公开(公告)号：US09496162B2

公开(公告)日：2016-11-15

申请号：US14395956

申请日：2013-10-07

申请人： Daifuku Co., Ltd.

发明人： Dong Gyu Yoo ,  Jae Hyun Lee ,  Jun Han Lee ,  Ui Han Jeong

IPC分类号： F17D1/00 ,  H01L21/673

CPC分类号： H01L21/67389 ,  Y10T137/0352 ,  Y10T137/0396

摘要： A method for supplying inert gas to a side track buffer (STB) in a semiconductor wafer production system includes a step of sensing that a front opening unified POD (FOUP) is loading on the STB and generating a first input signal, and a step of opening a valve for inert gas and supplying nitrogen gas to the FOUP based on the first input signal, and to a semiconductor wafer production system using the method.

摘要翻译： 向半导体晶片制造系统中的侧轨缓冲器（STB）供给惰性气体的方法包括：感测前置开口统一POD（FOUP）在STB上载入并产生第一输入信号的步骤，以及步骤 打开用于惰性气体的阀，并且基于第一输入信号向FOUP供应氮气，以及使用该方法的半导体晶片生产系统。

公开(公告)号：US20160280469A1

公开(公告)日：2016-09-29

申请号：US15070031

申请日：2016-03-15

申请人： Daifuku Co., Ltd.

发明人： Kazushi Tsujimoto ,  Shinji Inatomi

IPC分类号： B65G43/10 ,  B65G47/52

CPC分类号： B65G43/10 ,  B65G47/31 ,  B65G47/52

摘要： A conveying apparatus that increases the conveying speed of a conveyance object, and improves reliability and conveyance efficiency at low cost. Acceleration/deceleration sections, each of which includes a plurality of variable-speed conveyance sections, are provided among constant-speed conveyance sections. The conveying speed of a conveyance object is continuously accelerated or decelerated while the conveyance object passes through the acceleration/deceleration sections. This changes the conveying speed from the conveying speed of the upstream constant-speed conveyance section to the conveying speed of the downstream constant-speed conveyance section. Thus, it is controlled that the conveying speed and the conveyance acceleration/deceleration is identical between the upstream conveyance section and the downstream conveyance section when the conveyance object is transferred from the upstream conveyance section to the downstream conveyance section.

摘要翻译： 一种提高输送体的输送速度的输送装置，以低成本提高可靠性和输送效率。 在恒速输送部之间设置有各自包括多个变速输送部的加速/减速部。 当输送物体通过加速/减速部分时，输送物体的输送速度被连续加速或减速。 这将输送速度从上游恒速输送部的输送速度变更为下游恒速输送部的输送速度。 因此，当输送物体从上游输送部分转移到下游输送部分时，控制上游输送部分和下游输送部分之间的输送速度和输送加速/减速度相同。

公开(公告)号：US09245782B2

公开(公告)日：2016-01-26

申请号：US13850492

申请日：2013-03-26

申请人： Daifuku Co., Ltd.

发明人： Hideo Yoshioka ,  Takamichi Kanno

IPC分类号： H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/677 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/68707

摘要： An article storage facility includes a storage rack configured to store a semiconductor wafer and a reticle, and a storage and retrieval transport apparatus. The storage rack includes a first accommodation unit configured to store a wafer container for containing the semiconductor wafer, and a second accommodation unit configured to store a reticle container for containing the reticle. The storage and retrieval transport apparatus includes a holding unit configured to hold a top flange formed at an upper portion of the wafer container to support the wafer container in a hanging state. A flange portion configured to allow the storage and retrieval transport apparatus to hold the reticle container using the holding unit to support the reticle container in a hanging state is formed at an upper portion of the reticle container.

