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公开(公告)号：US5810062A
公开(公告)日：1998-09-22
申请号：US678890
申请日：1996-07-12
IPC分类号： H01L21/673 , B65B1/04
CPC分类号： H01L21/67393
摘要： A valve mounted in pod door of a SMIF pod for allowing gas flow to and from the sealed pod while the pod is seated on a SMIF port. The valve is provided to allow fluid flow to or from the pod upon the valve be actuated by either a standard registration pin or a specially adapted fluid flow pin. The valve includes a body and a valve stem capable of vertical translation within the valve body. A spring biases the valve stem downward with respect to the valve body such that a top of the valve stem lies in sealing engagement with a O-ring 54. When not engaged by a registration pin or fluid flow pin, the engagement between the valve top and the O-ring prevents passage of fluid into or out of the pod.
摘要翻译： 安装在SMIF舱的舱门中的阀门，用于当舱架安置在SMIF端口上时，允许气体从密封舱口流出。 该阀被设置成在阀由标准对准销或特别适合的流体流动销致动时允许流体流入或流出。 该阀包括能够在阀体内垂直平移的主体和阀杆。 弹簧相对于阀体向下偏压阀杆，使得阀杆的顶部与O形环54密封接合。当未被对准销或流体流动销接合时，阀顶部 并且O形环防止流体进入或离开容器。
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公开(公告)号：US5586585A
公开(公告)日：1996-12-24
申请号：US394698
申请日：1995-02-27
申请人： Anthony C. Bonora , Joshua T. Oen
发明人： Anthony C. Bonora , Joshua T. Oen
IPC分类号： B65G49/07 , H01L21/677 , B65G65/00
CPC分类号： H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.
摘要翻译： 一种负载锁定室，用于将一个或多个半导体晶片从存储和转移盒转移到无污染环境中的高真空处理室中。 负载锁定室包括用于将晶片承载盒与存储和传送盒分开的机构，用于将盒传送到可被密封和抽空的室中的机构，以及用于允许在盒和各个处理室之间传送晶片的机构， 其中每个机构在与外部环境密封的环境中操作。
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公开(公告)号：US4974166A
公开(公告)日：1990-11-27
申请号：US458767
申请日：1989-12-29
IPC分类号： B23Q41/00 , B23Q41/02 , B65G1/137 , B65G49/07 , B65G61/00 , G03F7/20 , G05B19/418 , G06Q50/00 , H01L21/00 , H01L21/02 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67294 , G03F7/70525 , G03F7/70541 , G03F7/7075 , G03F7/70991 , G05B19/4183 , H01L21/67276 , G05B2219/31002 , G05B2219/31286 , G05B2219/31323 , G05B2219/31432 , Y02P90/08 , Y02P90/10 , Y02P90/24 , Y02P90/28 , Y02P90/285
摘要： A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.
摘要翻译： 用于存储运输和处理物品的系统包括多个可运输容器，每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置，用于接收，存储，传送和显示与 由相应的运输容器收到的物品。 多个工作站适于接收可移动容器中的一个并处理所选物品中的一个。 工作站还验证可运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元通信以接收和发送状态信息和处理信息，并且传送由提供的数据处理装置存储的信息 运输容器。 该系统还可以包括用于接收所述可移动容器的存储站，用于提供在可运输容器上提供的数据处理设备与中央处理单元之间的通信，以及用于制作由所述数据处理设备存储的信息的备份副本。
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公开(公告)号：US4739882A
公开(公告)日：1988-04-26
申请号：US829447
申请日：1986-02-13
IPC分类号： H01L21/673 , H01L21/677 , B65D1/04
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67772 , Y10S414/14
摘要： The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.
摘要翻译： 本发明是用于储存物品并保持诸如半导体晶片的清洁物品的可运送的容器。 容器提供了一个盒子，它定义了用于容纳物品的内部空间。 箱子包括一个箱顶和盒底座，它支撑箱顶，并且包括用于打开和关闭容器的箱门。 箱门提供用于支撑内部空间中的物品的区域。 衬里可插入内部空间并围绕该区域。 箱门可从盒子空间伸缩。 该区域的物品可与箱门一起缩回。
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公开(公告)号：US4676709A
公开(公告)日：1987-06-30
申请号：US769709
申请日：1985-08-26
IPC分类号： H01L21/677 , B65G65/00
CPC分类号： H01L21/67781 , H01L21/67766 , H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station and has a removeable door on which the cassette is supportable. A first platform is transportable along a shaft below the interface port and is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. A second platform mounted in the shaft includes a manipulator arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The manipulator arm then pivots to transport the cassette to a location in the processing station away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The manipulator arm and the second platform after placing the cassette at a location in the processing station away from the shaft, are then positioned completely inside the shaft to minimize the space taken up in the processing station by the manipulator.
