26

申请人： Jacques Pottier

发明人： Jacques Pottier

IPC分类号： H05H9/00 ,  H05H9/04 ,  H01J23/18 ,  H01J25/02 ,  H05H7/00

CPC分类号： H05H9/04

摘要： The accelerating structure comprises a resonant cavity within which are placed at least two longitudinal conducting supports. One end of each support is electrically connected to the cavity in such a manner as to be in quarter-wave resonance and in opposite phase. Drift tubes are electrically connected alternately to each of the two supports. The supports are electrically connected respectively to each end of the lateral face of the cavity.

摘要翻译： 加速结构包括谐振腔，其中放置有至少两个纵向导电支撑件。 每个支撑件的一端以与四腔波谐振相反的方式电连接到空腔。 漂移管交替地电连接到两个支撑中的每一个。 支撑件分别电连接到腔的侧面的每个端部。