公开(公告)号：US06603893B1

公开(公告)日：2003-08-05

申请号：US09819160

申请日：2001-03-27

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Dean A. Samara-Rubio ,  Chi Chu

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Dean A. Samara-Rubio ,  Chi Chu

IPC分类号： G02B626

CPC分类号： G02F1/3136 ,  G02B6/2813 ,  G02F2001/217

摘要： An optical switching method and apparatus. In one aspect of the present invention, the disclosed apparatus includes first and second multi-mode interference (MMI) splitting devices in a semiconductor substrate. First and second outputs of the first MMI splitting device are optically coupled to first and second inputs, respectively, of the second MMI splitting device. First and second phase control devices are included in the semiconductor substrate. The first input of the second MMI splitting device is optically coupled to the first output of the first MMI splitting device through the first phase control device. The second input of the second MMI splitting device is optically coupled to the second output of the first MMI splitting device through the second phase control device. The first input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices. The second input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices.

摘要翻译： 一种光学切换方法和装置。 在本发明的一个方面，所公开的设备包括半导体衬底中的第一和第二多模干涉（MMI）分离器件。 第一MMI分割装置的第一和第二输出分别光耦合到第二MMI分割装置的第一和第二输入。 第一和第二相位控制装置包括在半导体衬底中。 第二MMI分割装置的第一输入通过第一相位控制装置光耦合到第一MMI分配装置的第一输出端。 第二MMI分配装置的第二输入通过第二相位控制装置光耦合到第一MMI分配装置的第二输出端。 响应于第一和第二相位控制装置，第一MMI分配装置的第一输入选择性地光耦合到第二MMI分配装置的第一和第二输出端。 响应于第一和第二相位控制装置，第一MMI分配装置的第二输入被选择性地光耦合到第二MMI分配装置的第一和第二输出端。

公开(公告)号：US06587605B2

公开(公告)日：2003-07-01

申请号：US09780174

申请日：2001-02-09

申请人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R. M. Rao

发明人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R. M. Rao

IPC分类号： G02B612

CPC分类号： G02F1/025 ,  G02B6/43

摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.

公开(公告)号：US06463193B2

公开(公告)日：2002-10-08

申请号：US09732033

申请日：2000-12-06

申请人： Mario J. Paniccia ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Dmitri E. Nikonov

IPC分类号： G02B626

CPC分类号： G02F1/025 ,  G02F2203/48 ,  G02F2203/50

摘要： A device for switching an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed in a well region in a semiconductor substrate layer. In one embodiment, the well region has a higher doping concentration than the semiconductor substrate layer in which the well region is disposed. The optical switching device is optically coupled to an optical input port and an optical output port of the integrated circuit die.

公开(公告)号：US06449405B1

公开(公告)日：2002-09-10

申请号：US09676293

申请日：2000-09-28

申请人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

IPC分类号： G02B642

CPC分类号： G02F1/025 ,  G02B2006/12145

摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the layers. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.

摘要翻译： 用于将光束限制在光开关中的装置。 在一个实施例中，所公开的光开关包括设置在设置在多个光限制层之间的半导体衬底层中的光输入端口和光输出端口之间的光开关器件，使得光束被限制在残留在层内。 在一个实施例中，光开关中包括多个半导体衬底层。 每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。 在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

公开(公告)号：US06393169B1

公开(公告)日：2002-05-21

申请号：US09226783

申请日：1999-01-06

申请人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

发明人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

IPC分类号： G02B612

CPC分类号： G02B6/43 ,  G02B2006/12107 ,  G02B2006/12142 ,  G02F1/218 ,  G02F2001/0152 ,  G02F2201/307

摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.

摘要翻译： 一种在集成电路管芯中提供光互连的方法和装置。 在一个实施例中，光互连用于通过集成电路管芯的半导体衬底的绝缘层和背面光学地互连基于波导的光学调制器。 在一个实施例中，绝缘氧化物层设置在半导体波导光调制器和半导体衬底的背面之间。 在光入射到半导体波导光调制器的位置处，光导管设置在绝缘氧化物层中。 在一个实施例中，光导管的折射指数基本上等于半导体衬底和半导体波导光调制器的折射率。 因此，减少了通过半导体衬底的背面光耦合半导体波导光学调制器的光的衰减。

公开(公告)号：US06351326B1

公开(公告)日：2002-02-26

申请号：US09465222

申请日：1999-12-14

申请人： Michael T. Morse ,  Mario J. Paniccia ,  Dmitri Nikonov

发明人： Michael T. Morse ,  Mario J. Paniccia ,  Dmitri Nikonov

IPC分类号： G02F103

CPC分类号： G02F1/2257 ,  G02F2201/302 ,  G02F2201/346 ,  G02F2202/104 ,  G02F2203/15

摘要： An optical modulator that modulates an optical beam through directed through an integrated circuit die. In one embodiment, the optical beam is directed into and out of a flip chip packaged integrated circuit die. In one embodiment, the optical modulator includes a resonant cavity structure. In one embodiment, the resonant cavity structure is disposed in the dielectric layer of the integrated circuit die. In one embodiment, the optical beam is directed into the integrated circuit die and through the resonant cavity structure and is modulated in response to an integrated circuit signal of the integrated circuit die. In one embodiment, the optical beam is modulated by modulating the resonant wavelength of the resonant cavity structure in response to the integrated circuit signal. A modulated optical beam is directed from the resonant cavity structure back out of the integrated circuit die.