摘要翻译： 物品存储设备包括：存储半导体晶片和掩模版的存储架，以及存储和取回传送装置。 存储架包括：第一容纳单元，被配置为存储用于容纳半导体晶片的晶片容器;以及第二容纳单元，被配置为存储用于容纳所述掩模版的掩模版容器。 存储和取回传送装置包括：保持单元，其构造成保持形成在晶片容器的上部的顶部凸缘，以将悬挂状态的晶片容器支撑。 在掩模版容器的上部形成凸缘部，该凸缘部被构造成允许存储和取回输送装置使用保持单元保持标线容器以支撑悬挂状态的标线容器。

公开(公告)号：US20150336279A1

公开(公告)日：2015-11-26

申请号：US14715853

申请日：2015-05-19

申请人： DAIFUKU CO., LTD.

发明人： Makoto USAMI

IPC分类号： B25J15/10 ,  B25J19/02 ,  B25J15/00

CPC分类号： B25J15/10 ,  B25J15/0028 ,  B25J19/02 ,  H01L21/67259 ,  H01L21/67346 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/68 ,  H01L21/68707

摘要： A transport device that can transport stacked articles to be transported without changing a device configuration and can correct and prevent a displacement of the stacked articles to be transported with a simple device configuration. A chucking device is provided to hold trays in a stacked state. The chucking device is provided with an overhead carriage for transporting the trays held by the chucking device. The chucking device includes a holding unit that holds the trays and sensors that detect the trays held by the holding unit. The holding unit is configured such that the holding operation of the holding unit on the trays is controlled based on detection of the sensors, and correct and prevent a displacement of the stacked trays.

摘要翻译： 一种运输装置，其可以在不改变装置结构的情况下运输堆放物品，并且能够以简单的装置构造来校正和防止要运输的堆放物品的位移。 提供夹持装置以将托盘保持在堆叠状态。 夹紧装置设置有用于输送由夹紧装置保持的托盘的架空托架。 夹持装置包括保持单元，其保持托盘和检测由保持单元保持的托盘的传感器。 保持单元被构造成使得基于传感器的检测来控制托盘上的保持单元的保持操作，并且校正和防止堆叠的托盘的位移。

公开(公告)号：US09139380B2

公开(公告)日：2015-09-22

申请号：US13719921

申请日：2012-12-19

申请人： Daifuku Co., Ltd.

发明人： Yoshitaka Inui ,  Yuichi Morimoto ,  Yuji Baba

IPC分类号： B65G1/04 ,  B65G49/00 ,  B61B3/02 ,  H01L21/677

CPC分类号： B65G49/00 ,  B61B3/02 ,  B65G1/0428 ,  B65G1/0457 ,  B65G2201/0297 ,  H01L21/6773 ,  H01L21/67733

摘要： An article transport facility includes a traveling rail hung from a ceiling portion and configured for guiding an article transport carriage, an article loading unit disposed laterally and downwardly of the traveling rail and configured for loading and supporting an article to be transferred to/from the article transport carriage, and a supporting mechanism for supporting the article loading unit hung from the ceiling portion in such a manner that the article loading unit is rendered position-adjustable between a transferring position for transferring the article to/from the article transport carriage and a retracted position retracted upwards from the transferring position. The supporting mechanism is capable of causing the article loading unit loading an article thereon to be position-changeable between the transferring position and the retracted position.

摘要翻译： 物品运送设备包括从天花板部分悬挂并构造成用于引导物品运输托架的行进轨道;物品装载单元，其横向和向下布置在行进轨道上，并且被构造成用于装载和支撑待传送到物品的物品 运输托架和用于支撑从天花板部分悬挂的物品装载单元的支撑机构，使得物品装载单元在用于将物品传送到物品运输托架的传送位置和缩回 位置从传送位置向上缩回。 支撑机构能够使物品装载单元将其上的物品在转印位置和缩回位置之间位置可变。

