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公开(公告)号：US6125217A
公开(公告)日：2000-09-26
申请号：US105502
申请日：1998-06-26
CPC分类号： G02B6/43 , G06F1/105 , G02B6/4249
摘要： A method and an apparatus for providing an optical clock distribution network. In one embodiment, an optical source is configured to emit optical pulses at a desired clock frequency. The optical pulses are separated into a plurality of split optical pulses, each of which is received by a clock receiver node in a semiconductor die. In one embodiment, each clock receiver node locally generates a photocurrent in response to the split optical beams. Each of the photocurrents is locally converted into voltage and thus into local clock signals, which are used to clock the local area of the integrated circuit. In one embodiment, the semiconductor die includes an additional clock receiver node used to clock a clock generation circuit included in the semiconductor die. The clock generation circuit generates clock signals that are in phase with each other and the other clock signals generated throughout the semiconductor die. In one embodiment, the clock signals generated by the clock generation circuit are used to clock and phase lock input/output communications on the semiconductor die as well as off chip input/output communications between the semiconductor die and other external semiconductor dice of the system.
摘要翻译： 一种用于提供光时钟分配网络的方法和装置。 在一个实施例中，光源被配置为以期望的时钟频率发射光脉冲。 光脉冲被分离成多个分裂光脉冲，每个分裂光脉冲由半导体管芯中的时钟接收器节点接收。 在一个实施例中，响应于分离的光束，每个时钟接收器节点局部地产生光电流。 每个光电流被局部地转换成电压并因此被转换成本地时钟信号，这些时钟信号用于对集成电路的局部区域进行时钟。 在一个实施例中，半导体管芯包括用于对包括在半导体管芯中的时钟产生电路进行时钟的附加时钟接收器节点。 时钟发生电路产生彼此同相的时钟信号和在整个半导体管芯中产生的其它时钟信号。 在一个实施例中，由时钟产生电路产生的时钟信号用于在半导体管芯上进行时钟和锁相输入/输出通信，以及半导体管芯与系统的其它外部半导体管芯之间的离线输入/输出通信。
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2.发明授权Method and apparatus for optically modulating light through the back side of an integrated circuit die 失效通过集成电路管芯的背侧对光进行光学调制的方法和装置
公开(公告)号：US6075908A
公开(公告)日：2000-06-13
申请号：US993786
申请日：1997-12-19
CPC分类号： G02F1/218 , G02B2006/12107 , G02B2006/12142 , G02F2001/0152 , G02F2201/307
摘要： An optical modulator that modulates light through the semiconductor substrate through the back side of a flip chip packaged integrated circuit. The optical modulator of the present invention enables integrated circuit signals to be extracted through the back side of the semiconductor substrate. In one embodiment, an optical modulator is disposed within a flip chip packaged integrated circuit die. The optical modulator includes a deflector and a diffraction grating. An infrared light beam is directed through the back side of a silicon substrate of the integrated circuit die, deflected off the deflector through the diffraction grating and back out the back side of the integrated circuit die. The diffraction grating modulates the phase of a portion of the deflected light beam in response to an integrated circuit signal. A resulting diffraction interference occurs between the phase modulated portions and non-phase modulated portions of the deflected light beam. The interference causes amplitude modulation of a zero order diffraction of the deflected light beam, from which the integrated circuit signal can be extracted.