摘要翻译： 光调制器，其通过引导通过集成电路管芯来调制光束。 在一个实施例中，光束被引导到倒装芯片封装的集成电路管芯中和外。 在一个实施例中，光调制器包括谐振腔结构。 在一个实施例中，谐振腔结构设置在集成电路管芯的电介质层中。 在一个实施例中，光束被引导到集成电路管芯中并通过谐振腔结构，并且响应于集成电路管芯的集成电路信号被调制。 在一个实施例中，通过响应于集成电路信号调制谐振腔结构的谐振波长来调制光束。 调制光束从谐振腔结构引出集成电路管芯。

公开(公告)号：US06330376B1

公开(公告)日：2001-12-11

申请号：US09283106

申请日：1999-03-31

申请人： Mario J. Paniccia

发明人： Mario J. Paniccia

IPC分类号： G02B612

CPC分类号： G02F1/218 ,  G02B2006/12107 ,  G02B2006/12142 ,  G02F2001/0152 ,  G02F2201/307

摘要： An optical modulator that modulates light through the semiconductor substrate through the back side of a flip chip packaged integrated circuit. The optical modulator of the present invention enables integrated circuit signals to be extracted through the back side of the semiconductor substrate. In one embodiment, an optical modulator is disposed within a flip chip packaged integrated circuit die. The optical modulator includes a deflector and a diffraction grating. An infrared light beam is directed through the back side of a silicon substrate of the integrated circuit die, deflected off the deflector through the diffraction grating and back out the back side of the integrated circuit die. The diffraction grating modulates the phase of a portion of the deflected light beam in response to an integrated circuit signal. A resulting diffraction interference occurs between the phase modulated portions and nonphase modulated portions of the deflected light beam. The interference causes amplitude modulation of a zero order diffraction of the deflected light beam, from which the integrated circuit signal can be extracted. The zero order diffraction is allowed to pass through an optical passage to exit the semiconductor substrate of the flip chip packaged integrated circuit die while the non-zero order diffractions are blocked.

摘要翻译： 一种光学调制器，其通过倒装芯片封装集成电路的背面来调制通过半导体衬底的光。 本发明的光调制器能够通过半导体基板的背面提取集成电路信号。 在一个实施例中，光学调制器设置在倒装芯片封装集成电路管芯内。 光学调制器包括偏转器和衍射光栅。 红外光束被引导通过集成电路管芯的硅衬底的背面，通过衍射光栅偏转偏转器并从集成电路管芯的背面退出。 衍射光栅响应于集成电路信号调制偏转光束的一部分的相位。 在偏转光束的相位调制部分和非相位调制部分之间产生衍射干涉。 干扰引起偏转光束的零级衍射的幅度调制，可从中提取集成电路信号。 允许零级衍射通过光通道以退出倒装芯片封装的集成电路管芯的半导体衬底，而非零级衍射被阻挡。

公开(公告)号：US6075908A

公开(公告)日：2000-06-13

申请号：US993786

申请日：1997-12-19

申请人： Mario J. Paniccia ,  Valluri R. M. Rao ,  Ian A. Young

发明人： Mario J. Paniccia ,  Valluri R. M. Rao ,  Ian A. Young

IPC分类号： G02B6/12 ,  G02F1/015 ,  G02F1/21

CPC分类号： G02F1/218 ,  G02B2006/12107 ,  G02B2006/12142 ,  G02F2001/0152 ,  G02F2201/307

摘要： An optical modulator that modulates light through the semiconductor substrate through the back side of a flip chip packaged integrated circuit. The optical modulator of the present invention enables integrated circuit signals to be extracted through the back side of the semiconductor substrate. In one embodiment, an optical modulator is disposed within a flip chip packaged integrated circuit die. The optical modulator includes a deflector and a diffraction grating. An infrared light beam is directed through the back side of a silicon substrate of the integrated circuit die, deflected off the deflector through the diffraction grating and back out the back side of the integrated circuit die. The diffraction grating modulates the phase of a portion of the deflected light beam in response to an integrated circuit signal. A resulting diffraction interference occurs between the phase modulated portions and non-phase modulated portions of the deflected light beam. The interference causes amplitude modulation of a zero order diffraction of the deflected light beam, from which the integrated circuit signal can be extracted.

摘要翻译： 一种光学调制器，其通过倒装芯片封装集成电路的背面来调制通过半导体衬底的光。 本发明的光调制器能够通过半导体基板的背面提取集成电路信号。 在一个实施例中，光学调制器设置在倒装芯片封装集成电路管芯内。 光学调制器包括偏转器和衍射光栅。 红外光束被引导通过集成电路管芯的硅衬底的背面，通过衍射光栅偏转偏转器并从集成电路管芯的背面退出。 衍射光栅响应于集成电路信号调制偏转光束的一部分的相位。 在偏转光束的相位调制部分和非相位调制部分之间产生衍射干涉。 干扰引起偏转光束的零级衍射的幅度调制，可从中提取集成电路信号。