PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
    71.
    发明申请
    PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM 有权
    等离子体蚀刻方法和计算机可读存储介质

    公开(公告)号:US20070165355A1

    公开(公告)日:2007-07-19

    申请号:US11617440

    申请日:2006-12-28

    IPC分类号: H01T23/00

    摘要: A plasma processing apparatus includes a first and a second electrode disposed to face each other in a processing chamber, the second electrode supporting a substrate; a first RF power supply for applying a first RF power of a higher frequency to the second electrode; a second RF power supply for applying a second RF power of a lower frequency to the second electrode; and a DC power source for applying a DC voltage to the first electrode. In a plasma etching method for etching a substrate by using the plasma processing apparatus, the first and the second radio frequency power are applied to the second electrode to convert a processing gas containing no CF-based gas into a plasma and a DC voltage is applied to the first electrode, to thereby etch an organic film or an amorphous film on the substrate by using a silicon-containing mask.

    摘要翻译: 等离子体处理装置包括在处理室中彼此面对的第一和第二电极,第二电极支撑基板; 用于向第二电极施加较高频率的第一RF功率的第一RF电源; 用于将较低频率的第二RF功率施加到所述第二电极的第二RF电源; 以及用于向第一电极施加DC电压的DC电源。 在通过使用等离子体处理装置蚀刻基板的等离子体蚀刻方法中,将第一和第二射频功率施加到第二电极,以将不含CF基气体的处理气体转换成等离子体,并施加DC电压 从而通过使用含硅掩模在基板上蚀刻有机膜或非晶膜。

    X-ray apparatus
    72.
    发明授权
    X-ray apparatus 有权
    X光装置

    公开(公告)号:US07203280B2

    公开(公告)日:2007-04-10

    申请号:US11404779

    申请日:2006-04-17

    IPC分类号: H01J35/00

    CPC分类号: H05G1/04 H05G1/08

    摘要: The present invention relates to an X-ray apparatus comprising an electron radiation source which generates an electron to an anode, a shaft which rotatably supports the anode, a stator which generates a force to rotate a rotor shaft, an enclosure which maintains at least the anode, electron radiation source and rotor shaft in vacuum, and a housing which contains a cooling medium around the enclosure. The X-ray apparatus is characterized in that an electric wire material to supply power to the electron radiation source and stator, or a connector used for connection with the electric wire material is molded by a material having an electrical insulating property.

    摘要翻译: 本发明涉及一种X射线设备,其包括:向阳极产生电子的电子辐射源,可旋转地支撑阳极的轴,产生转动轴的力的定子,至少保持 阳极,电子辐射源和真空中的转子轴,以及在外壳周围包含冷却介质的壳体。 X射线装置的特征在于,用于向电子辐射源和定子供电的电线材料或用于与电线材料连接的连接器由具有电绝缘性的材料模制。

    Method of checking sprocket attachment and sensor jig used for same
    73.
    发明授权
    Method of checking sprocket attachment and sensor jig used for same 有权
    检查链轮附件的方法和用于其的传感器夹具

    公开(公告)号:US07165448B2

    公开(公告)日:2007-01-23

    申请号:US11219237

    申请日:2005-09-02

    IPC分类号: G01M19/00

    CPC分类号: F16H55/30

    摘要: After a driven sprocket into which a ball bearing is press-fitted is pushed into a cylindrical portion of a pump cover, a sensor jig is set so as to have its legs extending from a base plate in contact with an end face of the cylindrical portion, and a front end of a sensor plate movable in parallel with the leg 13 in contact with an end face of the ball bearing. When the driven sprocket is not in a normal position in relation to the oil pump, the sensor plate intersects a light path between a light-emitting device and a light-receiving device placed as opposed to each other on the base plate, and on the other hand, when the driven sprocket is in a normal position, a light-passing hole formed in the sensor plate comes on the light path between the light-emitting device and the light-receiving device. Thereby it can be automatically determined based upon absence or presence of an optical signal from the light-receiving device whether or not an attachment state is appropriate.