摘要翻译： 一种光学调制器，其通过倒装芯片封装集成电路的背面来调制通过半导体衬底的光。 本发明的光调制器能够通过半导体基板的背面提取集成电路信号。 在一个实施例中，光学调制器设置在倒装芯片封装集成电路管芯内。 光学调制器包括偏转器和衍射光栅。 红外光束被引导通过集成电路管芯的硅衬底的背面，通过衍射光栅偏转偏转器并从集成电路管芯的背面退出。 衍射光栅响应于集成电路信号调制偏转光束的一部分的相位。 在偏转光束的相位调制部分和非相位调制部分之间产生衍射干涉。 干扰引起偏转光束的零级衍射的幅度调制，可从中提取集成电路信号。
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3.发明授权Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit 有权使用基于红外激光的光学探针的方法和装置，用于直接从集成电路中的有源区测量电压
公开(公告)号：US6072179A
公开(公告)日：2000-06-06
申请号：US130741
申请日：1998-08-07
IPC分类号： G01R1/06 , G01N21/41 , G01R19/00 , G01R31/302 , G01R31/311 , G01R31/28
CPC分类号： G01R31/311
摘要： A method and an apparatus for detecting an electric field in the active regions of an integrated circuit disposed in a semiconductor. In one embodiment, a laser beam is operated at a wavelength greater than approximately 0.9 .mu.m. The laser beam is focused onto a P-N junction, such as for example the drain of a MOS transistor, through the back side of the semiconductor substrate. As a result of free carrier absorption, the laser beam is partially absorbed near the P-N junction. When a signal is impressed on the P-N junction, the degree of free carrier absorption will be modulated in accordance with the modulation of the depletion region near the P-N junction. The laser beam passes through the P-N junction region, reflects off the oxide interface and metal behind the junction, and returns back through the P-N junction and back out of the silicon surface. Amplitude modulation in this reflected laser beam is detected with an optical detection system.
摘要翻译： 一种用于检测设置在半导体中的集成电路的有源区域中的电场的方法和装置。 在一个实施例中，激光束以大于约0.9μm的波长工作。 激光束通过半导体衬底的背面聚焦到P-N结，例如MOS晶体管的漏极。 作为自由载体吸收的结果，激光束在P-N结附近被部分吸收。 当在P-N结上施加信号时，将根据P-N结附近的耗尽区的调制来调制自由载流子吸收的程度。 激光束穿过P-N结区域，从结点后面的氧化物界面和金属反射出来，并通过P-N结返回并返回硅表面。 用光学检测系统检测该反射激光束中的幅度调制。
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4.发明授权Method and apparatus providing optical input/output through the back side of an integrated circuit die 失效通过集成电路管芯的背侧提供光输入/输出的方法和装置
公开(公告)号：US6049639A
公开(公告)日：2000-04-11
申请号：US995277
申请日：1997-12-19
CPC分类号： G02B6/43 , H01L25/105 , H01L2924/0002
摘要： A method and an apparatus providing optical input/output in an integrated circuit. In one embodiment, optical modulators and demodulators, which are coupled to integrated circuit input/output nodes, are disposed on or within the back side semiconductor substrate of a flip chip packaged integrated circuit. Since a flip chip packaged integrated circuit die is utilized, full access to the optical modulators and demodulators is provided from the back side of the integrated circuit die for optical input/output. In one embodiment, a heat sink including a light source and an optical assembly is thermally and optically coupled to the back side of the integrated circuit die. A light beam is directed to the optical modulators and the deflected modulated light beam is routed and directed to the optical demodulators to realize optical input/output. In one embodiment, infrared light may be utilized such that the optical modulators and demodulators are disposed within a silicon semiconductor substrate. Since silicon is partially transparent to infrared light, optical input/output is realized through the back side and through the semiconductor substrate of the flip chip packaged integrated circuit die.
摘要翻译： 一种在集成电路中提供光输入/输出的方法和装置。 在一个实施例中，耦合到集成电路输入/输出节点的光调制器和解调器设置在倒装芯片封装集成电路的背面半导体衬底上或其内部。 由于利用了倒装芯片封装的集成电路管芯，所以从用于光输入/输出的集成电路管芯的背面提供对光调制器和解调器的完全访问。 在一个实施例中，包括光源和光学组件的散热器被热和光耦合到集成电路管芯的背面。 光束被引导到光调制器，并且偏转的调制光束被路由并被引导到光解调器以实现光输入/输出。 在一个实施例中，可以利用红外光，使得光学调制器和解调器设置在硅半导体衬底内。 由于硅对红外光部分透明，所以通过背面和通过倒装芯片封装的集成电路裸片的半导体衬底实现光输入/输出。
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公开(公告)号：US06587605B2
公开(公告)日：2003-07-01
申请号：US09780174
申请日：2001-02-09
IPC分类号： G02B612
摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.
