摘要:
A plasma processing apparatus includes a first and a second electrode disposed to face each other in a processing chamber, the second electrode supporting a substrate; a first RF power supply for applying a first RF power of a higher frequency to the second electrode; a second RF power supply for applying a second RF power of a lower frequency to the second electrode; and a DC power source for applying a DC voltage to the first electrode. In a plasma etching method for etching a substrate by using the plasma processing apparatus, the first and the second radio frequency power are applied to the second electrode to convert a processing gas containing no CF-based gas into a plasma and a DC voltage is applied to the first electrode, to thereby etch an organic film or an amorphous film on the substrate by using a silicon-containing mask.
摘要:
The present invention relates to an X-ray apparatus comprising an electron radiation source which generates an electron to an anode, a shaft which rotatably supports the anode, a stator which generates a force to rotate a rotor shaft, an enclosure which maintains at least the anode, electron radiation source and rotor shaft in vacuum, and a housing which contains a cooling medium around the enclosure. The X-ray apparatus is characterized in that an electric wire material to supply power to the electron radiation source and stator, or a connector used for connection with the electric wire material is molded by a material having an electrical insulating property.
摘要:
After a driven sprocket into which a ball bearing is press-fitted is pushed into a cylindrical portion of a pump cover, a sensor jig is set so as to have its legs extending from a base plate in contact with an end face of the cylindrical portion, and a front end of a sensor plate movable in parallel with the leg 13 in contact with an end face of the ball bearing. When the driven sprocket is not in a normal position in relation to the oil pump, the sensor plate intersects a light path between a light-emitting device and a light-receiving device placed as opposed to each other on the base plate, and on the other hand, when the driven sprocket is in a normal position, a light-passing hole formed in the sensor plate comes on the light path between the light-emitting device and the light-receiving device. Thereby it can be automatically determined based upon absence or presence of an optical signal from the light-receiving device whether or not an attachment state is appropriate.
摘要:
A wiring board comprising: a conductor layer comprising Fe and Cu; and at least one of a radiator, a connection terminal, a cover and a circuit component, connected to the conductor layer through a joining member, which is obtained by coating a copper paste comprising a copper powder, an organic vehicle and an Fe2O3 particle as a conductor layer on a ceramic green sheet and firing it.
摘要翻译:一种布线板,包括:包含Fe和Cu的导体层; 以及通过连接构件连接到导体层的散热器,连接端子,盖和电路部件中的至少一个,其通过将包含铜粉,有机载体和Fe 2 O 3颗粒的铜浆涂布为 在陶瓷生片上的导体层并烧制。
摘要:
A wiring board obtained by filling a copper paste in a via hole formed on a ceramic green sheet and firing it to form an insulating layer and a via conductor, the copper paste comprising a copper powder, an organic vehicle and at least one selected from the group consisting of: a ceramic particle having an average particle size of 100 nm or less; and an Fe2O3 particle, wherein the copper paste comprises from 6 to 20 parts by mass of the organic vehicle per 100 parts by mass of the copper powder.
摘要翻译:1.一种布线基板,其特征在于,在形成于陶瓷生片上的通路孔中填充铜膏而进行烧成以形成绝缘层和通路导体,所述铜膏包含铜粉末,有机载体和选自 组成:平均粒径为100nm以下的陶瓷粒子; 和Fe 2 O 3粒子,其中,所述铜膏相对于每100质量份的铜粉含有6〜20质量份的有机载体。
摘要:
In a motor vehicle having an engine mounted in an engine room, an exhaust tube system extending from the engine toward a rear end of the vehicle and a fuel tank positioned near the rear end of the vehicle, there is proposed an improved under body structure of the vehicle, by which the fuel tank is effectively cooled during running of the vehicle. The under body structure comprises an under cover positioned below the engine room. The under cover is formed with a longitudinally extending groove whose opening faces downward to contact a relatively low temperature air. A floor panel is formed with a longitudinally extending tunnel whose opening faces downward. The tunnel receives therein the exhaust tube system without contacting the same. A heat insulating plate extends in and along the tunnel in a manner to define in the tunnel an air flow passage which is insulated from the exhaust tube system. The air flow passage has a rear open end directed toward the fuel tank. A connecting duct is provided for connecting the groove of the under cover with the air flow passage defined in the tunnel of the floor panel.
摘要:
Disclosed is a BaO-xTiO.sub.2 dielectric ceramic composition (x=3.5 to 4.5) containing BaTi.sub.4 O.sub.9 and Ba.sub.2 Ti.sub.9 O.sub.20, wherein the content ratio of Ba.sub.2 Ti.sub.9 O.sub.20 {Ba.sub.2 Ti.sub.9 O.sub.20 /(BaTi.sub.4 O.sub.9 +Ba.sub.2 Ti.sub.9 O.sub.20)}obtained by a X-ray diffraction maximum peak height integration method described below is less than 0.19,content ratio of Ba.sub.2 Ti.sub.9 O.sub.20 ={a peak height ascribed to the (421) face of Ba.sub.2 Ti.sub.9 O.sub.20 +a peak height ascribed to the (222) face thereof}/[{a peak height ascribed to the (200, 140) face of BaTi.sub.4 O.sub.9 +a peak height ascribed to the (121) face thereof+a peak height ascribed to the (230, 150) face thereof}+{a peak height ascribed to the (421) face of Ba.sub.2 Ti.sub.9 O.sub.20 +a peak height ascribed to the (222) face thereof}].In the above dielectric ceramic composition, it is possible to prevent the occurrence of hexagonal pattern cracks and hence to improve the yield.
摘要:
A microscope comprises a housing, a stage shiftably arranged on the housing, a shifting device including an operation handle to be rotated by an operator with respect to a shaft provided on the housing and a transmitting mechanism for shifting the stage in response to rotation of the handle, an electric circuit means and an input means for inputting commands to the electric circuit means. The input means includes at least one operation switch arranged on a surface of the housing at a position where the operator's finger can reach the switch without the operator removing his hand from the handle.
摘要:
A folding machine in a rotary press of the type in which a printed a paper web is twice-folded and then cut into folded sheets by means of cutter drums, and the folded sheets are conveyed through a distributor section on the downstream side of the machine to a pair of ejectd paper sheet runners while being pinched by belts, is improved. Namely, a conveyor for conveying the folded sheets includes a pair of first conveyor belts between the outlet side of the cutter drums, and the upstream side of the distributor section, a pair of distributor belts forming the distributor section with a triangular guide disposed on the downstream side thereof, two pairs of second conveyor belts between the downstream side of the distributor section and the inlet sides of the pair of ejected paper sheet runners, and guide belts or fixed guide members extending between a location upstream of the distributor section and the inlet side of the distributor section and between the outlet side of the distributor section and a location downstream of the distributor section. These belt pairs define, respectively, independent closed routes. The pair of distributor belts are respectively provided with uneven portions along their lengths adapted to mesh with each other. Preferably, the pair of distributor belts run at a higher speed than the pair of first conveyor belts, and the two pairs of second conveyor belts run at a higher speed than the pair of distributor belts.
摘要:
A tape cassette loading and unloading apparatus has a holder which is inserted with a tape cassette, a holder guide for guiding the holder between a cassette receiving position and a predetermined loading position via an insertion completion position a holder mover for moving the holder, a force transmitter coupled to a motor for driving the holder mover, and a pushing member for pushing a top surface of the tape cassette. The force transmitter has first and second rotary members such that the first rotary member locks the second rotary member when the holder reaches the predetermined loading position.