    摘要翻译: 在压入滚珠轴承的从动链轮被推入泵盖的圆筒部之后,设置传感器夹具,使其腿部从与底座板的圆筒部的端面接触的基板延伸 以及传感器板的前端,该传感器板可与支架13平行移动,与球轴承的端面相接触。 当从动链轮相对于油泵不在正常位置时,传感器板与基板上彼此相对放置的发光装置和光接收装置之间的光路相交,在 另一方面,当从动链轮处于正常位置时,形成在传感器板中的通光孔在发光装置和光接收装置之间的光路上。 因此,可以根据来自光接收装置的光信号的不存在或存在来自动确定附件状态是否合适。

    Under body structure of motor vehicle
    76.
    发明授权
    Under body structure of motor vehicle 失效
    机动车身体结构

    公开(公告)号:US5813491A

    公开(公告)日:1998-09-29

    申请号:US612617

    申请日:1996-03-06

    摘要: In a motor vehicle having an engine mounted in an engine room, an exhaust tube system extending from the engine toward a rear end of the vehicle and a fuel tank positioned near the rear end of the vehicle, there is proposed an improved under body structure of the vehicle, by which the fuel tank is effectively cooled during running of the vehicle. The under body structure comprises an under cover positioned below the engine room. The under cover is formed with a longitudinally extending groove whose opening faces downward to contact a relatively low temperature air. A floor panel is formed with a longitudinally extending tunnel whose opening faces downward. The tunnel receives therein the exhaust tube system without contacting the same. A heat insulating plate extends in and along the tunnel in a manner to define in the tunnel an air flow passage which is insulated from the exhaust tube system. The air flow passage has a rear open end directed toward the fuel tank. A connecting duct is provided for connecting the groove of the under cover with the air flow passage defined in the tunnel of the floor panel.

    摘要翻译: 在具有安装在发动机室中的发动机的机动车辆中,从发动机向车辆的后端延伸的排气管系统和位于车辆后端附近的燃料箱,提出了一种改进的底体结构 车辆在车辆行驶期间被有效地冷却。 底体结构包括位于发动机室下方的底盖。 底盖形成有一个纵向延伸的槽,其开口面向下以接触较低温度的空气。 地板镶板形成有纵向延伸的隧道,其开口面向下。 隧道在其中接收排气管系统而不接触排气管系统。 绝热板沿着隧道延伸并且沿着隧道以在隧道中限定与排气管系统绝缘的空气流动通道的方式延伸。 气流通道具有朝向燃料箱的后开口端。 提供连接管道,用于将底盖的凹槽与限定在地板镶板的隧道中的空气流动通道连接。

    BaO-xTiO.sub.2 dielectric ceramic composition
    77.
    发明授权
    BaO-xTiO.sub.2 dielectric ceramic composition 失效
    BaO-xTiO2介电陶瓷组合物

    公开(公告)号:US5272122A

    公开(公告)日:1993-12-21

    申请号:US946631

    申请日:1992-09-18

    IPC分类号: C04B35/46 C04B35/468 H01B3/12

    CPC分类号: H01B3/12 C04B35/4686

    摘要: Disclosed is a BaO-xTiO.sub.2 dielectric ceramic composition (x=3.5 to 4.5) containing BaTi.sub.4 O.sub.9 and Ba.sub.2 Ti.sub.9 O.sub.20, wherein the content ratio of Ba.sub.2 Ti.sub.9 O.sub.20 {Ba.sub.2 Ti.sub.9 O.sub.20 /(BaTi.sub.4 O.sub.9 +Ba.sub.2 Ti.sub.9 O.sub.20)}obtained by a X-ray diffraction maximum peak height integration method described below is less than 0.19,content ratio of Ba.sub.2 Ti.sub.9 O.sub.20 ={a peak height ascribed to the (421) face of Ba.sub.2 Ti.sub.9 O.sub.20 +a peak height ascribed to the (222) face thereof}/[{a peak height ascribed to the (200, 140) face of BaTi.sub.4 O.sub.9 +a peak height ascribed to the (121) face thereof+a peak height ascribed to the (230, 150) face thereof}+{a peak height ascribed to the (421) face of Ba.sub.2 Ti.sub.9 O.sub.20 +a peak height ascribed to the (222) face thereof}].In the above dielectric ceramic composition, it is possible to prevent the occurrence of hexagonal pattern cracks and hence to improve the yield.