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公开(公告)号：US08767792B2
公开(公告)日：2014-07-01
申请号：US13838932
申请日：2013-03-15
申请人： John E. Bowers , Oded Cohen , Alexander W. Fang , Richard Jones , Mario J. Paniccia , Hyundai Park
发明人： John E. Bowers , Oded Cohen , Alexander W. Fang , Richard Jones , Mario J. Paniccia , Hyundai Park
CPC分类号： H01S5/30 , G02B2006/12121 , H01S5/021 , H01S5/026 , H01S5/0424 , H01S5/0425 , H01S5/1032 , H01S5/125 , H01S5/141 , H01S5/2214 , H01S5/223 , H01S5/34
摘要： Embodiments of a method comprising guiding an optical mode with an optical waveguide disposed in silicon, overlapping both the optical waveguide and an active semiconductor material evanescently coupled to the optical waveguide with the optical mode guided through the optical waveguide, electrically pumping the active semiconductor material to inject current directed through the active semiconductor material and through the optical mode, and generating light in the active semiconductor material in response to the injected current. Other embodiments are disclosed and claimed.
摘要翻译： 一种方法的实施方案包括用设置在硅中的光波导引导光学模式，与光波导和有源半导体材料重叠，该有源半导体材料通过光波导引导而光学耦合到光波导，将活性半导体材料电泵送到 注入引导通过有源半导体材料并通过光学模式的电流，并响应于注入的电流产生有源半导体材料中的光。 公开和要求保护其他实施例。
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公开(公告)号：US20080002929A1
公开(公告)日：2008-01-03
申请号：US11479459
申请日：2006-06-30
申请人： John E. Bowers , Oded Cohen , Alexander W. Fang , Richard Jones , Mario J. Paniccia , Hyundai Park
发明人： John E. Bowers , Oded Cohen , Alexander W. Fang , Richard Jones , Mario J. Paniccia , Hyundai Park
CPC分类号： H01S5/30 , G02B2006/12121 , H01S5/021 , H01S5/026 , H01S5/0424 , H01S5/0425 , H01S5/1032 , H01S5/125 , H01S5/141 , H01S5/2214 , H01S5/223 , H01S5/34
摘要： An apparatus and method electrically pumping a hybrid evanescent laser. For one example, an apparatus includes an optical waveguide disposed in silicon. An active semiconductor material is disposed over the optical waveguide defining an evanescent coupling interface between the optical waveguide and the active semiconductor material such that an optical mode to be guided by the optical waveguide overlaps both the optical waveguide and the active semiconductor material. A current injection path is defined through the active semiconductor material and at least partially overlapping the optical mode such that light is generated in response to electrical pumping of the active semiconductor material in response to current injection along the current injection path at least partially overlapping the optical mode.
摘要翻译： 一种电泵浦混合ev逝激光的装置和方法。 作为一个示例，设备包括设置在硅中的光波导。 有源半导体材料设置在光波导上，限定光波导和有源半导体材料之间的渐逝耦合接口，使得由光波导引导的光学模式与光波导和有源半导体材料重叠。 通过有源半导体材料限定电流注入路径，并且至少部分地与光学模式重叠，使得响应于沿着沿着电流注入路径的电流注入而响应于有源半导体材料的电泵浦产生光而至少部分地与光学 模式。
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公开(公告)号：US07116847B2
公开(公告)日：2006-10-03
申请号：US11205409
申请日：2005-08-16
申请人： Ansheng Liu , Richard Jones , Mario J. Paniccia , Graham T. Reed
发明人： Ansheng Liu , Richard Jones , Mario J. Paniccia , Graham T. Reed
IPC分类号： G02F1/295
CPC分类号： G02F1/025 , G02F2203/06
摘要： An apparatus and method for modulating a phase of optical beam independent of polarization. In one embodiment, an apparatus according to embodiments of the present invention includes a first region of an optical waveguide disposed in semiconductor material, the first region having a first conductivity type, and a second region of the optical waveguide disposed in the semiconductor material, the second region having a second conductivity type opposite to the first conductivity type. The apparatus also includes a substantially V shaped insulating region disposed between the first and second regions of the optical waveguide, wherein a vertex of the substantially V shaped insulating region forms an intersecting line that is substantially parallel to an optical path of an optical beam to be directed through the optical waveguide.