公开(公告)号：US09045147B2

公开(公告)日：2015-06-02

申请号：US13239805

申请日：2011-09-22

申请人： Toru Kasuya

发明人： Toru Kasuya

IPC分类号： H01L21/677 ,  B61B3/02 ,  B61B1/00

CPC分类号： B61B3/02 ,  B61B1/005 ,  B65G2201/0297 ,  H01L21/6773 ,  H01L21/67733

摘要： A transporting space of an article transport facility is divided into a first space and a second space by a wall having an opening. A first movable body that travels along a first travel rail in the first space and a second movable body that travels along a second travel rail in the second space are provided. A relay portion which can support an article without interfering with the shutter that can open and close the opening is provided in the first space. The first travel rail is arranged to extend adjacent a first space side transfer position for transferring articles between the first mobile body and the relay portion, and the second travel rail is arranged to extend adjacent a second space side transfer position for transferring articles between the second mobile body and the relay portion through the opening.

摘要翻译： 物品输送设施的运输空间由具有开口的壁分成第一空间和第二空间。 提供沿着第一空间中的第一行进轨道行进的第一可移动体和在第二空间中沿着第二行进轨道行进的第二可移动体。 可以在第一空间中设置能够支撑制品而不干扰能够打开和关闭开口的快门的中继部。 第一行进轨道布置成在第一空间侧传送位置附近延伸以在第一移动体和中继部分之间传送物品，并且第二行进轨道布置成邻近第二空间侧传送位置延伸以在第二移动体之间传送物品 移动体和继电器部分通过开口。

公开(公告)号：US09027735B2

公开(公告)日：2015-05-12

申请号：US13232295

申请日：2011-09-14

申请人： Masayuki Nakagawa

发明人： Masayuki Nakagawa

IPC分类号： B65G29/00 ,  H01L21/677

CPC分类号： H01L21/67733 ,  Y10S414/14

摘要： A transport device includes a traveling holding member which can travel while holding a storage container, and a move out prevention mechanism which prevents substrates from moving out of an opening of the storage container. The move out prevention mechanism is configured to include a contacting member which can be moved between a contact position at which the contacting member is in contact with side faces of the substrates, and a spaced apart position at which the contacting member is spaced apart from the side faces of the substrates. The contact position is set such that the contacting member is located between an opening side end portion and a central portion of the substrates in a direction along which the substrates are inserted and removed.

摘要翻译： 输送装置包括能够在保持容器的同时行进的行进保持构件，以及防止基板从存储容器的开口移出的防止移出机构。 移出防止机构被配置为包括接触构件，该接触构件可以在接触构件与基底的侧面接触的接触位置和间隔开的位置之间移动，接触构件与接触构件的间隔开 基板的侧面。 接触位置被设定为使得接触构件沿着基板被插入和移除的方向位于基板的开口侧端部和中心部分之间。

公开(公告)号：US09011068B2

公开(公告)日：2015-04-21

申请号：US12933944

申请日：2009-01-15

申请人： Yoshitaka Inui ,  Mitsuru Yoshida

发明人： Yoshitaka Inui ,  Mitsuru Yoshida

IPC分类号： B65G65/00 ,  H01L21/687 ,  H01L21/677 ,  B65G1/06

CPC分类号： H01L21/68707 ,  B65G1/06 ,  H01L21/67706 ,  H01L21/67769 ,  Y10S414/14

摘要： Articles are stored while preventing disruption of the flow of clean air from an upper region to a lower region to alleviate degradation of clean air with an article supported by an article support. The article support (28) is provided with a movable body (30) which is supported to a fixed frame (29) to be movable in a far-near direction with respect to a travel path and which is formed to extend downwardly from the fixed frame (29), and a support member (31) formed to extend in the far-near direction from a lower end portion of the movable body (30). The support member (31) consists of a contact support portion (40) which is narrower than the width of an article in a direction along the travel path and which extends in the far-near direction from a lower end portion of the movable body, and a movement restricting portion (41) which extends in a direction along the travel path from the contact support portion (40), which has a vertical wall (41a) which contacts a side surface of an article, and which is narrower than the article in the far-near direction.