    Arrangement in operation switches of microscope
    78.
    发明授权
    Arrangement in operation switches of microscope 失效
    显微镜操作开关的布置

    公开(公告)号:US5000555A

    公开(公告)日:1991-03-19

    申请号:US338613

    申请日:1989-04-17

    申请人: Manabu Sato

    发明人: Manabu Sato

    IPC分类号: G02B21/24 G02B21/26

    CPC分类号: G02B21/26

    摘要: A microscope comprises a housing, a stage shiftably arranged on the housing, a shifting device including an operation handle to be rotated by an operator with respect to a shaft provided on the housing and a transmitting mechanism for shifting the stage in response to rotation of the handle, an electric circuit means and an input means for inputting commands to the electric circuit means. The input means includes at least one operation switch arranged on a surface of the housing at a position where the operator's finger can reach the switch without the operator removing his hand from the handle.

    摘要翻译: 显微镜包括壳体,可移动地布置在壳体上的台架,移动装置,包括操作者相对于设置在壳体上的轴旋转的操作手柄和用于响应于所述壳体的旋转而移动平台的传送机构 手柄,电路装置和用于向电路装置输入命令的输入装置。 所述输入装置包括布置在所述壳体的表面上的至少一个操作开关,所述操作开关在操作者的手指能够到达开关的位置处,而不用操作者将手从手柄上移开。

    Folding machine in a rotary press
    79.
    发明授权
    Folding machine in a rotary press 失效
    折叠机在旋转压机中

    公开(公告)号:US4948112A

    公开(公告)日:1990-08-14

    申请号:US268968

    申请日:1988-11-09

    摘要: A folding machine in a rotary press of the type in which a printed a paper web is twice-folded and then cut into folded sheets by means of cutter drums, and the folded sheets are conveyed through a distributor section on the downstream side of the machine to a pair of ejectd paper sheet runners while being pinched by belts, is improved. Namely, a conveyor for conveying the folded sheets includes a pair of first conveyor belts between the outlet side of the cutter drums, and the upstream side of the distributor section, a pair of distributor belts forming the distributor section with a triangular guide disposed on the downstream side thereof, two pairs of second conveyor belts between the downstream side of the distributor section and the inlet sides of the pair of ejected paper sheet runners, and guide belts or fixed guide members extending between a location upstream of the distributor section and the inlet side of the distributor section and between the outlet side of the distributor section and a location downstream of the distributor section. These belt pairs define, respectively, independent closed routes. The pair of distributor belts are respectively provided with uneven portions along their lengths adapted to mesh with each other. Preferably, the pair of distributor belts run at a higher speed than the pair of first conveyor belts, and the two pairs of second conveyor belts run at a higher speed than the pair of distributor belts.

    Tape cassette loading and unloading apparatus having a lock mechanism
for locking a tape cassette in a loading position
    80.
    发明授权
    Tape cassette loading and unloading apparatus having a lock mechanism for locking a tape cassette in a loading position 失效
    具有用于将带盒锁定在装载位置的锁定机构的带盒装载和卸载装置

    公开(公告)号:US4772970A

    公开(公告)日:1988-09-20

    申请号:US906755

    申请日:1986-09-12

    IPC分类号: G11B15/675

    CPC分类号: G11B15/67549

    摘要: A tape cassette loading and unloading apparatus has a holder which is inserted with a tape cassette, a holder guide for guiding the holder between a cassette receiving position and a predetermined loading position via an insertion completion position a holder mover for moving the holder, a force transmitter coupled to a motor for driving the holder mover, and a pushing member for pushing a top surface of the tape cassette. The force transmitter has first and second rotary members such that the first rotary member locks the second rotary member when the holder reaches the predetermined loading position.

    摘要翻译: 磁带盒装卸装置具有:插入带盒的保持架;保持器引导件,用于通过插入完成位置在盒接收位置和预定的装载位置之间引导保持器,用于移动保持器的保持器; 发送器连接到用于驱动支架移动器的马达,以及用于推动带盒的上表面的推动构件。 力传递器具有第一和第二旋转构件,使得当保持器到达预定的装载位置时,第一旋转构件锁定第二旋转构件。