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9.发明授权Method and apparatus for interleaving and switching an optical beam in a semiconductor substrate 有权用于在半导体衬底中交错和切换光束的方法和装置公开(公告)号：US06788837B2
公开(公告)日：2004-09-07
申请号：US09819520
申请日：2001-03-27
申请人： Ansheng Liu , Mario J. Paniccia
发明人： Ansheng Liu , Mario J. Paniccia
IPC分类号： G02B626
CPC分类号： G02B6/12007 , G02B6/2813 , G02B6/29352 , G02B6/29386 , H04J14/0208 , H04J14/021
摘要： An optical interleaving switching method and apparatus. In one aspect of the present invention, the disclosed apparatus includes first and second multi-mode interference (MMI) coupling devices disposed in a semiconductor substrate. Each of the first and second MMI coupling devices include first and second inputs and first and second outputs. A first optical coupler having a first optical path length is included. The first output of the first MMI coupling device is optically coupled to the first input of the second MMI coupling device through the first optical coupler. A second optical coupler having a second optical path length is also included. The second output of the first MMI coupling device is optically coupled to the second input of the second MMI coupling device through the second optical coupler. The first optical path length of the first optical coupler is different than the second optical path length of the second optical coupler. In another aspect of the invention, a 2×2 optical switch is optically coupled to the inputs and/or outputs of the first and/or second MMI coupling devices providing multiplexing/demultiplexing and switching functionality for multi-channel optical input and/or output beams.
摘要翻译： 一种光交错切换方法和装置。 在本发明的一个方面，所公开的设备包括设置在半导体衬底中的第一和第二多模干涉（MMI）耦合器件。 第一和第二MMI耦合装置中的每一个包括第一和第二输入以及第一和第二输出。 包括具有第一光路长度的第一光耦合器。 第一MMI耦合器件的第一输出通过第一光耦合器光耦合到第二MMI耦合器件的第一输入端。 还包括具有第二光程长度的第二光耦合器。 第一MMI耦合装置的第二输出通过第二光耦合器光耦合到第二MMI耦合装置的第二输入端。 第一光耦合器的第一光路长度不同于第二光耦合器的第二光路长度。 在本发明的另一方面，2x2光开关光学耦合到第一和/或第二MMI耦合器件的输入和/或输出，为多通道光输入和/或输出光束提供复用/解复用和切换功能。
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公开(公告)号：US06785430B2
公开(公告)日：2004-08-31
申请号：US10084776
申请日：2002-02-25
申请人： Mario J. Paniccia
发明人： Mario J. Paniccia
IPC分类号： G02F1295
CPC分类号： H04J14/02 , G02F1/011 , G02F1/0147 , G02F1/025 , G02F1/2257 , G02F2201/307 , G02F2202/10 , G02F2203/05 , H01S5/005 , H01S5/02252 , H01S5/0265 , H01S5/125 , H01S5/141 , H01S5/4087
摘要： An optical transmit module. In one aspect of the present invention, an optical beam is generated with a gain medium disposed in a semiconductor substrate. A tunable Bragg grating also disposed in the semiconductor substrate may be optically coupled to the gain medium to tune an output wavelength of the optical beam. The semiconductor substrate further includes an optical modulator optically coupled to receive the optical beam. The optical modulator is coupled to modulate the optical beam in response to a modulation signal.
摘要翻译： 光传输模块。 在本发明的一个方面中，利用设置在半导体衬底中的增益介质产生光束。 还可以将设置在半导体衬底中的可调谐布拉格光栅光耦合到增益介质以调谐光束的输出波长。 半导体衬底还包括光学调制器，其光耦合以接收光束。 光调制器被耦合以响应于调制信号调制光束。
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