摘要翻译： 存储物品，同时防止清洁空气从上部区域流动到下部区域，以减轻由物品支撑件支撑的物品的清洁空气的劣化。 物品支撑件（28）设置有可移动体（30），其被支撑在固定框架（29）上，以能够相对于行进路径在远近方向上移动，并且形成为从固定 框架（29）和形成为从远离可移动体（30）的下端部的远近方向延伸的支撑构件（31）。 支撑构件（31）包括接触支撑部分（40），该接触支撑部分（40）比沿着行进路径的方向的物体的宽度窄，并且在远离可移动体的下端部的方向上延伸， 以及沿着所述行进路径从所述接触支撑部分（40）沿着所述行进路径的方向延伸的运动限制部分（41），所述移动限制部分具有与物品的侧表面接触的垂直壁（41a），并且比所述物品 在远近的方向。

公开(公告)号：US09004471B2

公开(公告)日：2015-04-14

申请号：US13432988

申请日：2012-03-28

申请人： Masahiro Ooe

发明人： Masahiro Ooe

IPC分类号： B23Q3/18 ,  B66F7/08 ,  B62D65/18 ,  B66F7/06

CPC分类号： B66F7/08 ,  B62D65/18 ,  B66F7/0641

摘要： A workpiece elevating support device which can be utilized by being installed in a carriage-type conveying apparatus for conveying an automobile body while changing the height thereof in each section in an automobile assembly line. The workpiece elevating support device includes at least two center-folding double link mechanisms arranged in parallel on a base, each of which is composed of a lower parallel link, an intermediate link member, an upper parallel link, and an upper link member. The upper link member is consecutively provided with a workpiece support. There is juxtaposed a lock to hold the center-folding double link mechanisms in an expanding-rising posture, which is taken when the upper link members are vertically raised to a predetermined height.

摘要翻译： 一种工件升降支撑装置，其可以被安装在用于输送汽车车身的托架式输送装置中，同时改变其在汽车装配线中的每个部分中的高度。 工件升降支撑装置包括至少两个平行布置在基座上的中心折叠双连杆机构，每个中心折叠双连杆机构由下平行连杆，中间连杆构件，上平行连杆和上连杆构件构成。 上连杆构件连续设置有工件支撑件。 并列有一个锁，用于将中心折叠双重连杆机构保持在上升的姿态，当上连杆构件垂直升高到预定的高度时。

公开(公告)号：US08988244B2

公开(公告)日：2015-03-24

申请号：US13585117

申请日：2012-08-14

申请人： Kenji Yagawa

发明人： Kenji Yagawa

IPC分类号： G08B3/00 ,  B60R25/10 ,  B66B5/06 ,  G09G5/00 ,  G06T15/50 ,  G06F11/00 ,  G08B23/00 ,  B65G1/04

CPC分类号： G08B23/00 ,  B65G1/0421

摘要： An article transfer system that allows the operator to easily notice that abnormality occurs in an abnormality detecting sensor for detecting abnormality and perform remedial work is provided. The article transfer system is adapted to display information indicating that the abnormality occurs on a display device as abnormality occurrence information, receive input of a result of determination by the operator on whether or not the abnormality indicated by the abnormality occurrence information occurs, and display information indicating that the detecting information received from the abnormality detecting sensor is incorrect on the display device when the operator inputs the result of determination that the abnormality indicated by the abnormality occurrence information does not occur with the abnormality detecting sensor detecting the abnormality.

摘要翻译： 提供一种物品传送系统，其允许操作者容易地注意到异常检测传感器中发生异常，用于检测异常并执行补救工作。 物品传送系统适于显示表示异常发生在显示装置上的信息作为异常发生信息，接收操作者对是否发生由异常发生信息指示的异常发生的判定结果的输入，以及显示信息 当异常检测传感器检测到异常时，当操作者输入判定异常发生信息所示的异常不发生的结果时，表示从异常检测传感器接收到的检测信息不正确。