摘要翻译： 公开了一种用于从在标准机械接口（SMIF）系统中的处理站上支撑的容器中移除待加工物品的诸如半导体晶片的盒子的机械手。 容器被支撑在处理站的顶盖上的接口端口上，并且具有可拆卸的门，盒可以在其上支撑。 第一平台沿着接口端口下方的轴可运输，并且可操作以与接口端口配合并从容器接收盒。 第一平台沿着轴传送，从而将盒从容器中取出。 安装在所述轴中的第二平台包括操纵臂，所述操纵臂摆动以将所述盒接合在所述第一平台上并将所述盒支撑离开所述第一平台。 操纵臂然后枢转以将盒运送到加工站中远离轴的位置。 然后将第一平台从轴传回到接口端口以密封容器以防止颗粒污染。 然后，在将盒子放置在远离轴的处理站中的位置处的操纵臂和第二平台完全位于轴内部，以最小化由操纵器在处理站中占据的空间。
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76.发明授权Precision specular proximity detector and article handing apparatus employing same 失效精密镜面接近检测器及其使用的物品处理装置
公开(公告)号：US4458152A
公开(公告)日：1984-07-03
申请号：US376299
申请日：1982-05-10
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B65H7/14 , G01P13/00 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67265 , B65H7/14 , G01P13/00 , H01L21/67778 , Y10S414/137
摘要： Infrared radiation is focused to a line at a site at which a semiconductor wafer is expected to appear when a wafer is transferred with, i.e., loaded onto or unloaded from, a semiconductor wafer conveyor. A cylindrical lens of selected focal length is positioned to receive and focus to a line at an image plane radiation reflected by a wafer arriving at the site. An apertured stop defines an opening at the image plane to pass reflected radiation to an infrared sensor positioned on the side of the stop opposite the cylindrical lens.
摘要翻译： 红外辐射聚焦到当半导体晶片预期在半导体晶片传送带被转移，即加载或卸载晶片时出现半导体晶片的位置的线。 所选焦距的圆柱形透镜被定位成在到达该位置的晶片反射的图像平面上接收和聚焦于线。 有孔止动件限定了图像平面处的开口，以将反射的辐射传递到位于与柱面透镜相对的止挡侧的红外传感器。
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公开(公告)号：US4026574A
公开(公告)日：1977-05-31
申请号：US633588
申请日：1975-11-19
申请人： Anthony C. Bonora , Lawrence L. Ray
发明人： Anthony C. Bonora , Lawrence L. Ray
IPC分类号： B62H1/02
CPC分类号： B62H1/02
摘要： A kickstand for supporting a parked two-wheeled vehicle and a footrest for supporting the feet of the vehicle operator when the vehicle is in motion is provided by a single device comprising a lever pivoted about an axis parallel to the longitudinal axis of the vehicle on a horizontal beam rigidly affixed to the vehicle frame. The center of gravity of the lever portion is located relative to the pivot axis so that the lever portion is stable both when pivoted to contact the ground for vehicle support and when pivoted to a position parallel to the beam to act as a footrest.
摘要翻译： 用于支撑停放的两轮车辆的支架和用于在车辆运动时支撑车辆操作者脚部的搁脚板由单个装置提供，该装置包括围绕平行于车辆的纵向轴线的轴线枢转的杆 水平梁刚性地固定在车架上。 杠杆部分的重心相对于枢转轴线定位，使得当枢转以接触车辆支撑的地面并且当枢转到平行于梁的位置以用作搁脚板时，杠杆部分是稳定的。
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78.发明授权Dynamic storage and transfer system integrated with autonomous guided/roving vehicle 有权动态存储和传输系统与自动引导/漫游车集成公开(公告)号：US09190304B2
公开(公告)日：2015-11-17
申请号：US13475723
申请日：2012-05-18
IPC分类号： B65G65/00 , B65G1/04 , H01L21/677 , H01L21/67
CPC分类号： H01L21/67276 , B65G2201/0297 , H01L21/67724 , H01L21/67736
摘要： A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.
摘要翻译： 工件容器储存和处理系统包括基座，连接到基座的多个轮子以及连接到基座的容器处理系统。 轮子提供底座的运动。 容器处理系统被定义成相对于彼此保持至少两个容器的垂直方向。 容器处理系统被定义为提供至少两个容器相对于底座一致的受控垂直行进。 此外，容器处理系统被定义为提供所述至少两个容器中的每一个相对于底座的受控和独立的水平行进。
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79.发明申请Tray Engine and Methods for Transferring Trays To and From Tools and in Sorters 有权托盘引擎和方法将纸盘转移到工具和拆装工具中公开(公告)号：US20140262979A1
公开(公告)日：2014-09-18
申请号：US13830692
申请日：2013-03-14
CPC分类号： B07C5/3412 , B07C5/00 , B07C2501/0063 , B25J15/0028 , B25J15/022 , G01N35/04 , G01N2035/0418 , G01N2035/0425 , H01L21/67271 , H01L21/67721 , H01L21/67766 , H01L21/67772 , H01L21/67778 , H01L21/67781 , H01L21/68707
摘要： A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.
摘要翻译： 托盘发动机包括垂直驱动柱，用于旋转垂直驱动柱的旋转机构和附接到垂直驱动柱的端部执行器。 末端执行器包括附接到垂直驱动柱的端部执行器底座。 末端执行器还包括当存在时附接到端部执行器底座以支撑托盘的滑块。 滑块使托盘能够沿着末端执行器底座的长度滑动。 托盘发动机包括附接到端部执行器底座的驱动机构，用于沿着端部执行器底座的长度移动，以使得托盘当存在时沿着长度线性地滑动并且将托盘装载或卸载到滑动件上。
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80.发明申请Dynamic Storage and Transfer System Integrated with Autonomous Guided/Roving Vehicle 有权动态存储和转移系统与自主引导/流动车集成公开(公告)号：US20120321423A1
公开(公告)日：2012-12-20
申请号：US13475723
申请日：2012-05-18
CPC分类号： H01L21/67276 , B65G2201/0297 , H01L21/67724 , H01L21/67736
摘要： A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.
摘要翻译： 工件容器储存和处理系统包括基座，连接到基座的多个轮子以及连接到基座的容器处理系统。 轮子提供底座的运动。 容器处理系统被定义成相对于彼此保持至少两个容器的垂直方向。 容器处理系统被定义为提供至少两个容器相对于底座一致的受控垂直行进。 此外，容器处理系统被定义为提供所述至少两个容器中的每一个相对于底座的受控和独立的水平行进。
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